Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization of SiON integrated waveguides via FTIR and AFM measurements. In: 2011 Semiconductor Conference Dresden. IEEE; 2011. doi:10.1109/scd.2011.6068744
LibreCat: /record/4546
DOI: 10.1109/scd.2011.6068744