---
_id: '15363'
abstract:
- lang: eng
  text: The classical forms of noise present in the frequency of MEMS resonators have
    been recently investigated and described in detail. The present paper extends
    this investigation to 1/f noise. That is of fundamental nature in microelectromechanical
    systems (MEMS) resonators, and is given by the universal quantum 1/f effect. In
    recent years new piezoelectric and compound semiconductor materials have been
    developed along with advanced manufacturing technologies for MEMS including them.
    These technologies enable the deposition of thin compound semiconductor, or PZT
    films and their integration into MEMS devices.
author:
- first_name: Peter
  full_name: Handel, Peter
  last_name: Handel
- first_name: Bernd
  full_name: Henning, Bernd
  id: '213'
  last_name: Henning
citation:
  ama: 'Handel P, Henning B. 1/f-Frequency Fluctations and Phase Noise in MEMS Resonators.
    In: ; 2004:88-89.'
  apa: Handel, P., & Henning, B. (2004). 1/f-Frequency Fluctations and Phase Noise
    in MEMS Resonators (pp. 88–89). Presented at the 28th Workshop on Compound Semiconductor
    Devices and Integrated Circuits (WOCSDICE), Smolenice, Slovakia.
  bibtex: '@inproceedings{Handel_Henning_2004, title={1/f-Frequency Fluctations and
    Phase Noise in MEMS Resonators}, author={Handel, Peter and Henning, Bernd}, year={2004},
    pages={88–89} }'
  chicago: Handel, Peter, and Bernd Henning. “1/f-Frequency Fluctations and Phase
    Noise in MEMS Resonators,” 88–89, 2004.
  ieee: P. Handel and B. Henning, “1/f-Frequency Fluctations and Phase Noise in MEMS
    Resonators,” presented at the 28th Workshop on Compound Semiconductor Devices
    and Integrated Circuits (WOCSDICE), Smolenice, Slovakia, 2004, pp. 88–89.
  mla: Handel, Peter, and Bernd Henning. <i>1/f-Frequency Fluctations and Phase Noise
    in MEMS Resonators</i>. 2004, pp. 88–89.
  short: 'P. Handel, B. Henning, in: 2004, pp. 88–89.'
conference:
  end_date: 19.05.2014
  location: Smolenice, Slovakia
  name: 28th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE)
  start_date: 17.05.2004
date_created: 2019-12-17T15:57:33Z
date_updated: 2022-01-06T06:52:21Z
department:
- _id: '49'
language:
- iso: eng
page: 88-89
publication_identifier:
  isbn:
  - 80-2272050-X
status: public
title: 1/f-Frequency Fluctations and Phase Noise in MEMS Resonators
type: conference
user_id: '15911'
year: '2004'
...