---
_id: '4069'
author:
- first_name: R.M.
  full_name: Kemper, R.M.
  last_name: Kemper
- first_name: P.
  full_name: Veit, P.
  last_name: Veit
- first_name: 'C. '
  full_name: 'Mietze, C. '
  last_name: Mietze
- first_name: A.
  full_name: Dempewolf, A.
  last_name: Dempewolf
- first_name: 'T. '
  full_name: 'Wecker, T. '
  last_name: Wecker
- first_name: J.
  full_name: Christen, J.
  last_name: Christen
- first_name: D.
  full_name: As, D.
  last_name: As
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Kemper RM, Veit P, Mietze C, et al. STEM-CL investigations on the influence
    of stacking faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN
    multi-quantum wells. In: ; 2014.'
  apa: Kemper, R. M., Veit, P., Mietze, C., Dempewolf, A., Wecker, T., Christen, J.,
    … Lindner, J. (2014). STEM-CL investigations on the influence of stacking faults
    on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum
    wells. Presented at the European Materials Research Society Spring Meeting 2014,
    Lille (France).
  bibtex: '@inproceedings{Kemper_Veit_Mietze_Dempewolf_Wecker_Christen_As_Lindner_2014,
    title={STEM-CL investigations on the influence of stacking faults on the optical
    emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells}, author={Kemper,
    R.M. and Veit, P. and Mietze, C.  and Dempewolf, A. and Wecker, T.  and Christen,
    J. and As, D. and Lindner, Jörg}, year={2014} }'
  chicago: Kemper, R.M., P. Veit, C.  Mietze, A. Dempewolf, T.  Wecker, J. Christen,
    D. As, and Jörg Lindner. “STEM-CL Investigations on the Influence of Stacking
    Faults on the Optical Emission of Cubic GaN Epilayers and Cubic GaN/AlN Multi-Quantum
    Wells,” 2014.
  ieee: R. M. Kemper <i>et al.</i>, “STEM-CL investigations on the influence of stacking
    faults on the optical emission of cubic GaN epilayers and cubic GaN/AlN multi-quantum
    wells,” presented at the European Materials Research Society Spring Meeting 2014,
    Lille (France), 2014.
  mla: Kemper, R. M., et al. <i>STEM-CL Investigations on the Influence of Stacking
    Faults on the Optical Emission of Cubic GaN Epilayers and Cubic GaN/AlN Multi-Quantum
    Wells</i>. 2014.
  short: 'R.M. Kemper, P. Veit, C. Mietze, A. Dempewolf, T. Wecker, J. Christen, D.
    As, J. Lindner, in: 2014.'
conference:
  end_date: 2014-05-30
  location: Lille (France)
  name: European Materials Research Society Spring Meeting 2014
  start_date: 2014-05-26
date_created: 2018-08-22T12:26:49Z
date_updated: 2022-01-06T07:00:12Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: STEM-CL investigations on the influence of stacking faults on the optical emission
  of cubic GaN epilayers and cubic GaN/AlN multi-quantum wells
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4070'
abstract:
- lang: eng
  text: 'We report for the first time on the growth of cubic AlN/GaN multi‐quantum
    wells (MQWs) on pre‐patterned 3C‐SiC/Si (001) substrates. The sample structure
    consists of 10 periods of 2 nm c‐AlN barriers with a 4 nm c‐GaN layer in between,
    which were grown on 3C‐SiC post shaped structures by means of molecular beam epitaxy.
    Substrate patterning has been realized by electron beam lithography and a reactive
    ion etching process. The 3C‐SiC posts have a length of about 550 nm and a height
    of about 700 nm. (Scanning) transmission electron microscopy studies show that
    the morphology of the MQWs is clearly influenced by {111} stacking faults, modulating
    the local growth rate. Further, the growth at the edges of the surface pattern
    is investigated. The MQW layers cover the 90° edges by developing low‐index facets
    rather than by forming a conformal system of 90° angled layers. '
article_type: original
author:
- first_name: R. M.
  full_name: Kemper, R. M.
  last_name: Kemper
- first_name: C.
  full_name: Mietze, C.
  last_name: Mietze
- first_name: L.
  full_name: Hiller, L.
  last_name: Hiller
- first_name: T.
  full_name: Stauden, T.
  last_name: Stauden
- first_name: J.
  full_name: Pezoldt, J.
  last_name: Pezoldt
- first_name: D.
  full_name: Meertens, D.
  last_name: Meertens
- first_name: M.
  full_name: Luysberg, M.
  last_name: Luysberg
- first_name: D. J.
  full_name: As, D. J.
  last_name: As
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Kemper RM, Mietze C, Hiller L, et al. Cubic GaN/AlN multi-quantum wells grown
    on pre-patterned 3C-SiC/Si (001). <i>physica status solidi (c)</i>. 2014;11(2):265-268.
    doi:<a href="https://doi.org/10.1002/pssc.201300292">10.1002/pssc.201300292</a>
  apa: Kemper, R. M., Mietze, C., Hiller, L., Stauden, T., Pezoldt, J., Meertens,
    D., … Lindner, J. (2014). Cubic GaN/AlN multi-quantum wells grown on pre-patterned
    3C-SiC/Si (001). <i>Physica Status Solidi (C)</i>, <i>11</i>(2), 265–268. <a href="https://doi.org/10.1002/pssc.201300292">https://doi.org/10.1002/pssc.201300292</a>
  bibtex: '@article{Kemper_Mietze_Hiller_Stauden_Pezoldt_Meertens_Luysberg_As_Lindner_2014,
    title={Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001)},
    volume={11}, DOI={<a href="https://doi.org/10.1002/pssc.201300292">10.1002/pssc.201300292</a>},
    number={2}, journal={physica status solidi (c)}, publisher={Wiley}, author={Kemper,
    R. M. and Mietze, C. and Hiller, L. and Stauden, T. and Pezoldt, J. and Meertens,
    D. and Luysberg, M. and As, D. J. and Lindner, Jörg}, year={2014}, pages={265–268}
    }'
  chicago: 'Kemper, R. M., C. Mietze, L. Hiller, T. Stauden, J. Pezoldt, D. Meertens,
    M. Luysberg, D. J. As, and Jörg Lindner. “Cubic GaN/AlN Multi-Quantum Wells Grown
    on Pre-Patterned 3C-SiC/Si (001).” <i>Physica Status Solidi (C)</i> 11, no. 2
    (2014): 265–68. <a href="https://doi.org/10.1002/pssc.201300292">https://doi.org/10.1002/pssc.201300292</a>.'
  ieee: R. M. Kemper <i>et al.</i>, “Cubic GaN/AlN multi-quantum wells grown on pre-patterned
    3C-SiC/Si (001),” <i>physica status solidi (c)</i>, vol. 11, no. 2, pp. 265–268,
    2014.
  mla: Kemper, R. M., et al. “Cubic GaN/AlN Multi-Quantum Wells Grown on Pre-Patterned
    3C-SiC/Si (001).” <i>Physica Status Solidi (C)</i>, vol. 11, no. 2, Wiley, 2014,
    pp. 265–68, doi:<a href="https://doi.org/10.1002/pssc.201300292">10.1002/pssc.201300292</a>.
  short: R.M. Kemper, C. Mietze, L. Hiller, T. Stauden, J. Pezoldt, D. Meertens, M.
    Luysberg, D.J. As, J. Lindner, Physica Status Solidi (C) 11 (2014) 265–268.
date_created: 2018-08-22T12:28:15Z
date_updated: 2022-01-06T07:00:13Z
ddc:
- '530'
department:
- _id: '15'
- _id: '286'
doi: 10.1002/pssc.201300292
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-22T12:30:12Z
  date_updated: 2018-08-22T12:30:12Z
  file_id: '4071'
  file_name: Cubic GaN-AlN multi-quantum wells grown on pre-patterned 3C SiC Si 001.pdf
  file_size: 3777577
  relation: main_file
  success: 1
file_date_updated: 2018-08-22T12:30:12Z
has_accepted_license: '1'
intvolume: '        11'
issue: '2'
language:
- iso: eng
page: 265-268
publication: physica status solidi (c)
publication_identifier:
  issn:
  - 1862-6351
publication_status: published
publisher: Wiley
status: public
title: Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001)
type: journal_article
user_id: '55706'
volume: 11
year: '2014'
...
---
_id: '4072'
abstract:
- lang: eng
  text: 'This paper presents a low‐cost procedure that allows for self‐organized fabrication
    of periodically arranged, sub‐50 nm diameter, vertical‐sidewall GaAs nanopillars
    on GaAs surfaces based on nanosphere lithography, and reactive ion etching (RIE).
    Monodispersed polystyrene (PS) sphere double layers are deposited from a colloidal
    suspension on pre‐treated, hydrophilized GaAs substrates. Ni is thermally evaporated
    to act as a hard mask for subsequent RIE. Scanning electron microscopy reveals
    that the Ni nanoparticles left on the substrate after PS sphere removal have polygon‐shaped
    in‐plane cross‐sections corresponding to the shape of the double layer mask openings.
    RIE using SiCl4 at low pressure and high power density leads to the formation
    of vertical nanopillars with circular to oval cross‐sections, whose diameters
    are reduced by ∼1/3 compared to those of the Ni nanoparticles. These findings
    can be explained by plasma‐enhanced surface diffusion and sputtering processes
    during RIE. The obtained GaAs nanopillars have an average diameter of only ∼23 nm,
    exhibit an excellent verticality with a sidewall angle of 88.9 ± 0.4° and planar
    top faces, as visible in transmission electron microscopy images. '
article_type: original
author:
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Riedl T, Lindner J. Self-organized fabrication of periodic arrays of vertical,
    ultra-thin nanopillars on GaAs surfaces. <i>physica status solidi (a)</i>. 2014;211(12):2871-2877.
    doi:<a href="https://doi.org/10.1002/pssa.201431474">10.1002/pssa.201431474</a>
  apa: Riedl, T., &#38; Lindner, J. (2014). Self-organized fabrication of periodic
    arrays of vertical, ultra-thin nanopillars on GaAs surfaces. <i>Physica Status
    Solidi (A)</i>, <i>211</i>(12), 2871–2877. <a href="https://doi.org/10.1002/pssa.201431474">https://doi.org/10.1002/pssa.201431474</a>
  bibtex: '@article{Riedl_Lindner_2014, title={Self-organized fabrication of periodic
    arrays of vertical, ultra-thin nanopillars on GaAs surfaces}, volume={211}, DOI={<a
    href="https://doi.org/10.1002/pssa.201431474">10.1002/pssa.201431474</a>}, number={12},
    journal={physica status solidi (a)}, publisher={Wiley}, author={Riedl, Thomas
    and Lindner, Jörg}, year={2014}, pages={2871–2877} }'
  chicago: 'Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic
    Arrays of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” <i>Physica Status
    Solidi (A)</i> 211, no. 12 (2014): 2871–77. <a href="https://doi.org/10.1002/pssa.201431474">https://doi.org/10.1002/pssa.201431474</a>.'
  ieee: T. Riedl and J. Lindner, “Self-organized fabrication of periodic arrays of
    vertical, ultra-thin nanopillars on GaAs surfaces,” <i>physica status solidi (a)</i>,
    vol. 211, no. 12, pp. 2871–2877, 2014.
  mla: Riedl, Thomas, and Jörg Lindner. “Self-Organized Fabrication of Periodic Arrays
    of Vertical, Ultra-Thin Nanopillars on GaAs Surfaces.” <i>Physica Status Solidi
    (A)</i>, vol. 211, no. 12, Wiley, 2014, pp. 2871–77, doi:<a href="https://doi.org/10.1002/pssa.201431474">10.1002/pssa.201431474</a>.
  short: T. Riedl, J. Lindner, Physica Status Solidi (A) 211 (2014) 2871–2877.
date_created: 2018-08-22T12:31:17Z
date_updated: 2022-01-06T07:00:13Z
ddc:
- '530'
department:
- _id: '15'
- _id: '286'
doi: 10.1002/pssa.201431474
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-22T12:32:42Z
  date_updated: 2018-08-22T12:32:42Z
  file_id: '4073'
  file_name: Self-organized fabrication of periodic arrays of vertical, ultra-thin
    nanopillars on GaAs surfaces.pdf
  file_size: 989885
  relation: main_file
  success: 1
file_date_updated: 2018-08-22T12:32:42Z
has_accepted_license: '1'
intvolume: '       211'
issue: '12'
language:
- iso: eng
page: 2871-2877
publication: physica status solidi (a)
publication_identifier:
  issn:
  - 1862-6300
publication_status: published
publisher: Wiley
status: public
title: Self-organized fabrication of periodic arrays of vertical, ultra-thin nanopillars
  on GaAs surfaces
type: journal_article
user_id: '55706'
volume: 211
year: '2014'
...
---
_id: '4074'
abstract:
- lang: eng
  text: An experimental analysis of the morphology changes of hexagonally close packed
    polystyrene sphere monolayers induced by annealing in air is presented. The triangular
    interstices between each triple of spheres, which are frequently used as nanoscale
    mask openings in colloidal lithography, are observed to gradually shrink in size
    and change in shape upon annealing. Top view scanning electron microscopy images
    reveal that different stages are involved in the closure of monolayer interstices
    at annealing temperatures in the range between 110°C and 120°C. In the early stages
    shrinkage of the triangular interstices is dominated by material transport to
    and thus shortening of their corners, in the late stages interstice area reduction
    via displacement of the triangle edges becomes significant. At intermediate annealing
    times the rate of interstice area reduction displays a maximum before a stabilized
    state characterized by a rounded isosceles triangular shape forms.
article_number: mrsf13-1663-ww03-75
article_type: original
author:
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: Matthias
  full_name: Strake, Matthias
  last_name: Strake
- first_name: Werner
  full_name: Sievers, Werner
  last_name: Sievers
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Riedl T, Strake M, Sievers W, Lindner J. Thermal Modification of Nanoscale
    Mask Openings in Polystyrene Sphere Layers. <i>MRS Proceedings</i>. 2014;1663.
    doi:<a href="https://doi.org/10.1557/opl.2014.312">10.1557/opl.2014.312</a>
  apa: Riedl, T., Strake, M., Sievers, W., &#38; Lindner, J. (2014). Thermal Modification
    of Nanoscale Mask Openings in Polystyrene Sphere Layers. <i>MRS Proceedings</i>,
    <i>1663</i>. <a href="https://doi.org/10.1557/opl.2014.312">https://doi.org/10.1557/opl.2014.312</a>
  bibtex: '@article{Riedl_Strake_Sievers_Lindner_2014, title={Thermal Modification
    of Nanoscale Mask Openings in Polystyrene Sphere Layers}, volume={1663}, DOI={<a
    href="https://doi.org/10.1557/opl.2014.312">10.1557/opl.2014.312</a>}, number={mrsf13-1663-ww03-75},
    journal={MRS Proceedings}, publisher={Cambridge University Press (CUP)}, author={Riedl,
    Thomas and Strake, Matthias and Sievers, Werner and Lindner, Jörg}, year={2014}
    }'
  chicago: Riedl, Thomas, Matthias Strake, Werner Sievers, and Jörg Lindner. “Thermal
    Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers.” <i>MRS
    Proceedings</i> 1663 (2014). <a href="https://doi.org/10.1557/opl.2014.312">https://doi.org/10.1557/opl.2014.312</a>.
  ieee: T. Riedl, M. Strake, W. Sievers, and J. Lindner, “Thermal Modification of
    Nanoscale Mask Openings in Polystyrene Sphere Layers,” <i>MRS Proceedings</i>,
    vol. 1663, 2014.
  mla: Riedl, Thomas, et al. “Thermal Modification of Nanoscale Mask Openings in Polystyrene
    Sphere Layers.” <i>MRS Proceedings</i>, vol. 1663, mrsf13-1663-ww03-75, Cambridge
    University Press (CUP), 2014, doi:<a href="https://doi.org/10.1557/opl.2014.312">10.1557/opl.2014.312</a>.
  short: T. Riedl, M. Strake, W. Sievers, J. Lindner, MRS Proceedings 1663 (2014).
conference:
  end_date: 2013-12-06
  location: Boston (USA)
  name: 'MRS Fall Meeting '
  start_date: 2013-12-01
date_created: 2018-08-22T12:34:02Z
date_updated: 2022-01-06T07:00:13Z
department:
- _id: '15'
- _id: '286'
doi: 10.1557/opl.2014.312
intvolume: '      1663'
language:
- iso: eng
publication: MRS Proceedings
publication_identifier:
  issn:
  - 1946-4274
publication_status: published
publisher: Cambridge University Press (CUP)
status: public
title: Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers
type: journal_article
user_id: '55706'
volume: 1663
year: '2014'
...
---
_id: '4075'
abstract:
- lang: eng
  text: The formation of misfit dislocations is an important issue for the performance
    of heteroepitaxial micro- and optoelectronic devices. We analyze three approaches
    that quantify the stability of misfit dislocations in axial-heteroepitaxial nanowires
    with respect to applicability and predictions of critical nanowire dimensions.
    The “nanoheteroepitaxy” approach of Zubia and Hersee proves suitable for determination
    of strain partitioning in the presence of an elastic mismatch. Concerning the
    critical thickness and diameter however the descriptions of Ertekin et al. and
    Glas respectively yield more reliable results, owing to the consideration of the
    total coherent and dislocation related energies plus the residual strain energy.
    In contrast to the model of Ertekin et al., which refers to infinitely long nanowires,
    the other two mentioned approaches allow predictions of the critical thickness
    of mismatched deposits on the nanowire axial face.
author:
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Riedl T, Lindner J. Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent
    Transition in Nanoscale Axial Heterostructures. In: <i>Symposium YY – Elastic
    Strain Engineering for Unprecedented Materials Properties </i>. MRS Online Proceedings;
    2014. doi:<a href="https://doi.org/10.1557/opl.2014.325 ">10.1557/opl.2014.325
    </a>'
  apa: 'Riedl, T., &#38; Lindner, J. (2014). Comparison of Theoretical Approaches
    Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures.
    In <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties
    </i>. Boston (USA): MRS Online Proceedings. <a href="https://doi.org/10.1557/opl.2014.325
    ">https://doi.org/10.1557/opl.2014.325 </a>'
  bibtex: '@inproceedings{Riedl_Lindner_2014, title={Comparison of Theoretical Approaches
    Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures},
    DOI={<a href="https://doi.org/10.1557/opl.2014.325 ">10.1557/opl.2014.325 </a>},
    number={1664}, booktitle={Symposium YY – Elastic Strain Engineering for Unprecedented
    Materials Properties }, publisher={MRS Online Proceedings}, author={Riedl, Thomas
    and Lindner, Jörg}, year={2014} }'
  chicago: Riedl, Thomas, and Jörg Lindner. “Comparison of Theoretical Approaches
    Predicting the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures.”
    In <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties
    </i>. MRS Online Proceedings, 2014. <a href="https://doi.org/10.1557/opl.2014.325
    ">https://doi.org/10.1557/opl.2014.325 </a>.
  ieee: T. Riedl and J. Lindner, “Comparison of Theoretical Approaches Predicting
    the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures,” in
    <i>Symposium YY – Elastic Strain Engineering for Unprecedented Materials Properties
    </i>, Boston (USA), 2014, no. 1664.
  mla: Riedl, Thomas, and Jörg Lindner. “Comparison of Theoretical Approaches Predicting
    the Coherent-Semicoherent Transition in Nanoscale Axial Heterostructures.” <i>Symposium
    YY – Elastic Strain Engineering for Unprecedented Materials Properties </i>, no.
    1664, MRS Online Proceedings, 2014, doi:<a href="https://doi.org/10.1557/opl.2014.325
    ">10.1557/opl.2014.325 </a>.
  short: 'T. Riedl, J. Lindner, in: Symposium YY – Elastic Strain Engineering for
    Unprecedented Materials Properties , MRS Online Proceedings, 2014.'
conference:
  end_date: 2013-12-06
  location: Boston (USA)
  name: MRS Materials Research Society Fall Meeting 2014
  start_date: 2013-12-01
date_created: 2018-08-22T12:43:39Z
date_updated: 2022-01-06T07:00:13Z
department:
- _id: '15'
- _id: '286'
doi: '10.1557/opl.2014.325 '
issue: '1664'
language:
- iso: eng
publication: 'Symposium YY – Elastic Strain Engineering for Unprecedented Materials
  Properties '
publication_status: published
publisher: MRS Online Proceedings
status: public
title: Comparison of Theoretical Approaches Predicting the Coherent-Semicoherent Transition
  in Nanoscale Axial Heterostructures
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4076'
abstract:
- lang: eng
  text: 'This contribution analyzes the reliability of strain and rotation variation
    determination using cross‐ as well as phase‐only correlation of experimental wide‐angle
    electron backscatter diffraction (EBSD) patterns. For both rotation and three‐point
    bending the resulting displacement gradient tensor components are examined in
    terms of magnitude and statistical scatter as a function of various correlation
    procedure parameters and signal‐to‐noise ratio. It is shown that on the one hand
    the Fourier filter width has a major impact on the strain results. At higher noise
    level a smaller filter width has to be applied for obtaining maximum precision.
    On the other hand, the influence of the degree of overlap of the regions of interest
    positioned in the patterns is less important. For both rotation and bending experiments
    the cross‐correlation variant yields a smaller standard deviation with respect
    to phase‐only correlation, in particular for elevated noise level. The difference
    is attributed to the stronger propagation of noise effects in the course of phase‐only
    correlation function calculation and fitting. In the rotation experiment a standard
    deviation of ∼1.0 × 10^−4, averaged over the displacement gradient tensor components,
    and a rotational precision of ∼1.5 × 10^−4 rad have been achieved by using optimized
    evaluation settings. '
article_type: original
author:
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: H.
  full_name: Wendrock, H.
  last_name: Wendrock
citation:
  ama: Riedl T, Wendrock H. Reliability of high-resolution electron backscatter diffraction
    determination of strain and rotation variations using phase-only and cross correlation.
    <i>Crystal Research and Technology</i>. 2014;49(4):195-203. doi:<a href="https://doi.org/10.1002/crat.201300217">10.1002/crat.201300217</a>
  apa: Riedl, T., &#38; Wendrock, H. (2014). Reliability of high-resolution electron
    backscatter diffraction determination of strain and rotation variations using
    phase-only and cross correlation. <i>Crystal Research and Technology</i>, <i>49</i>(4),
    195–203. <a href="https://doi.org/10.1002/crat.201300217">https://doi.org/10.1002/crat.201300217</a>
  bibtex: '@article{Riedl_Wendrock_2014, title={Reliability of high-resolution electron
    backscatter diffraction determination of strain and rotation variations using
    phase-only and cross correlation}, volume={49}, DOI={<a href="https://doi.org/10.1002/crat.201300217">10.1002/crat.201300217</a>},
    number={4}, journal={Crystal Research and Technology}, publisher={Wiley}, author={Riedl,
    Thomas and Wendrock, H.}, year={2014}, pages={195–203} }'
  chicago: 'Riedl, Thomas, and H. Wendrock. “Reliability of High-Resolution Electron
    Backscatter Diffraction Determination of Strain and Rotation Variations Using
    Phase-Only and Cross Correlation.” <i>Crystal Research and Technology</i> 49,
    no. 4 (2014): 195–203. <a href="https://doi.org/10.1002/crat.201300217">https://doi.org/10.1002/crat.201300217</a>.'
  ieee: T. Riedl and H. Wendrock, “Reliability of high-resolution electron backscatter
    diffraction determination of strain and rotation variations using phase-only and
    cross correlation,” <i>Crystal Research and Technology</i>, vol. 49, no. 4, pp.
    195–203, 2014.
  mla: Riedl, Thomas, and H. Wendrock. “Reliability of High-Resolution Electron Backscatter
    Diffraction Determination of Strain and Rotation Variations Using Phase-Only and
    Cross Correlation.” <i>Crystal Research and Technology</i>, vol. 49, no. 4, Wiley,
    2014, pp. 195–203, doi:<a href="https://doi.org/10.1002/crat.201300217">10.1002/crat.201300217</a>.
  short: T. Riedl, H. Wendrock, Crystal Research and Technology 49 (2014) 195–203.
date_created: 2018-08-22T12:45:23Z
date_updated: 2022-01-06T07:00:13Z
ddc:
- '530'
department:
- _id: '15'
- _id: '286'
doi: 10.1002/crat.201300217
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-22T12:45:58Z
  date_updated: 2018-08-22T12:45:58Z
  file_id: '4077'
  file_name: Reliability of high-resolution electron backscatter diffraction determination
    of strain an totation variations using phase-only and cross correlation.pdf
  file_size: 1377255
  relation: main_file
  success: 1
file_date_updated: 2018-08-22T12:45:58Z
has_accepted_license: '1'
intvolume: '        49'
issue: '4'
language:
- iso: eng
page: 195-203
publication: Crystal Research and Technology
publication_identifier:
  issn:
  - 0232-1300
publication_status: published
publisher: Wiley
status: public
title: Reliability of high-resolution electron backscatter diffraction determination
  of strain and rotation variations using phase-only and cross correlation
type: journal_article
user_id: '55706'
volume: 49
year: '2014'
...
---
_id: '4078'
author:
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: A.
  full_name: Kovács, A.
  last_name: Kovács
- first_name: D.
  full_name: Meertens, D.
  last_name: Meertens
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Riedl T, Kovács A, Meertens D, Lindner J. Structure and surface chemistry
    analysis of ultra-thin reactive ion etched GaAs (111) nanopillars. In: ; 2014.'
  apa: Riedl, T., Kovács, A., Meertens, D., &#38; Lindner, J. (2014). Structure and
    surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars.
    Presented at the European Materials Research Society Fall Meeting 2014, Warsaw
    (Poland).
  bibtex: '@inproceedings{Riedl_Kovács_Meertens_Lindner_2014, title={Structure and
    surface chemistry analysis of ultra-thin reactive ion etched GaAs (111) nanopillars},
    author={Riedl, Thomas and Kovács, A. and Meertens, D. and Lindner, Jörg}, year={2014}
    }'
  chicago: Riedl, Thomas, A. Kovács, D. Meertens, and Jörg Lindner. “Structure and
    Surface Chemistry Analysis of Ultra-Thin Reactive Ion Etched GaAs (111) Nanopillars,”
    2014.
  ieee: T. Riedl, A. Kovács, D. Meertens, and J. Lindner, “Structure and surface chemistry
    analysis of ultra-thin reactive ion etched GaAs (111) nanopillars,” presented
    at the European Materials Research Society Fall Meeting 2014, Warsaw (Poland),
    2014.
  mla: Riedl, Thomas, et al. <i>Structure and Surface Chemistry Analysis of Ultra-Thin
    Reactive Ion Etched GaAs (111) Nanopillars</i>. 2014.
  short: 'T. Riedl, A. Kovács, D. Meertens, J. Lindner, in: 2014.'
conference:
  end_date: 2014-09-19
  location: Warsaw (Poland)
  name: European Materials Research Society Fall Meeting 2014
  start_date: 2014-09-15
date_created: 2018-08-22T12:48:37Z
date_updated: 2022-01-06T07:00:13Z
department:
- _id: '286'
language:
- iso: eng
status: public
title: Structure and surface chemistry analysis of ultra-thin reactive ion etched
  GaAs (111) nanopillars
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4079'
author:
- first_name: M.
  full_name: Rüsing, M.
  last_name: Rüsing
- first_name: L.
  full_name: Merten, L.
  last_name: Merten
- first_name: P.
  full_name: Reinert, P.
  last_name: Reinert
- first_name: D.
  full_name: Rogalla, D.
  last_name: Rogalla
- first_name: H.-W.
  full_name: Becker, H.-W.
  last_name: Becker
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Rüsing M, Merten L, Reinert P, Rogalla D, Becker H-W, Lindner J. RBS of gold-coated
    polystyrene nanospheres. In: ; 2014.'
  apa: Rüsing, M., Merten, L., Reinert, P., Rogalla, D., Becker, H.-W., &#38; Lindner,
    J. (2014). RBS of gold-coated polystyrene nanospheres. Presented at the Workshop
    Ionenstrahlen und Nanostrukturen, Paderborn.
  bibtex: '@inproceedings{Rüsing_Merten_Reinert_Rogalla_Becker_Lindner_2014, title={RBS
    of gold-coated polystyrene nanospheres}, author={Rüsing, M. and Merten, L. and
    Reinert, P. and Rogalla, D. and Becker, H.-W. and Lindner, Jörg}, year={2014}
    }'
  chicago: Rüsing, M., L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, and Jörg Lindner.
    “RBS of Gold-Coated Polystyrene Nanospheres,” 2014.
  ieee: M. Rüsing, L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, and J. Lindner,
    “RBS of gold-coated polystyrene nanospheres,” presented at the Workshop Ionenstrahlen
    und Nanostrukturen, Paderborn, 2014.
  mla: Rüsing, M., et al. <i>RBS of Gold-Coated Polystyrene Nanospheres</i>. 2014.
  short: 'M. Rüsing, L. Merten, P. Reinert, D. Rogalla, H.-W. Becker, J. Lindner,
    in: 2014.'
conference:
  end_date: 2014-07-22
  location: Paderborn
  name: Workshop Ionenstrahlen und Nanostrukturen
  start_date: 2014-07-20
date_created: 2018-08-22T12:50:31Z
date_updated: 2022-01-06T07:00:13Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: RBS of gold-coated polystyrene nanospheres
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4080'
author:
- first_name: Jörg
  full_name: Lindner, Jörg
  last_name: Lindner
citation:
  ama: 'Lindner J. TEM investigations on the nanoheteroepitaxy of semiconductors .
    In: ; 2014.'
  apa: Lindner, J. (2014). TEM investigations on the nanoheteroepitaxy of semiconductors
    . Presented at the 16th Scientific Seminar of the Dresden Fraunhofer Cluster Nanoanalysis
    in collaboration with the Dresden Center for Nanoanalysis, Dresden (Germany).
  bibtex: '@inproceedings{Lindner_2014, title={TEM investigations on the nanoheteroepitaxy
    of semiconductors }, author={Lindner, Jörg}, year={2014} }'
  chicago: Lindner, Jörg. “TEM Investigations on the Nanoheteroepitaxy of Semiconductors
    ,” 2014.
  ieee: J. Lindner, “TEM investigations on the nanoheteroepitaxy of semiconductors
    ,” presented at the 16th Scientific Seminar of the Dresden Fraunhofer Cluster
    Nanoanalysis in collaboration with the Dresden Center for Nanoanalysis, Dresden
    (Germany), 2014.
  mla: Lindner, Jörg. <i>TEM Investigations on the Nanoheteroepitaxy of Semiconductors
    </i>. 2014.
  short: 'J. Lindner, in: 2014.'
conference:
  end_date: 2014-12-04
  location: Dresden (Germany)
  name: 16th Scientific Seminar of the Dresden Fraunhofer Cluster Nanoanalysis in
    collaboration with the Dresden Center for Nanoanalysis
  start_date: 2014-12-04
date_created: 2018-08-22T12:51:57Z
date_updated: 2022-01-06T07:00:14Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: 'TEM investigations on the nanoheteroepitaxy of semiconductors '
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4082'
author:
- first_name: Jörg
  full_name: Lindner, Jörg
  last_name: Lindner
citation:
  ama: 'Lindner J. Microscopic studies of plasmonic nanostructures II. In: ; 2014.'
  apa: Lindner, J. (2014). Microscopic studies of plasmonic nanostructures II. Presented
    at the Europhotonics Spring School 2014, Porquerolles (France).
  bibtex: '@inproceedings{Lindner_2014, title={Microscopic studies of plasmonic nanostructures
    II}, author={Lindner, Jörg}, year={2014} }'
  chicago: Lindner, Jörg. “Microscopic Studies of Plasmonic Nanostructures II,” 2014.
  ieee: J. Lindner, “Microscopic studies of plasmonic nanostructures II,” presented
    at the Europhotonics Spring School 2014, Porquerolles (France), 2014.
  mla: Lindner, Jörg. <i>Microscopic Studies of Plasmonic Nanostructures II</i>. 2014.
  short: 'J. Lindner, in: 2014.'
conference:
  end_date: 2014-04-03
  location: Porquerolles (France)
  name: Europhotonics Spring School 2014
  start_date: 2014-03-31
date_created: 2018-08-22T12:53:13Z
date_updated: 2022-01-06T07:00:14Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: Microscopic studies of plasmonic nanostructures II
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4083'
author:
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Lindner J. Nanostrukturierte Oberflächen, nicht nur zum Spass. In: ; 2014.'
  apa: Lindner, J. (2014). Nanostrukturierte Oberflächen, nicht nur zum Spass. Presented
    at the Kolloquium der Friedrich-Schiller-Universität, Jena (Germany).
  bibtex: '@inproceedings{Lindner_2014, title={Nanostrukturierte Oberflächen, nicht
    nur zum Spass}, author={Lindner, Jörg}, year={2014} }'
  chicago: Lindner, Jörg. “Nanostrukturierte Oberflächen, Nicht Nur Zum Spass,” 2014.
  ieee: J. Lindner, “Nanostrukturierte Oberflächen, nicht nur zum Spass,” presented
    at the Kolloquium der Friedrich-Schiller-Universität, Jena (Germany), 2014.
  mla: Lindner, Jörg. <i>Nanostrukturierte Oberflächen, Nicht Nur Zum Spass</i>. 2014.
  short: 'J. Lindner, in: 2014.'
conference:
  end_date: 2014-04-25
  location: Jena (Germany)
  name: Kolloquium der Friedrich-Schiller-Universität
  start_date: 2014-04-25
date_created: 2018-08-22T12:54:24Z
date_updated: 2022-01-06T07:00:14Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: Nanostrukturierte Oberflächen, nicht nur zum Spass
type: conference
user_id: '55706'
year: '2014'
...
---
_id: '4064'
abstract:
- lang: eng
  text: "An anisotropic etching process for mesa structures using fluorinated plasma
    with\r\nhydrogen addition was developed in an electron cyclotron resonance setup.
    The evolution of the\r\nmesa morphology was studied in dependence on the gas composition,
    the applied bias and the\r\npressure. The achieved side wall slope approached
    90° with a negligible trenching. The aspect ratios\r\nof the fabricated structure
    in the developed residue free ECR plasma etching process were between\r\n5 and
    20."
article_type: original
author:
- first_name: Lars
  full_name: Hiller, Lars
  last_name: Hiller
- first_name: Thomas
  full_name: Stauden, Thomas
  last_name: Stauden
- first_name: Ricarda M.
  full_name: Kemper, Ricarda M.
  last_name: Kemper
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
- first_name: Donat J.
  full_name: As, Donat J.
  id: '14'
  last_name: As
  orcid: 0000-0003-1121-3565
- first_name: Jörg
  full_name: Pezoldt, Jörg
  last_name: Pezoldt
citation:
  ama: Hiller L, Stauden T, Kemper RM, Lindner J, As DJ, Pezoldt J. Hydrogen Effects
    in ECR-Etching of 3C-SiC(100) Mesa Structures. <i>Materials Science Forum</i>.
    2014;778-780:730-733. doi:<a href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">10.4028/www.scientific.net/msf.778-780.730</a>
  apa: Hiller, L., Stauden, T., Kemper, R. M., Lindner, J., As, D. J., &#38; Pezoldt,
    J. (2014). Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. <i>Materials
    Science Forum</i>, <i>778–780</i>, 730–733. <a href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">https://doi.org/10.4028/www.scientific.net/msf.778-780.730</a>
  bibtex: '@article{Hiller_Stauden_Kemper_Lindner_As_Pezoldt_2014, title={Hydrogen
    Effects in ECR-Etching of 3C-SiC(100) Mesa Structures}, volume={778–780}, DOI={<a
    href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">10.4028/www.scientific.net/msf.778-780.730</a>},
    journal={Materials Science Forum}, publisher={Trans Tech Publications}, author={Hiller,
    Lars and Stauden, Thomas and Kemper, Ricarda M. and Lindner, Jörg and As, Donat
    J. and Pezoldt, Jörg}, year={2014}, pages={730–733} }'
  chicago: 'Hiller, Lars, Thomas Stauden, Ricarda M. Kemper, Jörg Lindner, Donat J.
    As, and Jörg Pezoldt. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.”
    <i>Materials Science Forum</i> 778–780 (2014): 730–33. <a href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">https://doi.org/10.4028/www.scientific.net/msf.778-780.730</a>.'
  ieee: 'L. Hiller, T. Stauden, R. M. Kemper, J. Lindner, D. J. As, and J. Pezoldt,
    “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures,” <i>Materials
    Science Forum</i>, vol. 778–780, pp. 730–733, 2014, doi: <a href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">10.4028/www.scientific.net/msf.778-780.730</a>.'
  mla: Hiller, Lars, et al. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.”
    <i>Materials Science Forum</i>, vol. 778–780, Trans Tech Publications, 2014, pp.
    730–33, doi:<a href="https://doi.org/10.4028/www.scientific.net/msf.778-780.730">10.4028/www.scientific.net/msf.778-780.730</a>.
  short: L. Hiller, T. Stauden, R.M. Kemper, J. Lindner, D.J. As, J. Pezoldt, Materials
    Science Forum 778–780 (2014) 730–733.
date_created: 2018-08-22T12:17:30Z
date_updated: 2023-10-09T09:08:12Z
ddc:
- '530'
department:
- _id: '286'
doi: 10.4028/www.scientific.net/msf.778-780.730
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-22T12:20:24Z
  date_updated: 2018-08-22T12:20:24Z
  file_id: '4065'
  file_name: 2014_Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.pdf
  file_size: 882721
  relation: main_file
  success: 1
file_date_updated: 2018-08-22T12:20:24Z
has_accepted_license: '1'
language:
- iso: eng
page: 730-733
publication: Materials Science Forum
publication_identifier:
  issn:
  - 1662-9752
publication_status: published
publisher: Trans Tech Publications
status: public
title: Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures
type: journal_article
user_id: '14931'
volume: 778-780
year: '2014'
...
---
_id: '4094'
author:
- first_name: R.M.
  full_name: Kemper, R.M.
  last_name: Kemper
- first_name: Donald
  full_name: As, Donald
  last_name: As
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Kemper RM, As D, Lindner J. Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates.
    In: Li H, Wu J, Wang ZM, eds. <i>Silicon-Based Nanomaterials</i>. Vol 187. Springer
    Series in Materials Science; 2013:381-405.'
  apa: Kemper, R. M., As, D., &#38; Lindner, J. (2013). Cubic GaN on nano-patterned
    3C-SiC/Si (001) substrates. In H. Li, J. Wu, &#38; Z. M. Wang (Eds.), <i>Silicon-based
    Nanomaterials</i> (Vol. 187, pp. 381–405). Springer Series in Materials Science.
  bibtex: '@inbook{Kemper_As_Lindner_2013, title={Cubic GaN on nano-patterned 3C-SiC/Si
    (001) substrates}, volume={187}, booktitle={Silicon-based Nanomaterials}, publisher={Springer
    Series in Materials Science}, author={Kemper, R.M. and As, Donald and Lindner,
    Jörg}, editor={Li, H. and Wu, J. and Wang, Z.M.Editors}, year={2013}, pages={381–405}
    }'
  chicago: Kemper, R.M., Donald As, and Jörg Lindner. “Cubic GaN on Nano-Patterned
    3C-SiC/Si (001) Substrates.” In <i>Silicon-Based Nanomaterials</i>, edited by
    H. Li, J. Wu, and Z.M. Wang, 187:381–405. Springer Series in Materials Science,
    2013.
  ieee: R. M. Kemper, D. As, and J. Lindner, “Cubic GaN on nano-patterned 3C-SiC/Si
    (001) substrates,” in <i>Silicon-based Nanomaterials</i>, vol. 187, H. Li, J.
    Wu, and Z. M. Wang, Eds. Springer Series in Materials Science, 2013, pp. 381–405.
  mla: Kemper, R. M., et al. “Cubic GaN on Nano-Patterned 3C-SiC/Si (001) Substrates.”
    <i>Silicon-Based Nanomaterials</i>, edited by H. Li et al., vol. 187, Springer
    Series in Materials Science, 2013, pp. 381–405.
  short: 'R.M. Kemper, D. As, J. Lindner, in: H. Li, J. Wu, Z.M. Wang (Eds.), Silicon-Based
    Nanomaterials, Springer Series in Materials Science, 2013, pp. 381–405.'
date_created: 2018-08-23T12:34:23Z
date_updated: 2022-01-06T07:00:15Z
department:
- _id: '15'
- _id: '286'
editor:
- first_name: H.
  full_name: Li, H.
  last_name: Li
- first_name: J.
  full_name: Wu, J.
  last_name: Wu
- first_name: Z.M.
  full_name: Wang, Z.M.
  last_name: Wang
intvolume: '       187'
language:
- iso: eng
page: 381-405
publication: Silicon-based Nanomaterials
publication_identifier:
  eisbn:
  - '978-1-4614-8169-0 '
  isbn:
  - 978-1-4614-8168-3
publication_status: published
publisher: Springer Series in Materials Science
status: public
title: Cubic GaN on nano-patterned 3C-SiC/Si (001) substrates
type: book_chapter
user_id: '55706'
volume: 187
year: '2013'
...
---
_id: '4097'
author:
- first_name: Katharina
  full_name: Brassat, Katharina
  id: '11305'
  last_name: Brassat
- first_name: Johannes
  full_name: Pauly, Johannes
  last_name: Pauly
- first_name: R.
  full_name: Kemper, R.
  last_name: Kemper
- first_name: M.
  full_name: Strake, M.
  last_name: Strake
- first_name: Christoph
  full_name: Brodehl, Christoph
  id: '30380'
  last_name: Brodehl
- first_name: Werner
  full_name: Sievers, Werner
  last_name: Sievers
- first_name: Thomas
  full_name: Riedl, Thomas
  id: '36950'
  last_name: Riedl
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Brassat K, Pauly J, Kemper R, et al. Colloidal nano-lithography: state-of-the-art.
    In: ; 2013.'
  apa: 'Brassat, K., Pauly, J., Kemper, R., Strake, M., Brodehl, C., Sievers, W.,
    … Lindner, J. (2013). Colloidal nano-lithography: state-of-the-art. Presented
    at the 46th Biennial Meeting of the German Colloid Society “Morphological Transformations
    and Responses in Colloidal Systems,” Paderborn.'
  bibtex: '@inproceedings{Brassat_Pauly_Kemper_Strake_Brodehl_Sievers_Riedl_Lindner_2013,
    title={Colloidal nano-lithography: state-of-the-art}, author={Brassat, Katharina
    and Pauly, Johannes and Kemper, R. and Strake, M. and Brodehl, Christoph and Sievers,
    Werner and Riedl, Thomas and Lindner, Jörg}, year={2013} }'
  chicago: 'Brassat, Katharina, Johannes Pauly, R. Kemper, M. Strake, Christoph Brodehl,
    Werner Sievers, Thomas Riedl, and Jörg Lindner. “Colloidal Nano-Lithography: State-of-the-Art,”
    2013.'
  ieee: 'K. Brassat <i>et al.</i>, “Colloidal nano-lithography: state-of-the-art,”
    presented at the 46th Biennial Meeting of the German Colloid Society “Morphological
    Transformations and Responses in Colloidal Systems,” Paderborn, 2013.'
  mla: 'Brassat, Katharina, et al. <i>Colloidal Nano-Lithography: State-of-the-Art</i>.
    2013.'
  short: 'K. Brassat, J. Pauly, R. Kemper, M. Strake, C. Brodehl, W. Sievers, T. Riedl,
    J. Lindner, in: 2013.'
conference:
  end_date: 2013-09-25
  location: Paderborn
  name: 46th Biennial Meeting of the German Colloid Society "Morphological Transformations
    and Responses in Colloidal Systems"
  start_date: 2013-09-23
date_created: 2018-08-23T12:43:31Z
date_updated: 2022-01-06T07:00:16Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: 'Colloidal nano-lithography: state-of-the-art'
type: conference
user_id: '55706'
year: '2013'
...
---
_id: '4098'
abstract:
- lang: eng
  text: The selective deposition and self-assembly of nanospheres from a colloidal
    suspension in trenches on silicon surfaces is investigated using conventional
    light, confocal laser scanning and scanning electron microscopy. Trenches with
    widths of one to several nanosphere diameters are formed on silicon surfaces by
    photolithography and reactive ion etching. The spreading knife convective self-assembly
    technique is employed to distribute the nanosphere suspension on the pre-patterned
    surface. It is shown that this technique is particularly useful in combination
    with a functionalized surface where a selfassembled molecular monolayer changes
    the contact angle such that sphere deposition takes place almost exclusively in
    the trenches. By this, lines selectively filled with a chain of beads with a length
    of 0.5 mm have been achieved.
article_type: original
author:
- first_name: Katharina
  full_name: Brassat, Katharina
  id: '11305'
  last_name: Brassat
- first_name: Fabian
  full_name: Assion, Fabian
  last_name: Assion
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  last_name: Hilleringmann
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Brassat K, Assion F, Hilleringmann U, Lindner J. Self-organization of nanospheres
    in trenches on silicon surfaces. <i>physica status solidi (a)</i>. 2013;210(8):1485-1489.
    doi:<a href="https://doi.org/10.1002/pssa.201200899">10.1002/pssa.201200899</a>
  apa: Brassat, K., Assion, F., Hilleringmann, U., &#38; Lindner, J. (2013). Self-organization
    of nanospheres in trenches on silicon surfaces. <i>Physica Status Solidi (A)</i>,
    <i>210</i>(8), 1485–1489. <a href="https://doi.org/10.1002/pssa.201200899">https://doi.org/10.1002/pssa.201200899</a>
  bibtex: '@article{Brassat_Assion_Hilleringmann_Lindner_2013, title={Self-organization
    of nanospheres in trenches on silicon surfaces}, volume={210}, DOI={<a href="https://doi.org/10.1002/pssa.201200899">10.1002/pssa.201200899</a>},
    number={8}, journal={physica status solidi (a)}, publisher={Wiley}, author={Brassat,
    Katharina and Assion, Fabian and Hilleringmann, Ulrich and Lindner, Jörg}, year={2013},
    pages={1485–1489} }'
  chicago: 'Brassat, Katharina, Fabian Assion, Ulrich Hilleringmann, and Jörg Lindner.
    “Self-Organization of Nanospheres in Trenches on Silicon Surfaces.” <i>Physica
    Status Solidi (A)</i> 210, no. 8 (2013): 1485–89. <a href="https://doi.org/10.1002/pssa.201200899">https://doi.org/10.1002/pssa.201200899</a>.'
  ieee: K. Brassat, F. Assion, U. Hilleringmann, and J. Lindner, “Self-organization
    of nanospheres in trenches on silicon surfaces,” <i>physica status solidi (a)</i>,
    vol. 210, no. 8, pp. 1485–1489, 2013.
  mla: Brassat, Katharina, et al. “Self-Organization of Nanospheres in Trenches on
    Silicon Surfaces.” <i>Physica Status Solidi (A)</i>, vol. 210, no. 8, Wiley, 2013,
    pp. 1485–89, doi:<a href="https://doi.org/10.1002/pssa.201200899">10.1002/pssa.201200899</a>.
  short: K. Brassat, F. Assion, U. Hilleringmann, J. Lindner, Physica Status Solidi
    (A) 210 (2013) 1485–1489.
conference:
  end_date: 2012-09-21
  location: Warsaw (Poland)
  name: European Materials Research Society Fall Meeting 2012
  start_date: 2012-09-17
date_created: 2018-08-23T12:45:01Z
date_updated: 2022-01-06T07:00:16Z
ddc:
- '530'
department:
- _id: '15'
- _id: '286'
- _id: '230'
- _id: '59'
doi: 10.1002/pssa.201200899
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-23T12:47:33Z
  date_updated: 2018-08-23T12:47:33Z
  file_id: '4099'
  file_name: Self-organization of nanospheres in trenches on silicon surfaces.pdf
  file_size: 705809
  relation: main_file
  success: 1
file_date_updated: 2018-08-23T12:47:33Z
has_accepted_license: '1'
intvolume: '       210'
issue: '8'
language:
- iso: eng
page: 1485-1489
publication: physica status solidi (a)
publication_identifier:
  issn:
  - 1862-6300
publication_status: published
publisher: Wiley
status: public
title: Self-organization of nanospheres in trenches on silicon surfaces
type: journal_article
user_id: '55706'
volume: 210
year: '2013'
...
---
_id: '4100'
author:
- first_name: Katharina
  full_name: Brassat, Katharina
  id: '11305'
  last_name: Brassat
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Brassat K, Lindner J. Selective deposition of nanospheres in trenches on silicon
    surfaces by self-organisation. In: ; 2013.'
  apa: Brassat, K., &#38; Lindner, J. (2013). Selective deposition of nanospheres
    in trenches on silicon surfaces by self-organisation. Presented at the Frühjahrstagung
    der Deutschen Physikalischen Gesellschaft, Regensburg.
  bibtex: '@inproceedings{Brassat_Lindner_2013, title={Selective deposition of nanospheres
    in trenches on silicon surfaces by self-organisation}, author={Brassat, Katharina
    and Lindner, Jörg}, year={2013} }'
  chicago: Brassat, Katharina, and Jörg Lindner. “Selective Deposition of Nanospheres
    in Trenches on Silicon Surfaces by Self-Organisation,” 2013.
  ieee: K. Brassat and J. Lindner, “Selective deposition of nanospheres in trenches
    on silicon surfaces by self-organisation,” presented at the Frühjahrstagung der
    Deutschen Physikalischen Gesellschaft, Regensburg, 2013.
  mla: Brassat, Katharina, and Jörg Lindner. <i>Selective Deposition of Nanospheres
    in Trenches on Silicon Surfaces by Self-Organisation</i>. 2013.
  short: 'K. Brassat, J. Lindner, in: 2013.'
conference:
  end_date: 2013-03-15
  location: Regensburg
  name: Frühjahrstagung der Deutschen Physikalischen Gesellschaft
  start_date: 2013-03-10
date_created: 2018-08-23T12:50:03Z
date_updated: 2022-01-06T07:00:17Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: Selective deposition of nanospheres in trenches on silicon surfaces by self-organisation
type: conference
user_id: '55706'
year: '2013'
...
---
_id: '4101'
author:
- first_name: Christoph
  full_name: Brodehl, Christoph
  id: '30380'
  last_name: Brodehl
- first_name: Siegmund
  full_name: Greulich-Weber, Siegmund
  last_name: Greulich-Weber
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Brodehl C, Greulich-Weber S, Lindner J. Tailored structures produced via nanosphere
    lithography. In: ; 2013.'
  apa: Brodehl, C., Greulich-Weber, S., &#38; Lindner, J. (2013). Tailored structures
    produced via nanosphere lithography. Presented at the Graduate School 1464 on
    Micro- and Nanostructures in Optoelectronics and Photonics, Paderborn.
  bibtex: '@inproceedings{Brodehl_Greulich-Weber_Lindner_2013, title={Tailored structures
    produced via nanosphere lithography}, author={Brodehl, Christoph and Greulich-Weber,
    Siegmund and Lindner, Jörg}, year={2013} }'
  chicago: Brodehl, Christoph, Siegmund Greulich-Weber, and Jörg Lindner. “Tailored
    Structures Produced via Nanosphere Lithography,” 2013.
  ieee: C. Brodehl, S. Greulich-Weber, and J. Lindner, “Tailored structures produced
    via nanosphere lithography,” presented at the Graduate School 1464 on Micro- and
    Nanostructures in Optoelectronics and Photonics, Paderborn, 2013.
  mla: Brodehl, Christoph, et al. <i>Tailored Structures Produced via Nanosphere Lithography</i>.
    2013.
  short: 'C. Brodehl, S. Greulich-Weber, J. Lindner, in: 2013.'
conference:
  end_date: 2013-11-26
  location: Paderborn
  name: Graduate School 1464 on Micro- and Nanostructures in Optoelectronics and Photonics
  start_date: 2013-11-25
date_created: 2018-08-23T12:52:05Z
date_updated: 2022-01-06T07:00:17Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: Tailored structures produced via nanosphere lithography
type: conference
user_id: '55706'
year: '2013'
...
---
_id: '4103'
author:
- first_name: M.
  full_name: Dogan, M.
  last_name: Dogan
- first_name: R.M.
  full_name: Kemper, R.M.
  last_name: Kemper
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: 'Dogan M, Kemper RM, Lindner J. Dewetting and Redistribution of an Au Catalyst
    on Nanopatterned 3C-SiC/Si (001) Surfaces. In: ; 2013.'
  apa: Dogan, M., Kemper, R. M., &#38; Lindner, J. (2013). Dewetting and Redistribution
    of an Au Catalyst on Nanopatterned 3C-SiC/Si (001) Surfaces. Presented at the
    MRS Fall Meeting 2013, Boston.
  bibtex: '@inproceedings{Dogan_Kemper_Lindner_2013, title={Dewetting and Redistribution
    of an Au Catalyst on Nanopatterned 3C-SiC/Si (001) Surfaces}, author={Dogan, M.
    and Kemper, R.M. and Lindner, Jörg}, year={2013} }'
  chicago: Dogan, M., R.M. Kemper, and Jörg Lindner. “Dewetting and Redistribution
    of an Au Catalyst on Nanopatterned 3C-SiC/Si (001) Surfaces,” 2013.
  ieee: M. Dogan, R. M. Kemper, and J. Lindner, “Dewetting and Redistribution of an
    Au Catalyst on Nanopatterned 3C-SiC/Si (001) Surfaces,” presented at the MRS Fall
    Meeting 2013, Boston, 2013.
  mla: Dogan, M., et al. <i>Dewetting and Redistribution of an Au Catalyst on Nanopatterned
    3C-SiC/Si (001) Surfaces</i>. 2013.
  short: 'M. Dogan, R.M. Kemper, J. Lindner, in: 2013.'
conference:
  end_date: 2013-12-06
  location: Boston
  name: MRS Fall Meeting 2013
  start_date: 2013-12-01
date_created: 2018-08-23T12:57:43Z
date_updated: 2022-01-06T07:00:17Z
department:
- _id: '15'
- _id: '286'
language:
- iso: eng
status: public
title: Dewetting and Redistribution of an Au Catalyst on Nanopatterned 3C-SiC/Si (001)
  Surfaces
type: conference
user_id: '55706'
year: '2013'
...
---
_id: '4106'
author:
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
- first_name: R.M.
  full_name: Kemper, R.M.
  last_name: Kemper
- first_name: Donald
  full_name: As, Donald
  last_name: As
- first_name: D.
  full_name: Meeertens, D.
  last_name: Meeertens
- first_name: A.
  full_name: Kovács, A.
  last_name: Kovács
- first_name: M.
  full_name: Luysberg, M.
  last_name: Luysberg
- first_name: K.
  full_name: Tillmann, K.
  last_name: Tillmann
citation:
  ama: 'Lindner J, Kemper RM, As D, et al. Characterization of cubic GaN/AlN multi-quantum
    wells using state-of-the-art analytical STEM. In: ; 2013:188-189.'
  apa: Lindner, J., Kemper, R. M., As, D., Meeertens, D., Kovács, A., Luysberg, M.,
    &#38; Tillmann, K. (2013). Characterization of cubic GaN/AlN multi-quantum wells
    using state-of-the-art analytical STEM (pp. 188–189). Presented at the Proceedings
    of the Microscopy Conference MC2013, Regensburg.
  bibtex: '@inproceedings{Lindner_Kemper_As_Meeertens_Kovács_Luysberg_Tillmann_2013,
    title={Characterization of cubic GaN/AlN multi-quantum wells using state-of-the-art
    analytical STEM}, author={Lindner, Jörg and Kemper, R.M. and As, Donald and Meeertens,
    D. and Kovács, A. and Luysberg, M. and Tillmann, K.}, year={2013}, pages={188–189}
    }'
  chicago: Lindner, Jörg, R.M. Kemper, Donald As, D. Meeertens, A. Kovács, M. Luysberg,
    and K. Tillmann. “Characterization of Cubic GaN/AlN Multi-Quantum Wells Using
    State-of-the-Art Analytical STEM,” 188–89, 2013.
  ieee: J. Lindner <i>et al.</i>, “Characterization of cubic GaN/AlN multi-quantum
    wells using state-of-the-art analytical STEM,” presented at the Proceedings of
    the Microscopy Conference MC2013, Regensburg, 2013, pp. 188–189.
  mla: Lindner, Jörg, et al. <i>Characterization of Cubic GaN/AlN Multi-Quantum Wells
    Using State-of-the-Art Analytical STEM</i>. 2013, pp. 188–89.
  short: 'J. Lindner, R.M. Kemper, D. As, D. Meeertens, A. Kovács, M. Luysberg, K.
    Tillmann, in: 2013, pp. 188–189.'
conference:
  end_date: 2013-08-30
  location: Regensburg
  name: Proceedings of the Microscopy Conference MC2013
  start_date: 2013-08-25
date_created: 2018-08-23T13:06:02Z
date_updated: 2022-01-06T07:00:18Z
department:
- _id: '15'
- _id: '286'
page: 188-189
status: public
title: Characterization of cubic GaN/AlN multi-quantum wells using state-of-the-art
  analytical STEM
type: conference
user_id: '55706'
year: '2013'
...
---
_id: '4107'
article_type: original
author:
- first_name: Jörg
  full_name: Lindner, Jörg
  id: '20797'
  last_name: Lindner
citation:
  ama: Lindner J. Nanosphere lithography for device fabrication. <i>SPIE Newsroom</i>.
    2013. doi:<a href="https://doi.org/10.1117/2.1201310.005154">10.1117/2.1201310.005154</a>
  apa: Lindner, J. (2013). Nanosphere lithography for device fabrication. <i>SPIE
    Newsroom</i>. <a href="https://doi.org/10.1117/2.1201310.005154">https://doi.org/10.1117/2.1201310.005154</a>
  bibtex: '@article{Lindner_2013, title={Nanosphere lithography for device fabrication},
    DOI={<a href="https://doi.org/10.1117/2.1201310.005154">10.1117/2.1201310.005154</a>},
    journal={SPIE Newsroom}, publisher={SPIE-Intl Soc Optical Eng}, author={Lindner,
    Jörg}, year={2013} }'
  chicago: Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” <i>SPIE
    Newsroom</i>, 2013. <a href="https://doi.org/10.1117/2.1201310.005154">https://doi.org/10.1117/2.1201310.005154</a>.
  ieee: J. Lindner, “Nanosphere lithography for device fabrication,” <i>SPIE Newsroom</i>,
    2013.
  mla: Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” <i>SPIE Newsroom</i>,
    SPIE-Intl Soc Optical Eng, 2013, doi:<a href="https://doi.org/10.1117/2.1201310.005154">10.1117/2.1201310.005154</a>.
  short: J. Lindner, SPIE Newsroom (2013).
date_created: 2018-08-23T13:07:06Z
date_updated: 2022-01-06T07:00:18Z
ddc:
- '530'
department:
- _id: '15'
- _id: '286'
doi: 10.1117/2.1201310.005154
file:
- access_level: closed
  content_type: application/pdf
  creator: hclaudia
  date_created: 2018-08-23T13:09:31Z
  date_updated: 2018-08-23T13:09:31Z
  file_id: '4108'
  file_name: Nanosphere lithography for device fabrication.pdf
  file_size: 466277
  relation: main_file
  success: 1
file_date_updated: 2018-08-23T13:09:31Z
has_accepted_license: '1'
publication: SPIE Newsroom
publication_identifier:
  issn:
  - 1818-2259
publication_status: published
publisher: SPIE-Intl Soc Optical Eng
status: public
title: Nanosphere lithography for device fabrication
type: journal_article
user_id: '55706'
year: '2013'
...
