@articleGarralaga Rojas_Terheiden_Plagwitz_Hensen_Wiedemeier_Berth_Zrenner_Brendel_2011, title=Lift-off of mesoporous layers by electrochemical etching on Si (100) substrates with miscut of 6° off towards (111), volume=520, DOI=10.1016/j.tsf.2011.07.063, number=1, journal=Thin Solid Films, publisher=Elsevier BV, author=Garralaga Rojas, E. and Terheiden, B. and Plagwitz, H. and Hensen, J. and Wiedemeier, V. and Berth, Gerhard and Zrenner, Artur and Brendel, R., year=2011, pages=606–609