A new Ti-precursor for low-temperature PE-ALD of titanium dioxide thin films as gas barrier layers on polymer substrates.
}}, author = {{Gebhard, M. and Mitschker, F. and Wiesing, M. and Giner, I. and Torun, B. and de los Arcos de Pedro, Maria Teresa and Awakowicz, P. and Grundmeier, G. and Devi, A.}}, issn = {{2050-7526}}, journal = {{Journal of Materials Chemistry C}}, pages = {{1057--1065}}, title = {{{An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor}}}, doi = {{10.1039/c5tc03385c}}, year = {{2016}}, } @article{22578, author = {{Wiesing, Martin and to Baben, Moritz and Schneider, Jochen M. and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}}, issn = {{0013-4686}}, journal = {{Electrochimica Acta}}, pages = {{120--128}}, title = {{{Combined Electrochemical and Electron Spectroscopic Investigations of the Surface Oxidation of TiAlN HPPMS Hard Coatings}}}, doi = {{10.1016/j.electacta.2016.05.011}}, year = {{2016}}, } @article{22579, author = {{Grundmeier, Guido and von Keudell, Achim and de los Arcos de Pedro, Maria Teresa}}, issn = {{1612-8850}}, journal = {{Plasma Processes and Polymers}}, pages = {{926--940}}, title = {{{Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces}}}, doi = {{10.1002/ppap.201500087}}, year = {{2015}}, } @article{22582, author = {{Mitschker, Felix and Dietrich, Jan and Ozkaya, Berkem and de los Arcos de Pedro, Maria Teresa and Giner, Ignacio and Awakowicz, Peter and Grundmeier, Guido}}, issn = {{1612-8850}}, journal = {{Plasma Processes and Polymers}}, pages = {{1002--1009}}, title = {{{Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films}}}, doi = {{10.1002/ppap.201500085}}, year = {{2015}}, } @article{22583, author = {{Schröder, Daniel and Burhenn, Sebastian and de los Arcos de Pedro, Maria Teresa and Schulz-von der Gathen, Volker}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Characteristics of a propagating, self-pulsing, constricted ‘γ-mode-like’ discharge}}}, doi = {{10.1088/0022-3727/48/5/055206}}, year = {{2015}}, } @article{22581, author = {{Marcak, Adrian and Corbella, Carles and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim}}, issn = {{0034-6748}}, journal = {{Review of Scientific Instruments}}, title = {{{Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor}}}, doi = {{10.1063/1.4932309}}, year = {{2015}}, } @article{22580, author = {{König, Dennis and Naujoks, Dennis and de los Arcos de Pedro, Maria Teresa and Grosse-Kreul, Simon and Ludwig, Alfred}}, issn = {{1438-1656}}, journal = {{Advanced Engineering Materials}}, pages = {{669--673}}, title = {{{X-Ray Photoelectron Spectroscopy Investigations of the Surface Reaction Layer and its Effects on the Transformation Properties of Nanoscale Ti51Ni38Cu11Shape Memory Thin Films}}}, doi = {{10.1002/adem.201400317}}, year = {{2014}}, } @article{22585, author = {{de los Arcos de Pedro, Maria Teresa and Schröder, Raphael and Gonzalvo, Yolanda Aranda and Gathen, Volker Schulz-von der and Winter, Jörg}}, issn = {{0963-0252}}, journal = {{Plasma Sources Science and Technology}}, title = {{{Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate}}}, doi = {{10.1088/0963-0252/23/5/054008}}, year = {{2014}}, } @article{22586, author = {{Eren, Baran and Marot, Laurent and Steiner, Roland and de los Arcos de Pedro, Maria Teresa and Düggelin, Marcel and Mathys, Daniel and Goldie, Kenneth N. and Olivieri, Vesna and Meyer, Ernst}}, issn = {{0009-2614}}, journal = {{Chemical Physics Letters}}, pages = {{82--87}}, title = {{{Carbon nanotube growth on AlN support: Comparison between Ni and Fe chemical states and morphology}}}, doi = {{10.1016/j.cplett.2014.06.042}}, year = {{2014}}, } @article{22587, author = {{Machura, P D and Hecimovic, A and Gallian, S and Winter, J and de los Arcos de Pedro, Maria Teresa}}, issn = {{0963-0252}}, journal = {{Plasma Sources Science and Technology}}, title = {{{Simultaneous characterization of static and induced magnetic fields in high power impulse magnetron sputtering discharges}}}, doi = {{10.1088/0963-0252/23/6/065043}}, year = {{2014}}, } @article{22588, author = {{Marinov, D and Guaitella, O and de los Arcos de Pedro, Maria Teresa and von Keudell, A and Rousseau, A}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure}}}, doi = {{10.1088/0022-3727/47/47/475204}}, year = {{2014}}, } @article{22590, author = {{Xu, Ke and Dang, Van-Son and Ney, Andreas and de los Arcos de Pedro, Maria Teresa and Devi, Anjana}}, issn = {{1533-4880}}, journal = {{Journal of Nanoscience and Nanotechnology}}, pages = {{5095--5102}}, title = {{{Nanostructured Er2O3 Thin Films Grown by Metalorganic Chemical Vapour Deposition}}}, doi = {{10.1166/jnn.2014.8848}}, year = {{2014}}, } @article{22584, author = {{Dang, Van-Son and Parala, Harish and Kim, Jin Hyun and Xu, Ke and Srinivasan, Nagendra B. and Edengeiser, Eugen and Havenith, Martina and Wieck, Andreas D. and de los Arcos de Pedro, Maria Teresa and Fischer, Roland. A. and Devi, Anjana}}, issn = {{1862-6300}}, journal = {{physica status solidi (a)}}, pages = {{416--424}}, title = {{{Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition}}}, doi = {{10.1002/pssa.201330115}}, year = {{2013}}, } @article{22589, author = {{Srinivasan, Nagendra B. and Thiede, Tobias B. and de los Arcos de Pedro, Maria Teresa and Rogalla, Detlef and Becker, Hans-Werner and Devi, Anjana and Fischer, Roland A.}}, issn = {{1862-6300}}, journal = {{physica status solidi (a)}}, pages = {{260--266}}, title = {{{MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics}}}, doi = {{10.1002/pssa.201330127}}, year = {{2013}}, } @article{22596, author = {{Xu, Ke and Chaudhuri, Ayan Roy and Parala, Harish and Schwendt, Dominik and de los Arcos de Pedro, Maria Teresa and Osten, H. Jörg and Devi, Anjana}}, issn = {{2050-7526}}, journal = {{Journal of Materials Chemistry C}}, title = {{{Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties}}}, doi = {{10.1039/c3tc30401a}}, year = {{2013}}, } @article{22593, author = {{Srinivasan, N.B. and Thiede, T.B. and de los Arcos de Pedro, Maria Teresa and Gwildies, V. and Krasnopolski, M. and Becker, H.-W. and Rogalla, D. and Devi, A. and Fischer, R.A.}}, issn = {{0257-8972}}, journal = {{Surface and Coatings Technology}}, pages = {{130--136}}, title = {{{Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors}}}, doi = {{10.1016/j.surfcoat.2013.06.024}}, year = {{2013}}, } @article{22594, author = {{Will, Andreas and de los Arcos de Pedro, Maria Teresa and Corbella, Carles and Hecimovic, Ante and Machura, Patrick D and Winter, Jörg and von Keudell, Achim}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum}}}, doi = {{10.1088/0022-3727/46/8/084009}}, year = {{2013}}, } @article{22591, author = {{Corbella, Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos de Pedro, Maria Teresa and Benedikt, Jan and von Keudell, Achim}}, issn = {{0034-6748}}, journal = {{Review of Scientific Instruments}}, title = {{{Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces}}}, doi = {{10.1063/1.4826066}}, year = {{2013}}, } @article{22595, author = {{Winter, J and Hecimovic, A and de los Arcos de Pedro, Maria Teresa and Böke, M and Schulz-von der Gathen, V}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity}}}, doi = {{10.1088/0022-3727/46/8/084007}}, year = {{2013}}, } @article{22592, author = {{Rügner, Katja and Reuter, Rüdiger and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}}, issn = {{1612-8850}}, journal = {{Plasma Processes and Polymers}}, pages = {{1061--1073}}, title = {{{Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure}}}, doi = {{10.1002/ppap.201300059}}, year = {{2013}}, }