@articleHenksmeier_Eppinger_Reineke_Zentgraf_Meier_Reuter_2021, title=Selective Etching of (111)B-Oriented AlxGxAs-Layers for Epitaxial Lift-Off, volume=218, DOI=https://doi.org/10.1002/pssa.202000408, number=3, journal=physica status solidi (a), author=Henksmeier, Tobias and Eppinger, Martin and Reineke, Bernhard and Zentgraf, Thomas and Meier, Cedrik and Reuter, Dirk, year=2021, pages=2000408