Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PECVD and PEALD SiO            <sub>              x            </sub>            Thin Films on PDMS.”https://doi.org/10.1002/ppap.202100174__Plasma Processes and Polymers 19, no. 4 (2022).https://doi.org/10.1002/ppap.202100174 .

Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.”https://doi.org/10.1002/ppap.202200052__Plasma Processes and Polymers 19, no. 11 (2022).https://doi.org/10.1002/ppap.202200052 .

Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Maria Teresa de los Arcos de Pedro, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PECVD and PEALD SiO            <sub>              x            </sub>            Thin Films on PDMS.”https://doi.org/10.1002/ppap.202100174__Plasma Processes and Polymers 19, no. 4 (2022).https://doi.org/10.1002/ppap.202100174 .

Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.”https://doi.org/10.1002/ppap.202200052__Plasma Processes and Polymers 19, no. 11 (2022).https://doi.org/10.1002/ppap.202200052 .

Gebhard, Maximilian, Felix Mitschker, Christian Hoppe, Morteza Aghaee, Detlef Rogalla, Mariadriana Creatore, Guido Grundmeier, Peter Awakowicz, and Anjana Devi. “A Combinatorial Approach to Enhance Barrier Properties of Thin Films on Polymers: Seeding and Capping of PECVD Thin Films by PEALD.”https://doi.org/10.1002/ppap.201700209__Plasma Processes and Polymers, 2018.https://doi.org/10.1002/ppap.201700209 .

Gebhard, Maximilian, Felix Mitschker, Christian Hoppe, Morteza Aghaee, Detlef Rogalla, Mariadriana Creatore, Guido Grundmeier, Peter Awakowicz, and Anjana Devi. “A Combinatorial Approach to Enhance Barrier Properties of Thin Films on Polymers: Seeding and Capping of PECVD Thin Films by PEALD.”https://doi.org/10.1002/ppap.201700209__Plasma Processes and Polymers, 2018.https://doi.org/10.1002/ppap.201700209 .

Budde, Maik, Carles Corbella, Simon Große-Kreul, Maria Teresa de los Arcos de Pedro, Guido Grundmeier, and Achim von Keudell. “Decoupling of Ion- and Photon-Activation Mechanisms in Polymer Surfaces Exposed to Low-Temperature Plasmas.”https://doi.org/10.1002/ppap.201700230__Plasma Processes and Polymers, 2018.https://doi.org/10.1002/ppap.201700230 .

Grundmeier, Guido, Achim von Keudell, and Maria Teresa de los Arcos de Pedro. “Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces.”https://doi.org/10.1002/ppap.201500087__Plasma Processes and Polymers, 2015, 926–40.https://doi.org/10.1002/ppap.201500087 .

Mitschker, Felix, Jan Dietrich, Berkem Ozkaya, Maria Teresa de los Arcos de Pedro, Ignacio Giner, Peter Awakowicz, and Guido Grundmeier. “Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films.”https://doi.org/10.1002/ppap.201500085__Plasma Processes and Polymers, 2015, 1002–9.https://doi.org/10.1002/ppap.201500085 .

Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.”https://doi.org/10.1002/ppap.201300059__Plasma Processes and Polymers, 2013, 1061–73.https://doi.org/10.1002/ppap.201300059 .

Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.”https://doi.org/10.1002/ppap.201100146__Plasma Processes and Polymers, 2012, 1116–24.https://doi.org/10.1002/ppap.201100146 .