C. Corbella, S. Grosse-Kreul, O. Kreiter, M. T. de los Arcos de Pedro, J. Benedikt, and A. von Keudell, “Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces,”10.1063/1.4826066__Review of Scientific Instruments, Art. no. 103303, 2013, doi:10.1063/1.4826066 .

J. Winter, A. Hecimovic, M. T. de los Arcos de Pedro, M. Böke, and V. Schulz-von der Gathen, “Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity,”10.1088/0022-3727/46/8/084007__Journal of Physics D: Applied Physics, Art. no. 084007, 2013, doi:10.1088/0022-3727/46/8/084007 .

K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,”10.1002/ppap.201300059__Plasma Processes and Polymers, pp. 1061–1073, 2013, doi:10.1002/ppap.201300059 .

P. Thissen, V. Thissen, S. Wippermann, Y. J. Chabal, G. Grundmeier, and W. G. Schmidt, “pH-dependent structure and energetics of O/MgO(100),” Surface Science, vol. 606, pp. 902–907, 2012.

M. Banerjee et al., “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors,”10.1021/cg3010147__Crystal Growth &; Design, pp. 5079–5089, 2012, doi:10.1021/cg3010147 .

A. P. Milanov et al., “SO3, Er2O3, and O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors,”10.1039/c2dt31219k__Dalton Transactions, Art. no. 13936, 2012, doi:10.1039/c2dt31219k .

R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,”10.1002/ppap.201100146__Plasma Processes and Polymers, pp. 1116–1124, 2012, doi:10.1002/ppap.201100146 .

A. P. Ehiasarian et al., “High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization,”10.1063/1.3692172__Applied Physics Letters, Art. no. 114101, 2012, doi:10.1063/1.3692172 .

L. Marot et al., “Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film,”10.1016/j.surfcoat.2012.09.053__Surface and Coatings Technology, pp. 223–228, 2012, doi:10.1016/j.surfcoat.2012.09.053 .

M. Prenzel, M. T. de los Arcos de Pedro, A. Kortmann, J. Winter, and A. von Keudell, “Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films,”10.1063/1.4767383__Journal of Applied Physics, Art. no. 103306, 2012, doi:10.1063/1.4767383 .

A. Hecimovic, M. T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke, and J. Winter, “Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma discharges,”10.1088/0963-0252/21/3/035017__Plasma Sources Science and Technology, Art. no. 035017, 2012, doi:10.1088/0963-0252/21/3/035017 .

D. Schröder, H. Bahre, N. Knake, J. Winter, M. T. de los Arcos de Pedro, and V. Schulz-von der Gathen, “Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet,”10.1088/0963-0252/21/2/024007__Plasma Sources Science and Technology, Art. no. 024007, 2012, doi:10.1088/0963-0252/21/2/024007 .

M. Maxisch et al., “PM-IRRAS studies of the adsorption and stability of organophosphonate monolayers on passivated NiTi surfaces,” APPLIED SURFACE SCIENCE, vol. 257, no. 6, pp. 2011–2018, 2011.

D. Zacher et al., “Liquid-Phase Epitaxy of Multicomponent Layer-Based Porous Coordination Polymer Thin Films of [M(L)(P)0.5] Type: Importance of Deposition Sequence on the Oriented Growth,”10.1002/chem.201002381__Chemistry - A European Journal, pp. 1448–1455, 2011, doi:10.1002/chem.201002381 .

M. T. de los Arcos de Pedro et al., “Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition,”10.1016/j.tsf.2011.12.007__Thin Solid Films, pp. 11–16, 2011, doi:10.1016/j.tsf.2011.12.007 .

T. B. Thiede et al., “Evaluation of Homoleptic Guanidinate and Amidinate Complexes of Gadolinium and Dysprosium for MOCVD of Rare-Earth Nitride Thin Films,”10.1021/cm102840v__Chemistry of Materials, pp. 1430–1440, 2011, doi:10.1021/cm102840v .

A. R. Lahrood, M. T. de los Arcos de Pedro, M. Prenzel, A. von Keudell, and J. Winter, “X-ray photoelectron spectroscopy on implanted argon as a tool to follow local structural changes in thin films,”10.1016/j.tsf.2011.07.040__Thin Solid Films, pp. 1625–1630, 2011, doi:10.1016/j.tsf.2011.07.040 .

S. Wippermann, W. G. Schmidt, P. Thissen, and G. Grundmeier, “Dissociative and molecular adsorption of water on;1-Al2O3(0001),” physica status solidi (c), vol. 7, no. 2, pp. 137–140, 2010.

M. Maxisch et al., “PM-IRRAS studies of the adsorption and stability of organophosphonate monolayers on passivated NiTi surfaces,”10.1016/j.apsusc.2010.09.044__Applied Surface Science, pp. 2011–2018, 2010, doi:10.1016/j.apsusc.2010.09.044 .

S. Wippermann, W. G. Schmidt, P. Thissen, and G. Grundmeier, “Dissociative and molecular adsorption of water on;1-Al2O3(0001),” physica status solidi (c), vol. 7, no. 2, pp. 137–140, 2009.