Development of two new neodymium containing precursors and their successful implementation in the MOCVD of luminescent Nd2S3 thin films.
}}, author = {{Cwik, Stefan and Beer, Sebastian M. J. and Schmidt, Marcel and Gerhardt, Nils C. and de los Arcos de Pedro, Maria Teresa and Rogalla, Detlef and Weßing, Jana and Giner, Ignacio and Hofmann, Martin and Grundmeier, Guido and Wieck, Andreas D. and Devi, Anjana}}, issn = {{1477-9226}}, journal = {{Dalton Transactions}}, pages = {{2926--2938}}, title = {{{Luminescent Nd2S3 thin films: a new chemical vapour deposition route towards rare-earth sulphides}}}, doi = {{10.1039/c8dt04317e}}, year = {{2018}}, } @article{22542, author = {{Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}}, issn = {{1547-0091}}, journal = {{Journal of Coatings Technology and Research}}, pages = {{573--583}}, title = {{{Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD}}}, doi = {{10.1007/s11998-018-0138-4}}, year = {{2018}}, } @article{22546, author = {{Zanders, David and Ciftyurek, Engin and Hoppe, Christian and de los Arcos de Pedro, Maria Teresa and Kostka, Aleksander and Rogalla, Detlef and Grundmeier, Guido and Schierbaum, Klaus Dieter and Devi, Anjana}}, issn = {{2196-7350}}, journal = {{Advanced Materials Interfaces}}, title = {{{Validation of a Terminally Amino Functionalized Tetra‐Alkyl Sn(IV) Precursor in Metal–Organic Chemical Vapor Deposition of SnO 2 Thin Films: Study of Film Growth Characteristics, Optical, and Electrical Properties}}}, doi = {{10.1002/admi.201801540}}, year = {{2018}}, } @article{22550, author = {{Gebhard, Maximilian and Mai, Lukas and Banko, Lars and Mitschker, Felix and Hoppe, Christian and Jaritz, Montgomery and Kirchheim, Dennis and Zekorn, Christoph and de los Arcos de Pedro, Maria Teresa and Grochla, Dario and Dahlmann, Rainer and Grundmeier, Guido and Awakowicz, Peter and Ludwig, Alfred and Devi, Anjana}}, issn = {{1944-8244}}, journal = {{ACS Applied Materials & Interfaces}}, pages = {{7422--7434}}, title = {{{PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads}}}, doi = {{10.1021/acsami.7b14916}}, year = {{2018}}, } @article{22549, author = {{Gebhard, Maximilian and Mai, Lukas and Banko, Lars and Mitschker, Felix and Hoppe, Christian and Jaritz, Montgomery and Kirchheim, Dennis and Zekorn, Christoph and de los Arcos de Pedro, Maria Teresa and Grochla, Dario and Dahlmann, Rainer and Grundmeier, Guido and Awakowicz, Peter and Ludwig, Alfred and Devi, Anjana}}, issn = {{1944-8244}}, journal = {{ACS Applied Materials & Interfaces}}, pages = {{7422--7434}}, title = {{{PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads}}}, doi = {{10.1021/acsami.7b14916}}, year = {{2018}}, } @article{22551, author = {{Gebhard, Maximilian and Mai, Lukas and Banko, Lars and Mitschker, Felix and Hoppe, Christian and Jaritz, Montgomery and Kirchheim, Dennis and Zekorn, Christoph and de los Arcos de Pedro, Maria Teresa and Grochla, Dario and Dahlmann, Rainer and Grundmeier, Guido and Awakowicz, Peter and Ludwig, Alfred and Devi, Anjana}}, issn = {{1944-8244}}, journal = {{ACS Applied Materials & Interfaces}}, pages = {{7422--7434}}, title = {{{PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads}}}, doi = {{10.1021/acsami.7b14916}}, year = {{2018}}, } @article{22548, author = {{Dietrich, J. and Hoppe, C. and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}}, issn = {{0863-1042}}, journal = {{Contributions to Plasma Physics}}, pages = {{377--383}}, title = {{{Combined in situ infrared reflection absorption spectroscopy-quartz crystal microbalance investigation of the initial growth stages of plasma-deposited SiO x on polypropylene}}}, doi = {{10.1002/ctpp.201700036}}, year = {{2018}}, } @article{22547, author = {{Budde, Maik and Corbella, Carles and Große-Kreul, Simon and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido and von Keudell, Achim}}, issn = {{1612-8850}}, journal = {{Plasma Processes and Polymers}}, title = {{{Decoupling of ion- and photon-activation mechanisms in polymer surfaces exposed to low-temperature plasmas}}}, doi = {{10.1002/ppap.201700230}}, year = {{2018}}, } @article{22557, abstract = {{A new water assisted atomic layer deposition (ALD) process was developed using the yttrium tris-guanidinate precursor which resulted in device quality thin films.
}}, author = {{Mai, Lukas and Boysen, Nils and Subaşı, Ersoy and de los Arcos de Pedro, Maria Teresa and Rogalla, Detlef and Grundmeier, Guido and Bock, Claudia and Lu, Hong-Liang and Devi, Anjana}}, issn = {{2046-2069}}, journal = {{RSC Advances}}, pages = {{4987--4994}}, title = {{{Water assisted atomic layer deposition of yttrium oxide using tris(N,N′-diisopropyl-2-dimethylamido-guanidinato) yttrium(iii): process development, film characterization and functional properties}}}, doi = {{10.1039/c7ra13417g}}, year = {{2018}}, } @article{22558, author = {{Mitschker, F and Schücke, L and Hoppe, Ch and Jaritz, M and Dahlmann, R and de los Arcos de Pedro, Maria Teresa and Hopmann, Ch and Grundmeier, Guido and Awakowicz, P}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)}}}, doi = {{10.1088/1361-6463/aac0ab}}, year = {{2018}}, } @article{22559, author = {{Mitschker, F and Wißing, J and Hoppe, Ch and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido and Awakowicz, P}}, issn = {{0022-3727}}, journal = {{Journal of Physics D: Applied Physics}}, title = {{{Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET}}}, doi = {{10.1088/1361-6463/aab1dd}}, year = {{2018}}, }