@articleReuter_Kähler_Kunze_Wieck_2002, title=Layer-compensated selectively doped AlxG-xAs/GaAs heterostructures as a base material for nanolithography, DOI=10.1088/0268-1242/16/7/314, journal=Semiconductor Science and Technology, author=Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D, year=2002, pages=603–607 

@articleReuter_Kähler_Kunze_Wieck_2002, title=Layer-compensated selectively doped AlxG-xAs/GaAs heterostructures as a base material for nanolithography, DOI=10.1088/0268-1242/16/7/314, journal=Semiconductor Science and Technology, author=Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D, year=2002, pages=603–607