@articleBrockmeier_Rodriguez_Harrison_Hilleringmann_2012, title=Surface tension and its role for vertical wet etching of silicon, volume=22, DOI=10.1088/0960-1317/22/12/125012, number=12125012, journal=Journal of Micromechanics and Microengineering, publisher=IOP Publishing, author=Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich, year=2012 

@articleBrockmeier_Rodriguez_Harrison_Hilleringmann_2012, title=Surface tension and its role for vertical wet etching of silicon, volume=22, DOI=10.1088/0960-1317/22/12/125012, number=12125012, journal=Journal of Micromechanics and Microengineering, publisher=IOP Publishing, author=Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich, year=2012