[{"doi":"10.1007/978-3-658-23444-7","title":"Silizium-Halbleitertechnologie","author":[{"first_name":"Ulrich","full_name":"Hilleringmann, Ulrich","id":"20179","last_name":"Hilleringmann"}],"date_created":"2023-01-25T09:19:59Z","date_updated":"2023-03-21T09:54:10Z","publisher":"Springer Fachmedien Wiesbaden","citation":{"apa":"Hilleringmann, U. (2018). <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden. <a href=\"https://doi.org/10.1007/978-3-658-23444-7\">https://doi.org/10.1007/978-3-658-23444-7</a>","short":"U. Hilleringmann, Silizium-Halbleitertechnologie, Springer Fachmedien Wiesbaden, Wiesbaden, 2018.","mla":"Hilleringmann, Ulrich. <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden, 2018, doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7\">10.1007/978-3-658-23444-7</a>.","bibtex":"@book{Hilleringmann_2018, place={Wiesbaden}, title={Silizium-Halbleitertechnologie}, DOI={<a href=\"https://doi.org/10.1007/978-3-658-23444-7\">10.1007/978-3-658-23444-7</a>}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }","ieee":"U. Hilleringmann, <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2018.","chicago":"Hilleringmann, Ulrich. <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2018. <a href=\"https://doi.org/10.1007/978-3-658-23444-7\">https://doi.org/10.1007/978-3-658-23444-7</a>.","ama":"Hilleringmann U. <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden; 2018. doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7\">10.1007/978-3-658-23444-7</a>"},"place":"Wiesbaden","year":"2018","publication_identifier":{"isbn":["9783658234430","9783658234447"]},"publication_status":"published","language":[{"iso":"eng"}],"alternative_title":["Grundlagen mikroelektronischer Integrationstechnik"],"department":[{"_id":"59"}],"user_id":"20179","_id":"39898","status":"public","type":"book"},{"_id":"39428","user_id":"20179","department":[{"_id":"59"}],"language":[{"iso":"eng"}],"type":"book_chapter","publication":"Silizium-Halbleitertechnologie","status":"public","date_updated":"2023-03-21T10:10:52Z","publisher":"Springer Fachmedien Wiesbaden","date_created":"2023-01-24T10:42:26Z","author":[{"first_name":"Ulrich","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich","id":"20179"}],"title":"Ätztechnik","doi":"10.1007/978-3-658-23444-7_5","publication_status":"published","publication_identifier":{"isbn":["9783658234430","9783658234447"]},"year":"2018","place":"Wiesbaden","citation":{"short":"U. Hilleringmann, in: Silizium-Halbleitertechnologie, Springer Fachmedien Wiesbaden, Wiesbaden, 2018.","bibtex":"@inbook{Hilleringmann_2018, place={Wiesbaden}, title={Ätztechnik}, DOI={<a href=\"https://doi.org/10.1007/978-3-658-23444-7_5\">10.1007/978-3-658-23444-7_5</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }","mla":"Hilleringmann, Ulrich. “Ätztechnik.” <i>Silizium-Halbleitertechnologie</i>, Springer Fachmedien Wiesbaden, 2018, doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_5\">10.1007/978-3-658-23444-7_5</a>.","apa":"Hilleringmann, U. (2018). Ätztechnik. In <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_5\">https://doi.org/10.1007/978-3-658-23444-7_5</a>","ama":"Hilleringmann U. Ätztechnik. In: <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden; 2018. doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_5\">10.1007/978-3-658-23444-7_5</a>","chicago":"Hilleringmann, Ulrich. “Ätztechnik.” In <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2018. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_5\">https://doi.org/10.1007/978-3-658-23444-7_5</a>.","ieee":"U. Hilleringmann, “Ätztechnik,” in <i>Silizium-Halbleitertechnologie</i>, Wiesbaden: Springer Fachmedien Wiesbaden, 2018."}},{"place":"Wiesbaden","year":"2018","citation":{"bibtex":"@inbook{Hilleringmann_2018, place={Wiesbaden}, title={Oxidation des Siliziums}, DOI={<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }","mla":"Hilleringmann, Ulrich. “Oxidation Des Siliziums.” <i>Silizium-Halbleitertechnologie</i>, Springer Fachmedien Wiesbaden, 2018, doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>.","short":"U. Hilleringmann, in: Silizium-Halbleitertechnologie, Springer Fachmedien Wiesbaden, Wiesbaden, 2018.","apa":"Hilleringmann, U. (2018). Oxidation des Siliziums. In <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">https://doi.org/10.1007/978-3-658-23444-7_3</a>","chicago":"Hilleringmann, Ulrich. “Oxidation Des Siliziums.” In <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2018. <a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">https://doi.org/10.1007/978-3-658-23444-7_3</a>.","ieee":"U. Hilleringmann, “Oxidation des Siliziums,” in <i>Silizium-Halbleitertechnologie</i>, Wiesbaden: Springer Fachmedien Wiesbaden, 2018.","ama":"Hilleringmann U. Oxidation des Siliziums. In: <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden; 2018. doi:<a href=\"https://doi.org/10.1007/978-3-658-23444-7_3\">10.1007/978-3-658-23444-7_3</a>"},"publication_status":"published","publication_identifier":{"isbn":["9783658234430","9783658234447"]},"title":"Oxidation des Siliziums","doi":"10.1007/978-3-658-23444-7_3","publisher":"Springer Fachmedien Wiesbaden","date_updated":"2023-03-22T10:29:51Z","date_created":"2023-01-24T10:43:06Z","author":[{"full_name":"Hilleringmann, Ulrich","id":"20179","last_name":"Hilleringmann","first_name":"Ulrich"}],"status":"public","type":"book_chapter","publication":"Silizium-Halbleitertechnologie","language":[{"iso":"eng"}],"_id":"39429","user_id":"20179","department":[{"_id":"59"}]}]