Lift-off of mesoporous layers by electrochemical etching on Si (100) substrates with miscut of 6° off towards (111)
E. Garralaga Rojas, B. Terheiden, H. Plagwitz, J. Hensen, V. Wiedemeier, G. Berth, A. Zrenner, R. Brendel, Thin Solid Films 520 (2011) 606–609.
LibreCat: /record/4379
DOI: 10.1016/j.tsf.2011.07.063