Mehta M, Ruth M, Piegdon KA, Krix D, Nienhaus H, Meier C. Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films. Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures. 2009;27(5). doi:10.1116/1.3186528

Nienhaus H, Kravets V, Koutouzov S, et al. Quantum size effect of valence band plasmon energies in Si and SnO[sub x] nanoparticles. Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures. 2006;24(3). doi:10.1116/1.2190658

Reuter D, Riedesel C, Wieck AD. Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1x]As. Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures. 2006. doi:10.1116/1.2217975