Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering, 22(12), Article 125012.https://doi.org/10.1088/0960-1317/22/12/125012 
LibreCat: /record/39520
DOI: 10.1088/0960-1317/22/12/125012

Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering, 22(12), Article 125012.https://doi.org/10.1088/0960-1317/22/12/125012 
LibreCat: /record/39522
DOI: 10.1088/0960-1317/22/12/125012