Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films
M. Mehta, M. Ruth, K.A. Piegdon, D. Krix, H. Nienhaus, C. Meier, Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures 27 (2009).

Quantum size effect of valence band plasmon energies in Si and SnO[sub x] nanoparticles
H. Nienhaus, V. Kravets, S. Koutouzov, C. Meier, A. Lorke, H. Wiggers, M.K. Kennedy, F.E. Kruis, Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures 24 (2006).

Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1x]As
D. Reuter, C. Riedesel, A.D. Wieck, Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures (2006).