@inproceedings{38489,
  author       = {{Plotz, F and Michaelis, S and Fattinger, G and Aigner, R and Noé, Reinhold}},
  booktitle    = {{TRANSDUCERS ‘01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2}},
  editor       = {{Obermeier, E}},
  isbn         = {{3-540-42150-5}},
  pages        = {{1560--1563}},
  title        = {{{Performance and dynamics of a RF MEMS switch}}},
  year         = {{2001}},
}