Selective Etching of (111)B-Oriented AlxGxAs-Layers for Epitaxial Lift-Off
T. Henksmeier, M. Eppinger, B. Reineke, T. Zentgraf, C. Meier, D. Reuter, Physica Status Solidi (A) 218 (2021) 2000408.
LibreCat: /record/20592
DOI: https://doi.org/10.1002/pssa.202000408