Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PECVD and PEALD SiO            <sub>              x            </sub>            thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174.https://doi.org/10.1002/ppap.202100174 

Xie, X., de los Arcos, T., &; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052.https://doi.org/10.1002/ppap.202200052 

Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PECVD and PEALD SiO            <sub>              x            </sub>            thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174.https://doi.org/10.1002/ppap.202100174 

Xie, X., de los Arcos de Pedro, M. T., &; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052.https://doi.org/10.1002/ppap.202200052