[{"date_updated":"2023-03-22T10:10:23Z","publication_status":"published","status":"public","year":"2014","title":"Lithografie","author":[{"first_name":"Ulrich","last_name":"Hilleringmann","full_name":"Hilleringmann, Ulrich","id":"20179"}],"publication_identifier":{"isbn":["9783834813350","9783834820853"]},"doi":"10.1007/978-3-8348-2085-3_4","user_id":"20179","publisher":"Springer Fachmedien Wiesbaden","_id":"39501","language":[{"iso":"eng"}],"publication":"Silizium-Halbleitertechnologie","citation":{"ieee":"U. Hilleringmann, “Lithografie,” in <i>Silizium-Halbleitertechnologie</i>, Wiesbaden: Springer Fachmedien Wiesbaden, 2014.","apa":"Hilleringmann, U. (2014). Lithografie. In <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden. <a href=\"https://doi.org/10.1007/978-3-8348-2085-3_4\">https://doi.org/10.1007/978-3-8348-2085-3_4</a>","short":"U. Hilleringmann, in: Silizium-Halbleitertechnologie, Springer Fachmedien Wiesbaden, Wiesbaden, 2014.","chicago":"Hilleringmann, Ulrich. “Lithografie.” In <i>Silizium-Halbleitertechnologie</i>. Wiesbaden: Springer Fachmedien Wiesbaden, 2014. <a href=\"https://doi.org/10.1007/978-3-8348-2085-3_4\">https://doi.org/10.1007/978-3-8348-2085-3_4</a>.","mla":"Hilleringmann, Ulrich. “Lithografie.” <i>Silizium-Halbleitertechnologie</i>, Springer Fachmedien Wiesbaden, 2014, doi:<a href=\"https://doi.org/10.1007/978-3-8348-2085-3_4\">10.1007/978-3-8348-2085-3_4</a>.","bibtex":"@inbook{Hilleringmann_2014, place={Wiesbaden}, title={Lithografie}, DOI={<a href=\"https://doi.org/10.1007/978-3-8348-2085-3_4\">10.1007/978-3-8348-2085-3_4</a>}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2014} }","ama":"Hilleringmann U. Lithografie. In: <i>Silizium-Halbleitertechnologie</i>. Springer Fachmedien Wiesbaden; 2014. doi:<a href=\"https://doi.org/10.1007/978-3-8348-2085-3_4\">10.1007/978-3-8348-2085-3_4</a>"},"type":"book_chapter","department":[{"_id":"59"}],"place":"Wiesbaden","date_created":"2023-01-24T11:44:13Z"}]