Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence
F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim, M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz, Journal of Physics D: Applied Physics (2017).

Influence of organic surface chemistry on the nucleation of plasma deposited SiOxfilms
C. Hoppe, F. Mitschker, I. Giner, M.T. de los Arcos de Pedro, P. Awakowicz, G. Grundmeier, Journal of Physics D: Applied Physics (2017).

Revising secondary electron yields of ion-sputtered metal oxides
C. Corbella, A. Marcak, M.T. de los Arcos de Pedro, A. von Keudell, Journal of Physics D: Applied Physics (2016).

Characteristics of a propagating, self-pulsing, constricted ‘;3-mode-like’ discharge
D. Schröder, S. Burhenn, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, Journal of Physics D: Applied Physics (2015).

Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure
D. Marinov, O. Guaitella, M.T. de los Arcos de Pedro, A. von Keudell, A. Rousseau, Journal of Physics D: Applied Physics (2014).

Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum
A. Will, M.T. de los Arcos de Pedro, C. Corbella, A. Hecimovic, P.D. Machura, J. Winter, A. von Keudell, Journal of Physics D: Applied Physics (2013).

Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity
J. Winter, A. Hecimovic, M.T. de los Arcos de Pedro, M. Böke, V. Schulz-von der Gathen, Journal of Physics D: Applied Physics (2013).

The correlation between mechanical stress and magnetic properties of ultrathin films
D. Sander, R. Skomski, A. Enders, C. Schmidthals, D. Reuter, J. Kirschner, Journal of Physics D: Applied Physics (2002) 663–670.