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Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. <i>Diamond and Related Materials</i>. 2002;11(3-6):841-844. doi:<a href=\"https://doi.org/10.1016/s0925-9635(01)00703-8\">10.1016/s0925-9635(01)00703-8</a>","chicago":"Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” <i>Diamond and Related Materials</i> 11, no. 3–6 (2002): 841–44. <a href=\"https://doi.org/10.1016/s0925-9635(01)00703-8\">https://doi.org/10.1016/s0925-9635(01)00703-8</a>.","ieee":"R. Otterbach and U. Hilleringmann, “Reactive ion etching of CVD-diamond for piezoresistive pressure sensors,” <i>Diamond and Related Materials</i>, vol. 11, no. 3–6, pp. 841–844, 2002, doi: <a href=\"https://doi.org/10.1016/s0925-9635(01)00703-8\">10.1016/s0925-9635(01)00703-8</a>.","short":"R. Otterbach, U. 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Sie führt die Anschlüsse über weitere Leiterbahnen zum Rand des Chips und wird dort zu Kontaktflecken (“Pads”) aufgeweitet, die als Anschluss für die Verbindungsdrähte zwischen Chip und Gehäuse oder zum Aufsetzen von Messsonden für die Parametererfassung zum Schaltungstest auf ungesägten Scheiben dienen."}],"status":"public","type":"book_chapter","publication":"Silizium-Halbleitertechnologie","language":[{"iso":"eng"}],"_id":"39875","user_id":"20179","department":[{"_id":"59"}],"year":"2002","place":"Wiesbaden","citation":{"mla":"Hilleringmann, Ulrich. “Metallisierung Und Kontakte.” <i>Silizium-Halbleitertechnologie</i>, Vieweg+Teubner Verlag, 2002, pp. 131–151, doi:<a href=\"https://doi.org/10.1007/978-3-322-94119-0_8\">10.1007/978-3-322-94119-0_8</a>.","bibtex":"@inbook{Hilleringmann_2002, place={Wiesbaden}, title={Metallisierung und Kontakte}, DOI={<a href=\"https://doi.org/10.1007/978-3-322-94119-0_8\">10.1007/978-3-322-94119-0_8</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Vieweg+Teubner Verlag}, author={Hilleringmann, Ulrich}, year={2002}, pages={131–151} }","short":"U. 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Vieweg+Teubner Verlag; 2002:131–151. doi:<a href=\"https://doi.org/10.1007/978-3-322-94119-0_8\">10.1007/978-3-322-94119-0_8</a>"},"page":"131–151","publication_identifier":{"isbn":["978-3-322-94119-0"]},"title":"Metallisierung und Kontakte","doi":"10.1007/978-3-322-94119-0_8","publisher":"Vieweg+Teubner Verlag","date_updated":"2023-03-21T10:03:35Z","author":[{"first_name":"Ulrich","full_name":"Hilleringmann, Ulrich","id":"20179","last_name":"Hilleringmann"}],"date_created":"2023-01-25T09:06:58Z"},{"page":"201-211","citation":{"chicago":"Burban, Igor, and Yu. Drozd. “Derived Categories and Matrix Problems.” In <i> Ukrainian Mathematical Congress 2001. Algebraic Structures and Their Applications. Proceedings of the Third International Algebraic Conference Held in Framework of the Ukrainian Mathematical Congress</i>, 201–11. Kyiv: Instytut Matematyky NAN Ukrainy, 2002.","ieee":"I. Burban and Yu. 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