--- _id: '29694' article_number: '2120' author: - first_name: A. full_name: Thomas, A. last_name: Thomas - first_name: H. full_name: Brückl, H. last_name: Brückl - first_name: Marc full_name: Sacher, Marc id: '26883' last_name: Sacher - first_name: J. full_name: Schmalhorst, J. last_name: Schmalhorst - first_name: G. full_name: Reiss, G. last_name: Reiss citation: ama: 'Thomas A, Brückl H, Sacher M, Schmalhorst J, Reiss G. Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2003;21(5). doi:10.1116/1.1609480' apa: 'Thomas, A., Brückl, H., Sacher, M., Schmalhorst, J., & Reiss, G. (2003). Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 21(5), Article 2120. https://doi.org/10.1116/1.1609480' bibtex: '@article{Thomas_Brückl_Sacher_Schmalhorst_Reiss_2003, title={Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions}, volume={21}, DOI={10.1116/1.1609480}, number={52120}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, publisher={American Vacuum Society}, author={Thomas, A. and Brückl, H. and Sacher, Marc and Schmalhorst, J. and Reiss, G.}, year={2003} }' chicago: 'Thomas, A., H. Brückl, Marc Sacher, J. Schmalhorst, and G. Reiss. “Aluminum Oxidation by a Remote Electron Cyclotron Resonance Plasma in Magnetic Tunnel Junctions.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21, no. 5 (2003). https://doi.org/10.1116/1.1609480.' ieee: 'A. Thomas, H. Brückl, M. Sacher, J. Schmalhorst, and G. Reiss, “Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 5, Art. no. 2120, 2003, doi: 10.1116/1.1609480.' mla: 'Thomas, A., et al. “Aluminum Oxidation by a Remote Electron Cyclotron Resonance Plasma in Magnetic Tunnel Junctions.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 5, 2120, American Vacuum Society, 2003, doi:10.1116/1.1609480.' short: 'A. Thomas, H. Brückl, M. Sacher, J. Schmalhorst, G. Reiss, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (2003).' date_created: 2022-01-31T10:26:12Z date_updated: 2022-01-31T10:26:31Z department: - _id: '15' - _id: '576' doi: 10.1116/1.1609480 extern: '1' intvolume: ' 21' issue: '5' keyword: - General Engineering language: - iso: eng publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures' publication_identifier: issn: - 0734-211X publication_status: published publisher: American Vacuum Society status: public title: Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions type: journal_article user_id: '26883' volume: 21 year: '2003' ... --- _id: '13751' article_number: '1756' author: - first_name: N. full_name: Esser, N. last_name: Esser - first_name: Wolf Gero full_name: Schmidt, Wolf Gero id: '468' last_name: Schmidt orcid: 0000-0002-2717-5076 - first_name: C. full_name: Cobet, C. last_name: Cobet - first_name: K. full_name: Fleischer, K. last_name: Fleischer - first_name: A. I. full_name: Shkrebtii, A. I. last_name: Shkrebtii - first_name: B. O. full_name: Fimland, B. O. last_name: Fimland - first_name: W. full_name: Richter, W. last_name: Richter citation: ama: 'Esser N, Schmidt WG, Cobet C, et al. Atomic structure and optical anisotropy of III–V(001) surfaces. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2001;19(5). doi:10.1116/1.1394730' apa: 'Esser, N., Schmidt, W. G., Cobet, C., Fleischer, K., Shkrebtii, A. I., Fimland, B. O., & Richter, W. (2001). Atomic structure and optical anisotropy of III–V(001) surfaces. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 19(5). https://doi.org/10.1116/1.1394730' bibtex: '@article{Esser_Schmidt_Cobet_Fleischer_Shkrebtii_Fimland_Richter_2001, title={Atomic structure and optical anisotropy of III–V(001) surfaces}, volume={19}, DOI={10.1116/1.1394730}, number={51756}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, author={Esser, N. and Schmidt, Wolf Gero and Cobet, C. and Fleischer, K. and Shkrebtii, A. I. and Fimland, B. O. and Richter, W.}, year={2001} }' chicago: 'Esser, N., Wolf Gero Schmidt, C. Cobet, K. Fleischer, A. I. Shkrebtii, B. O. Fimland, and W. Richter. “Atomic Structure and Optical Anisotropy of III–V(001) Surfaces.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 19, no. 5 (2001). https://doi.org/10.1116/1.1394730.' ieee: 'N. Esser et al., “Atomic structure and optical anisotropy of III–V(001) surfaces,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 19, no. 5, 2001.' mla: 'Esser, N., et al. “Atomic Structure and Optical Anisotropy of III–V(001) Surfaces.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 19, no. 5, 1756, 2001, doi:10.1116/1.1394730.' short: 'N. Esser, W.G. Schmidt, C. Cobet, K. Fleischer, A.I. Shkrebtii, B.O. Fimland, W. Richter, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 19 (2001).' date_created: 2019-10-10T12:05:50Z date_updated: 2022-01-06T06:51:43Z department: - _id: '15' - _id: '170' - _id: '295' doi: 10.1116/1.1394730 funded_apc: '1' intvolume: ' 19' issue: '5' language: - iso: eng publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures' publication_identifier: issn: - 0734-211X publication_status: published status: public title: Atomic structure and optical anisotropy of III–V(001) surfaces type: journal_article user_id: '16199' volume: 19 year: '2001' ... --- _id: '13761' article_number: '2215' author: - first_name: Wolf Gero full_name: Schmidt, Wolf Gero id: '468' last_name: Schmidt orcid: 0000-0002-2717-5076 - first_name: F. full_name: Bechstedt, F. last_name: Bechstedt - first_name: J. full_name: Bernholc, J. last_name: Bernholc citation: ama: 'Schmidt WG, Bechstedt F, Bernholc J. Understanding reflectance anisotropy: Surface-state signatures and bulk-related features. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 2000;18(4). doi:10.1116/1.1305289' apa: 'Schmidt, W. G., Bechstedt, F., & Bernholc, J. (2000). Understanding reflectance anisotropy: Surface-state signatures and bulk-related features. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 18(4). https://doi.org/10.1116/1.1305289' bibtex: '@article{Schmidt_Bechstedt_Bernholc_2000, title={Understanding reflectance anisotropy: Surface-state signatures and bulk-related features}, volume={18}, DOI={10.1116/1.1305289}, number={42215}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, author={Schmidt, Wolf Gero and Bechstedt, F. and Bernholc, J.}, year={2000} }' chicago: 'Schmidt, Wolf Gero, F. Bechstedt, and J. Bernholc. “Understanding Reflectance Anisotropy: Surface-State Signatures and Bulk-Related Features.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 18, no. 4 (2000). https://doi.org/10.1116/1.1305289.' ieee: 'W. G. Schmidt, F. Bechstedt, and J. Bernholc, “Understanding reflectance anisotropy: Surface-state signatures and bulk-related features,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 18, no. 4, 2000.' mla: 'Schmidt, Wolf Gero, et al. “Understanding Reflectance Anisotropy: Surface-State Signatures and Bulk-Related Features.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 18, no. 4, 2215, 2000, doi:10.1116/1.1305289.' short: 'W.G. Schmidt, F. Bechstedt, J. Bernholc, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 18 (2000).' date_created: 2019-10-10T12:45:27Z date_updated: 2022-01-06T06:51:43Z department: - _id: '15' - _id: '170' - _id: '295' doi: 10.1116/1.1305289 intvolume: ' 18' issue: '4' language: - iso: eng publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures' publication_identifier: issn: - 0734-211X publication_status: published status: public title: 'Understanding reflectance anisotropy: Surface-state signatures and bulk-related features' type: journal_article user_id: '16199' volume: 18 year: '2000' ... --- _id: '13767' article_number: '1691' author: - first_name: N. full_name: Esser, N. last_name: Esser - first_name: Wolf Gero full_name: Schmidt, Wolf Gero id: '468' last_name: Schmidt orcid: 0000-0002-2717-5076 - first_name: J. full_name: Bernholc, J. last_name: Bernholc - first_name: A. M. full_name: Frisch, A. M. last_name: Frisch - first_name: P. full_name: Vogt, P. last_name: Vogt - first_name: M. full_name: Zorn, M. last_name: Zorn - first_name: M. full_name: Pristovsek, M. last_name: Pristovsek - first_name: W. full_name: Richter, W. last_name: Richter - first_name: F. full_name: Bechstedt, F. last_name: Bechstedt - first_name: Th. full_name: Hannappel, Th. last_name: Hannappel - first_name: S. full_name: Visbeck, S. last_name: Visbeck citation: ama: 'Esser N, Schmidt WG, Bernholc J, et al. GaP(001) and InP(001): Reflectance anisotropy and surface geometry. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 1999;17(4). doi:10.1116/1.590810' apa: 'Esser, N., Schmidt, W. G., Bernholc, J., Frisch, A. M., Vogt, P., Zorn, M., … Visbeck, S. (1999). GaP(001) and InP(001): Reflectance anisotropy and surface geometry. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 17(4). https://doi.org/10.1116/1.590810' bibtex: '@article{Esser_Schmidt_Bernholc_Frisch_Vogt_Zorn_Pristovsek_Richter_Bechstedt_Hannappel_et al._1999, title={GaP(001) and InP(001): Reflectance anisotropy and surface geometry}, volume={17}, DOI={10.1116/1.590810}, number={41691}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}, author={Esser, N. and Schmidt, Wolf Gero and Bernholc, J. and Frisch, A. M. and Vogt, P. and Zorn, M. and Pristovsek, M. and Richter, W. and Bechstedt, F. and Hannappel, Th. and et al.}, year={1999} }' chicago: 'Esser, N., Wolf Gero Schmidt, J. Bernholc, A. M. Frisch, P. Vogt, M. Zorn, M. Pristovsek, et al. “GaP(001) and InP(001): Reflectance Anisotropy and Surface Geometry.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 17, no. 4 (1999). https://doi.org/10.1116/1.590810.' ieee: 'N. Esser et al., “GaP(001) and InP(001): Reflectance anisotropy and surface geometry,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 17, no. 4, 1999.' mla: 'Esser, N., et al. “GaP(001) and InP(001): Reflectance Anisotropy and Surface Geometry.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 17, no. 4, 1691, 1999, doi:10.1116/1.590810.' short: 'N. Esser, W.G. Schmidt, J. Bernholc, A.M. Frisch, P. Vogt, M. Zorn, M. Pristovsek, W. Richter, F. Bechstedt, T. Hannappel, S. Visbeck, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 17 (1999).' date_created: 2019-10-10T13:02:11Z date_updated: 2022-01-06T06:51:43Z department: - _id: '15' - _id: '170' - _id: '295' doi: 10.1116/1.590810 funded_apc: '1' intvolume: ' 17' issue: '4' language: - iso: eng publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures' publication_identifier: issn: - 0734-211X publication_status: published status: public title: 'GaP(001) and InP(001): Reflectance anisotropy and surface geometry' type: journal_article user_id: '16199' volume: 17 year: '1999' ...