A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,”10.1088/0960-1317/22/12/125012__Journal of Micromechanics and Microengineering, vol. 22, no. 12, Art. no. 125012, 2012, doi:10.1088/0960-1317/22/12/125012 .

A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,”10.1088/0960-1317/22/12/125012__Journal of Micromechanics and Microengineering, vol. 22, no. 12, Art. no. 125012, 2012, doi:10.1088/0960-1317/22/12/125012 .