---
_id: '29694'
article_number: '2120'
author:
- first_name: A.
full_name: Thomas, A.
last_name: Thomas
- first_name: H.
full_name: Brückl, H.
last_name: Brückl
- first_name: Marc
full_name: Sacher, Marc
id: '26883'
last_name: Sacher
- first_name: J.
full_name: Schmalhorst, J.
last_name: Schmalhorst
- first_name: G.
full_name: Reiss, G.
last_name: Reiss
citation:
ama: 'Thomas A, Brückl H, Sacher M, Schmalhorst J, Reiss G. Aluminum oxidation
by a remote electron cyclotron resonance plasma in magnetic tunnel junctions.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures. 2003;21(5). doi:10.1116/1.1609480'
apa: 'Thomas, A., Brückl, H., Sacher, M., Schmalhorst, J., & Reiss, G. (2003).
Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic
tunnel junctions. Journal of Vacuum Science & Technology B: Microelectronics
and Nanometer Structures, 21(5), Article 2120. https://doi.org/10.1116/1.1609480'
bibtex: '@article{Thomas_Brückl_Sacher_Schmalhorst_Reiss_2003, title={Aluminum
oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions},
volume={21}, DOI={10.1116/1.1609480},
number={52120}, journal={Journal of Vacuum Science & Technology B: Microelectronics
and Nanometer Structures}, publisher={American Vacuum Society}, author={Thomas,
A. and Brückl, H. and Sacher, Marc and Schmalhorst, J. and Reiss, G.}, year={2003}
}'
chicago: 'Thomas, A., H. Brückl, Marc Sacher, J. Schmalhorst, and G. Reiss. “Aluminum
Oxidation by a Remote Electron Cyclotron Resonance Plasma in Magnetic Tunnel Junctions.”
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures 21, no. 5 (2003). https://doi.org/10.1116/1.1609480.'
ieee: 'A. Thomas, H. Brückl, M. Sacher, J. Schmalhorst, and G. Reiss, “Aluminum
oxidation by a remote electron cyclotron resonance plasma in magnetic tunnel junctions,”
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures, vol. 21, no. 5, Art. no. 2120, 2003, doi: 10.1116/1.1609480.'
mla: 'Thomas, A., et al. “Aluminum Oxidation by a Remote Electron Cyclotron Resonance
Plasma in Magnetic Tunnel Junctions.” Journal of Vacuum Science & Technology
B: Microelectronics and Nanometer Structures, vol. 21, no. 5, 2120, American
Vacuum Society, 2003, doi:10.1116/1.1609480.'
short: 'A. Thomas, H. Brückl, M. Sacher, J. Schmalhorst, G. Reiss, Journal of Vacuum
Science & Technology B: Microelectronics and Nanometer Structures 21 (2003).'
date_created: 2022-01-31T10:26:12Z
date_updated: 2022-01-31T10:26:31Z
department:
- _id: '15'
- _id: '576'
doi: 10.1116/1.1609480
extern: '1'
intvolume: ' 21'
issue: '5'
keyword:
- General Engineering
language:
- iso: eng
publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures'
publication_identifier:
issn:
- 0734-211X
publication_status: published
publisher: American Vacuum Society
status: public
title: Aluminum oxidation by a remote electron cyclotron resonance plasma in magnetic
tunnel junctions
type: journal_article
user_id: '26883'
volume: 21
year: '2003'
...
---
_id: '13751'
article_number: '1756'
author:
- first_name: N.
full_name: Esser, N.
last_name: Esser
- first_name: Wolf Gero
full_name: Schmidt, Wolf Gero
id: '468'
last_name: Schmidt
orcid: 0000-0002-2717-5076
- first_name: C.
full_name: Cobet, C.
last_name: Cobet
- first_name: K.
full_name: Fleischer, K.
last_name: Fleischer
- first_name: A. I.
full_name: Shkrebtii, A. I.
last_name: Shkrebtii
- first_name: B. O.
full_name: Fimland, B. O.
last_name: Fimland
- first_name: W.
full_name: Richter, W.
last_name: Richter
citation:
ama: 'Esser N, Schmidt WG, Cobet C, et al. Atomic structure and optical anisotropy
of III–V(001) surfaces. Journal of Vacuum Science & Technology B: Microelectronics
and Nanometer Structures. 2001;19(5). doi:10.1116/1.1394730'
apa: 'Esser, N., Schmidt, W. G., Cobet, C., Fleischer, K., Shkrebtii, A. I., Fimland,
B. O., & Richter, W. (2001). Atomic structure and optical anisotropy of III–V(001)
surfaces. Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, 19(5). https://doi.org/10.1116/1.1394730'
bibtex: '@article{Esser_Schmidt_Cobet_Fleischer_Shkrebtii_Fimland_Richter_2001,
title={Atomic structure and optical anisotropy of III–V(001) surfaces}, volume={19},
DOI={10.1116/1.1394730}, number={51756},
journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures}, author={Esser, N. and Schmidt, Wolf Gero and Cobet, C. and Fleischer,
K. and Shkrebtii, A. I. and Fimland, B. O. and Richter, W.}, year={2001} }'
chicago: 'Esser, N., Wolf Gero Schmidt, C. Cobet, K. Fleischer, A. I. Shkrebtii,
B. O. Fimland, and W. Richter. “Atomic Structure and Optical Anisotropy of III–V(001)
Surfaces.” Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures 19, no. 5 (2001). https://doi.org/10.1116/1.1394730.'
ieee: 'N. Esser et al., “Atomic structure and optical anisotropy of III–V(001)
surfaces,” Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, vol. 19, no. 5, 2001.'
mla: 'Esser, N., et al. “Atomic Structure and Optical Anisotropy of III–V(001) Surfaces.”
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures, vol. 19, no. 5, 1756, 2001, doi:10.1116/1.1394730.'
short: 'N. Esser, W.G. Schmidt, C. Cobet, K. Fleischer, A.I. Shkrebtii, B.O. Fimland,
W. Richter, Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures 19 (2001).'
date_created: 2019-10-10T12:05:50Z
date_updated: 2022-01-06T06:51:43Z
department:
- _id: '15'
- _id: '170'
- _id: '295'
doi: 10.1116/1.1394730
funded_apc: '1'
intvolume: ' 19'
issue: '5'
language:
- iso: eng
publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures'
publication_identifier:
issn:
- 0734-211X
publication_status: published
status: public
title: Atomic structure and optical anisotropy of III–V(001) surfaces
type: journal_article
user_id: '16199'
volume: 19
year: '2001'
...
---
_id: '13761'
article_number: '2215'
author:
- first_name: Wolf Gero
full_name: Schmidt, Wolf Gero
id: '468'
last_name: Schmidt
orcid: 0000-0002-2717-5076
- first_name: F.
full_name: Bechstedt, F.
last_name: Bechstedt
- first_name: J.
full_name: Bernholc, J.
last_name: Bernholc
citation:
ama: 'Schmidt WG, Bechstedt F, Bernholc J. Understanding reflectance anisotropy:
Surface-state signatures and bulk-related features. Journal of Vacuum Science
& Technology B: Microelectronics and Nanometer Structures. 2000;18(4).
doi:10.1116/1.1305289'
apa: 'Schmidt, W. G., Bechstedt, F., & Bernholc, J. (2000). Understanding reflectance
anisotropy: Surface-state signatures and bulk-related features. Journal of
Vacuum Science & Technology B: Microelectronics and Nanometer Structures,
18(4). https://doi.org/10.1116/1.1305289'
bibtex: '@article{Schmidt_Bechstedt_Bernholc_2000, title={Understanding reflectance
anisotropy: Surface-state signatures and bulk-related features}, volume={18},
DOI={10.1116/1.1305289}, number={42215},
journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures}, author={Schmidt, Wolf Gero and Bechstedt, F. and Bernholc, J.}, year={2000}
}'
chicago: 'Schmidt, Wolf Gero, F. Bechstedt, and J. Bernholc. “Understanding Reflectance
Anisotropy: Surface-State Signatures and Bulk-Related Features.” Journal of
Vacuum Science & Technology B: Microelectronics and Nanometer Structures
18, no. 4 (2000). https://doi.org/10.1116/1.1305289.'
ieee: 'W. G. Schmidt, F. Bechstedt, and J. Bernholc, “Understanding reflectance
anisotropy: Surface-state signatures and bulk-related features,” Journal of
Vacuum Science & Technology B: Microelectronics and Nanometer Structures,
vol. 18, no. 4, 2000.'
mla: 'Schmidt, Wolf Gero, et al. “Understanding Reflectance Anisotropy: Surface-State
Signatures and Bulk-Related Features.” Journal of Vacuum Science & Technology
B: Microelectronics and Nanometer Structures, vol. 18, no. 4, 2215, 2000,
doi:10.1116/1.1305289.'
short: 'W.G. Schmidt, F. Bechstedt, J. Bernholc, Journal of Vacuum Science &
Technology B: Microelectronics and Nanometer Structures 18 (2000).'
date_created: 2019-10-10T12:45:27Z
date_updated: 2022-01-06T06:51:43Z
department:
- _id: '15'
- _id: '170'
- _id: '295'
doi: 10.1116/1.1305289
intvolume: ' 18'
issue: '4'
language:
- iso: eng
publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures'
publication_identifier:
issn:
- 0734-211X
publication_status: published
status: public
title: 'Understanding reflectance anisotropy: Surface-state signatures and bulk-related
features'
type: journal_article
user_id: '16199'
volume: 18
year: '2000'
...
---
_id: '13767'
article_number: '1691'
author:
- first_name: N.
full_name: Esser, N.
last_name: Esser
- first_name: Wolf Gero
full_name: Schmidt, Wolf Gero
id: '468'
last_name: Schmidt
orcid: 0000-0002-2717-5076
- first_name: J.
full_name: Bernholc, J.
last_name: Bernholc
- first_name: A. M.
full_name: Frisch, A. M.
last_name: Frisch
- first_name: P.
full_name: Vogt, P.
last_name: Vogt
- first_name: M.
full_name: Zorn, M.
last_name: Zorn
- first_name: M.
full_name: Pristovsek, M.
last_name: Pristovsek
- first_name: W.
full_name: Richter, W.
last_name: Richter
- first_name: F.
full_name: Bechstedt, F.
last_name: Bechstedt
- first_name: Th.
full_name: Hannappel, Th.
last_name: Hannappel
- first_name: S.
full_name: Visbeck, S.
last_name: Visbeck
citation:
ama: 'Esser N, Schmidt WG, Bernholc J, et al. GaP(001) and InP(001): Reflectance
anisotropy and surface geometry. Journal of Vacuum Science & Technology
B: Microelectronics and Nanometer Structures. 1999;17(4). doi:10.1116/1.590810'
apa: 'Esser, N., Schmidt, W. G., Bernholc, J., Frisch, A. M., Vogt, P., Zorn, M.,
… Visbeck, S. (1999). GaP(001) and InP(001): Reflectance anisotropy and surface
geometry. Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, 17(4). https://doi.org/10.1116/1.590810'
bibtex: '@article{Esser_Schmidt_Bernholc_Frisch_Vogt_Zorn_Pristovsek_Richter_Bechstedt_Hannappel_et
al._1999, title={GaP(001) and InP(001): Reflectance anisotropy and surface geometry},
volume={17}, DOI={10.1116/1.590810},
number={41691}, journal={Journal of Vacuum Science & Technology B: Microelectronics
and Nanometer Structures}, author={Esser, N. and Schmidt, Wolf Gero and Bernholc,
J. and Frisch, A. M. and Vogt, P. and Zorn, M. and Pristovsek, M. and Richter,
W. and Bechstedt, F. and Hannappel, Th. and et al.}, year={1999} }'
chicago: 'Esser, N., Wolf Gero Schmidt, J. Bernholc, A. M. Frisch, P. Vogt, M. Zorn,
M. Pristovsek, et al. “GaP(001) and InP(001): Reflectance Anisotropy and Surface
Geometry.” Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures 17, no. 4 (1999). https://doi.org/10.1116/1.590810.'
ieee: 'N. Esser et al., “GaP(001) and InP(001): Reflectance anisotropy and
surface geometry,” Journal of Vacuum Science & Technology B: Microelectronics
and Nanometer Structures, vol. 17, no. 4, 1999.'
mla: 'Esser, N., et al. “GaP(001) and InP(001): Reflectance Anisotropy and Surface
Geometry.” Journal of Vacuum Science & Technology B: Microelectronics and
Nanometer Structures, vol. 17, no. 4, 1691, 1999, doi:10.1116/1.590810.'
short: 'N. Esser, W.G. Schmidt, J. Bernholc, A.M. Frisch, P. Vogt, M. Zorn, M. Pristovsek,
W. Richter, F. Bechstedt, T. Hannappel, S. Visbeck, Journal of Vacuum Science
& Technology B: Microelectronics and Nanometer Structures 17 (1999).'
date_created: 2019-10-10T13:02:11Z
date_updated: 2022-01-06T06:51:43Z
department:
- _id: '15'
- _id: '170'
- _id: '295'
doi: 10.1116/1.590810
funded_apc: '1'
intvolume: ' 17'
issue: '4'
language:
- iso: eng
publication: 'Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures'
publication_identifier:
issn:
- 0734-211X
publication_status: published
status: public
title: 'GaP(001) and InP(001): Reflectance anisotropy and surface geometry'
type: journal_article
user_id: '16199'
volume: 17
year: '1999'
...