@articleMitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et al._2017, title=Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence, DOI=10.1088/1361-6463/aa6e28, number=235201, journal=Journal of Physics D: Applied Physics, author=Mitschker, F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al., year=2017 

@articleHoppe_Mitschker_Giner_de los Arcos de Pedro_Awakowicz_Grundmeier_2017, title=Influence of organic surface chemistry on the nucleation of plasma deposited SiOxfilms, DOI=10.1088/1361-6463/aa69e5, number=204002, journal=Journal of Physics D: Applied Physics, author=Hoppe, C and Mitschker, F and Giner, I and de los Arcos de Pedro, Maria Teresa and Awakowicz, P and Grundmeier, G, year=2017 

@articleCorbella_Marcak_de los Arcos de Pedro_von Keudell_2016, title=Revising secondary electron yields of ion-sputtered metal oxides, DOI=10.1088/0022-3727/49/16/16lt01, number=16L, journal=Journal of Physics D: Applied Physics, author=Corbella, Carles and Marcak, Adrian and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim, year=2016 

@articleSchröder_Burhenn_de los Arcos de Pedro_Schulz-von der Gathen_2015, title=Characteristics of a propagating, self-pulsing, constricted ‘;3-mode-like’ discharge, DOI=10.1088/0022-3727/48/5/055206, number=055206, journal=Journal of Physics D: Applied Physics, author=Schröder, Daniel and Burhenn, Sebastian and de los Arcos de Pedro, Maria Teresa and Schulz-von der Gathen, Volker, year=2015 

@articleMarinov_Guaitella_de los Arcos de Pedro_von Keudell_Rousseau_2014, title=Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure, DOI=10.1088/0022-3727/47/47/475204, number=475204, journal=Journal of Physics D: Applied Physics, author=Marinov, D and Guaitella, O and de los Arcos de Pedro, Maria Teresa and von Keudell, A and Rousseau, A, year=2014 

@articleWill_de los Arcos de Pedro_Corbella_Hecimovic_Machura_Winter_von Keudell_2013, title=Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum, DOI=10.1088/0022-3727/46/8/084009, number=084009, journal=Journal of Physics D: Applied Physics, author=Will, Andreas and de los Arcos de Pedro, Maria Teresa and Corbella, Carles and Hecimovic, Ante and Machura, Patrick D and Winter, Jörg and von Keudell, Achim, year=2013 

@articleWinter_Hecimovic_de los Arcos de Pedro_Böke_Schulz-von der Gathen_2013, title=Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity, DOI=10.1088/0022-3727/46/8/084007, number=084007, journal=Journal of Physics D: Applied Physics, author=Winter, J and Hecimovic, A and de los Arcos de Pedro, Maria Teresa and Böke, M and Schulz-von der Gathen, V, year=2013 

@articleSander_Skomski_Enders_Schmidthals_Reuter_Kirschner_2002, title=The correlation between mechanical stress and magnetic properties of ultrathin films, DOI=10.1088/0022-3727/31/6/014, journal=Journal of Physics D: Applied Physics, author=Sander, D and Skomski, R and Enders, A and Schmidthals, C and Reuter, Dirk and Kirschner, J, year=2002, pages=663–670