[{"year":"2014","citation":{"ama":"Brodehl C, Greulich-Weber S, Lindner J. Double-Angle-Resolved Nanosphere Lithography. In: ; 2014.","chicago":"Brodehl, Christoph, Siegmund Greulich-Weber, and Jörg Lindner. “Double-Angle-Resolved Nanosphere Lithography,” 2014.","ieee":"C. Brodehl, S. Greulich-Weber, and J. Lindner, “Double-Angle-Resolved Nanosphere Lithography,” presented at the Europhotonics Spring School 2014, Porquerolles (France), 2014.","bibtex":"@inproceedings{Brodehl_Greulich-Weber_Lindner_2014, title={Double-Angle-Resolved Nanosphere Lithography}, author={Brodehl, Christoph and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2014} }","short":"C. Brodehl, S. Greulich-Weber, J. Lindner, in: 2014.","mla":"Brodehl, Christoph, et al. <i>Double-Angle-Resolved Nanosphere Lithography</i>. 2014.","apa":"Brodehl, C., Greulich-Weber, S., &#38; Lindner, J. (2014). Double-Angle-Resolved Nanosphere Lithography. Presented at the Europhotonics Spring School 2014, Porquerolles (France)."},"date_updated":"2022-01-06T07:00:11Z","date_created":"2018-08-22T11:54:13Z","author":[{"first_name":"Christoph","id":"30380","full_name":"Brodehl, Christoph","last_name":"Brodehl"},{"last_name":"Greulich-Weber","full_name":"Greulich-Weber, Siegmund","first_name":"Siegmund"},{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"}],"title":"Double-Angle-Resolved Nanosphere Lithography","conference":{"end_date":"2014-04-03","location":"Porquerolles (France)","name":"Europhotonics Spring School 2014","start_date":"2014-03-31"},"type":"conference","status":"public","_id":"4058","user_id":"55706","department":[{"_id":"286"}],"language":[{"iso":"eng"}]},{"user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"_id":"4059","language":[{"iso":"eng"}],"type":"conference","status":"public","date_created":"2018-08-22T12:02:59Z","author":[{"id":"30380","full_name":"Brodehl, Christoph","last_name":"Brodehl","first_name":"Christoph"},{"last_name":"Greulich-Weber","full_name":"Greulich-Weber, Siegmund","first_name":"Siegmund"},{"first_name":"Jörg","full_name":"Lindner, Jörg","id":"20797","last_name":"Lindner"}],"date_updated":"2022-01-06T07:00:11Z","conference":{"name":"European Materials Research Society Fall Meeting 2014","start_date":"2014-09-15","end_date":"2014-09-19","location":"Warsaw (Poland)"},"title":"Nanosphere lithography for the creation of nanoparticle arrays with tailored shape","citation":{"ama":"Brodehl C, Greulich-Weber S, Lindner J. Nanosphere lithography for the creation of nanoparticle arrays with tailored shape. In: ; 2014.","ieee":"C. Brodehl, S. Greulich-Weber, and J. Lindner, “Nanosphere lithography for the creation of nanoparticle arrays with tailored shape,” presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland), 2014.","chicago":"Brodehl, Christoph, Siegmund Greulich-Weber, and Jörg Lindner. “Nanosphere Lithography for the Creation of Nanoparticle Arrays with Tailored Shape,” 2014.","bibtex":"@inproceedings{Brodehl_Greulich-Weber_Lindner_2014, title={Nanosphere lithography for the creation of nanoparticle arrays with tailored shape}, author={Brodehl, Christoph and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2014} }","mla":"Brodehl, Christoph, et al. <i>Nanosphere Lithography for the Creation of Nanoparticle Arrays with Tailored Shape</i>. 2014.","short":"C. Brodehl, S. Greulich-Weber, J. Lindner, in: 2014.","apa":"Brodehl, C., Greulich-Weber, S., &#38; Lindner, J. (2014). Nanosphere lithography for the creation of nanoparticle arrays with tailored shape. Presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland)."},"year":"2014"},{"conference":{"start_date":"2014-11-30","name":"MRS Materials Research Society Fall Meeting 2014","location":"Boston (USA)","end_date":"2014-12-05"},"title":"Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape","date_created":"2018-08-22T12:09:29Z","author":[{"first_name":"Christoph","last_name":"Brodehl","full_name":"Brodehl, Christoph","id":"30380"},{"last_name":"Greulich-Weber","full_name":"Greulich-Weber, Siegmund","first_name":"Siegmund"},{"first_name":"Jörg","last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg"}],"date_updated":"2022-01-06T07:00:11Z","citation":{"apa":"Brodehl, C., Greulich-Weber, S., &#38; Lindner, J. (2014). Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape. Presented at the MRS Materials Research Society Fall Meeting 2014, Boston (USA).","short":"C. Brodehl, S. Greulich-Weber, J. Lindner, in: 2014.","bibtex":"@inproceedings{Brodehl_Greulich-Weber_Lindner_2014, title={Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape}, author={Brodehl, Christoph and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2014} }","mla":"Brodehl, Christoph, et al. <i>Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape</i>. 2014.","ama":"Brodehl C, Greulich-Weber S, Lindner J. Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape. In: ; 2014.","ieee":"C. Brodehl, S. Greulich-Weber, and J. Lindner, “Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape,” presented at the MRS Materials Research Society Fall Meeting 2014, Boston (USA), 2014.","chicago":"Brodehl, Christoph, Siegmund Greulich-Weber, and Jörg Lindner. “Fabrication of Arrays of Nanoparticles with Arbitrarily Designed Shape,” 2014."},"year":"2014","language":[{"iso":"eng"}],"department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","_id":"4060","status":"public","type":"conference"},{"department":[{"_id":"15"},{"_id":"286"},{"_id":"292"}],"author":[{"first_name":"M.","last_name":"Bürger","full_name":"Bürger, M."},{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"},{"first_name":"Dirk","last_name":"Reuter","id":"37763","full_name":"Reuter, Dirk"},{"full_name":"As, D.J.","last_name":"As","first_name":"D.J."}],"date_created":"2018-08-22T12:11:40Z","user_id":"55706","_id":"4061","date_updated":"2022-01-06T07:00:11Z","conference":{"location":"Lille (France)","end_date":"2014-05-30","start_date":"2014-05-26","name":"European Materials Research Society Spring Meeting 2014"},"language":[{"iso":"eng"}],"title":"Investigation of cubic GaN quantum dots grown by the Stranski-Krastanov process","type":"conference","status":"public","citation":{"ama":"Bürger M, Lindner J, Reuter D, As DJ. Investigation of cubic GaN quantum dots grown by the Stranski-Krastanov process. In: ; 2014.","ieee":"M. Bürger, J. Lindner, D. Reuter, and D. J. As, “Investigation of cubic GaN quantum dots grown by the Stranski-Krastanov process,” presented at the European Materials Research Society Spring Meeting 2014, Lille (France), 2014.","chicago":"Bürger, M., Jörg Lindner, Dirk Reuter, and D.J. As. “Investigation of Cubic GaN Quantum Dots Grown by the Stranski-Krastanov Process,” 2014.","apa":"Bürger, M., Lindner, J., Reuter, D., &#38; As, D. J. (2014). Investigation of cubic GaN quantum dots grown by the Stranski-Krastanov process. Presented at the European Materials Research Society Spring Meeting 2014, Lille (France).","mla":"Bürger, M., et al. <i>Investigation of Cubic GaN Quantum Dots Grown by the Stranski-Krastanov Process</i>. 2014.","short":"M. Bürger, J. Lindner, D. Reuter, D.J. As, in: 2014.","bibtex":"@inproceedings{Bürger_Lindner_Reuter_As_2014, title={Investigation of cubic GaN quantum dots grown by the Stranski-Krastanov process}, author={Bürger, M. and Lindner, Jörg and Reuter, Dirk and As, D.J.}, year={2014} }"},"year":"2014"},{"language":[{"iso":"eng"}],"_id":"4062","department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","status":"public","type":"conference","title":"Numerical analysis of defects in colloidal nanosphere masks","conference":{"name":"European Materials Research Society Fall Meeting 2014","start_date":"2014-09-15","end_date":"2014-09-19","location":"Warsaw (Poland)"},"date_updated":"2022-01-06T07:00:11Z","author":[{"first_name":"Dennis","last_name":"Drude","full_name":"Drude, Dennis"},{"first_name":"Katharina","last_name":"Brassat","id":"11305","full_name":"Brassat, Katharina"},{"last_name":"Brodehl","full_name":"Brodehl, Christoph","id":"30380","first_name":"Christoph"},{"first_name":"Thomas","last_name":"Riedl","id":"36950","full_name":"Riedl, Thomas"},{"first_name":"Jörg","last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg"}],"date_created":"2018-08-22T12:13:23Z","year":"2014","citation":{"ama":"Drude D, Brassat K, Brodehl C, Riedl T, Lindner J. Numerical analysis of defects in colloidal nanosphere masks. In: ; 2014.","ieee":"D. Drude, K. Brassat, C. Brodehl, T. Riedl, and J. Lindner, “Numerical analysis of defects in colloidal nanosphere masks,” presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland), 2014.","chicago":"Drude, Dennis, Katharina Brassat, Christoph Brodehl, Thomas Riedl, and Jörg Lindner. “Numerical Analysis of Defects in Colloidal Nanosphere Masks,” 2014.","apa":"Drude, D., Brassat, K., Brodehl, C., Riedl, T., &#38; Lindner, J. (2014). Numerical analysis of defects in colloidal nanosphere masks. Presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland).","mla":"Drude, Dennis, et al. <i>Numerical Analysis of Defects in Colloidal Nanosphere Masks</i>. 2014.","bibtex":"@inproceedings{Drude_Brassat_Brodehl_Riedl_Lindner_2014, title={Numerical analysis of defects in colloidal nanosphere masks}, author={Drude, Dennis and Brassat, Katharina and Brodehl, Christoph and Riedl, Thomas and Lindner, Jörg}, year={2014} }","short":"D. Drude, K. Brassat, C. Brodehl, T. Riedl, J. Lindner, in: 2014."}},{"year":"2014","citation":{"chicago":"Ezhova, A., Jörg Lindner, M. Muldarisnur, Thomas Zentgraf, and K. Huber. “Ag‐nanoparticles in PA-Templates,” 2014.","ieee":"A. Ezhova, J. Lindner, M. Muldarisnur, T. Zentgraf, and K. Huber, “Ag‐nanoparticles in PA-templates,” presented at the Europhotonics Spring School 2014, Porquerolles (France), 2014.","ama":"Ezhova A, Lindner J, Muldarisnur M, Zentgraf T, Huber K. Ag‐nanoparticles in PA-templates. In: ; 2014.","mla":"Ezhova, A., et al. <i>Ag‐nanoparticles in PA-Templates</i>. 2014.","bibtex":"@inproceedings{Ezhova_Lindner_Muldarisnur_Zentgraf_Huber_2014, title={Ag‐nanoparticles in PA-templates}, author={Ezhova, A. and Lindner, Jörg and Muldarisnur, M. and Zentgraf, Thomas and Huber, K.}, year={2014} }","short":"A. Ezhova, J. Lindner, M. Muldarisnur, T. Zentgraf, K. Huber, in: 2014.","apa":"Ezhova, A., Lindner, J., Muldarisnur, M., Zentgraf, T., &#38; Huber, K. (2014). Ag‐nanoparticles in PA-templates. Presented at the Europhotonics Spring School 2014, Porquerolles (France)."},"title":"Ag‐nanoparticles in PA-templates","conference":{"start_date":"2014-03-31","name":"Europhotonics Spring School 2014","location":"Porquerolles (France)","end_date":"2014-04-03"},"date_updated":"2022-01-06T07:00:11Z","date_created":"2018-08-22T12:16:17Z","author":[{"last_name":"Ezhova","full_name":"Ezhova, A.","first_name":"A."},{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"},{"full_name":"Muldarisnur, M.","last_name":"Muldarisnur","first_name":"M."},{"last_name":"Zentgraf","orcid":"0000-0002-8662-1101","full_name":"Zentgraf, Thomas","id":"30525","first_name":"Thomas"},{"full_name":"Huber, K.","last_name":"Huber","first_name":"K."}],"status":"public","type":"conference","language":[{"iso":"eng"}],"_id":"4063","user_id":"55706","department":[{"_id":"15"},{"_id":"286"},{"_id":"289"}]},{"type":"conference","status":"public","department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","_id":"4068","language":[{"iso":"eng"}],"citation":{"mla":"Kemper, R. M., et al. <i>Influence of Growth Area Reduction on Cubic GaN Heteroepitaxial Layer Growth on 3C-SiC(001)</i>. 2014.","short":"R.M. Kemper, A. Kovacs, T. Riedl, D. Meertens, K. Tillmann, D. As, J. Lindner, in: 2014.","bibtex":"@inproceedings{Kemper_Kovacs_Riedl_Meertens_Tillmann_As_Lindner_2014, title={Influence of growth area reduction on cubic GaN heteroepitaxial layer growth on 3C-SiC(001)}, author={Kemper, R.M. and Kovacs, A.  and Riedl, Thomas and Meertens, D. and Tillmann, K. and As, D. and Lindner, Jörg}, year={2014} }","apa":"Kemper, R. M., Kovacs, A., Riedl, T., Meertens, D., Tillmann, K., As, D., &#38; Lindner, J. (2014). Influence of growth area reduction on cubic GaN heteroepitaxial layer growth on 3C-SiC(001). Presented at the European Materials Research Society Spring Meeting 2014, Lille (France).","chicago":"Kemper, R.M., A.  Kovacs, Thomas Riedl, D. Meertens, K. Tillmann, D. As, and Jörg Lindner. “Influence of Growth Area Reduction on Cubic GaN Heteroepitaxial Layer Growth on 3C-SiC(001),” 2014.","ieee":"R. M. Kemper <i>et al.</i>, “Influence of growth area reduction on cubic GaN heteroepitaxial layer growth on 3C-SiC(001),” presented at the European Materials Research Society Spring Meeting 2014, Lille (France), 2014.","ama":"Kemper RM, Kovacs A, Riedl T, et al. Influence of growth area reduction on cubic GaN heteroepitaxial layer growth on 3C-SiC(001). In: ; 2014."},"year":"2014","date_created":"2018-08-22T12:24:45Z","author":[{"first_name":"R.M.","full_name":"Kemper, R.M.","last_name":"Kemper"},{"full_name":"Kovacs, A. ","last_name":"Kovacs","first_name":"A. "},{"last_name":"Riedl","full_name":"Riedl, Thomas","id":"36950","first_name":"Thomas"},{"first_name":"D.","full_name":"Meertens, D.","last_name":"Meertens"},{"last_name":"Tillmann","full_name":"Tillmann, K.","first_name":"K."},{"full_name":"As, D.","last_name":"As","first_name":"D."},{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"}],"date_updated":"2022-01-06T07:00:12Z","conference":{"end_date":"2014-05-30","location":"Lille (France)","name":"European Materials Research Society Spring Meeting 2014","start_date":"2014-05-26"},"title":"Influence of growth area reduction on cubic GaN heteroepitaxial layer growth on 3C-SiC(001)"},{"conference":{"location":"Lille (France)","end_date":"2014-05-30","start_date":"2014-05-26","name":"European Materials Research Society Spring Meeting 2014"},"title":"STEM-CL investigations on the influence of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells","author":[{"first_name":"R.M.","last_name":"Kemper","full_name":"Kemper, R.M."},{"full_name":"Veit, P.","last_name":"Veit","first_name":"P."},{"first_name":"C. ","full_name":"Mietze, C. ","last_name":"Mietze"},{"first_name":"A.","full_name":"Dempewolf, A.","last_name":"Dempewolf"},{"first_name":"T. ","last_name":"Wecker","full_name":"Wecker, T. "},{"last_name":"Christen","full_name":"Christen, J.","first_name":"J."},{"first_name":"D.","last_name":"As","full_name":"As, D."},{"last_name":"Lindner","full_name":"Lindner, Jörg","id":"20797","first_name":"Jörg"}],"date_created":"2018-08-22T12:26:49Z","date_updated":"2022-01-06T07:00:12Z","citation":{"mla":"Kemper, R. M., et al. <i>STEM-CL Investigations on the Influence of Stacking Faults on the Optical Emission of Cubic GaN Epilayers and Cubic GaN/AlN Multi-Quantum Wells</i>. 2014.","short":"R.M. Kemper, P. Veit, C. Mietze, A. Dempewolf, T. Wecker, J. Christen, D. As, J. Lindner, in: 2014.","bibtex":"@inproceedings{Kemper_Veit_Mietze_Dempewolf_Wecker_Christen_As_Lindner_2014, title={STEM-CL investigations on the influence of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells}, author={Kemper, R.M. and Veit, P. and Mietze, C.  and Dempewolf, A. and Wecker, T.  and Christen, J. and As, D. and Lindner, Jörg}, year={2014} }","apa":"Kemper, R. M., Veit, P., Mietze, C., Dempewolf, A., Wecker, T., Christen, J., … Lindner, J. (2014). STEM-CL investigations on the influence of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells. Presented at the European Materials Research Society Spring Meeting 2014, Lille (France).","chicago":"Kemper, R.M., P. Veit, C.  Mietze, A. Dempewolf, T.  Wecker, J. Christen, D. As, and Jörg Lindner. “STEM-CL Investigations on the Influence of Stacking Faults on the Optical Emission of Cubic GaN Epilayers and Cubic GaN/AlN Multi-Quantum Wells,” 2014.","ieee":"R. M. Kemper <i>et al.</i>, “STEM-CL investigations on the influence of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells,” presented at the European Materials Research Society Spring Meeting 2014, Lille (France), 2014.","ama":"Kemper RM, Veit P, Mietze C, et al. STEM-CL investigations on the influence of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells. In: ; 2014."},"year":"2014","language":[{"iso":"eng"}],"user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"_id":"4069","status":"public","type":"conference"},{"issue":"2","year":"2014","date_created":"2018-08-22T12:28:15Z","publisher":"Wiley","title":"Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001)","publication":"physica status solidi (c)","file":[{"content_type":"application/pdf","relation":"main_file","success":1,"date_created":"2018-08-22T12:30:12Z","creator":"hclaudia","date_updated":"2018-08-22T12:30:12Z","file_id":"4071","access_level":"closed","file_name":"Cubic GaN-AlN multi-quantum wells grown on pre-patterned 3C SiC Si 001.pdf","file_size":3777577}],"abstract":[{"lang":"eng","text":"We report for the first time on the growth of cubic AlN/GaN multi‐quantum wells (MQWs) on pre‐patterned 3C‐SiC/Si (001) substrates. The sample structure consists of 10 periods of 2 nm c‐AlN barriers with a 4 nm c‐GaN layer in between, which were grown on 3C‐SiC post shaped structures by means of molecular beam epitaxy. Substrate patterning has been realized by electron beam lithography and a reactive ion etching process. The 3C‐SiC posts have a length of about 550 nm and a height of about 700 nm. (Scanning) transmission electron microscopy studies show that the morphology of the MQWs is clearly influenced by {111} stacking faults, modulating the local growth rate. Further, the growth at the edges of the surface pattern is investigated. The MQW layers cover the 90° edges by developing low‐index facets rather than by forming a conformal system of 90° angled layers. "}],"language":[{"iso":"eng"}],"ddc":["530"],"publication_status":"published","publication_identifier":{"issn":["1862-6351"]},"has_accepted_license":"1","citation":{"apa":"Kemper, R. M., Mietze, C., Hiller, L., Stauden, T., Pezoldt, J., Meertens, D., … Lindner, J. (2014). Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001). <i>Physica Status Solidi (C)</i>, <i>11</i>(2), 265–268. <a href=\"https://doi.org/10.1002/pssc.201300292\">https://doi.org/10.1002/pssc.201300292</a>","bibtex":"@article{Kemper_Mietze_Hiller_Stauden_Pezoldt_Meertens_Luysberg_As_Lindner_2014, title={Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001)}, volume={11}, DOI={<a href=\"https://doi.org/10.1002/pssc.201300292\">10.1002/pssc.201300292</a>}, number={2}, journal={physica status solidi (c)}, publisher={Wiley}, author={Kemper, R. M. and Mietze, C. and Hiller, L. and Stauden, T. and Pezoldt, J. and Meertens, D. and Luysberg, M. and As, D. J. and Lindner, Jörg}, year={2014}, pages={265–268} }","mla":"Kemper, R. M., et al. “Cubic GaN/AlN Multi-Quantum Wells Grown on Pre-Patterned 3C-SiC/Si (001).” <i>Physica Status Solidi (C)</i>, vol. 11, no. 2, Wiley, 2014, pp. 265–68, doi:<a href=\"https://doi.org/10.1002/pssc.201300292\">10.1002/pssc.201300292</a>.","short":"R.M. Kemper, C. Mietze, L. Hiller, T. Stauden, J. Pezoldt, D. Meertens, M. Luysberg, D.J. As, J. Lindner, Physica Status Solidi (C) 11 (2014) 265–268.","ama":"Kemper RM, Mietze C, Hiller L, et al. Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001). <i>physica status solidi (c)</i>. 2014;11(2):265-268. doi:<a href=\"https://doi.org/10.1002/pssc.201300292\">10.1002/pssc.201300292</a>","chicago":"Kemper, R. M., C. Mietze, L. Hiller, T. Stauden, J. Pezoldt, D. Meertens, M. Luysberg, D. J. As, and Jörg Lindner. “Cubic GaN/AlN Multi-Quantum Wells Grown on Pre-Patterned 3C-SiC/Si (001).” <i>Physica Status Solidi (C)</i> 11, no. 2 (2014): 265–68. <a href=\"https://doi.org/10.1002/pssc.201300292\">https://doi.org/10.1002/pssc.201300292</a>.","ieee":"R. M. Kemper <i>et al.</i>, “Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001),” <i>physica status solidi (c)</i>, vol. 11, no. 2, pp. 265–268, 2014."},"page":"265-268","intvolume":"        11","author":[{"first_name":"R. M.","full_name":"Kemper, R. M.","last_name":"Kemper"},{"full_name":"Mietze, C.","last_name":"Mietze","first_name":"C."},{"last_name":"Hiller","full_name":"Hiller, L.","first_name":"L."},{"first_name":"T.","full_name":"Stauden, T.","last_name":"Stauden"},{"full_name":"Pezoldt, J.","last_name":"Pezoldt","first_name":"J."},{"last_name":"Meertens","full_name":"Meertens, D.","first_name":"D."},{"last_name":"Luysberg","full_name":"Luysberg, M.","first_name":"M."},{"full_name":"As, D. J.","last_name":"As","first_name":"D. J."},{"first_name":"Jörg","last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg"}],"volume":11,"date_updated":"2022-01-06T07:00:13Z","doi":"10.1002/pssc.201300292","type":"journal_article","status":"public","user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"_id":"4070","file_date_updated":"2018-08-22T12:30:12Z","article_type":"original"},{"language":[{"iso":"eng"}],"ddc":["530"],"publication":"physica status solidi (a)","file":[{"success":1,"relation":"main_file","content_type":"application/pdf","file_size":989885,"file_id":"4073","access_level":"closed","file_name":"Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces.pdf","date_updated":"2018-08-22T12:32:42Z","creator":"hclaudia","date_created":"2018-08-22T12:32:42Z"}],"abstract":[{"lang":"eng","text":"This paper presents a low‐cost procedure that allows for self‐organized fabrication of periodically arranged, sub‐50 nm diameter, vertical‐sidewall GaAs nanopillars on GaAs surfaces based on nanosphere lithography, and reactive ion etching (RIE). Monodispersed polystyrene (PS) sphere double layers are deposited from a colloidal suspension on pre‐treated, hydrophilized GaAs substrates. Ni is thermally evaporated to act as a hard mask for subsequent RIE. Scanning electron microscopy reveals that the Ni nanoparticles left on the substrate after PS sphere removal have polygon‐shaped in‐plane cross‐sections corresponding to the shape of the double layer mask openings. RIE using SiCl4 at low pressure and high power density leads to the formation of vertical nanopillars with circular to oval cross‐sections, whose diameters are reduced by ∼1/3 compared to those of the Ni nanoparticles. These findings can be explained by plasma‐enhanced surface diffusion and sputtering processes during RIE. The obtained GaAs nanopillars have an average diameter of only ∼23 nm, exhibit an excellent verticality with a sidewall angle of 88.9 ± 0.4° and planar top faces, as visible in transmission electron microscopy images. "}],"date_created":"2018-08-22T12:31:17Z","publisher":"Wiley","title":"Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces","issue":"12","year":"2014","user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"_id":"4072","file_date_updated":"2018-08-22T12:32:42Z","article_type":"original","type":"journal_article","status":"public","author":[{"last_name":"Riedl","full_name":"Riedl, Thomas","id":"36950","first_name":"Thomas"},{"first_name":"Jörg","full_name":"Lindner, Jörg","id":"20797","last_name":"Lindner"}],"volume":211,"date_updated":"2022-01-06T07:00:13Z","doi":"10.1002/pssa.201431474","publication_status":"published","has_accepted_license":"1","publication_identifier":{"issn":["1862-6300"]},"citation":{"ama":"Riedl T, Lindner J. Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces. <i>physica status solidi (a)</i>. 2014;211(12):2871-2877. doi:<a href=\"https://doi.org/10.1002/pssa.201431474\">10.1002/pssa.201431474</a>","chicago":"Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic Arrays of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” <i>Physica Status Solidi (A)</i> 211, no. 12 (2014): 2871–77. <a href=\"https://doi.org/10.1002/pssa.201431474\">https://doi.org/10.1002/pssa.201431474</a>.","ieee":"T. Riedl and J. Lindner, “Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces,” <i>physica status solidi (a)</i>, vol. 211, no. 12, pp. 2871–2877, 2014.","short":"T. Riedl, J. Lindner, Physica Status Solidi (A) 211 (2014) 2871–2877.","bibtex":"@article{Riedl_Lindner_2014, title={Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces}, volume={211}, DOI={<a href=\"https://doi.org/10.1002/pssa.201431474\">10.1002/pssa.201431474</a>}, number={12}, journal={physica status solidi (a)}, publisher={Wiley}, author={Riedl, Thomas and Lindner, Jörg}, year={2014}, pages={2871–2877} }","mla":"Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic Arrays of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” <i>Physica Status Solidi (A)</i>, vol. 211, no. 12, Wiley, 2014, pp. 2871–77, doi:<a href=\"https://doi.org/10.1002/pssa.201431474\">10.1002/pssa.201431474</a>.","apa":"Riedl, T., &#38; Lindner, J. (2014). Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars on GaAs surfaces. <i>Physica Status Solidi (A)</i>, <i>211</i>(12), 2871–2877. <a href=\"https://doi.org/10.1002/pssa.201431474\">https://doi.org/10.1002/pssa.201431474</a>"},"intvolume":"       211","page":"2871-2877"},{"title":"Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers","doi":"10.1557/opl.2014.312","conference":{"location":"Boston (USA)","end_date":"2013-12-06","start_date":"2013-12-01","name":"MRS Fall Meeting "},"publisher":"Cambridge University Press (CUP)","date_updated":"2022-01-06T07:00:13Z","date_created":"2018-08-22T12:34:02Z","author":[{"first_name":"Thomas","last_name":"Riedl","id":"36950","full_name":"Riedl, Thomas"},{"last_name":"Strake","full_name":"Strake, Matthias","first_name":"Matthias"},{"full_name":"Sievers, Werner","last_name":"Sievers","first_name":"Werner"},{"first_name":"Jörg","id":"20797","full_name":"Lindner, Jörg","last_name":"Lindner"}],"volume":1663,"year":"2014","citation":{"ama":"Riedl T, Strake M, Sievers W, Lindner J. Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers. <i>MRS Proceedings</i>. 2014;1663. doi:<a href=\"https://doi.org/10.1557/opl.2014.312\">10.1557/opl.2014.312</a>","ieee":"T. Riedl, M. Strake, W. Sievers, and J. Lindner, “Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers,” <i>MRS Proceedings</i>, vol. 1663, 2014.","chicago":"Riedl, Thomas, Matthias Strake, Werner Sievers, and Jörg Lindner. “Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers.” <i>MRS Proceedings</i> 1663 (2014). <a href=\"https://doi.org/10.1557/opl.2014.312\">https://doi.org/10.1557/opl.2014.312</a>.","bibtex":"@article{Riedl_Strake_Sievers_Lindner_2014, title={Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers}, volume={1663}, DOI={<a href=\"https://doi.org/10.1557/opl.2014.312\">10.1557/opl.2014.312</a>}, number={mrsf13-1663-ww03-75}, journal={MRS Proceedings}, publisher={Cambridge University Press (CUP)}, author={Riedl, Thomas and Strake, Matthias and Sievers, Werner and Lindner, Jörg}, year={2014} }","mla":"Riedl, Thomas, et al. “Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers.” <i>MRS Proceedings</i>, vol. 1663, mrsf13-1663-ww03-75, Cambridge University Press (CUP), 2014, doi:<a href=\"https://doi.org/10.1557/opl.2014.312\">10.1557/opl.2014.312</a>.","short":"T. Riedl, M. Strake, W. Sievers, J. Lindner, MRS Proceedings 1663 (2014).","apa":"Riedl, T., Strake, M., Sievers, W., &#38; Lindner, J. (2014). Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers. <i>MRS Proceedings</i>, <i>1663</i>. <a href=\"https://doi.org/10.1557/opl.2014.312\">https://doi.org/10.1557/opl.2014.312</a>"},"intvolume":"      1663","publication_status":"published","publication_identifier":{"issn":["1946-4274"]},"article_type":"original","article_number":"mrsf13-1663-ww03-75","language":[{"iso":"eng"}],"_id":"4074","user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"abstract":[{"text":"An experimental analysis of the morphology changes of hexagonally close packed polystyrene sphere monolayers induced by annealing in air is presented. The triangular interstices between each triple of spheres, which are frequently used as nanoscale mask openings in colloidal lithography, are observed to gradually shrink in size and change in shape upon annealing. Top view scanning electron microscopy images reveal that different stages are involved in the closure of monolayer interstices at annealing temperatures in the range between 110°C and 120°C. In the early stages shrinkage of the triangular interstices is dominated by material transport to and thus shortening of their corners, in the late stages interstice area reduction via displacement of the triangle edges becomes significant. At intermediate annealing times the rate of interstice area reduction displays a maximum before a stabilized state characterized by a rounded isosceles triangular shape forms.","lang":"eng"}],"status":"public","type":"journal_article","publication":"MRS Proceedings"},{"title":"Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures","doi":"10.1557/opl.2014.325 ","conference":{"location":"Boston (USA)","end_date":"2013-12-06","start_date":"2013-12-01","name":"MRS Materials Research Society Fall Meeting 2014"},"publisher":"MRS Online Proceedings","date_updated":"2022-01-06T07:00:13Z","date_created":"2018-08-22T12:43:39Z","author":[{"first_name":"Thomas","id":"36950","full_name":"Riedl, Thomas","last_name":"Riedl"},{"last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg","first_name":"Jörg"}],"year":"2014","citation":{"mla":"Riedl, Thomas, and Jörg Lindner. “Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures.” <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>, no. 1664, MRS Online Proceedings, 2014, doi:<a href=\"https://doi.org/10.1557/opl.2014.325 \">10.1557/opl.2014.325 </a>.","short":"T. Riedl, J. Lindner, in: Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties , MRS Online Proceedings, 2014.","bibtex":"@inproceedings{Riedl_Lindner_2014, title={Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures}, DOI={<a href=\"https://doi.org/10.1557/opl.2014.325 \">10.1557/opl.2014.325 </a>}, number={1664}, booktitle={Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties }, publisher={MRS Online Proceedings}, author={Riedl, Thomas and Lindner, Jörg}, year={2014} }","apa":"Riedl, T., &#38; Lindner, J. (2014). Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures. In <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>. Boston (USA): MRS Online Proceedings. <a href=\"https://doi.org/10.1557/opl.2014.325 \">https://doi.org/10.1557/opl.2014.325 </a>","ama":"Riedl T, Lindner J. Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures. In: <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>. MRS Online Proceedings; 2014. doi:<a href=\"https://doi.org/10.1557/opl.2014.325 \">10.1557/opl.2014.325 </a>","chicago":"Riedl, Thomas, and Jörg Lindner. “Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures.” In <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>. MRS Online Proceedings, 2014. <a href=\"https://doi.org/10.1557/opl.2014.325 \">https://doi.org/10.1557/opl.2014.325 </a>.","ieee":"T. Riedl and J. Lindner, “Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures,” in <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>, Boston (USA), 2014, no. 1664."},"publication_status":"published","issue":"1664","language":[{"iso":"eng"}],"_id":"4075","department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","abstract":[{"text":"The formation of misfit dislocations is an important issue for the performance of heteroepitaxial micro- and optoelectronic devices. We analyze three approaches that quantify the stability of misfit dislocations in axial-heteroepitaxial nanowires with respect to applicability and predictions of critical nanowire dimensions. The “nanoheteroepitaxy” approach of Zubia and Hersee proves suitable for determination of strain partitioning in the presence of an elastic mismatch. Concerning the critical thickness and diameter however the descriptions of Ertekin et al. and Glas respectively yield more reliable results, owing to the consideration of the total coherent and dislocation related energies plus the residual strain energy. In contrast to the model of Ertekin et al., which refers to infinitely long nanowires, the other two mentioned approaches allow predictions of the critical thickness of mismatched deposits on the nanowire axial face.","lang":"eng"}],"status":"public","publication":"Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties ","type":"conference"},{"author":[{"last_name":"Riedl","id":"36950","full_name":"Riedl, Thomas","first_name":"Thomas"},{"first_name":"A.","full_name":"Kovács, A.","last_name":"Kovács"},{"first_name":"D.","last_name":"Meertens","full_name":"Meertens, D."},{"first_name":"Jörg","id":"20797","full_name":"Lindner, Jörg","last_name":"Lindner"}],"date_created":"2018-08-22T12:48:37Z","date_updated":"2022-01-06T07:00:13Z","conference":{"end_date":"2014-09-19","location":"Warsaw (Poland)","name":"European Materials Research Society Fall Meeting 2014","start_date":"2014-09-15"},"title":"Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars","citation":{"apa":"Riedl, T., Kovács, A., Meertens, D., &#38; Lindner, J. (2014). Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars. Presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland).","mla":"Riedl, Thomas, et al. <i>Structure and Surface Chemistry Analysis of Ultra-Thin Reactive Ion Etched GaAs (111) Nanopillars</i>. 2014.","bibtex":"@inproceedings{Riedl_Kovács_Meertens_Lindner_2014, title={Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars}, author={Riedl, Thomas and Kovács, A. and Meertens, D. and Lindner, Jörg}, year={2014} }","short":"T. Riedl, A. Kovács, D. Meertens, J. Lindner, in: 2014.","ieee":"T. Riedl, A. Kovács, D. Meertens, and J. Lindner, “Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars,” presented at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland), 2014.","chicago":"Riedl, Thomas, A. Kovács, D. Meertens, and Jörg Lindner. “Structure and Surface Chemistry Analysis of Ultra-Thin Reactive Ion Etched GaAs (111) Nanopillars,” 2014.","ama":"Riedl T, Kovács A, Meertens D, Lindner J. Structure and surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars. In: ; 2014."},"year":"2014","department":[{"_id":"286"}],"user_id":"55706","_id":"4078","language":[{"iso":"eng"}],"type":"conference","status":"public"},{"language":[{"iso":"eng"}],"user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"_id":"4079","status":"public","type":"conference","conference":{"name":"Workshop Ionenstrahlen und Nanostrukturen","start_date":"2014-07-20","end_date":"2014-07-22","location":"Paderborn"},"title":"RBS of gold-coated polystyrene nanospheres","date_created":"2018-08-22T12:50:31Z","author":[{"last_name":"Rüsing","full_name":"Rüsing, M.","first_name":"M."},{"first_name":"L.","last_name":"Merten","full_name":"Merten, L."},{"full_name":"Reinert, P.","last_name":"Reinert","first_name":"P."},{"first_name":"D.","last_name":"Rogalla","full_name":"Rogalla, D."},{"full_name":"Becker, H.-W.","last_name":"Becker","first_name":"H.-W."},{"first_name":"Jörg","full_name":"Lindner, Jörg","id":"20797","last_name":"Lindner"}],"date_updated":"2022-01-06T07:00:13Z","citation":{"ieee":"M. Rüsing, L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, and J. Lindner, “RBS of gold-coated polystyrene nanospheres,” presented at the Workshop Ionenstrahlen und Nanostrukturen, Paderborn, 2014.","chicago":"Rüsing, M., L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, and Jörg Lindner. “RBS of Gold-Coated Polystyrene Nanospheres,” 2014.","ama":"Rüsing M, Merten L, Reinert P, Rogalla D, Becker H-W, Lindner J. RBS of gold-coated polystyrene nanospheres. In: ; 2014.","mla":"Rüsing, M., et al. <i>RBS of Gold-Coated Polystyrene Nanospheres</i>. 2014.","bibtex":"@inproceedings{Rüsing_Merten_Reinert_Rogalla_Becker_Lindner_2014, title={RBS of gold-coated polystyrene nanospheres}, author={Rüsing, M. and Merten, L. and Reinert, P. and Rogalla, D. and Becker, H.-W. and Lindner, Jörg}, year={2014} }","short":"M. Rüsing, L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, J. Lindner, in: 2014.","apa":"Rüsing, M., Merten, L., Reinert, P., Rogalla, D., Becker, H.-W., &#38; Lindner, J. (2014). RBS of gold-coated polystyrene nanospheres. Presented at the Workshop Ionenstrahlen und Nanostrukturen, Paderborn."},"year":"2014"},{"citation":{"apa":"Lindner, J. (2014). Nanostrukturierte Oberflächen, nicht nur zum Spass. Presented at the Kolloquium der Friedrich-Schiller-Universität, Jena (Germany).","short":"J. Lindner, in: 2014.","bibtex":"@inproceedings{Lindner_2014, title={Nanostrukturierte Oberflächen, nicht nur zum Spass}, author={Lindner, Jörg}, year={2014} }","mla":"Lindner, Jörg. <i>Nanostrukturierte Oberflächen, Nicht Nur Zum Spass</i>. 2014.","ama":"Lindner J. Nanostrukturierte Oberflächen, nicht nur zum Spass. In: ; 2014.","ieee":"J. Lindner, “Nanostrukturierte Oberflächen, nicht nur zum Spass,” presented at the Kolloquium der Friedrich-Schiller-Universität, Jena (Germany), 2014.","chicago":"Lindner, Jörg. “Nanostrukturierte Oberflächen, Nicht Nur Zum Spass,” 2014."},"year":"2014","conference":{"name":"Kolloquium der Friedrich-Schiller-Universität","start_date":"2014-04-25","end_date":"2014-04-25","location":"Jena (Germany)"},"title":"Nanostrukturierte Oberflächen, nicht nur zum Spass","date_created":"2018-08-22T12:54:24Z","author":[{"first_name":"Jörg","id":"20797","full_name":"Lindner, Jörg","last_name":"Lindner"}],"date_updated":"2022-01-06T07:00:14Z","status":"public","type":"conference","language":[{"iso":"eng"}],"department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","_id":"4083"},{"date_updated":"2023-10-09T09:08:12Z","author":[{"last_name":"Hiller","full_name":"Hiller, Lars","first_name":"Lars"},{"last_name":"Stauden","full_name":"Stauden, Thomas","first_name":"Thomas"},{"first_name":"Ricarda M.","full_name":"Kemper, Ricarda M.","last_name":"Kemper"},{"last_name":"Lindner","full_name":"Lindner, Jörg","id":"20797","first_name":"Jörg"},{"id":"14","full_name":"As, Donat J.","orcid":"0000-0003-1121-3565","last_name":"As","first_name":"Donat J."},{"first_name":"Jörg","last_name":"Pezoldt","full_name":"Pezoldt, Jörg"}],"volume":"778-780","doi":"10.4028/www.scientific.net/msf.778-780.730","publication_status":"published","has_accepted_license":"1","publication_identifier":{"issn":["1662-9752"]},"citation":{"chicago":"Hiller, Lars, Thomas Stauden, Ricarda M. Kemper, Jörg Lindner, Donat J. As, and Jörg Pezoldt. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” <i>Materials Science Forum</i> 778–780 (2014): 730–33. <a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">https://doi.org/10.4028/www.scientific.net/msf.778-780.730</a>.","ieee":"L. Hiller, T. Stauden, R. M. Kemper, J. Lindner, D. J. As, and J. Pezoldt, “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures,” <i>Materials Science Forum</i>, vol. 778–780, pp. 730–733, 2014, doi: <a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">10.4028/www.scientific.net/msf.778-780.730</a>.","ama":"Hiller L, Stauden T, Kemper RM, Lindner J, As DJ, Pezoldt J. Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. <i>Materials Science Forum</i>. 2014;778-780:730-733. doi:<a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">10.4028/www.scientific.net/msf.778-780.730</a>","apa":"Hiller, L., Stauden, T., Kemper, R. M., Lindner, J., As, D. J., &#38; Pezoldt, J. (2014). Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. <i>Materials Science Forum</i>, <i>778–780</i>, 730–733. <a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">https://doi.org/10.4028/www.scientific.net/msf.778-780.730</a>","mla":"Hiller, Lars, et al. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” <i>Materials Science Forum</i>, vol. 778–780, Trans Tech Publications, 2014, pp. 730–33, doi:<a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">10.4028/www.scientific.net/msf.778-780.730</a>.","bibtex":"@article{Hiller_Stauden_Kemper_Lindner_As_Pezoldt_2014, title={Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures}, volume={778–780}, DOI={<a href=\"https://doi.org/10.4028/www.scientific.net/msf.778-780.730\">10.4028/www.scientific.net/msf.778-780.730</a>}, journal={Materials Science Forum}, publisher={Trans Tech Publications}, author={Hiller, Lars and Stauden, Thomas and Kemper, Ricarda M. and Lindner, Jörg and As, Donat J. and Pezoldt, Jörg}, year={2014}, pages={730–733} }","short":"L. Hiller, T. Stauden, R.M. Kemper, J. Lindner, D.J. As, J. Pezoldt, Materials Science Forum 778–780 (2014) 730–733."},"page":"730-733","_id":"4064","user_id":"14931","department":[{"_id":"286"}],"article_type":"original","file_date_updated":"2018-08-22T12:20:24Z","type":"journal_article","status":"public","publisher":"Trans Tech Publications","date_created":"2018-08-22T12:17:30Z","title":"Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures","year":"2014","ddc":["530"],"language":[{"iso":"eng"}],"publication":"Materials Science Forum","abstract":[{"lang":"eng","text":"An anisotropic etching process for mesa structures using fluorinated plasma with\r\nhydrogen addition was developed in an electron cyclotron resonance setup. The evolution of the\r\nmesa morphology was studied in dependence on the gas composition, the applied bias and the\r\npressure. The achieved side wall slope approached 90° with a negligible trenching. The aspect ratios\r\nof the fabricated structure in the developed residue free ECR plasma etching process were between\r\n5 and 20."}],"file":[{"content_type":"application/pdf","relation":"main_file","success":1,"creator":"hclaudia","date_created":"2018-08-22T12:20:24Z","date_updated":"2018-08-22T12:20:24Z","file_name":"2014_Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.pdf","access_level":"closed","file_id":"4065","file_size":882721}]},{"department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","_id":"4094","language":[{"iso":"eng"}],"publication":"Silicon-based Nanomaterials","type":"book_chapter","status":"public","editor":[{"first_name":"H.","full_name":"Li, H.","last_name":"Li"},{"last_name":"Wu","full_name":"Wu, J.","first_name":"J."},{"first_name":"Z.M.","last_name":"Wang","full_name":"Wang, Z.M."}],"volume":187,"date_created":"2018-08-23T12:34:23Z","author":[{"first_name":"R.M.","full_name":"Kemper, R.M.","last_name":"Kemper"},{"first_name":"Donald","full_name":"As, Donald","last_name":"As"},{"first_name":"Jörg","full_name":"Lindner, Jörg","id":"20797","last_name":"Lindner"}],"date_updated":"2022-01-06T07:00:15Z","publisher":"Springer Series in Materials Science","title":"Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates","publication_identifier":{"eisbn":["978-1-4614-8169-0 "],"isbn":["978-1-4614-8168-3"]},"publication_status":"published","page":"381-405","intvolume":"       187","citation":{"ieee":"R. M. Kemper, D. As, and J. Lindner, “Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates,” in <i>Silicon-based Nanomaterials</i>, vol. 187, H. Li, J. Wu, and Z. M. Wang, Eds. Springer Series in Materials Science, 2013, pp. 381–405.","chicago":"Kemper, R.M., Donald As, and Jörg Lindner. “Cubic GaN on Nano-Patterned 3C-SiC/Si (001) Substrates.” In <i>Silicon-Based Nanomaterials</i>, edited by H. Li, J. Wu, and Z.M. Wang, 187:381–405. Springer Series in Materials Science, 2013.","ama":"Kemper RM, As D, Lindner J. Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates. In: Li H, Wu J, Wang ZM, eds. <i>Silicon-Based Nanomaterials</i>. Vol 187. Springer Series in Materials Science; 2013:381-405.","apa":"Kemper, R. M., As, D., &#38; Lindner, J. (2013). Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates. In H. Li, J. Wu, &#38; Z. M. Wang (Eds.), <i>Silicon-based Nanomaterials</i> (Vol. 187, pp. 381–405). Springer Series in Materials Science.","bibtex":"@inbook{Kemper_As_Lindner_2013, title={Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates}, volume={187}, booktitle={Silicon-based Nanomaterials}, publisher={Springer Series in Materials Science}, author={Kemper, R.M. and As, Donald and Lindner, Jörg}, editor={Li, H. and Wu, J. and Wang, Z.M.Editors}, year={2013}, pages={381–405} }","short":"R.M. Kemper, D. As, J. Lindner, in: H. Li, J. Wu, Z.M. Wang (Eds.), Silicon-Based Nanomaterials, Springer Series in Materials Science, 2013, pp. 381–405.","mla":"Kemper, R. M., et al. “Cubic GaN on Nano-Patterned 3C-SiC/Si (001) Substrates.” <i>Silicon-Based Nanomaterials</i>, edited by H. Li et al., vol. 187, Springer Series in Materials Science, 2013, pp. 381–405."},"year":"2013"},{"date_updated":"2022-01-06T07:00:16Z","date_created":"2018-08-23T12:43:31Z","author":[{"first_name":"Katharina","last_name":"Brassat","id":"11305","full_name":"Brassat, Katharina"},{"full_name":"Pauly, Johannes","last_name":"Pauly","first_name":"Johannes"},{"first_name":"R.","full_name":"Kemper, R.","last_name":"Kemper"},{"last_name":"Strake","full_name":"Strake, M.","first_name":"M."},{"full_name":"Brodehl, Christoph","id":"30380","last_name":"Brodehl","first_name":"Christoph"},{"full_name":"Sievers, Werner","last_name":"Sievers","first_name":"Werner"},{"last_name":"Riedl","full_name":"Riedl, Thomas","id":"36950","first_name":"Thomas"},{"first_name":"Jörg","id":"20797","full_name":"Lindner, Jörg","last_name":"Lindner"}],"title":"Colloidal nano-lithography: state-of-the-art","conference":{"location":"Paderborn","end_date":"2013-09-25","start_date":"2013-09-23","name":"46th Biennial Meeting of the German Colloid Society \"Morphological Transformations and Responses in Colloidal Systems\""},"year":"2013","citation":{"mla":"Brassat, Katharina, et al. <i>Colloidal Nano-Lithography: State-of-the-Art</i>. 2013.","bibtex":"@inproceedings{Brassat_Pauly_Kemper_Strake_Brodehl_Sievers_Riedl_Lindner_2013, title={Colloidal nano-lithography: state-of-the-art}, author={Brassat, Katharina and Pauly, Johannes and Kemper, R. and Strake, M. and Brodehl, Christoph and Sievers, Werner and Riedl, Thomas and Lindner, Jörg}, year={2013} }","short":"K. Brassat, J. Pauly, R. Kemper, M. Strake, C. Brodehl, W. Sievers, T. Riedl, J. Lindner, in: 2013.","apa":"Brassat, K., Pauly, J., Kemper, R., Strake, M., Brodehl, C., Sievers, W., … Lindner, J. (2013). Colloidal nano-lithography: state-of-the-art. Presented at the 46th Biennial Meeting of the German Colloid Society “Morphological Transformations and Responses in Colloidal Systems,” Paderborn.","chicago":"Brassat, Katharina, Johannes Pauly, R. Kemper, M. Strake, Christoph Brodehl, Werner Sievers, Thomas Riedl, and Jörg Lindner. “Colloidal Nano-Lithography: State-of-the-Art,” 2013.","ieee":"K. Brassat <i>et al.</i>, “Colloidal nano-lithography: state-of-the-art,” presented at the 46th Biennial Meeting of the German Colloid Society “Morphological Transformations and Responses in Colloidal Systems,” Paderborn, 2013.","ama":"Brassat K, Pauly J, Kemper R, et al. Colloidal nano-lithography: state-of-the-art. In: ; 2013."},"_id":"4097","user_id":"55706","department":[{"_id":"15"},{"_id":"286"}],"language":[{"iso":"eng"}],"type":"conference","status":"public"},{"type":"journal_article","status":"public","department":[{"_id":"15"},{"_id":"286"},{"_id":"230"},{"_id":"59"}],"user_id":"55706","_id":"4098","file_date_updated":"2018-08-23T12:47:33Z","article_type":"original","has_accepted_license":"1","publication_identifier":{"issn":["1862-6300"]},"publication_status":"published","page":"1485-1489","intvolume":"       210","citation":{"ama":"Brassat K, Assion F, Hilleringmann U, Lindner J. Self-organization of nanospheres in trenches on silicon surfaces. <i>physica status solidi (a)</i>. 2013;210(8):1485-1489. doi:<a href=\"https://doi.org/10.1002/pssa.201200899\">10.1002/pssa.201200899</a>","ieee":"K. Brassat, F. Assion, U. Hilleringmann, and J. Lindner, “Self-organization of nanospheres in trenches on silicon surfaces,” <i>physica status solidi (a)</i>, vol. 210, no. 8, pp. 1485–1489, 2013.","chicago":"Brassat, Katharina, Fabian Assion, Ulrich Hilleringmann, and Jörg Lindner. “Self-Organization of Nanospheres in Trenches on Silicon Surfaces.” <i>Physica Status Solidi (A)</i> 210, no. 8 (2013): 1485–89. <a href=\"https://doi.org/10.1002/pssa.201200899\">https://doi.org/10.1002/pssa.201200899</a>.","bibtex":"@article{Brassat_Assion_Hilleringmann_Lindner_2013, title={Self-organization of nanospheres in trenches on silicon surfaces}, volume={210}, DOI={<a href=\"https://doi.org/10.1002/pssa.201200899\">10.1002/pssa.201200899</a>}, number={8}, journal={physica status solidi (a)}, publisher={Wiley}, author={Brassat, Katharina and Assion, Fabian and Hilleringmann, Ulrich and Lindner, Jörg}, year={2013}, pages={1485–1489} }","mla":"Brassat, Katharina, et al. “Self-Organization of Nanospheres in Trenches on Silicon Surfaces.” <i>Physica Status Solidi (A)</i>, vol. 210, no. 8, Wiley, 2013, pp. 1485–89, doi:<a href=\"https://doi.org/10.1002/pssa.201200899\">10.1002/pssa.201200899</a>.","short":"K. Brassat, F. Assion, U. Hilleringmann, J. Lindner, Physica Status Solidi (A) 210 (2013) 1485–1489.","apa":"Brassat, K., Assion, F., Hilleringmann, U., &#38; Lindner, J. (2013). Self-organization of nanospheres in trenches on silicon surfaces. <i>Physica Status Solidi (A)</i>, <i>210</i>(8), 1485–1489. <a href=\"https://doi.org/10.1002/pssa.201200899\">https://doi.org/10.1002/pssa.201200899</a>"},"volume":210,"author":[{"first_name":"Katharina","last_name":"Brassat","full_name":"Brassat, Katharina","id":"11305"},{"first_name":"Fabian","last_name":"Assion","full_name":"Assion, Fabian"},{"first_name":"Ulrich","full_name":"Hilleringmann, Ulrich","last_name":"Hilleringmann"},{"first_name":"Jörg","last_name":"Lindner","full_name":"Lindner, Jörg","id":"20797"}],"date_updated":"2022-01-06T07:00:16Z","conference":{"location":"Warsaw (Poland)","end_date":"2012-09-21","start_date":"2012-09-17","name":"European Materials Research Society Fall Meeting 2012"},"doi":"10.1002/pssa.201200899","publication":"physica status solidi (a)","file":[{"date_updated":"2018-08-23T12:47:33Z","creator":"hclaudia","date_created":"2018-08-23T12:47:33Z","file_size":705809,"file_id":"4099","access_level":"closed","file_name":"Self-organization of nanospheres in trenches on silicon surfaces.pdf","content_type":"application/pdf","success":1,"relation":"main_file"}],"abstract":[{"lang":"eng","text":"The selective deposition and self-assembly of nanospheres from a colloidal suspension in trenches on silicon surfaces is investigated using conventional light, confocal laser scanning and scanning electron microscopy. Trenches with widths of one to several nanosphere diameters are formed on silicon surfaces by photolithography and reactive ion etching. The spreading knife convective self-assembly technique is employed to distribute the nanosphere suspension on the pre-patterned surface. It is shown that this technique is particularly useful in combination with a functionalized surface where a selfassembled molecular monolayer changes the contact angle such that sphere deposition takes place almost exclusively in the trenches. By this, lines selectively filled with a chain of beads with a length of 0.5 mm have been achieved."}],"language":[{"iso":"eng"}],"ddc":["530"],"issue":"8","year":"2013","date_created":"2018-08-23T12:45:01Z","publisher":"Wiley","title":"Self-organization of nanospheres in trenches on silicon surfaces"},{"department":[{"_id":"15"},{"_id":"286"}],"user_id":"55706","_id":"4100","language":[{"iso":"eng"}],"type":"conference","status":"public","author":[{"last_name":"Brassat","full_name":"Brassat, Katharina","id":"11305","first_name":"Katharina"},{"first_name":"Jörg","last_name":"Lindner","id":"20797","full_name":"Lindner, Jörg"}],"date_created":"2018-08-23T12:50:03Z","date_updated":"2022-01-06T07:00:17Z","conference":{"name":"Frühjahrstagung der Deutschen Physikalischen Gesellschaft","start_date":"2013-03-10","end_date":"2013-03-15","location":"Regensburg"},"title":"Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation","citation":{"ama":"Brassat K, Lindner J. Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation. In: ; 2013.","chicago":"Brassat, Katharina, and Jörg Lindner. “Selective Deposition of Nanospheres in Trenches on Silicon Surfaces by Self-Organisation,” 2013.","ieee":"K. Brassat and J. Lindner, “Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation,” presented at the Frühjahrstagung der Deutschen Physikalischen Gesellschaft, Regensburg, 2013.","mla":"Brassat, Katharina, and Jörg Lindner. <i>Selective Deposition of Nanospheres in Trenches on Silicon Surfaces by Self-Organisation</i>. 2013.","bibtex":"@inproceedings{Brassat_Lindner_2013, title={Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation}, author={Brassat, Katharina and Lindner, Jörg}, year={2013} }","short":"K. Brassat, J. Lindner, in: 2013.","apa":"Brassat, K., &#38; Lindner, J. (2013). Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation. Presented at the Frühjahrstagung der Deutschen Physikalischen Gesellschaft, Regensburg."},"year":"2013"}]
