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T. and Pannemann, C. and Hilleringmann, Ulrich}, editor={Bao, Zhenan and Gundlach, David J.}, year={2005} }","short":"R. Scholz, A.-D. Müller, F. Müller, I. Thurzo, B.A. Paez, L. Mancera, D.R.T. Zahn, C. Pannemann, U. Hilleringmann, in: Z. Bao, D.J. Gundlach (Eds.), SPIE Proceedings, SPIE, 2005."},"year":"2005","date_created":"2023-01-25T08:19:15Z","author":[{"first_name":"R.","full_name":"Scholz, R.","last_name":"Scholz"},{"first_name":"A.-D.","last_name":"Müller","full_name":"Müller, A.-D."},{"first_name":"F.","last_name":"Müller","full_name":"Müller, F."},{"last_name":"Thurzo","full_name":"Thurzo, I.","first_name":"I."},{"full_name":"Paez, B. A.","last_name":"Paez","first_name":"B. A."},{"first_name":"L.","last_name":"Mancera","full_name":"Mancera, L."},{"last_name":"Zahn","full_name":"Zahn, D. R. T.","first_name":"D. R. 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Hilleringmann, in: Silizium-Halbleitertechnologie, Vieweg+Teubner Verlag, Wiesbaden, 2004, pp. 65–90.","bibtex":"@inbook{Hilleringmann_2004, place={Wiesbaden}, title={Ätztechnik}, DOI={<a href=\"https://doi.org/10.1007/978-3-322-94072-8_5\">10.1007/978-3-322-94072-8_5</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Vieweg+Teubner Verlag}, author={Hilleringmann, Ulrich}, year={2004}, pages={65–90} }","chicago":"Hilleringmann, Ulrich. “Ätztechnik.” In <i>Silizium-Halbleitertechnologie</i>, 65–90. Wiesbaden: Vieweg+Teubner Verlag, 2004. <a href=\"https://doi.org/10.1007/978-3-322-94072-8_5\">https://doi.org/10.1007/978-3-322-94072-8_5</a>.","ieee":"U. Hilleringmann, “Ätztechnik,” in <i>Silizium-Halbleitertechnologie</i>, Wiesbaden: Vieweg+Teubner Verlag, 2004, pp. 65–90.","ama":"Hilleringmann U. Ätztechnik. In: <i>Silizium-Halbleitertechnologie</i>. 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Für diese Aufgabe bieten sich einerseits nasschemische Ätzlösungen an, zum anderen eignen sich speziell entwickelte Trockenätzverfahren zur geforderten präzisen Strukturübertragung vom Lack in das Material.","lang":"eng"}],"type":"book_chapter","publication":"Silizium-Halbleitertechnologie","language":[{"iso":"eng"}],"user_id":"20179","department":[{"_id":"59"}],"_id":"39850"},{"status":"public","editor":[{"last_name":"Zhang","full_name":"Zhang, Guangjun","first_name":"Guangjun"},{"last_name":"Zhao","full_name":"Zhao, Huijie","first_name":"Huijie"},{"first_name":"Zhongyu","full_name":"Wang, Zhongyu","last_name":"Wang"}],"type":"conference","publication":"Fifth International Symposium on Instrumentation and Control Technology","language":[{"iso":"eng"}],"user_id":"20179","department":[{"_id":"59"}],"_id":"39872","citation":{"ieee":"U. Hilleringmann and C. 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