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Xie, X., de los Arcos, T., &; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052.https://doi.org/10.1002/ppap.202200052 

Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PECVD and PEALD SiO            <sub>              x            </sub>            thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174.https://doi.org/10.1002/ppap.202100174 

Xie, X., de los Arcos de Pedro, M. T., &; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052.https://doi.org/10.1002/ppap.202200052 

Gebhard, M., Mitschker, F., Hoppe, C., Aghaee, M., Rogalla, D., Creatore, M.,https://doi.org/10.1002/ppap.201700209__Devi, A. (2018). A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers.https://doi.org/10.1002/ppap.201700209 

Gebhard, M., Mitschker, F., Hoppe, C., Aghaee, M., Rogalla, D., Creatore, M.,https://doi.org/10.1002/ppap.201700209__Devi, A. (2018). A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers.https://doi.org/10.1002/ppap.201700209 

Budde, M., Corbella, C., Große-Kreul, S., de los Arcos de Pedro, M. T., Grundmeier, G., &; von Keudell, A. (2018). Decoupling of ion- and photon-activation mechanisms in polymer surfaces exposed to low-temperature plasmas. Plasma Processes and Polymers, Article 1700230.https://doi.org/10.1002/ppap.201700230 

Grundmeier, G., von Keudell, A., &; de los Arcos de Pedro, M. T. (2015). Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces. Plasma Processes and Polymers, 926–940.https://doi.org/10.1002/ppap.201500087 

Mitschker, F., Dietrich, J., Ozkaya, B., de los Arcos de Pedro, M. T., Giner, I., Awakowicz, P., &; Grundmeier, G. (2015). Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films. Plasma Processes and Polymers, 1002–1009.https://doi.org/10.1002/ppap.201500085 

Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., &; Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers, 1061–1073.https://doi.org/10.1002/ppap.201300059 

Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., &; Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers, 1116–1124.https://doi.org/10.1002/ppap.201100146