---
_id: '22588'
article_number: '475204'
author:
- first_name: D
  full_name: Marinov, D
  last_name: Marinov
- first_name: O
  full_name: Guaitella, O
  last_name: Guaitella
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: A
  full_name: von Keudell, A
  last_name: von Keudell
- first_name: A
  full_name: Rousseau, A
  last_name: Rousseau
citation:
  ama: 'Marinov D, Guaitella O, de los Arcos de Pedro MT, von Keudell A, Rousseau
    A. Adsorption and reactivity of nitrogen atoms on silica surface under plasma
    exposure. <i>Journal of Physics D: Applied Physics</i>. Published online 2014.
    doi:<a href="https://doi.org/10.1088/0022-3727/47/47/475204">10.1088/0022-3727/47/47/475204</a>'
  apa: 'Marinov, D., Guaitella, O., de los Arcos de Pedro, M. T., von Keudell, A.,
    &#38; Rousseau, A. (2014). Adsorption and reactivity of nitrogen atoms on silica
    surface under plasma exposure. <i>Journal of Physics D: Applied Physics</i>, Article
    475204. <a href="https://doi.org/10.1088/0022-3727/47/47/475204">https://doi.org/10.1088/0022-3727/47/47/475204</a>'
  bibtex: '@article{Marinov_Guaitella_de los Arcos de Pedro_von Keudell_Rousseau_2014,
    title={Adsorption and reactivity of nitrogen atoms on silica surface under plasma
    exposure}, DOI={<a href="https://doi.org/10.1088/0022-3727/47/47/475204">10.1088/0022-3727/47/47/475204</a>},
    number={475204}, journal={Journal of Physics D: Applied Physics}, author={Marinov,
    D and Guaitella, O and de los Arcos de Pedro, Maria Teresa and von Keudell, A
    and Rousseau, A}, year={2014} }'
  chicago: 'Marinov, D, O Guaitella, Maria Teresa de los Arcos de Pedro, A von Keudell,
    and A Rousseau. “Adsorption and Reactivity of Nitrogen Atoms on Silica Surface
    under Plasma Exposure.” <i>Journal of Physics D: Applied Physics</i>, 2014. <a
    href="https://doi.org/10.1088/0022-3727/47/47/475204">https://doi.org/10.1088/0022-3727/47/47/475204</a>.'
  ieee: 'D. Marinov, O. Guaitella, M. T. de los Arcos de Pedro, A. von Keudell, and
    A. Rousseau, “Adsorption and reactivity of nitrogen atoms on silica surface under
    plasma exposure,” <i>Journal of Physics D: Applied Physics</i>, Art. no. 475204,
    2014, doi: <a href="https://doi.org/10.1088/0022-3727/47/47/475204">10.1088/0022-3727/47/47/475204</a>.'
  mla: 'Marinov, D., et al. “Adsorption and Reactivity of Nitrogen Atoms on Silica
    Surface under Plasma Exposure.” <i>Journal of Physics D: Applied Physics</i>,
    475204, 2014, doi:<a href="https://doi.org/10.1088/0022-3727/47/47/475204">10.1088/0022-3727/47/47/475204</a>.'
  short: 'D. Marinov, O. Guaitella, M.T. de los Arcos de Pedro, A. von Keudell, A.
    Rousseau, Journal of Physics D: Applied Physics (2014).'
date_created: 2021-07-07T11:11:00Z
date_updated: 2023-01-24T08:21:18Z
department:
- _id: '302'
doi: 10.1088/0022-3727/47/47/475204
extern: '1'
language:
- iso: eng
publication: 'Journal of Physics D: Applied Physics'
publication_identifier:
  issn:
  - 0022-3727
  - 1361-6463
publication_status: published
status: public
title: Adsorption and reactivity of nitrogen atoms on silica surface under plasma
  exposure
type: journal_article
user_id: '54556'
year: '2014'
...
---
_id: '22590'
author:
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Van-Son
  full_name: Dang, Van-Son
  last_name: Dang
- first_name: Andreas
  full_name: Ney, Andreas
  last_name: Ney
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: Xu K, Dang V-S, Ney A, de los Arcos de Pedro MT, Devi A. Nanostructured Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62;
    Thin Films Grown by Metalorganic Chemical Vapour Deposition. <i>Journal of Nanoscience
    and Nanotechnology</i>. Published online 2014:5095-5102. doi:<a href="https://doi.org/10.1166/jnn.2014.8848">10.1166/jnn.2014.8848</a>
  apa: Xu, K., Dang, V.-S., Ney, A., de los Arcos de Pedro, M. T., &#38; Devi, A.
    (2014). Nanostructured Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62;
    Thin Films Grown by Metalorganic Chemical Vapour Deposition. <i>Journal of Nanoscience
    and Nanotechnology</i>, 5095–5102. <a href="https://doi.org/10.1166/jnn.2014.8848">https://doi.org/10.1166/jnn.2014.8848</a>
  bibtex: '@article{Xu_Dang_Ney_de los Arcos de Pedro_Devi_2014, title={Nanostructured
    Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62; Thin Films Grown by
    Metalorganic Chemical Vapour Deposition}, DOI={<a href="https://doi.org/10.1166/jnn.2014.8848">10.1166/jnn.2014.8848</a>},
    journal={Journal of Nanoscience and Nanotechnology}, author={Xu, Ke and Dang,
    Van-Son and Ney, Andreas and de los Arcos de Pedro, Maria Teresa and Devi, Anjana},
    year={2014}, pages={5095–5102} }'
  chicago: Xu, Ke, Van-Son Dang, Andreas Ney, Maria Teresa de los Arcos de Pedro,
    and Anjana Devi. “Nanostructured Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62;
    Thin Films Grown by Metalorganic Chemical Vapour Deposition.” <i>Journal of Nanoscience
    and Nanotechnology</i>, 2014, 5095–5102. <a href="https://doi.org/10.1166/jnn.2014.8848">https://doi.org/10.1166/jnn.2014.8848</a>.
  ieee: 'K. Xu, V.-S. Dang, A. Ney, M. T. de los Arcos de Pedro, and A. Devi, “Nanostructured
    Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62; Thin Films Grown by
    Metalorganic Chemical Vapour Deposition,” <i>Journal of Nanoscience and Nanotechnology</i>,
    pp. 5095–5102, 2014, doi: <a href="https://doi.org/10.1166/jnn.2014.8848">10.1166/jnn.2014.8848</a>.'
  mla: Xu, Ke, et al. “Nanostructured Er&#60;SUB&#62;2&#60;/SUB&#62;O&#60;SUB&#62;3&#60;/SUB&#62;
    Thin Films Grown by Metalorganic Chemical Vapour Deposition.” <i>Journal of Nanoscience
    and Nanotechnology</i>, 2014, pp. 5095–102, doi:<a href="https://doi.org/10.1166/jnn.2014.8848">10.1166/jnn.2014.8848</a>.
  short: K. Xu, V.-S. Dang, A. Ney, M.T. de los Arcos de Pedro, A. Devi, Journal of
    Nanoscience and Nanotechnology (2014) 5095–5102.
date_created: 2021-07-07T11:11:37Z
date_updated: 2023-01-24T08:21:36Z
department:
- _id: '302'
doi: 10.1166/jnn.2014.8848
extern: '1'
language:
- iso: eng
page: 5095-5102
publication: Journal of Nanoscience and Nanotechnology
publication_identifier:
  issn:
  - 1533-4880
  - 1533-4899
publication_status: published
status: public
title: Nanostructured Er<SUB>2</SUB>O<SUB>3</SUB> Thin Films Grown by Metalorganic
  Chemical Vapour Deposition
type: journal_article
user_id: '54556'
year: '2014'
...
---
_id: '20945'
abstract:
- lang: eng
  text: Calcium-Silicate-Hydrates (C-S-H) are the main binding phases in most concrete
    which is the primarily used composite construction material in the world. However,
    a big lack is cleaving between the actual knowledge about C-S-H, compared to what
    could be reached using state-of-the-art technologies of modern research. In this
    article, the formation of a C-S-H phase on a native oxide covered silicon wafer
    is investigated by means of in-situ attenuated total reflection infrared (ATR-IR)
    and ex-situ surface-enhanced Raman spectroscopy (SERS). The total thickness of
    the C-S-H phase is determined by X-ray photoelectron spectroscopy (XPS) to be
    3 nm. The formation appears to be reversible depending on the environment pH value
    and can be performed at room temperature. Based on density functional theory (DFT)
    calculations, it is shown that the C-S-H phase in the presence of water will change
    its chemical composition in order to reach the thermodynamic ground state of the
    system. This change is achieved by a metal-proton exchange reaction. The stoichiometry
    of these metal-proton exchange reactions is nearly independent of the environment
    pH value. Electrokinetic measurements yield isoelectric points of 2.0 and 2.6
    for the native oxide covered silicon wafer (SiO2) and the C-S-H phase. This is
    consistent with a predominance of Si-O sites at the C-S-H/water interface. (C)
    2013 Elsevier B. V. All rights reserved.
author:
- first_name: Christoph
  full_name: Ebbert, Christoph
  id: '7266'
  last_name: Ebbert
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
- first_name: Nadine
  full_name: Buitkamp, Nadine
  id: '1449'
  last_name: Buitkamp
- first_name: Alexander
  full_name: Kroeger, Alexander
  last_name: Kroeger
- first_name: Florian
  full_name: Messerschmidt, Florian
  last_name: Messerschmidt
- first_name: Peter
  full_name: Thissen, Peter
  last_name: Thissen
citation:
  ama: Ebbert C, Grundmeier G, Buitkamp N, Kroeger A, Messerschmidt F, Thissen P.
    Toward a microscopic understanding of the calcium-silicate-hydrates/water interface.
    <i>APPLIED SURFACE SCIENCE</i>. 2014;290:207-214. doi:<a href="https://doi.org/10.1016/j.apsusc.2013.11.045">10.1016/j.apsusc.2013.11.045</a>
  apa: Ebbert, C., Grundmeier, G., Buitkamp, N., Kroeger, A., Messerschmidt, F., &#38;
    Thissen, P. (2014). Toward a microscopic understanding of the calcium-silicate-hydrates/water
    interface. <i>APPLIED SURFACE SCIENCE</i>, <i>290</i>, 207–214. <a href="https://doi.org/10.1016/j.apsusc.2013.11.045">https://doi.org/10.1016/j.apsusc.2013.11.045</a>
  bibtex: '@article{Ebbert_Grundmeier_Buitkamp_Kroeger_Messerschmidt_Thissen_2014,
    title={Toward a microscopic understanding of the calcium-silicate-hydrates/water
    interface}, volume={290}, DOI={<a href="https://doi.org/10.1016/j.apsusc.2013.11.045">10.1016/j.apsusc.2013.11.045</a>},
    journal={APPLIED SURFACE SCIENCE}, author={Ebbert, Christoph and Grundmeier, Guido
    and Buitkamp, Nadine and Kroeger, Alexander and Messerschmidt, Florian and Thissen,
    Peter}, year={2014}, pages={207–214} }'
  chicago: 'Ebbert, Christoph, Guido Grundmeier, Nadine Buitkamp, Alexander Kroeger,
    Florian Messerschmidt, and Peter Thissen. “Toward a Microscopic Understanding
    of the Calcium-Silicate-Hydrates/Water Interface.” <i>APPLIED SURFACE SCIENCE</i>
    290 (2014): 207–14. <a href="https://doi.org/10.1016/j.apsusc.2013.11.045">https://doi.org/10.1016/j.apsusc.2013.11.045</a>.'
  ieee: 'C. Ebbert, G. Grundmeier, N. Buitkamp, A. Kroeger, F. Messerschmidt, and
    P. Thissen, “Toward a microscopic understanding of the calcium-silicate-hydrates/water
    interface,” <i>APPLIED SURFACE SCIENCE</i>, vol. 290, pp. 207–214, 2014, doi:
    <a href="https://doi.org/10.1016/j.apsusc.2013.11.045">10.1016/j.apsusc.2013.11.045</a>.'
  mla: Ebbert, Christoph, et al. “Toward a Microscopic Understanding of the Calcium-Silicate-Hydrates/Water
    Interface.” <i>APPLIED SURFACE SCIENCE</i>, vol. 290, 2014, pp. 207–14, doi:<a
    href="https://doi.org/10.1016/j.apsusc.2013.11.045">10.1016/j.apsusc.2013.11.045</a>.
  short: C. Ebbert, G. Grundmeier, N. Buitkamp, A. Kroeger, F. Messerschmidt, P. Thissen,
    APPLIED SURFACE SCIENCE 290 (2014) 207–214.
date_created: 2021-01-13T10:12:51Z
date_updated: 2025-11-18T12:05:39Z
department:
- _id: '35'
- _id: '302'
- _id: '321'
doi: 10.1016/j.apsusc.2013.11.045
external_id:
  isi:
  - '000329060100032'
intvolume: '       290'
isi: '1'
language:
- iso: eng
page: 207-214
publication: APPLIED SURFACE SCIENCE
publication_identifier:
  eissn:
  - 1873-5584
  issn:
  - 0169-4332
publication_status: published
quality_controlled: '1'
status: public
title: Toward a microscopic understanding of the calcium-silicate-hydrates/water interface
type: journal_article
user_id: '7266'
volume: 290
year: '2014'
...
---
_id: '20946'
abstract:
- lang: eng
  text: In the current work, we study the silver ion release potential and the water
    uptake through a SiOxCyHz-polymer which is grown from the precursor hexamethyldisiloxane
    (HMDSO) in radiofrequency (RF) plasma. These layers were deposited on top of two
    dimensional (2D) ensembles of silver nanoparticles (AgNPs) with nominal thickness
    of 2 nm on a 20 nm RF-sputtered polytetrafluoroethylene (PTFE) thin film. The
    composition of the plasma-polymerized HMDSO barriers was varied by changing the
    oxygen flow during the polymerization process and their thickness was varied as
    well. Morphology and optical properties of the nanocomposites were investigated
    using transmission electron microscopy (TEM) and UV-Visible spectroscopy (UV-Vis),
    respectively. The concentration of the silver ions released from the nanocomposites
    after immersion in water for several time intervals was measured using inductively
    coupled plasma mass spectrometry (ICP-MS). Contact angle analysis and electrochemical
    impedance spectroscopy (EIS) measurements were also performed and results show
    a strong dependence of the coatings properties and their water uptake on the oxygen
    content in the coating films and their thickness. Plasma polymerization with increasing
    the oxygen flow leads to the formation of more hydrophilic thin films with a higher
    Ag ion release potential. Increasing the thickness of the coatings reduced the
    amount of the released ions and the rate of the release process was slowed down.
    This indicates that by tailoring the structure and the thickness of the plasma-polymerized
    coating films, one can tune the silver ion release properties of Ag/polymer nanocomposites.
article_number: '2080'
author:
- first_name: N.
  full_name: Alissawi, N.
  last_name: Alissawi
- first_name: T.
  full_name: Peter, T.
  last_name: Peter
- first_name: T.
  full_name: Strunskus, T.
  last_name: Strunskus
- first_name: Christoph
  full_name: Ebbert, Christoph
  id: '7266'
  last_name: Ebbert
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
- first_name: F.
  full_name: Faupel, F.
  last_name: Faupel
citation:
  ama: Alissawi N, Peter T, Strunskus T, Ebbert C, Grundmeier G, Faupel F. Plasma-polymerized
    HMDSO coatings to adjust the silver ion release properties of Ag/polymer nanocomposites.
    <i>JOURNAL OF NANOPARTICLE RESEARCH</i>. 2013;15(11). doi:<a href="https://doi.org/10.1007/s11051-013-2080-9">10.1007/s11051-013-2080-9</a>
  apa: Alissawi, N., Peter, T., Strunskus, T., Ebbert, C., Grundmeier, G., &#38; Faupel,
    F. (2013). Plasma-polymerized HMDSO coatings to adjust the silver ion release
    properties of Ag/polymer nanocomposites. <i>JOURNAL OF NANOPARTICLE RESEARCH</i>,
    <i>15</i>(11). <a href="https://doi.org/10.1007/s11051-013-2080-9">https://doi.org/10.1007/s11051-013-2080-9</a>
  bibtex: '@article{Alissawi_Peter_Strunskus_Ebbert_Grundmeier_Faupel_2013, title={Plasma-polymerized
    HMDSO coatings to adjust the silver ion release properties of Ag/polymer nanocomposites},
    volume={15}, DOI={<a href="https://doi.org/10.1007/s11051-013-2080-9">10.1007/s11051-013-2080-9</a>},
    number={112080}, journal={JOURNAL OF NANOPARTICLE RESEARCH}, author={Alissawi,
    N. and Peter, T. and Strunskus, T. and Ebbert, Christoph and Grundmeier, Guido
    and Faupel, F.}, year={2013} }'
  chicago: Alissawi, N., T. Peter, T. Strunskus, Christoph Ebbert, Guido Grundmeier,
    and F. Faupel. “Plasma-Polymerized HMDSO Coatings to Adjust the Silver Ion Release
    Properties of Ag/Polymer Nanocomposites.” <i>JOURNAL OF NANOPARTICLE RESEARCH</i>
    15, no. 11 (2013). <a href="https://doi.org/10.1007/s11051-013-2080-9">https://doi.org/10.1007/s11051-013-2080-9</a>.
  ieee: N. Alissawi, T. Peter, T. Strunskus, C. Ebbert, G. Grundmeier, and F. Faupel,
    “Plasma-polymerized HMDSO coatings to adjust the silver ion release properties
    of Ag/polymer nanocomposites,” <i>JOURNAL OF NANOPARTICLE RESEARCH</i>, vol. 15,
    no. 11, 2013.
  mla: Alissawi, N., et al. “Plasma-Polymerized HMDSO Coatings to Adjust the Silver
    Ion Release Properties of Ag/Polymer Nanocomposites.” <i>JOURNAL OF NANOPARTICLE
    RESEARCH</i>, vol. 15, no. 11, 2080, 2013, doi:<a href="https://doi.org/10.1007/s11051-013-2080-9">10.1007/s11051-013-2080-9</a>.
  short: N. Alissawi, T. Peter, T. Strunskus, C. Ebbert, G. Grundmeier, F. Faupel,
    JOURNAL OF NANOPARTICLE RESEARCH 15 (2013).
date_created: 2021-01-13T10:12:52Z
date_updated: 2022-01-06T06:54:41Z
department:
- _id: '35'
- _id: '302'
- _id: '321'
doi: 10.1007/s11051-013-2080-9
external_id:
  isi:
  - '000326054400001'
intvolume: '        15'
isi: '1'
issue: '11'
language:
- iso: eng
publication: JOURNAL OF NANOPARTICLE RESEARCH
publication_identifier:
  eissn:
  - 1572-896X
  issn:
  - 1388-0764
publication_status: published
quality_controlled: '1'
status: public
title: Plasma-polymerized HMDSO coatings to adjust the silver ion release properties
  of Ag/polymer nanocomposites
type: journal_article
user_id: '7266'
volume: 15
year: '2013'
...
---
_id: '22584'
author:
- first_name: Van-Son
  full_name: Dang, Van-Son
  last_name: Dang
- first_name: Harish
  full_name: Parala, Harish
  last_name: Parala
- first_name: Jin Hyun
  full_name: Kim, Jin Hyun
  last_name: Kim
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Nagendra B.
  full_name: Srinivasan, Nagendra B.
  last_name: Srinivasan
- first_name: Eugen
  full_name: Edengeiser, Eugen
  last_name: Edengeiser
- first_name: Martina
  full_name: Havenith, Martina
  last_name: Havenith
- first_name: Andreas D.
  full_name: Wieck, Andreas D.
  last_name: Wieck
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Roland. A.
  full_name: Fischer, Roland. A.
  last_name: Fischer
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: Dang V-S, Parala H, Kim JH, et al. Electrical and optical properties of TiO2thin
    films prepared by plasma-enhanced atomic layer deposition. <i>physica status solidi
    (a)</i>. Published online 2013:416-424. doi:<a href="https://doi.org/10.1002/pssa.201330115">10.1002/pssa.201330115</a>
  apa: Dang, V.-S., Parala, H., Kim, J. H., Xu, K., Srinivasan, N. B., Edengeiser,
    E., Havenith, M., Wieck, A. D., de los Arcos de Pedro, M. T., Fischer, Roland.
    A., &#38; Devi, A. (2013). Electrical and optical properties of TiO2thin films
    prepared by plasma-enhanced atomic layer deposition. <i>Physica Status Solidi
    (a)</i>, 416–424. <a href="https://doi.org/10.1002/pssa.201330115">https://doi.org/10.1002/pssa.201330115</a>
  bibtex: '@article{Dang_Parala_Kim_Xu_Srinivasan_Edengeiser_Havenith_Wieck_de los
    Arcos de Pedro_Fischer_et al._2013, title={Electrical and optical properties of
    TiO2thin films prepared by plasma-enhanced atomic layer deposition}, DOI={<a href="https://doi.org/10.1002/pssa.201330115">10.1002/pssa.201330115</a>},
    journal={physica status solidi (a)}, author={Dang, Van-Son and Parala, Harish
    and Kim, Jin Hyun and Xu, Ke and Srinivasan, Nagendra B. and Edengeiser, Eugen
    and Havenith, Martina and Wieck, Andreas D. and de los Arcos de Pedro, Maria Teresa
    and Fischer, Roland. A. and et al.}, year={2013}, pages={416–424} }'
  chicago: Dang, Van-Son, Harish Parala, Jin Hyun Kim, Ke Xu, Nagendra B. Srinivasan,
    Eugen Edengeiser, Martina Havenith, et al. “Electrical and Optical Properties
    of TiO2thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition.” <i>Physica
    Status Solidi (a)</i>, 2013, 416–24. <a href="https://doi.org/10.1002/pssa.201330115">https://doi.org/10.1002/pssa.201330115</a>.
  ieee: 'V.-S. Dang <i>et al.</i>, “Electrical and optical properties of TiO2thin
    films prepared by plasma-enhanced atomic layer deposition,” <i>physica status
    solidi (a)</i>, pp. 416–424, 2013, doi: <a href="https://doi.org/10.1002/pssa.201330115">10.1002/pssa.201330115</a>.'
  mla: Dang, Van-Son, et al. “Electrical and Optical Properties of TiO2thin Films
    Prepared by Plasma-Enhanced Atomic Layer Deposition.” <i>Physica Status Solidi
    (a)</i>, 2013, pp. 416–24, doi:<a href="https://doi.org/10.1002/pssa.201330115">10.1002/pssa.201330115</a>.
  short: V.-S. Dang, H. Parala, J.H. Kim, K. Xu, N.B. Srinivasan, E. Edengeiser, M.
    Havenith, A.D. Wieck, M.T. de los Arcos de Pedro, Roland.A. Fischer, A. Devi,
    Physica Status Solidi (a) (2013) 416–424.
date_created: 2021-07-07T11:09:32Z
date_updated: 2023-01-24T08:21:54Z
department:
- _id: '302'
doi: 10.1002/pssa.201330115
extern: '1'
language:
- iso: eng
page: 416-424
publication: physica status solidi (a)
publication_identifier:
  issn:
  - 1862-6300
publication_status: published
status: public
title: Electrical and optical properties of TiO2thin films prepared by plasma-enhanced
  atomic layer deposition
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22589'
author:
- first_name: Nagendra B.
  full_name: Srinivasan, Nagendra B.
  last_name: Srinivasan
- first_name: Tobias B.
  full_name: Thiede, Tobias B.
  last_name: Thiede
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Detlef
  full_name: Rogalla, Detlef
  last_name: Rogalla
- first_name: Hans-Werner
  full_name: Becker, Hans-Werner
  last_name: Becker
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
- first_name: Roland A.
  full_name: Fischer, Roland A.
  last_name: Fischer
citation:
  ama: 'Srinivasan NB, Thiede TB, de los Arcos de Pedro MT, et al. MOCVD of tungsten
    nitride thin films: Comparison of precursor performance and film characteristics.
    <i>physica status solidi (a)</i>. Published online 2013:260-266. doi:<a href="https://doi.org/10.1002/pssa.201330127">10.1002/pssa.201330127</a>'
  apa: 'Srinivasan, N. B., Thiede, T. B., de los Arcos de Pedro, M. T., Rogalla, D.,
    Becker, H.-W., Devi, A., &#38; Fischer, R. A. (2013). MOCVD of tungsten nitride
    thin films: Comparison of precursor performance and film characteristics. <i>Physica
    Status Solidi (a)</i>, 260–266. <a href="https://doi.org/10.1002/pssa.201330127">https://doi.org/10.1002/pssa.201330127</a>'
  bibtex: '@article{Srinivasan_Thiede_de los Arcos de Pedro_Rogalla_Becker_Devi_Fischer_2013,
    title={MOCVD of tungsten nitride thin films: Comparison of precursor performance
    and film characteristics}, DOI={<a href="https://doi.org/10.1002/pssa.201330127">10.1002/pssa.201330127</a>},
    journal={physica status solidi (a)}, author={Srinivasan, Nagendra B. and Thiede,
    Tobias B. and de los Arcos de Pedro, Maria Teresa and Rogalla, Detlef and Becker,
    Hans-Werner and Devi, Anjana and Fischer, Roland A.}, year={2013}, pages={260–266}
    }'
  chicago: 'Srinivasan, Nagendra B., Tobias B. Thiede, Maria Teresa de los Arcos de
    Pedro, Detlef Rogalla, Hans-Werner Becker, Anjana Devi, and Roland A. Fischer.
    “MOCVD of Tungsten Nitride Thin Films: Comparison of Precursor Performance and
    Film Characteristics.” <i>Physica Status Solidi (a)</i>, 2013, 260–66. <a href="https://doi.org/10.1002/pssa.201330127">https://doi.org/10.1002/pssa.201330127</a>.'
  ieee: 'N. B. Srinivasan <i>et al.</i>, “MOCVD of tungsten nitride thin films: Comparison
    of precursor performance and film characteristics,” <i>physica status solidi (a)</i>,
    pp. 260–266, 2013, doi: <a href="https://doi.org/10.1002/pssa.201330127">10.1002/pssa.201330127</a>.'
  mla: 'Srinivasan, Nagendra B., et al. “MOCVD of Tungsten Nitride Thin Films: Comparison
    of Precursor Performance and Film Characteristics.” <i>Physica Status Solidi (a)</i>,
    2013, pp. 260–66, doi:<a href="https://doi.org/10.1002/pssa.201330127">10.1002/pssa.201330127</a>.'
  short: N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, D. Rogalla, H.-W.
    Becker, A. Devi, R.A. Fischer, Physica Status Solidi (a) (2013) 260–266.
date_created: 2021-07-07T11:11:23Z
date_updated: 2023-01-24T08:22:27Z
department:
- _id: '302'
doi: 10.1002/pssa.201330127
extern: '1'
language:
- iso: eng
page: 260-266
publication: physica status solidi (a)
publication_identifier:
  issn:
  - 1862-6300
publication_status: published
status: public
title: 'MOCVD of tungsten nitride thin films: Comparison of precursor performance
  and film characteristics'
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22596'
article_number: '3939'
author:
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Ayan Roy
  full_name: Chaudhuri, Ayan Roy
  last_name: Chaudhuri
- first_name: Harish
  full_name: Parala, Harish
  last_name: Parala
- first_name: Dominik
  full_name: Schwendt, Dominik
  last_name: Schwendt
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: H. Jörg
  full_name: Osten, H. Jörg
  last_name: Osten
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: 'Xu K, Chaudhuri AR, Parala H, et al. Atomic layer deposition of Er2O3 thin
    films from Er tris-guanidinate and water: process optimization, film analysis
    and electrical properties. <i>Journal of Materials Chemistry C</i>. Published
    online 2013. doi:<a href="https://doi.org/10.1039/c3tc30401a">10.1039/c3tc30401a</a>'
  apa: 'Xu, K., Chaudhuri, A. R., Parala, H., Schwendt, D., de los Arcos de Pedro,
    M. T., Osten, H. J., &#38; Devi, A. (2013). Atomic layer deposition of Er2O3 thin
    films from Er tris-guanidinate and water: process optimization, film analysis
    and electrical properties. <i>Journal of Materials Chemistry C</i>, Article 3939.
    <a href="https://doi.org/10.1039/c3tc30401a">https://doi.org/10.1039/c3tc30401a</a>'
  bibtex: '@article{Xu_Chaudhuri_Parala_Schwendt_de los Arcos de Pedro_Osten_Devi_2013,
    title={Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and
    water: process optimization, film analysis and electrical properties}, DOI={<a
    href="https://doi.org/10.1039/c3tc30401a">10.1039/c3tc30401a</a>}, number={3939},
    journal={Journal of Materials Chemistry C}, author={Xu, Ke and Chaudhuri, Ayan
    Roy and Parala, Harish and Schwendt, Dominik and de los Arcos de Pedro, Maria
    Teresa and Osten, H. Jörg and Devi, Anjana}, year={2013} }'
  chicago: 'Xu, Ke, Ayan Roy Chaudhuri, Harish Parala, Dominik Schwendt, Maria Teresa
    de los Arcos de Pedro, H. Jörg Osten, and Anjana Devi. “Atomic Layer Deposition
    of Er2O3 Thin Films from Er Tris-Guanidinate and Water: Process Optimization,
    Film Analysis and Electrical Properties.” <i>Journal of Materials Chemistry C</i>,
    2013. <a href="https://doi.org/10.1039/c3tc30401a">https://doi.org/10.1039/c3tc30401a</a>.'
  ieee: 'K. Xu <i>et al.</i>, “Atomic layer deposition of Er2O3 thin films from Er
    tris-guanidinate and water: process optimization, film analysis and electrical
    properties,” <i>Journal of Materials Chemistry C</i>, Art. no. 3939, 2013, doi:
    <a href="https://doi.org/10.1039/c3tc30401a">10.1039/c3tc30401a</a>.'
  mla: 'Xu, Ke, et al. “Atomic Layer Deposition of Er2O3 Thin Films from Er Tris-Guanidinate
    and Water: Process Optimization, Film Analysis and Electrical Properties.” <i>Journal
    of Materials Chemistry C</i>, 3939, 2013, doi:<a href="https://doi.org/10.1039/c3tc30401a">10.1039/c3tc30401a</a>.'
  short: K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, M.T. de los Arcos de Pedro,
    H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).
date_created: 2021-07-07T11:14:22Z
date_updated: 2023-01-24T08:24:04Z
department:
- _id: '302'
doi: 10.1039/c3tc30401a
extern: '1'
language:
- iso: eng
publication: Journal of Materials Chemistry C
publication_identifier:
  issn:
  - 2050-7526
  - 2050-7534
publication_status: published
status: public
title: 'Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water:
  process optimization, film analysis and electrical properties'
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22593'
author:
- first_name: N.B.
  full_name: Srinivasan, N.B.
  last_name: Srinivasan
- first_name: T.B.
  full_name: Thiede, T.B.
  last_name: Thiede
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: V.
  full_name: Gwildies, V.
  last_name: Gwildies
- first_name: M.
  full_name: Krasnopolski, M.
  last_name: Krasnopolski
- first_name: H.-W.
  full_name: Becker, H.-W.
  last_name: Becker
- first_name: D.
  full_name: Rogalla, D.
  last_name: Rogalla
- first_name: A.
  full_name: Devi, A.
  last_name: Devi
- first_name: R.A.
  full_name: Fischer, R.A.
  last_name: Fischer
citation:
  ama: Srinivasan NB, Thiede TB, de los Arcos de Pedro MT, et al. Transition metal
    nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2]
    (M=Mo, W) as precursors. <i>Surface and Coatings Technology</i>. Published online
    2013:130-136. doi:<a href="https://doi.org/10.1016/j.surfcoat.2013.06.024">10.1016/j.surfcoat.2013.06.024</a>
  apa: Srinivasan, N. B., Thiede, T. B., de los Arcos de Pedro, M. T., Gwildies, V.,
    Krasnopolski, M., Becker, H.-W., Rogalla, D., Devi, A., &#38; Fischer, R. A. (2013).
    Transition metal nitride thin films grown by MOCVD using amidinato based complexes
    [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors. <i>Surface and Coatings Technology</i>,
    130–136. <a href="https://doi.org/10.1016/j.surfcoat.2013.06.024">https://doi.org/10.1016/j.surfcoat.2013.06.024</a>
  bibtex: '@article{Srinivasan_Thiede_de los Arcos de Pedro_Gwildies_Krasnopolski_Becker_Rogalla_Devi_Fischer_2013,
    title={Transition metal nitride thin films grown by MOCVD using amidinato based
    complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors}, DOI={<a href="https://doi.org/10.1016/j.surfcoat.2013.06.024">10.1016/j.surfcoat.2013.06.024</a>},
    journal={Surface and Coatings Technology}, author={Srinivasan, N.B. and Thiede,
    T.B. and de los Arcos de Pedro, Maria Teresa and Gwildies, V. and Krasnopolski,
    M. and Becker, H.-W. and Rogalla, D. and Devi, A. and Fischer, R.A.}, year={2013},
    pages={130–136} }'
  chicago: Srinivasan, N.B., T.B. Thiede, Maria Teresa de los Arcos de Pedro, V. Gwildies,
    M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, and R.A. Fischer. “Transition
    Metal Nitride Thin Films Grown by MOCVD Using Amidinato Based Complexes [M(NtBu)2{(IPrN)2CMe}2]
    (M=Mo, W) as Precursors.” <i>Surface and Coatings Technology</i>, 2013, 130–36.
    <a href="https://doi.org/10.1016/j.surfcoat.2013.06.024">https://doi.org/10.1016/j.surfcoat.2013.06.024</a>.
  ieee: 'N. B. Srinivasan <i>et al.</i>, “Transition metal nitride thin films grown
    by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as
    precursors,” <i>Surface and Coatings Technology</i>, pp. 130–136, 2013, doi: <a
    href="https://doi.org/10.1016/j.surfcoat.2013.06.024">10.1016/j.surfcoat.2013.06.024</a>.'
  mla: Srinivasan, N. B., et al. “Transition Metal Nitride Thin Films Grown by MOCVD
    Using Amidinato Based Complexes [M(NtBu)2{(IPrN)2CMe}2] (M=Mo, W) as Precursors.”
    <i>Surface and Coatings Technology</i>, 2013, pp. 130–36, doi:<a href="https://doi.org/10.1016/j.surfcoat.2013.06.024">10.1016/j.surfcoat.2013.06.024</a>.
  short: N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, V. Gwildies, M.
    Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, R.A. Fischer, Surface and Coatings
    Technology (2013) 130–136.
date_created: 2021-07-07T11:13:33Z
date_updated: 2023-01-24T08:23:13Z
department:
- _id: '302'
doi: 10.1016/j.surfcoat.2013.06.024
extern: '1'
language:
- iso: eng
page: 130-136
publication: Surface and Coatings Technology
publication_identifier:
  issn:
  - 0257-8972
publication_status: published
status: public
title: Transition metal nitride thin films grown by MOCVD using amidinato based complexes
  [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22594'
article_number: '084009'
author:
- first_name: Andreas
  full_name: Will, Andreas
  last_name: Will
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Carles
  full_name: Corbella, Carles
  last_name: Corbella
- first_name: Ante
  full_name: Hecimovic, Ante
  last_name: Hecimovic
- first_name: Patrick D
  full_name: Machura, Patrick D
  last_name: Machura
- first_name: Jörg
  full_name: Winter, Jörg
  last_name: Winter
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
citation:
  ama: 'Will A, de los Arcos de Pedro MT, Corbella C, et al. Target implantation and
    redeposition processes during high-power impulse magnetron sputtering of aluminum.
    <i>Journal of Physics D: Applied Physics</i>. Published online 2013. doi:<a href="https://doi.org/10.1088/0022-3727/46/8/084009">10.1088/0022-3727/46/8/084009</a>'
  apa: 'Will, A., de los Arcos de Pedro, M. T., Corbella, C., Hecimovic, A., Machura,
    P. D., Winter, J., &#38; von Keudell, A. (2013). Target implantation and redeposition
    processes during high-power impulse magnetron sputtering of aluminum. <i>Journal
    of Physics D: Applied Physics</i>, Article 084009. <a href="https://doi.org/10.1088/0022-3727/46/8/084009">https://doi.org/10.1088/0022-3727/46/8/084009</a>'
  bibtex: '@article{Will_de los Arcos de Pedro_Corbella_Hecimovic_Machura_Winter_von
    Keudell_2013, title={Target implantation and redeposition processes during high-power
    impulse magnetron sputtering of aluminum}, DOI={<a href="https://doi.org/10.1088/0022-3727/46/8/084009">10.1088/0022-3727/46/8/084009</a>},
    number={084009}, journal={Journal of Physics D: Applied Physics}, author={Will,
    Andreas and de los Arcos de Pedro, Maria Teresa and Corbella, Carles and Hecimovic,
    Ante and Machura, Patrick D and Winter, Jörg and von Keudell, Achim}, year={2013}
    }'
  chicago: 'Will, Andreas, Maria Teresa de los Arcos de Pedro, Carles Corbella, Ante
    Hecimovic, Patrick D Machura, Jörg Winter, and Achim von Keudell. “Target Implantation
    and Redeposition Processes during High-Power Impulse Magnetron Sputtering of Aluminum.”
    <i>Journal of Physics D: Applied Physics</i>, 2013. <a href="https://doi.org/10.1088/0022-3727/46/8/084009">https://doi.org/10.1088/0022-3727/46/8/084009</a>.'
  ieee: 'A. Will <i>et al.</i>, “Target implantation and redeposition processes during
    high-power impulse magnetron sputtering of aluminum,” <i>Journal of Physics D:
    Applied Physics</i>, Art. no. 084009, 2013, doi: <a href="https://doi.org/10.1088/0022-3727/46/8/084009">10.1088/0022-3727/46/8/084009</a>.'
  mla: 'Will, Andreas, et al. “Target Implantation and Redeposition Processes during
    High-Power Impulse Magnetron Sputtering of Aluminum.” <i>Journal of Physics D:
    Applied Physics</i>, 084009, 2013, doi:<a href="https://doi.org/10.1088/0022-3727/46/8/084009">10.1088/0022-3727/46/8/084009</a>.'
  short: 'A. Will, M.T. de los Arcos de Pedro, C. Corbella, A. Hecimovic, P.D. Machura,
    J. Winter, A. von Keudell, Journal of Physics D: Applied Physics (2013).'
date_created: 2021-07-07T11:13:47Z
date_updated: 2023-01-24T08:23:28Z
department:
- _id: '302'
doi: 10.1088/0022-3727/46/8/084009
extern: '1'
language:
- iso: eng
publication: 'Journal of Physics D: Applied Physics'
publication_identifier:
  issn:
  - 0022-3727
  - 1361-6463
publication_status: published
status: public
title: Target implantation and redeposition processes during high-power impulse magnetron
  sputtering of aluminum
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22591'
article_number: '103303'
author:
- first_name: Carles
  full_name: Corbella, Carles
  last_name: Corbella
- first_name: Simon
  full_name: Grosse-Kreul, Simon
  last_name: Grosse-Kreul
- first_name: Oliver
  full_name: Kreiter, Oliver
  last_name: Kreiter
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Jan
  full_name: Benedikt, Jan
  last_name: Benedikt
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
citation:
  ama: Corbella C, Grosse-Kreul S, Kreiter O, de los Arcos de Pedro MT, Benedikt J,
    von Keudell A. Particle beam experiments for the analysis of reactive sputtering
    processes in metals and polymer surfaces. <i>Review of Scientific Instruments</i>.
    Published online 2013. doi:<a href="https://doi.org/10.1063/1.4826066">10.1063/1.4826066</a>
  apa: Corbella, C., Grosse-Kreul, S., Kreiter, O., de los Arcos de Pedro, M. T.,
    Benedikt, J., &#38; von Keudell, A. (2013). Particle beam experiments for the
    analysis of reactive sputtering processes in metals and polymer surfaces. <i>Review
    of Scientific Instruments</i>, Article 103303. <a href="https://doi.org/10.1063/1.4826066">https://doi.org/10.1063/1.4826066</a>
  bibtex: '@article{Corbella_Grosse-Kreul_Kreiter_de los Arcos de Pedro_Benedikt_von
    Keudell_2013, title={Particle beam experiments for the analysis of reactive sputtering
    processes in metals and polymer surfaces}, DOI={<a href="https://doi.org/10.1063/1.4826066">10.1063/1.4826066</a>},
    number={103303}, journal={Review of Scientific Instruments}, author={Corbella,
    Carles and Grosse-Kreul, Simon and Kreiter, Oliver and de los Arcos de Pedro,
    Maria Teresa and Benedikt, Jan and von Keudell, Achim}, year={2013} }'
  chicago: Corbella, Carles, Simon Grosse-Kreul, Oliver Kreiter, Maria Teresa de los
    Arcos de Pedro, Jan Benedikt, and Achim von Keudell. “Particle Beam Experiments
    for the Analysis of Reactive Sputtering Processes in Metals and Polymer Surfaces.”
    <i>Review of Scientific Instruments</i>, 2013. <a href="https://doi.org/10.1063/1.4826066">https://doi.org/10.1063/1.4826066</a>.
  ieee: 'C. Corbella, S. Grosse-Kreul, O. Kreiter, M. T. de los Arcos de Pedro, J.
    Benedikt, and A. von Keudell, “Particle beam experiments for the analysis of reactive
    sputtering processes in metals and polymer surfaces,” <i>Review of Scientific
    Instruments</i>, Art. no. 103303, 2013, doi: <a href="https://doi.org/10.1063/1.4826066">10.1063/1.4826066</a>.'
  mla: Corbella, Carles, et al. “Particle Beam Experiments for the Analysis of Reactive
    Sputtering Processes in Metals and Polymer Surfaces.” <i>Review of Scientific
    Instruments</i>, 103303, 2013, doi:<a href="https://doi.org/10.1063/1.4826066">10.1063/1.4826066</a>.
  short: C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J.
    Benedikt, A. von Keudell, Review of Scientific Instruments (2013).
date_created: 2021-07-07T11:12:42Z
date_updated: 2023-01-24T08:22:42Z
department:
- _id: '302'
doi: 10.1063/1.4826066
extern: '1'
language:
- iso: eng
publication: Review of Scientific Instruments
publication_identifier:
  issn:
  - 0034-6748
  - 1089-7623
publication_status: published
status: public
title: Particle beam experiments for the analysis of reactive sputtering processes
  in metals and polymer surfaces
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22595'
article_number: '084007'
author:
- first_name: J
  full_name: Winter, J
  last_name: Winter
- first_name: A
  full_name: Hecimovic, A
  last_name: Hecimovic
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: M
  full_name: Böke, M
  last_name: Böke
- first_name: V
  full_name: Schulz-von der Gathen, V
  last_name: Schulz-von der Gathen
citation:
  ama: 'Winter J, Hecimovic A, de los Arcos de Pedro MT, Böke M, Schulz-von der Gathen
    V. Instabilities in high-power impulse magnetron plasmas: from stochasticity to
    periodicity. <i>Journal of Physics D: Applied Physics</i>. Published online 2013.
    doi:<a href="https://doi.org/10.1088/0022-3727/46/8/084007">10.1088/0022-3727/46/8/084007</a>'
  apa: 'Winter, J., Hecimovic, A., de los Arcos de Pedro, M. T., Böke, M., &#38; Schulz-von
    der Gathen, V. (2013). Instabilities in high-power impulse magnetron plasmas:
    from stochasticity to periodicity. <i>Journal of Physics D: Applied Physics</i>,
    Article 084007. <a href="https://doi.org/10.1088/0022-3727/46/8/084007">https://doi.org/10.1088/0022-3727/46/8/084007</a>'
  bibtex: '@article{Winter_Hecimovic_de los Arcos de Pedro_Böke_Schulz-von der Gathen_2013,
    title={Instabilities in high-power impulse magnetron plasmas: from stochasticity
    to periodicity}, DOI={<a href="https://doi.org/10.1088/0022-3727/46/8/084007">10.1088/0022-3727/46/8/084007</a>},
    number={084007}, journal={Journal of Physics D: Applied Physics}, author={Winter,
    J and Hecimovic, A and de los Arcos de Pedro, Maria Teresa and Böke, M and Schulz-von
    der Gathen, V}, year={2013} }'
  chicago: 'Winter, J, A Hecimovic, Maria Teresa de los Arcos de Pedro, M Böke, and
    V Schulz-von der Gathen. “Instabilities in High-Power Impulse Magnetron Plasmas:
    From Stochasticity to Periodicity.” <i>Journal of Physics D: Applied Physics</i>,
    2013. <a href="https://doi.org/10.1088/0022-3727/46/8/084007">https://doi.org/10.1088/0022-3727/46/8/084007</a>.'
  ieee: 'J. Winter, A. Hecimovic, M. T. de los Arcos de Pedro, M. Böke, and V. Schulz-von
    der Gathen, “Instabilities in high-power impulse magnetron plasmas: from stochasticity
    to periodicity,” <i>Journal of Physics D: Applied Physics</i>, Art. no. 084007,
    2013, doi: <a href="https://doi.org/10.1088/0022-3727/46/8/084007">10.1088/0022-3727/46/8/084007</a>.'
  mla: 'Winter, J., et al. “Instabilities in High-Power Impulse Magnetron Plasmas:
    From Stochasticity to Periodicity.” <i>Journal of Physics D: Applied Physics</i>,
    084007, 2013, doi:<a href="https://doi.org/10.1088/0022-3727/46/8/084007">10.1088/0022-3727/46/8/084007</a>.'
  short: 'J. Winter, A. Hecimovic, M.T. de los Arcos de Pedro, M. Böke, V. Schulz-von
    der Gathen, Journal of Physics D: Applied Physics (2013).'
date_created: 2021-07-07T11:14:06Z
date_updated: 2023-01-24T08:23:42Z
department:
- _id: '302'
doi: 10.1088/0022-3727/46/8/084007
extern: '1'
language:
- iso: eng
publication: 'Journal of Physics D: Applied Physics'
publication_identifier:
  issn:
  - 0022-3727
  - 1361-6463
publication_status: published
status: public
title: 'Instabilities in high-power impulse magnetron plasmas: from stochasticity
  to periodicity'
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22592'
author:
- first_name: Katja
  full_name: Rügner, Katja
  last_name: Rügner
- first_name: Rüdiger
  full_name: Reuter, Rüdiger
  last_name: Reuter
- first_name: Dirk
  full_name: Ellerweg, Dirk
  last_name: Ellerweg
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
- first_name: Jan
  full_name: Benedikt, Jan
  last_name: Benedikt
citation:
  ama: Rügner K, Reuter R, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt
    J. Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.
    <i>Plasma Processes and Polymers</i>. Published online 2013:1061-1073. doi:<a
    href="https://doi.org/10.1002/ppap.201300059">10.1002/ppap.201300059</a>
  apa: Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell,
    A., &#38; Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition
    at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>, 1061–1073. <a href="https://doi.org/10.1002/ppap.201300059">https://doi.org/10.1002/ppap.201300059</a>
  bibtex: '@article{Rügner_Reuter_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2013,
    title={Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric
    Pressure}, DOI={<a href="https://doi.org/10.1002/ppap.201300059">10.1002/ppap.201300059</a>},
    journal={Plasma Processes and Polymers}, author={Rügner, Katja and Reuter, Rüdiger
    and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim
    and Benedikt, Jan}, year={2013}, pages={1061–1073} }'
  chicago: Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Maria Teresa de los Arcos
    de Pedro, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme
    of SiO2 Film Deposition at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>,
    2013, 1061–73. <a href="https://doi.org/10.1002/ppap.201300059">https://doi.org/10.1002/ppap.201300059</a>.
  ieee: 'K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell,
    and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at
    Atmospheric Pressure,” <i>Plasma Processes and Polymers</i>, pp. 1061–1073, 2013,
    doi: <a href="https://doi.org/10.1002/ppap.201300059">10.1002/ppap.201300059</a>.'
  mla: Rügner, Katja, et al. “Insight into the Reaction Scheme of SiO2 Film Deposition
    at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2013, pp. 1061–73,
    doi:<a href="https://doi.org/10.1002/ppap.201300059">10.1002/ppap.201300059</a>.
  short: K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell,
    J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.
date_created: 2021-07-07T11:13:20Z
date_updated: 2023-01-24T08:22:58Z
department:
- _id: '302'
doi: 10.1002/ppap.201300059
extern: '1'
language:
- iso: eng
page: 1061-1073
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
publication_status: published
status: public
title: Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
type: journal_article
user_id: '54556'
year: '2013'
...
---
_id: '22597'
author:
- first_name: Manish
  full_name: Banerjee, Manish
  last_name: Banerjee
- first_name: Nagendra Babu
  full_name: Srinivasan, Nagendra Babu
  last_name: Srinivasan
- first_name: Huaizhi
  full_name: Zhu, Huaizhi
  last_name: Zhu
- first_name: Sun Ja
  full_name: Kim, Sun Ja
  last_name: Kim
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Manuela
  full_name: Winter, Manuela
  last_name: Winter
- first_name: Hans-Werner
  full_name: Becker, Hans-Werner
  last_name: Becker
- first_name: Detlef
  full_name: Rogalla, Detlef
  last_name: Rogalla
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Daniela
  full_name: Bekermann, Daniela
  last_name: Bekermann
- first_name: Davide
  full_name: Barreca, Davide
  last_name: Barreca
- first_name: Roland A.
  full_name: Fischer, Roland A.
  last_name: Fischer
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: Banerjee M, Srinivasan NB, Zhu H, et al. Fabrication of ZrO2 and ZrN Films
    by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors. <i>Crystal
    Growth &#38; Design</i>. Published online 2012:5079-5089. doi:<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>
  apa: Banerjee, M., Srinivasan, N. B., Zhu, H., Kim, S. J., Xu, K., Winter, M., Becker,
    H.-W., Rogalla, D., de los Arcos de Pedro, M. T., Bekermann, D., Barreca, D.,
    Fischer, R. A., &#38; Devi, A. (2012). Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors. <i>Crystal Growth &#38;
    Design</i>, 5079–5089. <a href="https://doi.org/10.1021/cg3010147">https://doi.org/10.1021/cg3010147</a>
  bibtex: '@article{Banerjee_Srinivasan_Zhu_Kim_Xu_Winter_Becker_Rogalla_de los Arcos
    de Pedro_Bekermann_et al._2012, title={Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors}, DOI={<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>},
    journal={Crystal Growth &#38; Design}, author={Banerjee, Manish and Srinivasan,
    Nagendra Babu and Zhu, Huaizhi and Kim, Sun Ja and Xu, Ke and Winter, Manuela
    and Becker, Hans-Werner and Rogalla, Detlef and de los Arcos de Pedro, Maria Teresa
    and Bekermann, Daniela and et al.}, year={2012}, pages={5079–5089} }'
  chicago: Banerjee, Manish, Nagendra Babu Srinivasan, Huaizhi Zhu, Sun Ja Kim, Ke
    Xu, Manuela Winter, Hans-Werner Becker, et al. “Fabrication of ZrO2 and ZrN Films
    by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors.” <i>Crystal
    Growth &#38; Design</i>, 2012, 5079–89. <a href="https://doi.org/10.1021/cg3010147">https://doi.org/10.1021/cg3010147</a>.
  ieee: 'M. Banerjee <i>et al.</i>, “Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors,” <i>Crystal Growth &#38;
    Design</i>, pp. 5079–5089, 2012, doi: <a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>.'
  mla: Banerjee, Manish, et al. “Fabrication of ZrO2 and ZrN Films by Metalorganic
    Chemical Vapor Deposition Employing New Zr Precursors.” <i>Crystal Growth &#38;
    Design</i>, 2012, pp. 5079–89, doi:<a href="https://doi.org/10.1021/cg3010147">10.1021/cg3010147</a>.
  short: M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker,
    D. Rogalla, M.T. de los Arcos de Pedro, D. Bekermann, D. Barreca, R.A. Fischer,
    A. Devi, Crystal Growth &#38; Design (2012) 5079–5089.
date_created: 2021-07-07T11:14:37Z
date_updated: 2023-01-24T08:24:20Z
department:
- _id: '302'
doi: 10.1021/cg3010147
extern: '1'
language:
- iso: eng
page: 5079-5089
publication: Crystal Growth & Design
publication_identifier:
  issn:
  - 1528-7483
  - 1528-7505
publication_status: published
status: public
title: Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition
  Employing New Zr Precursors
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22602'
article_number: '13936'
author:
- first_name: Andrian P.
  full_name: Milanov, Andrian P.
  last_name: Milanov
- first_name: Ke
  full_name: Xu, Ke
  last_name: Xu
- first_name: Stefan
  full_name: Cwik, Stefan
  last_name: Cwik
- first_name: Harish
  full_name: Parala, Harish
  last_name: Parala
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Hans-Werner
  full_name: Becker, Hans-Werner
  last_name: Becker
- first_name: Detlef
  full_name: Rogalla, Detlef
  last_name: Rogalla
- first_name: Richard
  full_name: Cross, Richard
  last_name: Cross
- first_name: Shashi
  full_name: Paul, Shashi
  last_name: Paul
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
citation:
  ama: Milanov AP, Xu K, Cwik S, et al. Sc2O3, Er2O3, and Y2O3 thin films by MOCVD
    from volatile guanidinate class of rare-earth precursors. <i>Dalton Transactions</i>.
    Published online 2012. doi:<a href="https://doi.org/10.1039/c2dt31219k">10.1039/c2dt31219k</a>
  apa: Milanov, A. P., Xu, K., Cwik, S., Parala, H., de los Arcos de Pedro, M. T.,
    Becker, H.-W., Rogalla, D., Cross, R., Paul, S., &#38; Devi, A. (2012). Sc2O3,
    Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth
    precursors. <i>Dalton Transactions</i>, Article 13936. <a href="https://doi.org/10.1039/c2dt31219k">https://doi.org/10.1039/c2dt31219k</a>
  bibtex: '@article{Milanov_Xu_Cwik_Parala_de los Arcos de Pedro_Becker_Rogalla_Cross_Paul_Devi_2012,
    title={Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class
    of rare-earth precursors}, DOI={<a href="https://doi.org/10.1039/c2dt31219k">10.1039/c2dt31219k</a>},
    number={13936}, journal={Dalton Transactions}, author={Milanov, Andrian P. and
    Xu, Ke and Cwik, Stefan and Parala, Harish and de los Arcos de Pedro, Maria Teresa
    and Becker, Hans-Werner and Rogalla, Detlef and Cross, Richard and Paul, Shashi
    and Devi, Anjana}, year={2012} }'
  chicago: Milanov, Andrian P., Ke Xu, Stefan Cwik, Harish Parala, Maria Teresa de
    los Arcos de Pedro, Hans-Werner Becker, Detlef Rogalla, Richard Cross, Shashi
    Paul, and Anjana Devi. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from Volatile
    Guanidinate Class of Rare-Earth Precursors.” <i>Dalton Transactions</i>, 2012.
    <a href="https://doi.org/10.1039/c2dt31219k">https://doi.org/10.1039/c2dt31219k</a>.
  ieee: 'A. P. Milanov <i>et al.</i>, “Sc2O3, Er2O3, and Y2O3 thin films by MOCVD
    from volatile guanidinate class of rare-earth precursors,” <i>Dalton Transactions</i>,
    Art. no. 13936, 2012, doi: <a href="https://doi.org/10.1039/c2dt31219k">10.1039/c2dt31219k</a>.'
  mla: Milanov, Andrian P., et al. “Sc2O3, Er2O3, and Y2O3 Thin Films by MOCVD from
    Volatile Guanidinate Class of Rare-Earth Precursors.” <i>Dalton Transactions</i>,
    13936, 2012, doi:<a href="https://doi.org/10.1039/c2dt31219k">10.1039/c2dt31219k</a>.
  short: A.P. Milanov, K. Xu, S. Cwik, H. Parala, M.T. de los Arcos de Pedro, H.-W.
    Becker, D. Rogalla, R. Cross, S. Paul, A. Devi, Dalton Transactions (2012).
date_created: 2021-07-07T11:26:57Z
date_updated: 2023-01-24T08:25:43Z
department:
- _id: '302'
doi: 10.1039/c2dt31219k
extern: '1'
language:
- iso: eng
publication: Dalton Transactions
publication_identifier:
  issn:
  - 1477-9226
  - 1477-9234
publication_status: published
status: public
title: Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class
  of rare-earth precursors
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22604'
author:
- first_name: Rüdiger
  full_name: Reuter, Rüdiger
  last_name: Reuter
- first_name: Katja
  full_name: Rügner, Katja
  last_name: Rügner
- first_name: Dirk
  full_name: Ellerweg, Dirk
  last_name: Ellerweg
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
- first_name: Jan
  full_name: Benedikt, Jan
  last_name: Benedikt
citation:
  ama: Reuter R, Rügner K, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt
    J. The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
    like Films from HMDSO at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>.
    Published online 2012:1116-1124. doi:<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>
  apa: Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell,
    A., &#38; Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the
    Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. <i>Plasma
    Processes and Polymers</i>, 1116–1124. <a href="https://doi.org/10.1002/ppap.201100146">https://doi.org/10.1002/ppap.201100146</a>
  bibtex: '@article{Reuter_Rügner_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2012,
    title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
    like Films from HMDSO at Atmospheric Pressure}, DOI={<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>},
    journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja
    and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim
    and Benedikt, Jan}, year={2012}, pages={1116–1124} }'
  chicago: Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos
    de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface
    Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric
    Pressure.” <i>Plasma Processes and Polymers</i>, 2012, 1116–24. <a href="https://doi.org/10.1002/ppap.201100146">https://doi.org/10.1002/ppap.201100146</a>.
  ieee: 'R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell,
    and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of
    Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” <i>Plasma Processes
    and Polymers</i>, pp. 1116–1124, 2012, doi: <a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>.'
  mla: Reuter, Rüdiger, et al. “The Role of Oxygen and Surface Reactions in the Deposition
    of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” <i>Plasma Processes
    and Polymers</i>, 2012, pp. 1116–24, doi:<a href="https://doi.org/10.1002/ppap.201100146">10.1002/ppap.201100146</a>.
  short: R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell,
    J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
date_created: 2021-07-07T11:30:59Z
date_updated: 2023-01-24T08:26:12Z
department:
- _id: '302'
doi: 10.1002/ppap.201100146
extern: '1'
language:
- iso: eng
page: 1116-1124
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
publication_status: published
status: public
title: The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide
  like Films from HMDSO at Atmospheric Pressure
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22599'
article_number: '114101'
author:
- first_name: A. P.
  full_name: Ehiasarian, A. P.
  last_name: Ehiasarian
- first_name: A.
  full_name: Hecimovic, A.
  last_name: Hecimovic
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: R.
  full_name: New, R.
  last_name: New
- first_name: V.
  full_name: Schulz-von der Gathen, V.
  last_name: Schulz-von der Gathen
- first_name: M.
  full_name: Böke, M.
  last_name: Böke
- first_name: J.
  full_name: Winter, J.
  last_name: Winter
citation:
  ama: 'Ehiasarian AP, Hecimovic A, de los Arcos de Pedro MT, et al. High power impulse
    magnetron sputtering discharges: Instabilities and plasma self-organization. <i>Applied
    Physics Letters</i>. Published online 2012. doi:<a href="https://doi.org/10.1063/1.3692172">10.1063/1.3692172</a>'
  apa: 'Ehiasarian, A. P., Hecimovic, A., de los Arcos de Pedro, M. T., New, R., Schulz-von
    der Gathen, V., Böke, M., &#38; Winter, J. (2012). High power impulse magnetron
    sputtering discharges: Instabilities and plasma self-organization. <i>Applied
    Physics Letters</i>, Article 114101. <a href="https://doi.org/10.1063/1.3692172">https://doi.org/10.1063/1.3692172</a>'
  bibtex: '@article{Ehiasarian_Hecimovic_de los Arcos de Pedro_New_Schulz-von der
    Gathen_Böke_Winter_2012, title={High power impulse magnetron sputtering discharges:
    Instabilities and plasma self-organization}, DOI={<a href="https://doi.org/10.1063/1.3692172">10.1063/1.3692172</a>},
    number={114101}, journal={Applied Physics Letters}, author={Ehiasarian, A. P.
    and Hecimovic, A. and de los Arcos de Pedro, Maria Teresa and New, R. and Schulz-von
    der Gathen, V. and Böke, M. and Winter, J.}, year={2012} }'
  chicago: 'Ehiasarian, A. P., A. Hecimovic, Maria Teresa de los Arcos de Pedro, R.
    New, V. Schulz-von der Gathen, M. Böke, and J. Winter. “High Power Impulse Magnetron
    Sputtering Discharges: Instabilities and Plasma Self-Organization.” <i>Applied
    Physics Letters</i>, 2012. <a href="https://doi.org/10.1063/1.3692172">https://doi.org/10.1063/1.3692172</a>.'
  ieee: 'A. P. Ehiasarian <i>et al.</i>, “High power impulse magnetron sputtering
    discharges: Instabilities and plasma self-organization,” <i>Applied Physics Letters</i>,
    Art. no. 114101, 2012, doi: <a href="https://doi.org/10.1063/1.3692172">10.1063/1.3692172</a>.'
  mla: 'Ehiasarian, A. P., et al. “High Power Impulse Magnetron Sputtering Discharges:
    Instabilities and Plasma Self-Organization.” <i>Applied Physics Letters</i>, 114101,
    2012, doi:<a href="https://doi.org/10.1063/1.3692172">10.1063/1.3692172</a>.'
  short: A.P. Ehiasarian, A. Hecimovic, M.T. de los Arcos de Pedro, R. New, V. Schulz-von
    der Gathen, M. Böke, J. Winter, Applied Physics Letters (2012).
date_created: 2021-07-07T11:22:50Z
date_updated: 2023-01-24T08:24:51Z
department:
- _id: '302'
doi: 10.1063/1.3692172
extern: '1'
language:
- iso: eng
publication: Applied Physics Letters
publication_identifier:
  issn:
  - 0003-6951
  - 1077-3118
publication_status: published
status: public
title: 'High power impulse magnetron sputtering discharges: Instabilities and plasma
  self-organization'
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22601'
author:
- first_name: L.
  full_name: Marot, L.
  last_name: Marot
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: A.M.
  full_name: Bünzli, A.M.
  last_name: Bünzli
- first_name: C.
  full_name: Wäckerlin, C.
  last_name: Wäckerlin
- first_name: R.
  full_name: Steiner, R.
  last_name: Steiner
- first_name: P.
  full_name: Oelhafen, P.
  last_name: Oelhafen
- first_name: E.
  full_name: Meyer, E.
  last_name: Meyer
- first_name: D.
  full_name: Mathys, D.
  last_name: Mathys
- first_name: P.
  full_name: Spätig, P.
  last_name: Spätig
- first_name: G.
  full_name: Covarel, G.
  last_name: Covarel
citation:
  ama: Marot L, de los Arcos de Pedro MT, Bünzli AM, et al. Nanocomposites of carbon
    nanotubes embedded in a (Ti,Al)N coated film. <i>Surface and Coatings Technology</i>.
    Published online 2012:223-228. doi:<a href="https://doi.org/10.1016/j.surfcoat.2012.09.053">10.1016/j.surfcoat.2012.09.053</a>
  apa: Marot, L., de los Arcos de Pedro, M. T., Bünzli, A. M., Wäckerlin, C., Steiner,
    R., Oelhafen, P., Meyer, E., Mathys, D., Spätig, P., &#38; Covarel, G. (2012).
    Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film. <i>Surface
    and Coatings Technology</i>, 223–228. <a href="https://doi.org/10.1016/j.surfcoat.2012.09.053">https://doi.org/10.1016/j.surfcoat.2012.09.053</a>
  bibtex: '@article{Marot_de los Arcos de Pedro_Bünzli_Wäckerlin_Steiner_Oelhafen_Meyer_Mathys_Spätig_Covarel_2012,
    title={Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film},
    DOI={<a href="https://doi.org/10.1016/j.surfcoat.2012.09.053">10.1016/j.surfcoat.2012.09.053</a>},
    journal={Surface and Coatings Technology}, author={Marot, L. and de los Arcos
    de Pedro, Maria Teresa and Bünzli, A.M. and Wäckerlin, C. and Steiner, R. and
    Oelhafen, P. and Meyer, E. and Mathys, D. and Spätig, P. and Covarel, G.}, year={2012},
    pages={223–228} }'
  chicago: Marot, L., Maria Teresa de los Arcos de Pedro, A.M. Bünzli, C. Wäckerlin,
    R. Steiner, P. Oelhafen, E. Meyer, D. Mathys, P. Spätig, and G. Covarel. “Nanocomposites
    of Carbon Nanotubes Embedded in a (Ti,Al)N Coated Film.” <i>Surface and Coatings
    Technology</i>, 2012, 223–28. <a href="https://doi.org/10.1016/j.surfcoat.2012.09.053">https://doi.org/10.1016/j.surfcoat.2012.09.053</a>.
  ieee: 'L. Marot <i>et al.</i>, “Nanocomposites of carbon nanotubes embedded in a
    (Ti,Al)N coated film,” <i>Surface and Coatings Technology</i>, pp. 223–228, 2012,
    doi: <a href="https://doi.org/10.1016/j.surfcoat.2012.09.053">10.1016/j.surfcoat.2012.09.053</a>.'
  mla: Marot, L., et al. “Nanocomposites of Carbon Nanotubes Embedded in a (Ti,Al)N
    Coated Film.” <i>Surface and Coatings Technology</i>, 2012, pp. 223–28, doi:<a
    href="https://doi.org/10.1016/j.surfcoat.2012.09.053">10.1016/j.surfcoat.2012.09.053</a>.
  short: L. Marot, M.T. de los Arcos de Pedro, A.M. Bünzli, C. Wäckerlin, R. Steiner,
    P. Oelhafen, E. Meyer, D. Mathys, P. Spätig, G. Covarel, Surface and Coatings
    Technology (2012) 223–228.
date_created: 2021-07-07T11:26:42Z
date_updated: 2023-01-24T08:25:27Z
department:
- _id: '302'
doi: 10.1016/j.surfcoat.2012.09.053
extern: '1'
language:
- iso: eng
page: 223-228
publication: Surface and Coatings Technology
publication_identifier:
  issn:
  - 0257-8972
publication_status: published
status: public
title: Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22603'
article_number: '103306'
author:
- first_name: Marina
  full_name: Prenzel, Marina
  last_name: Prenzel
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Annika
  full_name: Kortmann, Annika
  last_name: Kortmann
- first_name: Jörg
  full_name: Winter, Jörg
  last_name: Winter
- first_name: Achim
  full_name: von Keudell, Achim
  last_name: von Keudell
citation:
  ama: Prenzel M, de los Arcos de Pedro MT, Kortmann A, Winter J, von Keudell A. Embedded
    argon as a tool for sampling local structure in thin plasma deposited aluminum
    oxide films. <i>Journal of Applied Physics</i>. Published online 2012. doi:<a
    href="https://doi.org/10.1063/1.4767383">10.1063/1.4767383</a>
  apa: Prenzel, M., de los Arcos de Pedro, M. T., Kortmann, A., Winter, J., &#38;
    von Keudell, A. (2012). Embedded argon as a tool for sampling local structure
    in thin plasma deposited aluminum oxide films. <i>Journal of Applied Physics</i>,
    Article 103306. <a href="https://doi.org/10.1063/1.4767383">https://doi.org/10.1063/1.4767383</a>
  bibtex: '@article{Prenzel_de los Arcos de Pedro_Kortmann_Winter_von Keudell_2012,
    title={Embedded argon as a tool for sampling local structure in thin plasma deposited
    aluminum oxide films}, DOI={<a href="https://doi.org/10.1063/1.4767383">10.1063/1.4767383</a>},
    number={103306}, journal={Journal of Applied Physics}, author={Prenzel, Marina
    and de los Arcos de Pedro, Maria Teresa and Kortmann, Annika and Winter, Jörg
    and von Keudell, Achim}, year={2012} }'
  chicago: Prenzel, Marina, Maria Teresa de los Arcos de Pedro, Annika Kortmann, Jörg
    Winter, and Achim von Keudell. “Embedded Argon as a Tool for Sampling Local Structure
    in Thin Plasma Deposited Aluminum Oxide Films.” <i>Journal of Applied Physics</i>,
    2012. <a href="https://doi.org/10.1063/1.4767383">https://doi.org/10.1063/1.4767383</a>.
  ieee: 'M. Prenzel, M. T. de los Arcos de Pedro, A. Kortmann, J. Winter, and A. von
    Keudell, “Embedded argon as a tool for sampling local structure in thin plasma
    deposited aluminum oxide films,” <i>Journal of Applied Physics</i>, Art. no. 103306,
    2012, doi: <a href="https://doi.org/10.1063/1.4767383">10.1063/1.4767383</a>.'
  mla: Prenzel, Marina, et al. “Embedded Argon as a Tool for Sampling Local Structure
    in Thin Plasma Deposited Aluminum Oxide Films.” <i>Journal of Applied Physics</i>,
    103306, 2012, doi:<a href="https://doi.org/10.1063/1.4767383">10.1063/1.4767383</a>.
  short: M. Prenzel, M.T. de los Arcos de Pedro, A. Kortmann, J. Winter, A. von Keudell,
    Journal of Applied Physics (2012).
date_created: 2021-07-07T11:30:38Z
date_updated: 2023-01-24T08:25:58Z
department:
- _id: '302'
doi: 10.1063/1.4767383
extern: '1'
language:
- iso: eng
publication: Journal of Applied Physics
publication_identifier:
  issn:
  - 0021-8979
  - 1089-7550
publication_status: published
status: public
title: Embedded argon as a tool for sampling local structure in thin plasma deposited
  aluminum oxide films
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22600'
article_number: '035017'
author:
- first_name: A
  full_name: Hecimovic, A
  last_name: Hecimovic
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: V
  full_name: Schulz-von der Gathen, V
  last_name: Schulz-von der Gathen
- first_name: M
  full_name: Böke, M
  last_name: Böke
- first_name: J
  full_name: Winter, J
  last_name: Winter
citation:
  ama: Hecimovic A, de los Arcos de Pedro MT, Schulz-von der Gathen V, Böke M, Winter
    J. Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma
    discharges. <i>Plasma Sources Science and Technology</i>. Published online 2012.
    doi:<a href="https://doi.org/10.1088/0963-0252/21/3/035017">10.1088/0963-0252/21/3/035017</a>
  apa: Hecimovic, A., de los Arcos de Pedro, M. T., Schulz-von der Gathen, V., Böke,
    M., &#38; Winter, J. (2012). Temporal evolution of the radial plasma emissivity
    profile in HIPIMS plasma discharges. <i>Plasma Sources Science and Technology</i>,
    Article 035017. <a href="https://doi.org/10.1088/0963-0252/21/3/035017">https://doi.org/10.1088/0963-0252/21/3/035017</a>
  bibtex: '@article{Hecimovic_de los Arcos de Pedro_Schulz-von der Gathen_Böke_Winter_2012,
    title={Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma
    discharges}, DOI={<a href="https://doi.org/10.1088/0963-0252/21/3/035017">10.1088/0963-0252/21/3/035017</a>},
    number={035017}, journal={Plasma Sources Science and Technology}, author={Hecimovic,
    A and de los Arcos de Pedro, Maria Teresa and Schulz-von der Gathen, V and Böke,
    M and Winter, J}, year={2012} }'
  chicago: Hecimovic, A, Maria Teresa de los Arcos de Pedro, V Schulz-von der Gathen,
    M Böke, and J Winter. “Temporal Evolution of the Radial Plasma Emissivity Profile
    in HIPIMS Plasma Discharges.” <i>Plasma Sources Science and Technology</i>, 2012.
    <a href="https://doi.org/10.1088/0963-0252/21/3/035017">https://doi.org/10.1088/0963-0252/21/3/035017</a>.
  ieee: 'A. Hecimovic, M. T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke,
    and J. Winter, “Temporal evolution of the radial plasma emissivity profile in
    HIPIMS plasma discharges,” <i>Plasma Sources Science and Technology</i>, Art.
    no. 035017, 2012, doi: <a href="https://doi.org/10.1088/0963-0252/21/3/035017">10.1088/0963-0252/21/3/035017</a>.'
  mla: Hecimovic, A., et al. “Temporal Evolution of the Radial Plasma Emissivity Profile
    in HIPIMS Plasma Discharges.” <i>Plasma Sources Science and Technology</i>, 035017,
    2012, doi:<a href="https://doi.org/10.1088/0963-0252/21/3/035017">10.1088/0963-0252/21/3/035017</a>.
  short: A. Hecimovic, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke,
    J. Winter, Plasma Sources Science and Technology (2012).
date_created: 2021-07-07T11:23:01Z
date_updated: 2023-01-24T08:25:05Z
department:
- _id: '302'
doi: 10.1088/0963-0252/21/3/035017
extern: '1'
language:
- iso: eng
publication: Plasma Sources Science and Technology
publication_identifier:
  issn:
  - 0963-0252
  - 1361-6595
publication_status: published
status: public
title: Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma
  discharges
type: journal_article
user_id: '54556'
year: '2012'
...
---
_id: '22605'
article_number: '024007'
author:
- first_name: D
  full_name: Schröder, D
  last_name: Schröder
- first_name: H
  full_name: Bahre, H
  last_name: Bahre
- first_name: N
  full_name: Knake, N
  last_name: Knake
- first_name: J
  full_name: Winter, J
  last_name: Winter
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: V
  full_name: Schulz-von der Gathen, V
  last_name: Schulz-von der Gathen
citation:
  ama: Schröder D, Bahre H, Knake N, Winter J, de los Arcos de Pedro MT, Schulz-von
    der Gathen V. Influence of target surfaces on the atomic oxygen distribution in
    the effluent of a micro-scaled atmospheric pressure plasma jet. <i>Plasma Sources
    Science and Technology</i>. Published online 2012. doi:<a href="https://doi.org/10.1088/0963-0252/21/2/024007">10.1088/0963-0252/21/2/024007</a>
  apa: Schröder, D., Bahre, H., Knake, N., Winter, J., de los Arcos de Pedro, M. T.,
    &#38; Schulz-von der Gathen, V. (2012). Influence of target surfaces on the atomic
    oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma
    jet. <i>Plasma Sources Science and Technology</i>, Article 024007. <a href="https://doi.org/10.1088/0963-0252/21/2/024007">https://doi.org/10.1088/0963-0252/21/2/024007</a>
  bibtex: '@article{Schröder_Bahre_Knake_Winter_de los Arcos de Pedro_Schulz-von der
    Gathen_2012, title={Influence of target surfaces on the atomic oxygen distribution
    in the effluent of a micro-scaled atmospheric pressure plasma jet}, DOI={<a href="https://doi.org/10.1088/0963-0252/21/2/024007">10.1088/0963-0252/21/2/024007</a>},
    number={024007}, journal={Plasma Sources Science and Technology}, author={Schröder,
    D and Bahre, H and Knake, N and Winter, J and de los Arcos de Pedro, Maria Teresa
    and Schulz-von der Gathen, V}, year={2012} }'
  chicago: Schröder, D, H Bahre, N Knake, J Winter, Maria Teresa de los Arcos de Pedro,
    and V Schulz-von der Gathen. “Influence of Target Surfaces on the Atomic Oxygen
    Distribution in the Effluent of a Micro-Scaled Atmospheric Pressure Plasma Jet.”
    <i>Plasma Sources Science and Technology</i>, 2012. <a href="https://doi.org/10.1088/0963-0252/21/2/024007">https://doi.org/10.1088/0963-0252/21/2/024007</a>.
  ieee: 'D. Schröder, H. Bahre, N. Knake, J. Winter, M. T. de los Arcos de Pedro,
    and V. Schulz-von der Gathen, “Influence of target surfaces on the atomic oxygen
    distribution in the effluent of a micro-scaled atmospheric pressure plasma jet,”
    <i>Plasma Sources Science and Technology</i>, Art. no. 024007, 2012, doi: <a href="https://doi.org/10.1088/0963-0252/21/2/024007">10.1088/0963-0252/21/2/024007</a>.'
  mla: Schröder, D., et al. “Influence of Target Surfaces on the Atomic Oxygen Distribution
    in the Effluent of a Micro-Scaled Atmospheric Pressure Plasma Jet.” <i>Plasma
    Sources Science and Technology</i>, 024007, 2012, doi:<a href="https://doi.org/10.1088/0963-0252/21/2/024007">10.1088/0963-0252/21/2/024007</a>.
  short: D. Schröder, H. Bahre, N. Knake, J. Winter, M.T. de los Arcos de Pedro, V.
    Schulz-von der Gathen, Plasma Sources Science and Technology (2012).
date_created: 2021-07-07T11:31:09Z
date_updated: 2023-01-24T08:26:27Z
department:
- _id: '302'
doi: 10.1088/0963-0252/21/2/024007
extern: '1'
language:
- iso: eng
publication: Plasma Sources Science and Technology
publication_identifier:
  issn:
  - 0963-0252
  - 1361-6595
publication_status: published
status: public
title: Influence of target surfaces on the atomic oxygen distribution in the effluent
  of a micro-scaled atmospheric pressure plasma jet
type: journal_article
user_id: '54556'
year: '2012'
...
