@book{39898,
  author       = {{Hilleringmann, Ulrich}},
  isbn         = {{9783658234430}},
  publisher    = {{Springer Fachmedien Wiesbaden}},
  title        = {{{Silizium-Halbleitertechnologie}}},
  doi          = {{10.1007/978-3-658-23444-7}},
  year         = {{2018}},
}

@inbook{39428,
  author       = {{Hilleringmann, Ulrich}},
  booktitle    = {{Silizium-Halbleitertechnologie}},
  isbn         = {{9783658234430}},
  publisher    = {{Springer Fachmedien Wiesbaden}},
  title        = {{{Ätztechnik}}},
  doi          = {{10.1007/978-3-658-23444-7_5}},
  year         = {{2018}},
}

@inbook{39429,
  author       = {{Hilleringmann, Ulrich}},
  booktitle    = {{Silizium-Halbleitertechnologie}},
  isbn         = {{9783658234430}},
  publisher    = {{Springer Fachmedien Wiesbaden}},
  title        = {{{Oxidation des Siliziums}}},
  doi          = {{10.1007/978-3-658-23444-7_3}},
  year         = {{2018}},
}