---
_id: '22538'
article_number: '103256'
author:
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Hendrik
  full_name: Müller, Hendrik
  last_name: Müller
- first_name: Fuzeng
  full_name: Wang, Fuzeng
  last_name: Wang
- first_name: Varun Raj
  full_name: Damerla, Varun Raj
  last_name: Damerla
- first_name: Christian
  full_name: Hoppe, Christian
  last_name: Hoppe
- first_name: Christian
  full_name: Weinberger, Christian
  last_name: Weinberger
- first_name: Michael
  full_name: Tiemann, Michael
  last_name: Tiemann
- first_name: Guido
  full_name: Grundmeier, Guido
  last_name: Grundmeier
citation:
  ama: de los Arcos de Pedro MT, Müller H, Wang F, et al. Review of infrared spectroscopy
    techniques for the determination of internal structure in thin SiO2 films. <i>Vibrational
    Spectroscopy</i>. Published online 2021. doi:<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>
  apa: de los Arcos de Pedro, M. T., Müller, H., Wang, F., Damerla, V. R., Hoppe,
    C., Weinberger, C., Tiemann, M., &#38; Grundmeier, G. (2021). Review of infrared
    spectroscopy techniques for the determination of internal structure in thin SiO2
    films. <i>Vibrational Spectroscopy</i>, Article 103256. <a href="https://doi.org/10.1016/j.vibspec.2021.103256">https://doi.org/10.1016/j.vibspec.2021.103256</a>
  bibtex: '@article{de los Arcos de Pedro_Müller_Wang_Damerla_Hoppe_Weinberger_Tiemann_Grundmeier_2021,
    title={Review of infrared spectroscopy techniques for the determination of internal
    structure in thin SiO2 films}, DOI={<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>},
    number={103256}, journal={Vibrational Spectroscopy}, author={de los Arcos de Pedro,
    Maria Teresa and Müller, Hendrik and Wang, Fuzeng and Damerla, Varun Raj and Hoppe,
    Christian and Weinberger, Christian and Tiemann, Michael and Grundmeier, Guido},
    year={2021} }'
  chicago: Arcos de Pedro, Maria Teresa de los, Hendrik Müller, Fuzeng Wang, Varun
    Raj Damerla, Christian Hoppe, Christian Weinberger, Michael Tiemann, and Guido
    Grundmeier. “Review of Infrared Spectroscopy Techniques for the Determination
    of Internal Structure in Thin SiO2 Films.” <i>Vibrational Spectroscopy</i>, 2021.
    <a href="https://doi.org/10.1016/j.vibspec.2021.103256">https://doi.org/10.1016/j.vibspec.2021.103256</a>.
  ieee: 'M. T. de los Arcos de Pedro <i>et al.</i>, “Review of infrared spectroscopy
    techniques for the determination of internal structure in thin SiO2 films,” <i>Vibrational
    Spectroscopy</i>, Art. no. 103256, 2021, doi: <a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>.'
  mla: de los Arcos de Pedro, Maria Teresa, et al. “Review of Infrared Spectroscopy
    Techniques for the Determination of Internal Structure in Thin SiO2 Films.” <i>Vibrational
    Spectroscopy</i>, 103256, 2021, doi:<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>.
  short: M.T. de los Arcos de Pedro, H. Müller, F. Wang, V.R. Damerla, C. Hoppe, C.
    Weinberger, M. Tiemann, G. Grundmeier, Vibrational Spectroscopy (2021).
date_created: 2021-07-07T08:37:38Z
date_updated: 2023-01-24T08:32:59Z
department:
- _id: '302'
doi: 10.1016/j.vibspec.2021.103256
language:
- iso: eng
publication: Vibrational Spectroscopy
publication_identifier:
  issn:
  - 0924-2031
publication_status: published
status: public
title: Review of infrared spectroscopy techniques for the determination of internal
  structure in thin SiO2 films
type: journal_article
user_id: '54556'
year: '2021'
...
---
_id: '25897'
abstract:
- lang: eng
  text: A comparison of infrared spectroscopic analytical approaches was made in order
    to assess their applicability for internal structure characterization of SiO2
    thin films. Markers for porosity and/or disorder based on the analysis of the
    asymmetric stretching absorption band of SiO2 between 900−1350 cm−1 were discussed.
    The shape of this band, which shows a well-defined LO–TO splitting, depends not
    only on the inherent characteristics of the film under analysis but also on the
    particular geometry of the IR experiment and the specific surface selection rules
    of the substrate. Three types of SiO2 thin films with clearly defined porosity
    ranging from dense films to mesoporous films were investigated by transmission
    (at different incidence angles), direct specular reflection (at different angles),
    and diffuse reflection. Two different types of substrate, metallic and semiconducting,
    were used. The combined effect of substrate and specific technique in the final
    shape of the band, was discussed, and the efficacy for their applicability to
    the determination of porosity in thin SiO2 films was critically evaluated.
article_number: '103256'
article_type: original
author:
- first_name: Teresa
  full_name: de los Arcos, Teresa
  last_name: de los Arcos
- first_name: Hendrik
  full_name: Müller, Hendrik
  last_name: Müller
- first_name: Fuzeng
  full_name: Wang, Fuzeng
  last_name: Wang
- first_name: Varun Raj
  full_name: Damerla, Varun Raj
  last_name: Damerla
- first_name: Christian
  full_name: Hoppe, Christian
  last_name: Hoppe
- first_name: Christian
  full_name: Weinberger, Christian
  id: '11848'
  last_name: Weinberger
- first_name: Michael
  full_name: Tiemann, Michael
  id: '23547'
  last_name: Tiemann
  orcid: 0000-0003-1711-2722
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: de los Arcos T, Müller H, Wang F, et al. Review of infrared spectroscopy techniques
    for the determination of internal structure in thin SiO2 films. <i>Vibrational
    Spectroscopy</i>. Published online 2021. doi:<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>
  apa: de los Arcos, T., Müller, H., Wang, F., Damerla, V. R., Hoppe, C., Weinberger,
    C., Tiemann, M., &#38; Grundmeier, G. (2021). Review of infrared spectroscopy
    techniques for the determination of internal structure in thin SiO2 films. <i>Vibrational
    Spectroscopy</i>, Article 103256. <a href="https://doi.org/10.1016/j.vibspec.2021.103256">https://doi.org/10.1016/j.vibspec.2021.103256</a>
  bibtex: '@article{de los Arcos_Müller_Wang_Damerla_Hoppe_Weinberger_Tiemann_Grundmeier_2021,
    title={Review of infrared spectroscopy techniques for the determination of internal
    structure in thin SiO2 films}, DOI={<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>},
    number={103256}, journal={Vibrational Spectroscopy}, author={de los Arcos, Teresa
    and Müller, Hendrik and Wang, Fuzeng and Damerla, Varun Raj and Hoppe, Christian
    and Weinberger, Christian and Tiemann, Michael and Grundmeier, Guido}, year={2021}
    }'
  chicago: Arcos, Teresa de los, Hendrik Müller, Fuzeng Wang, Varun Raj Damerla, Christian
    Hoppe, Christian Weinberger, Michael Tiemann, and Guido Grundmeier. “Review of
    Infrared Spectroscopy Techniques for the Determination of Internal Structure in
    Thin SiO2 Films.” <i>Vibrational Spectroscopy</i>, 2021. <a href="https://doi.org/10.1016/j.vibspec.2021.103256">https://doi.org/10.1016/j.vibspec.2021.103256</a>.
  ieee: 'T. de los Arcos <i>et al.</i>, “Review of infrared spectroscopy techniques
    for the determination of internal structure in thin SiO2 films,” <i>Vibrational
    Spectroscopy</i>, Art. no. 103256, 2021, doi: <a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>.'
  mla: de los Arcos, Teresa, et al. “Review of Infrared Spectroscopy Techniques for
    the Determination of Internal Structure in Thin SiO2 Films.” <i>Vibrational Spectroscopy</i>,
    103256, 2021, doi:<a href="https://doi.org/10.1016/j.vibspec.2021.103256">10.1016/j.vibspec.2021.103256</a>.
  short: T. de los Arcos, H. Müller, F. Wang, V.R. Damerla, C. Hoppe, C. Weinberger,
    M. Tiemann, G. Grundmeier, Vibrational Spectroscopy (2021).
date_created: 2021-10-08T10:09:45Z
date_updated: 2023-03-07T10:44:06Z
department:
- _id: '35'
- _id: '2'
- _id: '307'
- _id: '302'
doi: 10.1016/j.vibspec.2021.103256
language:
- iso: eng
publication: Vibrational Spectroscopy
publication_identifier:
  issn:
  - 0924-2031
publication_status: published
quality_controlled: '1'
status: public
title: Review of infrared spectroscopy techniques for the determination of internal
  structure in thin SiO2 films
type: journal_article
user_id: '23547'
year: '2021'
...
---
_id: '22621'
author:
- first_name: C
  full_name: Domingo, C
  last_name: Domingo
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: A
  full_name: Ainetschian, A
  last_name: Ainetschian
- first_name: M.M
  full_name: Sanz, M.M
  last_name: Sanz
- first_name: I
  full_name: Tanarro, I
  last_name: Tanarro
citation:
  ama: Domingo C, de los Arcos de Pedro MT, Ainetschian A, Sanz MM, Tanarro I. Gas
    phase FT-IR absorption spectroscopy as a quantitative diagnostic method for cold
    plasmas. <i>Vibrational Spectroscopy</i>. Published online 2002:157-167. doi:<a
    href="https://doi.org/10.1016/s0924-2031(02)00023-1">10.1016/s0924-2031(02)00023-1</a>
  apa: Domingo, C., de los Arcos de Pedro, M. T., Ainetschian, A., Sanz, M. M., &#38;
    Tanarro, I. (2002). Gas phase FT-IR absorption spectroscopy as a quantitative
    diagnostic method for cold plasmas. <i>Vibrational Spectroscopy</i>, 157–167.
    <a href="https://doi.org/10.1016/s0924-2031(02)00023-1">https://doi.org/10.1016/s0924-2031(02)00023-1</a>
  bibtex: '@article{Domingo_de los Arcos de Pedro_Ainetschian_Sanz_Tanarro_2002, title={Gas
    phase FT-IR absorption spectroscopy as a quantitative diagnostic method for cold
    plasmas}, DOI={<a href="https://doi.org/10.1016/s0924-2031(02)00023-1">10.1016/s0924-2031(02)00023-1</a>},
    journal={Vibrational Spectroscopy}, author={Domingo, C and de los Arcos de Pedro,
    Maria Teresa and Ainetschian, A and Sanz, M.M and Tanarro, I}, year={2002}, pages={157–167}
    }'
  chicago: Domingo, C, Maria Teresa de los Arcos de Pedro, A Ainetschian, M.M Sanz,
    and I Tanarro. “Gas Phase FT-IR Absorption Spectroscopy as a Quantitative Diagnostic
    Method for Cold Plasmas.” <i>Vibrational Spectroscopy</i>, 2002, 157–67. <a href="https://doi.org/10.1016/s0924-2031(02)00023-1">https://doi.org/10.1016/s0924-2031(02)00023-1</a>.
  ieee: 'C. Domingo, M. T. de los Arcos de Pedro, A. Ainetschian, M. M. Sanz, and
    I. Tanarro, “Gas phase FT-IR absorption spectroscopy as a quantitative diagnostic
    method for cold plasmas,” <i>Vibrational Spectroscopy</i>, pp. 157–167, 2002,
    doi: <a href="https://doi.org/10.1016/s0924-2031(02)00023-1">10.1016/s0924-2031(02)00023-1</a>.'
  mla: Domingo, C., et al. “Gas Phase FT-IR Absorption Spectroscopy as a Quantitative
    Diagnostic Method for Cold Plasmas.” <i>Vibrational Spectroscopy</i>, 2002, pp.
    157–67, doi:<a href="https://doi.org/10.1016/s0924-2031(02)00023-1">10.1016/s0924-2031(02)00023-1</a>.
  short: C. Domingo, M.T. de los Arcos de Pedro, A. Ainetschian, M.M. Sanz, I. Tanarro,
    Vibrational Spectroscopy (2002) 157–167.
date_created: 2021-07-07T11:49:01Z
date_updated: 2023-01-24T08:31:08Z
department:
- _id: '302'
doi: 10.1016/s0924-2031(02)00023-1
extern: '1'
language:
- iso: eng
page: 157-167
publication: Vibrational Spectroscopy
publication_identifier:
  issn:
  - 0924-2031
publication_status: published
status: public
title: Gas phase FT-IR absorption spectroscopy as a quantitative diagnostic method
  for cold plasmas
type: journal_article
user_id: '54556'
year: '2002'
...