@inbook{39501,
  author       = {{Hilleringmann, Ulrich}},
  booktitle    = {{Silizium-Halbleitertechnologie}},
  isbn         = {{9783834813350}},
  publisher    = {{Springer Fachmedien Wiesbaden}},
  title        = {{{Lithografie}}},
  doi          = {{10.1007/978-3-8348-2085-3_4}},
  year         = {{2014}},
}