Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.”https://doi.org/10.1088/0960-1317/22/12/125012__Journal of Micromechanics and Microengineering 22, no. 12 (2012).https://doi.org/10.1088/0960-1317/22/12/125012 .
LibreCat: /record/39520
DOI: 10.1088/0960-1317/22/12/125012

Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.”https://doi.org/10.1088/0960-1317/22/12/125012__Journal of Micromechanics and Microengineering 22, no. 12 (2012).https://doi.org/10.1088/0960-1317/22/12/125012 .
LibreCat: /record/39522
DOI: 10.1088/0960-1317/22/12/125012