Otterbach, R., Ulrich Hilleringmann, T.J. Horstmann, and K. Goser. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.”https://doi.org/10.1016/s0925-9635(01)00373-9__Diamond and Related Materials 10, no. 3–7 (2002): 511–14.https://doi.org/10.1016/s0925-9635(01)00373-9 .
LibreCat: /record/39876
DOI: 10.1016/s0925-9635(01)00373-9

Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.”https://doi.org/10.1016/s0925-9635(01)00703-8__Diamond and Related Materials 11, no. 3–6 (2002): 841–44.https://doi.org/10.1016/s0925-9635(01)00703-8 .
LibreCat: /record/39874
DOI: 10.1016/s0925-9635(01)00703-8