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@articleWill_Gröschel_Kot_Schubert_Bergmann_Steinrück_Kissinger_Magerl_2013, title=Oxygen diffusivity in silicon derived from dynamical X-ray diffraction, volume=7, DOI=10.1063/1.4792747, journal=Journal of Applied Physics, author=Will, J. and Gröschel, A. and Kot, D. and Schubert, M. A. and Bergmann, C. and Steinrück, Hans-Georg and Kissinger, G. and Magerl, A., year=2013, pages=073508 

@articleDang_Parala_Kim_Xu_Srinivasan_Edengeiser_Havenith_Wieck_de los Arcos de Pedro_Fischer_et al._2013, title=Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition, DOI=10.1002/pssa.201330115, journal=physica status solidi (a), author=Dang, Van-Son and Parala, Harish and Kim, Jin Hyun and Xu, Ke and Srinivasan, Nagendra B. and Edengeiser, Eugen and Havenith, Martina and Wieck, Andreas D. and de los Arcos de Pedro, Maria Teresa and Fischer, Roland. A. and et al., year=2013, pages=416–424 

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@articleXu_Chaudhuri_Parala_Schwendt_de los Arcos de Pedro_Osten_Devi_2013, title=Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties, DOI=10.1039/c3tc30401a, number=3939, journal=Journal of Materials Chemistry C, author=Xu, Ke and Chaudhuri, Ayan Roy and Parala, Harish and Schwendt, Dominik and de los Arcos de Pedro, Maria Teresa and Osten, H. Jörg and Devi, Anjana, year=2013 

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@articleWill_de los Arcos de Pedro_Corbella_Hecimovic_Machura_Winter_von Keudell_2013, title=Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum, DOI=10.1088/0022-3727/46/8/084009, number=084009, journal=Journal of Physics D: Applied Physics, author=Will, Andreas and de los Arcos de Pedro, Maria Teresa and Corbella, Carles and Hecimovic, Ante and Machura, Patrick D and Winter, Jörg and von Keudell, Achim, year=2013 

@articleCorbella_Grosse-Kreul_Kreiter_de los Arcos de Pedro_Benedikt_von Keudell_2013, title=Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces, DOI=10.1063/1.4826066, number=103303, journal=Review of Scientific Instruments, author=Corbella, Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos de Pedro, Maria Teresa and Benedikt, Jan and von Keudell, Achim, year=2013 

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@articleBanerjee_Srinivasan_Zhu_Kim_Xu_Winter_Becker_Rogalla_de los Arcos de Pedro_Bekermann_et al._2012, title=Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors, DOI=10.1021/cg3010147, journal=Crystal Growth &; Design, author=Banerjee, Manish and Srinivasan, Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos de Pedro, Maria Teresa and Bekermann, Daniela and et al., year=2012, pages=5079–5089 

@articleMilanov_Xu_Cwik_Parala_de los Arcos de Pedro_Becker_Rogalla_Cross_Paul_Devi_2012, title=SO3, Er2O3, and O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors, DOI=10.1039/c2dt31219k, number=13936, journal=Dalton Transactions, author=Milanov, Andrian P. and Xu, Ke and Cwik, Stefan and Parala, Harish and de los Arcos de Pedro, Maria Teresa and Becker, Hans-Werner and Rogalla, Detlef and Cross, Richard and Paul, Shashi and Devi, Anjana, year=2012 

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@articleEhiasarian_Hecimovic_de los Arcos de Pedro_New_Schulz-von der Gathen_Böke_Winter_2012, title=High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization, DOI=10.1063/1.3692172, number=114101, journal=Applied Physics Letters, author=Ehiasarian, A. P. and Hecimovic, A. and de los Arcos de Pedro, Maria Teresa and New, R. and Schulz-von der Gathen, V. and Böke, M. and Winter, J., year=2012 

@articleMarot_de los Arcos de Pedro_Bünzli_Wäckerlin_Steiner_Oelhafen_Meyer_Mathys_Spätig_Covarel_2012, title=Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film, DOI=10.1016/j.surfcoat.2012.09.053, journal=Surface and Coatings Technology, author=Marot, L. and de los Arcos de Pedro, Maria Teresa and Bünzli, A.M. and Wäckerlin, C. and Steiner, R. and Oelhafen, P. and Meyer, E. and Mathys, D. and Spätig, P. and Covarel, G., year=2012, pages=223–228 

@articlePrenzel_de los Arcos de Pedro_Kortmann_Winter_von Keudell_2012, title=Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films, DOI=10.1063/1.4767383, number=103306, journal=Journal of Applied Physics, author=Prenzel, Marina and de los Arcos de Pedro, Maria Teresa and Kortmann, Annika and Winter, Jörg and von Keudell, Achim, year=2012 

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