[{"title":"Model-based condition monitoring of piezoelectric bending actuators","publisher":"Elsevier BV","date_created":"2023-05-09T09:49:44Z","year":"2023","quality_controlled":"1","keyword":["Condition Monitoring","Model-based approach Diagnostics","Varying conditions","Explainability","Piezoelectric bending actuators"],"language":[{"iso":"eng"}],"abstract":[{"lang":"eng","text":"With enhancing digitalization, condition monitoring is used in an increasing number of application fields across various industrial sectors. By its application, increased reliability as well as reduced risks and costs can be achieved. Based on different approaches, technical systems are monitored and measured data is analyzed to enable condition-based or predictive maintenance. To this end, machine learning approaches are usually implemented to diagnose the health states or predict the health index of the monitored system. However, these trained models are often black-box models, not intuitively explainable for a human. To overcome this shortcoming, a model-based approach based on physics is developed for piezoelectric bending actuators. Such a model enables a transparent representation of the system. Moreover, the model-based approach is extended by a parameter-estimation to account for sudden changes in behavior e. g. caused by occurring cracks."}],"publication":"Sensors and Actuators A: Physical","doi":"10.1016/j.sna.2023.114399","main_file_link":[{"url":"https://authors.elsevier.com/a/1h2WV3IC9dF7Hm","open_access":"1"}],"oa":"1","date_updated":"2023-05-09T09:53:31Z","volume":357,"author":[{"full_name":"Bender, Amelie","id":"54290","last_name":"Bender","first_name":"Amelie"}],"intvolume":"       357","citation":{"mla":"Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending Actuators.” <i>Sensors and Actuators A: Physical</i>, vol. 357, 114399, Elsevier BV, 2023, doi:<a href=\"https://doi.org/10.1016/j.sna.2023.114399\">10.1016/j.sna.2023.114399</a>.","short":"A. Bender, Sensors and Actuators A: Physical 357 (2023).","bibtex":"@article{Bender_2023, title={Model-based condition monitoring of piezoelectric bending actuators}, volume={357}, DOI={<a href=\"https://doi.org/10.1016/j.sna.2023.114399\">10.1016/j.sna.2023.114399</a>}, number={114399}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Bender, Amelie}, year={2023} }","apa":"Bender, A. (2023). Model-based condition monitoring of piezoelectric bending actuators. <i>Sensors and Actuators A: Physical</i>, <i>357</i>, Article 114399. <a href=\"https://doi.org/10.1016/j.sna.2023.114399\">https://doi.org/10.1016/j.sna.2023.114399</a>","ama":"Bender A. Model-based condition monitoring of piezoelectric bending actuators. <i>Sensors and Actuators A: Physical</i>. 2023;357. doi:<a href=\"https://doi.org/10.1016/j.sna.2023.114399\">10.1016/j.sna.2023.114399</a>","ieee":"A. Bender, “Model-based condition monitoring of piezoelectric bending actuators,” <i>Sensors and Actuators A: Physical</i>, vol. 357, Art. no. 114399, 2023, doi: <a href=\"https://doi.org/10.1016/j.sna.2023.114399\">10.1016/j.sna.2023.114399</a>.","chicago":"Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending Actuators.” <i>Sensors and Actuators A: Physical</i> 357 (2023). <a href=\"https://doi.org/10.1016/j.sna.2023.114399\">https://doi.org/10.1016/j.sna.2023.114399</a>."},"publication_identifier":{"issn":["0924-4247"]},"publication_status":"published","article_type":"original","article_number":"114399","_id":"44672","department":[{"_id":"151"}],"user_id":"54290","status":"public","type":"journal_article"},{"page":"653 - 662","intvolume":"       295","citation":{"apa":"Schemmel, R., Hemsel, T., Dymel, C., Hunstig, M., Brökelmann, M., &#38; Sextro, W. (2019). Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding. <i>Sensors and Actuators A: Physical</i>, <i>295</i>, 653–662. <a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">https://doi.org/10.1016/j.sna.2019.04.025</a>","bibtex":"@article{Schemmel_Hemsel_Dymel_Hunstig_Brökelmann_Sextro_2019, title={Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding}, volume={295}, DOI={<a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">10.1016/j.sna.2019.04.025</a>}, journal={Sensors and Actuators A: Physical}, author={Schemmel, Reinhard and Hemsel, Tobias and Dymel, Collin and Hunstig, Matthias and Brökelmann, Michael and Sextro, Walter}, year={2019}, pages={653–662} }","short":"R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, W. Sextro, Sensors and Actuators A: Physical 295 (2019) 653–662.","mla":"Schemmel, Reinhard, et al. “Using Complex Multi-Dimensional Vibration Trajectories in Ultrasonic Bonding and Welding.” <i>Sensors and Actuators A: Physical</i>, vol. 295, 2019, pp. 653–62, doi:<a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">10.1016/j.sna.2019.04.025</a>.","ieee":"R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, and W. Sextro, “Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding,” <i>Sensors and Actuators A: Physical</i>, vol. 295, pp. 653–662, 2019, doi: <a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">10.1016/j.sna.2019.04.025</a>.","chicago":"Schemmel, Reinhard, Tobias Hemsel, Collin Dymel, Matthias Hunstig, Michael Brökelmann, and Walter Sextro. “Using Complex Multi-Dimensional Vibration Trajectories in Ultrasonic Bonding and Welding.” <i>Sensors and Actuators A: Physical</i> 295 (2019): 653–62. <a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">https://doi.org/10.1016/j.sna.2019.04.025</a>.","ama":"Schemmel R, Hemsel T, Dymel C, Hunstig M, Brökelmann M, Sextro W. Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding. <i>Sensors and Actuators A: Physical</i>. 2019;295:653-662. doi:<a href=\"https://doi.org/10.1016/j.sna.2019.04.025\">10.1016/j.sna.2019.04.025</a>"},"year":"2019","quality_controlled":"1","publication_identifier":{"issn":["0924-4247"]},"doi":"10.1016/j.sna.2019.04.025","title":"Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding","volume":295,"author":[{"first_name":"Reinhard","last_name":"Schemmel","full_name":"Schemmel, Reinhard","id":"28647"},{"last_name":"Hemsel","full_name":"Hemsel, Tobias","id":"210","first_name":"Tobias"},{"first_name":"Collin","id":"66833","full_name":"Dymel, Collin","last_name":"Dymel"},{"first_name":"Matthias","full_name":"Hunstig, Matthias","last_name":"Hunstig"},{"last_name":"Brökelmann","full_name":"Brökelmann, Michael","first_name":"Michael"},{"id":"21220","full_name":"Sextro, Walter","last_name":"Sextro","first_name":"Walter"}],"date_created":"2019-07-01T07:32:07Z","date_updated":"2023-09-21T14:12:15Z","status":"public","abstract":[{"lang":"eng","text":"Ultrasonic joining is a common industrial process. In the electronics industry it is used to form electrical connections, including those of dissimilar materials. Multiple influencing factors in ultrasonic joining are known and extensively investigated; process parameters like ultrasonic power, bond force, and bonding frequency of the ultrasonic vibration are known to have a high impact on a reliable joining process and need to be adapted for each new application with different geometry or materials. This contribution is focused on increasing ultrasonic power transmitted to the interface and keeping mechanical stresses during ultrasonic bonding low by using a multi-dimensional ultrasonic transducer concept. Bonding results for a new designed connector pin in IGBT-modules achieved by multi- and one-dimensional bonding are discussed."}],"publication":"Sensors and Actuators A: Physical","type":"journal_article","language":[{"iso":"eng"}],"keyword":["Ultrasonic bonding","Ultrasonic welding","Multi-dimensional bonding","Complex vibration","Multi-frequent","Two-dimensional friction model"],"department":[{"_id":"151"}],"user_id":"210","_id":"10334","project":[{"grant_number":"MP-1-1-015","_id":"93","name":"Hochleistungsbonden in energieeffizienten Leistungshalbleitermodulen"}]},{"language":[{"iso":"eng"}],"keyword":["Piezoelektrischer Trägheitsmotoren"],"user_id":"55222","series_title":"HNI-Verlagsschriftenreihe","department":[{"_id":"151"}],"_id":"9753","status":"public","editor":[{"last_name":"Gausemeier","full_name":"Gausemeier, Jürgen","first_name":"Jürgen"},{"first_name":"Franz","last_name":"Rammig","full_name":"Rammig, Franz"},{"last_name":"Schäfer","full_name":"Schäfer, Wilhelm","first_name":"Wilhelm"},{"full_name":"Trächtler, Ansgar","last_name":"Trächtler","first_name":"Ansgar"}],"abstract":[{"text":"Piezoelektrische Trägheitsmotoren nutzen die Trägheit einer bewegten Masse, um diese in kleinen Schritten durch abwechselnde Haft- und Gleitphasen voranzutreiben. Eine Kernfrage bei der Entwicklung eines piezoelektrischen Trägheitsmotors ist, welches elektrische Ansteuersignal für das gewünschte Motorverhalten optimal ist. Das elektrische Signal führt zu einer Bewegung des piezoelektrischen Aktors und damit der Antriebsstange, die den reibschlüssigen Vortrieb bewirkt. Entsprechend wird diese Fragestellung in zwei Teilen untersucht: Anhand eines Starrkörpermodells werden zunächst Bewegungsverläufe für die Antriebsstange ermittelt, mit denen die maximale Geschwindigkeit erreicht wird. Dabei werden drei Antriebsmodi identifiziert. Mit allen kann eine höhere Geschwindigkeit als mit der heute häufig verwendeten Sägezahnanregung erreicht werden. Anschließend wird ein einfaches dynamisches Modell eines piezoelektrischen Aktors genutzt, um die notwendigen elektrischen Ansteuersignale für die verschiedenen Antriebsmodi zu bestimmen. Es zeigt sich, dass das gewählte einfache Modell hierzu nur bedingt geeignet ist.","lang":"eng"}],"type":"conference","publication":"7. Paderborner Workshop Entwurf mechatronischer Systeme","title":"Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren","date_created":"2019-05-13T10:05:14Z","author":[{"full_name":"Hunstig, Matthias","last_name":"Hunstig","first_name":"Matthias"},{"last_name":"Hemsel","id":"210","full_name":"Hemsel, Tobias","first_name":"Tobias"},{"first_name":"Walter","last_name":"Sextro","id":"21220","full_name":"Sextro, Walter"}],"volume":272,"publisher":"Heinz Nixdorf Institut, Universität Paderborn","date_updated":"2022-01-06T07:04:19Z","citation":{"ama":"Hunstig M, Hemsel T, Sextro W. Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren. In: Gausemeier J, Rammig F, Schäfer W, Trächtler A, eds. <i>7. Paderborner Workshop Entwurf Mechatronischer Systeme</i>. Vol 272. HNI-Verlagsschriftenreihe. Paderborn: Heinz Nixdorf Institut, Universität Paderborn; 2010:129-141.","ieee":"M. Hunstig, T. Hemsel, and W. Sextro, “Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren,” in <i>7. Paderborner Workshop Entwurf mechatronischer Systeme</i>, 2010, vol. 272, pp. 129–141.","chicago":"Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Anregungskonzepte Und Modellierung Piezoelektrischer Trägheitsmotoren.” In <i>7. Paderborner Workshop Entwurf Mechatronischer Systeme</i>, edited by Jürgen Gausemeier, Franz Rammig, Wilhelm Schäfer, and Ansgar Trächtler, 272:129–41. HNI-Verlagsschriftenreihe. Paderborn: Heinz Nixdorf Institut, Universität Paderborn, 2010.","apa":"Hunstig, M., Hemsel, T., &#38; Sextro, W. (2010). Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren. In J. Gausemeier, F. Rammig, W. Schäfer, &#38; A. Trächtler (Eds.), <i>7. Paderborner Workshop Entwurf mechatronischer Systeme</i> (Vol. 272, pp. 129–141). Paderborn: Heinz Nixdorf Institut, Universität Paderborn.","bibtex":"@inproceedings{Hunstig_Hemsel_Sextro_2010, place={Paderborn}, series={HNI-Verlagsschriftenreihe}, title={Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren}, volume={272}, booktitle={7. Paderborner Workshop Entwurf mechatronischer Systeme}, publisher={Heinz Nixdorf Institut, Universität Paderborn}, author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, editor={Gausemeier, Jürgen and Rammig, Franz and Schäfer, Wilhelm and Trächtler, AnsgarEditors}, year={2010}, pages={129–141}, collection={HNI-Verlagsschriftenreihe} }","short":"M. Hunstig, T. Hemsel, W. Sextro, in: J. Gausemeier, F. Rammig, W. Schäfer, A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf Mechatronischer Systeme, Heinz Nixdorf Institut, Universität Paderborn, Paderborn, 2010, pp. 129–141.","mla":"Hunstig, Matthias, et al. “Anregungskonzepte Und Modellierung Piezoelektrischer Trägheitsmotoren.” <i>7. Paderborner Workshop Entwurf Mechatronischer Systeme</i>, edited by Jürgen Gausemeier et al., vol. 272, Heinz Nixdorf Institut, Universität Paderborn, 2010, pp. 129–41."},"intvolume":"       272","page":"129-141","year":"2010","place":"Paderborn","publication_identifier":{"issn":["0924-4247"]}},{"language":[{"iso":"eng"}],"user_id":"55222","department":[{"_id":"151"}],"_id":"9754","status":"public","abstract":[{"text":"A model based design approach for improved piezoelectric inertia motors is presented. Three velocityoptimized movement patterns for the driving body have been derived. The influence of the motor parameters and the process of designing an application specific motor with maximum velocity are shown. A simple dynamic model of the piezoelectric actuator is used to calculate the voltage signal for achieving the desired movement pattern. Observed distortions of the optimum pattern, their influence on the motion of the driven body and different methods to reduce them are discussed.","lang":"eng"}],"type":"conference","publication":"ACTUATOR 2010 Conference Proceedings","title":"Improving the Performance of Piezoelectric Inertia Motors","date_created":"2019-05-13T10:10:31Z","author":[{"last_name":"Hunstig","full_name":"Hunstig, Matthias","first_name":"Matthias"},{"last_name":"Hemsel","full_name":"Hemsel, Tobias","id":"210","first_name":"Tobias"},{"id":"21220","full_name":"Sextro, Walter","last_name":"Sextro","first_name":"Walter"}],"date_updated":"2022-01-06T07:04:19Z","citation":{"apa":"Hunstig, M., Hemsel, T., &#38; Sextro, W. (2010). Improving the Performance of Piezoelectric Inertia Motors. In <i>ACTUATOR 2010 Conference Proceedings</i> (pp. 657–661).","bibtex":"@inproceedings{Hunstig_Hemsel_Sextro_2010, title={Improving the Performance of Piezoelectric Inertia Motors}, booktitle={ACTUATOR 2010 Conference Proceedings}, author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, year={2010}, pages={657–661} }","short":"M. Hunstig, T. Hemsel, W. Sextro, in: ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–661.","mla":"Hunstig, Matthias, et al. “Improving the Performance of Piezoelectric Inertia Motors.” <i>ACTUATOR 2010 Conference Proceedings</i>, 2010, pp. 657–61.","chicago":"Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Improving the Performance of Piezoelectric Inertia Motors.” In <i>ACTUATOR 2010 Conference Proceedings</i>, 657–61, 2010.","ieee":"M. Hunstig, T. Hemsel, and W. Sextro, “Improving the Performance of Piezoelectric Inertia Motors,” in <i>ACTUATOR 2010 Conference Proceedings</i>, 2010, pp. 657–661.","ama":"Hunstig M, Hemsel T, Sextro W. Improving the Performance of Piezoelectric Inertia Motors. In: <i>ACTUATOR 2010 Conference Proceedings</i>. ; 2010:657-661."},"page":"657-661","year":"2010","quality_controlled":"1","publication_identifier":{"issn":["0924-4247"]}},{"publication":"Sensors and Actuators A: Physical","type":"journal_article","status":"public","_id":"39563","department":[{"_id":"59"}],"user_id":"20179","keyword":["Electrical and Electronic Engineering","Metals and Alloys","Surfaces","Coatings and Films","Condensed Matter Physics","Instrumentation","Electronic","Optical and Magnetic Materials"],"language":[{"iso":"eng"}],"publication_identifier":{"issn":["0924-4247"]},"publication_status":"published","issue":"2","year":"2007","page":"302-307","intvolume":"       137","citation":{"mla":"Jiang, Jianliang, et al. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” <i>Sensors and Actuators A: Physical</i>, vol. 137, no. 2, Elsevier BV, 2007, pp. 302–07, doi:<a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">10.1016/j.sna.2007.03.012</a>.","bibtex":"@article{Jiang_Hilleringmann_Shui_2007, title={Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator}, volume={137}, DOI={<a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">10.1016/j.sna.2007.03.012</a>}, number={2}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Jiang, Jianliang and Hilleringmann, Ulrich and Shui, Xiaoping}, year={2007}, pages={302–307} }","short":"J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A: Physical 137 (2007) 302–307.","apa":"Jiang, J., Hilleringmann, U., &#38; Shui, X. (2007). Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. <i>Sensors and Actuators A: Physical</i>, <i>137</i>(2), 302–307. <a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">https://doi.org/10.1016/j.sna.2007.03.012</a>","ieee":"J. Jiang, U. Hilleringmann, and X. Shui, “Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator,” <i>Sensors and Actuators A: Physical</i>, vol. 137, no. 2, pp. 302–307, 2007, doi: <a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">10.1016/j.sna.2007.03.012</a>.","chicago":"Jiang, Jianliang, Ulrich Hilleringmann, and Xiaoping Shui. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” <i>Sensors and Actuators A: Physical</i> 137, no. 2 (2007): 302–7. <a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">https://doi.org/10.1016/j.sna.2007.03.012</a>.","ama":"Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. <i>Sensors and Actuators A: Physical</i>. 2007;137(2):302-307. doi:<a href=\"https://doi.org/10.1016/j.sna.2007.03.012\">10.1016/j.sna.2007.03.012</a>"},"publisher":"Elsevier BV","date_updated":"2023-03-21T10:12:55Z","volume":137,"author":[{"first_name":"Jianliang","full_name":"Jiang, Jianliang","last_name":"Jiang"},{"last_name":"Hilleringmann","id":"20179","full_name":"Hilleringmann, Ulrich","first_name":"Ulrich"},{"full_name":"Shui, Xiaoping","last_name":"Shui","first_name":"Xiaoping"}],"date_created":"2023-01-24T12:16:12Z","title":"Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator","doi":"10.1016/j.sna.2007.03.012"},{"author":[{"last_name":"Püttmer","full_name":"Püttmer, A","first_name":"A"},{"first_name":"N","full_name":"Hoppe, N","last_name":"Hoppe"},{"first_name":"Bernd","id":"213","full_name":"Henning, Bernd","last_name":"Henning"},{"first_name":"P","full_name":"Hauptmann, P","last_name":"Hauptmann"}],"date_created":"2019-10-16T14:03:32Z","date_updated":"2022-01-06T06:51:46Z","doi":"10.1016/s0924-4247(98)00365-3","title":"Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface","publication_status":"published","publication_identifier":{"issn":["0924-4247"]},"citation":{"mla":"Püttmer, A., et al. “Ultrasonic Density Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.” <i>Sensors and Actuators A: Physical</i>, 2002, pp. 122–26, doi:<a href=\"https://doi.org/10.1016/s0924-4247(98)00365-3\">10.1016/s0924-4247(98)00365-3</a>.","short":"A. Püttmer, N. Hoppe, B. Henning, P. Hauptmann, Sensors and Actuators A: Physical (2002) 122–126.","bibtex":"@article{Püttmer_Hoppe_Henning_Hauptmann_2002, title={Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface}, DOI={<a href=\"https://doi.org/10.1016/s0924-4247(98)00365-3\">10.1016/s0924-4247(98)00365-3</a>}, journal={Sensors and Actuators A: Physical}, author={Püttmer, A and Hoppe, N and Henning, Bernd and Hauptmann, P}, year={2002}, pages={122–126} }","apa":"Püttmer, A., Hoppe, N., Henning, B., &#38; Hauptmann, P. (2002). Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface. <i>Sensors and Actuators A: Physical</i>, 122–126. <a href=\"https://doi.org/10.1016/s0924-4247(98)00365-3\">https://doi.org/10.1016/s0924-4247(98)00365-3</a>","ama":"Püttmer A, Hoppe N, Henning B, Hauptmann P. Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface. <i>Sensors and Actuators A: Physical</i>. 2002:122-126. doi:<a href=\"https://doi.org/10.1016/s0924-4247(98)00365-3\">10.1016/s0924-4247(98)00365-3</a>","chicago":"Püttmer, A, N Hoppe, Bernd Henning, and P Hauptmann. “Ultrasonic Density Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.” <i>Sensors and Actuators A: Physical</i>, 2002, 122–26. <a href=\"https://doi.org/10.1016/s0924-4247(98)00365-3\">https://doi.org/10.1016/s0924-4247(98)00365-3</a>.","ieee":"A. Püttmer, N. Hoppe, B. Henning, and P. Hauptmann, “Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface,” <i>Sensors and Actuators A: Physical</i>, pp. 122–126, 2002."},"page":"122-126","year":"2002","user_id":"15911","department":[{"_id":"49"}],"_id":"13890","language":[{"iso":"eng"}],"type":"journal_article","publication":"Sensors and Actuators A: Physical","status":"public"},{"language":[{"iso":"eng"}],"department":[{"_id":"49"}],"user_id":"11829","_id":"13812","status":"public","publication":"Sensors and Actuators A: Physical","type":"journal_article","doi":"10.1016/s0924-4247(97)01720-2","title":"Improved ultrasonic density sensor with reduced diffraction influence","author":[{"first_name":"A.","full_name":"Püttmer, A.","last_name":"Püttmer"},{"first_name":"R.","last_name":"Lucklum","full_name":"Lucklum, R."},{"first_name":"Bernd","last_name":"Henning","id":"213","full_name":"Henning, Bernd"},{"last_name":"Hauptmann","full_name":"Hauptmann, P.","first_name":"P."}],"date_created":"2019-10-14T12:36:34Z","date_updated":"2022-01-06T06:51:45Z","page":"8-12","citation":{"ieee":"A. Püttmer, R. Lucklum, B. Henning, and P. Hauptmann, “Improved ultrasonic density sensor with reduced diffraction influence,” <i>Sensors and Actuators A: Physical</i>, pp. 8–12, 2002.","chicago":"Püttmer, A., R. Lucklum, Bernd Henning, and P. Hauptmann. “Improved Ultrasonic Density Sensor with Reduced Diffraction Influence.” <i>Sensors and Actuators A: Physical</i>, 2002, 8–12. <a href=\"https://doi.org/10.1016/s0924-4247(97)01720-2\">https://doi.org/10.1016/s0924-4247(97)01720-2</a>.","ama":"Püttmer A, Lucklum R, Henning B, Hauptmann P. Improved ultrasonic density sensor with reduced diffraction influence. <i>Sensors and Actuators A: Physical</i>. 2002:8-12. doi:<a href=\"https://doi.org/10.1016/s0924-4247(97)01720-2\">10.1016/s0924-4247(97)01720-2</a>","apa":"Püttmer, A., Lucklum, R., Henning, B., &#38; Hauptmann, P. (2002). Improved ultrasonic density sensor with reduced diffraction influence. <i>Sensors and Actuators A: Physical</i>, 8–12. <a href=\"https://doi.org/10.1016/s0924-4247(97)01720-2\">https://doi.org/10.1016/s0924-4247(97)01720-2</a>","short":"A. Püttmer, R. Lucklum, B. Henning, P. Hauptmann, Sensors and Actuators A: Physical (2002) 8–12.","bibtex":"@article{Püttmer_Lucklum_Henning_Hauptmann_2002, title={Improved ultrasonic density sensor with reduced diffraction influence}, DOI={<a href=\"https://doi.org/10.1016/s0924-4247(97)01720-2\">10.1016/s0924-4247(97)01720-2</a>}, journal={Sensors and Actuators A: Physical}, author={Püttmer, A. and Lucklum, R. and Henning, Bernd and Hauptmann, P.}, year={2002}, pages={8–12} }","mla":"Püttmer, A., et al. “Improved Ultrasonic Density Sensor with Reduced Diffraction Influence.” <i>Sensors and Actuators A: Physical</i>, 2002, pp. 8–12, doi:<a href=\"https://doi.org/10.1016/s0924-4247(97)01720-2\">10.1016/s0924-4247(97)01720-2</a>."},"year":"2002","quality_controlled":"1","publication_identifier":{"issn":["0924-4247"]},"publication_status":"published"},{"title":"A low-voltage torsional actuator for application in RF-microswitches","doi":"10.1016/S0924-4247(01)00589-1","date_updated":"2023-01-25T22:15:02Z","author":[{"first_name":"R","full_name":"Plotz, R","last_name":"Plotz"},{"last_name":"Michaelis","full_name":"Michaelis, S","first_name":"S"},{"last_name":"Aigner","full_name":"Aigner, R","first_name":"R"},{"full_name":"Timme, HJ","last_name":"Timme","first_name":"HJ"},{"last_name":"Binder","full_name":"Binder, J","first_name":"J"},{"full_name":"Noé, Reinhold","id":"381","orcid":"https://orcid.org/0000-0002-5839-7616","last_name":"Noé","first_name":"Reinhold"}],"date_created":"2023-01-23T18:14:18Z","volume":92,"year":"2001","citation":{"ama":"Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>. 2001;92(1-3):312-317. doi:<a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>","ieee":"R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage torsional actuator for application in RF-microswitches,” <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, pp. 312–317, 2001, doi: <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>.","chicago":"Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS AND ACTUATORS A-PHYSICAL</i> 92, no. 1–3 (2001): 312–17. <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">https://doi.org/10.1016/S0924-4247(01)00589-1</a>.","apa":"Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., &#38; Noé, R. (2001). A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, <i>92</i>(1–3), 312–317. <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">https://doi.org/10.1016/S0924-4247(01)00589-1</a>","short":"R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND ACTUATORS A-PHYSICAL 92 (2001) 312–317.","mla":"Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, 2001, pp. 312–17, doi:<a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>.","bibtex":"@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage torsional actuator for application in RF-microswitches}, volume={92}, DOI={<a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>}, number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001}, pages={312–317} }"},"page":"312-317","intvolume":"        92","publication_identifier":{"issn":["0924-4247"]},"issue":"1-3","language":[{"iso":"eng"}],"_id":"38341","user_id":"14931","department":[{"_id":"56"}],"status":"public","type":"journal_article","publication":"SENSORS AND ACTUATORS A-PHYSICAL"},{"issue":"1-3","publication_identifier":{"issn":["0924-4247"]},"citation":{"chicago":"Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS AND ACTUATORS A-PHYSICAL</i> 92, no. 1–3 (2001): 312–17. <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">https://doi.org/10.1016/S0924-4247(01)00589-1</a>.","ieee":"R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage torsional actuator for application in RF-microswitches,” <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, pp. 312–317, 2001, doi: <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>.","ama":"Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>. 2001;92(1-3):312-317. doi:<a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">10.1016/S0924-4247(01)00589-1</a>","apa":"Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., &#38; Noé, R. (2001). A low-voltage torsional actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, <i>92</i>(1–3), 312–317. <a href=\"https://doi.org/10.1016/S0924-4247(01)00589-1\">https://doi.org/10.1016/S0924-4247(01)00589-1</a>","short":"R. Plotz, S. Michaelis, R. Aigner, H. 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