---
_id: '44672'
abstract:
- lang: eng
text: With enhancing digitalization, condition monitoring is used in an increasing
number of application fields across various industrial sectors. By its application,
increased reliability as well as reduced risks and costs can be achieved. Based
on different approaches, technical systems are monitored and measured data is
analyzed to enable condition-based or predictive maintenance. To this end, machine
learning approaches are usually implemented to diagnose the health states or predict
the health index of the monitored system. However, these trained models are often
black-box models, not intuitively explainable for a human. To overcome this shortcoming,
a model-based approach based on physics is developed for piezoelectric bending
actuators. Such a model enables a transparent representation of the system. Moreover,
the model-based approach is extended by a parameter-estimation to account for
sudden changes in behavior e. g. caused by occurring cracks.
article_number: '114399'
article_type: original
author:
- first_name: Amelie
full_name: Bender, Amelie
id: '54290'
last_name: Bender
citation:
ama: 'Bender A. Model-based condition monitoring of piezoelectric bending actuators.
Sensors and Actuators A: Physical. 2023;357. doi:10.1016/j.sna.2023.114399'
apa: 'Bender, A. (2023). Model-based condition monitoring of piezoelectric bending
actuators. Sensors and Actuators A: Physical, 357, Article 114399.
https://doi.org/10.1016/j.sna.2023.114399'
bibtex: '@article{Bender_2023, title={Model-based condition monitoring of piezoelectric
bending actuators}, volume={357}, DOI={10.1016/j.sna.2023.114399},
number={114399}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier
BV}, author={Bender, Amelie}, year={2023} }'
chicago: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending
Actuators.” Sensors and Actuators A: Physical 357 (2023). https://doi.org/10.1016/j.sna.2023.114399.'
ieee: 'A. Bender, “Model-based condition monitoring of piezoelectric bending actuators,”
Sensors and Actuators A: Physical, vol. 357, Art. no. 114399, 2023, doi:
10.1016/j.sna.2023.114399.'
mla: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending
Actuators.” Sensors and Actuators A: Physical, vol. 357, 114399, Elsevier
BV, 2023, doi:10.1016/j.sna.2023.114399.'
short: 'A. Bender, Sensors and Actuators A: Physical 357 (2023).'
date_created: 2023-05-09T09:49:44Z
date_updated: 2023-05-09T09:53:31Z
department:
- _id: '151'
doi: 10.1016/j.sna.2023.114399
intvolume: ' 357'
keyword:
- Condition Monitoring
- Model-based approach Diagnostics
- Varying conditions
- Explainability
- Piezoelectric bending actuators
language:
- iso: eng
main_file_link:
- open_access: '1'
url: https://authors.elsevier.com/a/1h2WV3IC9dF7Hm
oa: '1'
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
issn:
- 0924-4247
publication_status: published
publisher: Elsevier BV
quality_controlled: '1'
status: public
title: Model-based condition monitoring of piezoelectric bending actuators
type: journal_article
user_id: '54290'
volume: 357
year: '2023'
...
---
_id: '10334'
abstract:
- lang: eng
text: Ultrasonic joining is a common industrial process. In the electronics industry
it is used to form electrical connections, including those of dissimilar materials.
Multiple influencing factors in ultrasonic joining are known and extensively investigated;
process parameters like ultrasonic power, bond force, and bonding frequency of
the ultrasonic vibration are known to have a high impact on a reliable joining
process and need to be adapted for each new application with different geometry
or materials. This contribution is focused on increasing ultrasonic power transmitted
to the interface and keeping mechanical stresses during ultrasonic bonding low
by using a multi-dimensional ultrasonic transducer concept. Bonding results for
a new designed connector pin in IGBT-modules achieved by multi- and one-dimensional
bonding are discussed.
author:
- first_name: Reinhard
full_name: Schemmel, Reinhard
id: '28647'
last_name: Schemmel
- first_name: Tobias
full_name: Hemsel, Tobias
id: '210'
last_name: Hemsel
- first_name: Collin
full_name: Dymel, Collin
id: '66833'
last_name: Dymel
- first_name: Matthias
full_name: Hunstig, Matthias
last_name: Hunstig
- first_name: Michael
full_name: Brökelmann, Michael
last_name: Brökelmann
- first_name: Walter
full_name: Sextro, Walter
id: '21220'
last_name: Sextro
citation:
ama: 'Schemmel R, Hemsel T, Dymel C, Hunstig M, Brökelmann M, Sextro W. Using complex
multi-dimensional vibration trajectories in ultrasonic bonding and welding. Sensors
and Actuators A: Physical. 2019;295:653-662. doi:10.1016/j.sna.2019.04.025'
apa: 'Schemmel, R., Hemsel, T., Dymel, C., Hunstig, M., Brökelmann, M., & Sextro,
W. (2019). Using complex multi-dimensional vibration trajectories in ultrasonic
bonding and welding. Sensors and Actuators A: Physical, 295, 653–662.
https://doi.org/10.1016/j.sna.2019.04.025'
bibtex: '@article{Schemmel_Hemsel_Dymel_Hunstig_Brökelmann_Sextro_2019, title={Using
complex multi-dimensional vibration trajectories in ultrasonic bonding and welding},
volume={295}, DOI={10.1016/j.sna.2019.04.025},
journal={Sensors and Actuators A: Physical}, author={Schemmel, Reinhard and Hemsel,
Tobias and Dymel, Collin and Hunstig, Matthias and Brökelmann, Michael and Sextro,
Walter}, year={2019}, pages={653–662} }'
chicago: 'Schemmel, Reinhard, Tobias Hemsel, Collin Dymel, Matthias Hunstig, Michael
Brökelmann, and Walter Sextro. “Using Complex Multi-Dimensional Vibration Trajectories
in Ultrasonic Bonding and Welding.” Sensors and Actuators A: Physical 295
(2019): 653–62. https://doi.org/10.1016/j.sna.2019.04.025.'
ieee: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, and W. Sextro,
“Using complex multi-dimensional vibration trajectories in ultrasonic bonding
and welding,” Sensors and Actuators A: Physical, vol. 295, pp. 653–662,
2019, doi: 10.1016/j.sna.2019.04.025.'
mla: 'Schemmel, Reinhard, et al. “Using Complex Multi-Dimensional Vibration Trajectories
in Ultrasonic Bonding and Welding.” Sensors and Actuators A: Physical,
vol. 295, 2019, pp. 653–62, doi:10.1016/j.sna.2019.04.025.'
short: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, W. Sextro,
Sensors and Actuators A: Physical 295 (2019) 653–662.'
date_created: 2019-07-01T07:32:07Z
date_updated: 2023-09-21T14:12:15Z
department:
- _id: '151'
doi: 10.1016/j.sna.2019.04.025
intvolume: ' 295'
keyword:
- Ultrasonic bonding
- Ultrasonic welding
- Multi-dimensional bonding
- Complex vibration
- Multi-frequent
- Two-dimensional friction model
language:
- iso: eng
page: 653 - 662
project:
- _id: '93'
grant_number: MP-1-1-015
name: Hochleistungsbonden in energieeffizienten Leistungshalbleitermodulen
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
issn:
- 0924-4247
quality_controlled: '1'
status: public
title: Using complex multi-dimensional vibration trajectories in ultrasonic bonding
and welding
type: journal_article
user_id: '210'
volume: 295
year: '2019'
...
---
_id: '9753'
abstract:
- lang: eng
text: 'Piezoelektrische Trägheitsmotoren nutzen die Trägheit einer bewegten Masse,
um diese in kleinen Schritten durch abwechselnde Haft- und Gleitphasen voranzutreiben.
Eine Kernfrage bei der Entwicklung eines piezoelektrischen Trägheitsmotors ist,
welches elektrische Ansteuersignal für das gewünschte Motorverhalten optimal ist.
Das elektrische Signal führt zu einer Bewegung des piezoelektrischen Aktors und
damit der Antriebsstange, die den reibschlüssigen Vortrieb bewirkt. Entsprechend
wird diese Fragestellung in zwei Teilen untersucht: Anhand eines Starrkörpermodells
werden zunächst Bewegungsverläufe für die Antriebsstange ermittelt, mit denen
die maximale Geschwindigkeit erreicht wird. Dabei werden drei Antriebsmodi identifiziert.
Mit allen kann eine höhere Geschwindigkeit als mit der heute häufig verwendeten
Sägezahnanregung erreicht werden. Anschließend wird ein einfaches dynamisches
Modell eines piezoelektrischen Aktors genutzt, um die notwendigen elektrischen
Ansteuersignale für die verschiedenen Antriebsmodi zu bestimmen. Es zeigt sich,
dass das gewählte einfache Modell hierzu nur bedingt geeignet ist.'
author:
- first_name: Matthias
full_name: Hunstig, Matthias
last_name: Hunstig
- first_name: Tobias
full_name: Hemsel, Tobias
id: '210'
last_name: Hemsel
- first_name: Walter
full_name: Sextro, Walter
id: '21220'
last_name: Sextro
citation:
ama: 'Hunstig M, Hemsel T, Sextro W. Anregungskonzepte und Modellierung piezoelektrischer
Trägheitsmotoren. In: Gausemeier J, Rammig F, Schäfer W, Trächtler A, eds. 7.
Paderborner Workshop Entwurf Mechatronischer Systeme. Vol 272. HNI-Verlagsschriftenreihe.
Paderborn: Heinz Nixdorf Institut, Universität Paderborn; 2010:129-141.'
apa: 'Hunstig, M., Hemsel, T., & Sextro, W. (2010). Anregungskonzepte und Modellierung
piezoelektrischer Trägheitsmotoren. In J. Gausemeier, F. Rammig, W. Schäfer, &
A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf mechatronischer Systeme
(Vol. 272, pp. 129–141). Paderborn: Heinz Nixdorf Institut, Universität Paderborn.'
bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, place={Paderborn}, series={HNI-Verlagsschriftenreihe},
title={Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren},
volume={272}, booktitle={7. Paderborner Workshop Entwurf mechatronischer Systeme},
publisher={Heinz Nixdorf Institut, Universität Paderborn}, author={Hunstig, Matthias
and Hemsel, Tobias and Sextro, Walter}, editor={Gausemeier, Jürgen and Rammig,
Franz and Schäfer, Wilhelm and Trächtler, AnsgarEditors}, year={2010}, pages={129–141},
collection={HNI-Verlagsschriftenreihe} }'
chicago: 'Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Anregungskonzepte
Und Modellierung Piezoelektrischer Trägheitsmotoren.” In 7. Paderborner Workshop
Entwurf Mechatronischer Systeme, edited by Jürgen Gausemeier, Franz Rammig,
Wilhelm Schäfer, and Ansgar Trächtler, 272:129–41. HNI-Verlagsschriftenreihe.
Paderborn: Heinz Nixdorf Institut, Universität Paderborn, 2010.'
ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Anregungskonzepte und Modellierung
piezoelektrischer Trägheitsmotoren,” in 7. Paderborner Workshop Entwurf mechatronischer
Systeme, 2010, vol. 272, pp. 129–141.
mla: Hunstig, Matthias, et al. “Anregungskonzepte Und Modellierung Piezoelektrischer
Trägheitsmotoren.” 7. Paderborner Workshop Entwurf Mechatronischer Systeme,
edited by Jürgen Gausemeier et al., vol. 272, Heinz Nixdorf Institut, Universität
Paderborn, 2010, pp. 129–41.
short: 'M. Hunstig, T. Hemsel, W. Sextro, in: J. Gausemeier, F. Rammig, W. Schäfer,
A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf Mechatronischer Systeme,
Heinz Nixdorf Institut, Universität Paderborn, Paderborn, 2010, pp. 129–141.'
date_created: 2019-05-13T10:05:14Z
date_updated: 2022-01-06T07:04:19Z
department:
- _id: '151'
editor:
- first_name: Jürgen
full_name: Gausemeier, Jürgen
last_name: Gausemeier
- first_name: Franz
full_name: Rammig, Franz
last_name: Rammig
- first_name: Wilhelm
full_name: Schäfer, Wilhelm
last_name: Schäfer
- first_name: Ansgar
full_name: Trächtler, Ansgar
last_name: Trächtler
intvolume: ' 272'
keyword:
- Piezoelektrischer Trägheitsmotoren
language:
- iso: eng
page: 129-141
place: Paderborn
publication: 7. Paderborner Workshop Entwurf mechatronischer Systeme
publication_identifier:
issn:
- 0924-4247
publisher: Heinz Nixdorf Institut, Universität Paderborn
series_title: HNI-Verlagsschriftenreihe
status: public
title: Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren
type: conference
user_id: '55222'
volume: 272
year: '2010'
...
---
_id: '9754'
abstract:
- lang: eng
text: A model based design approach for improved piezoelectric inertia motors is
presented. Three velocityoptimized movement patterns for the driving body have
been derived. The influence of the motor parameters and the process of designing
an application specific motor with maximum velocity are shown. A simple dynamic
model of the piezoelectric actuator is used to calculate the voltage signal for
achieving the desired movement pattern. Observed distortions of the optimum pattern,
their influence on the motion of the driven body and different methods to reduce
them are discussed.
author:
- first_name: Matthias
full_name: Hunstig, Matthias
last_name: Hunstig
- first_name: Tobias
full_name: Hemsel, Tobias
id: '210'
last_name: Hemsel
- first_name: Walter
full_name: Sextro, Walter
id: '21220'
last_name: Sextro
citation:
ama: 'Hunstig M, Hemsel T, Sextro W. Improving the Performance of Piezoelectric
Inertia Motors. In: ACTUATOR 2010 Conference Proceedings. ; 2010:657-661.'
apa: Hunstig, M., Hemsel, T., & Sextro, W. (2010). Improving the Performance
of Piezoelectric Inertia Motors. In ACTUATOR 2010 Conference Proceedings
(pp. 657–661).
bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, title={Improving the Performance
of Piezoelectric Inertia Motors}, booktitle={ACTUATOR 2010 Conference Proceedings},
author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, year={2010},
pages={657–661} }'
chicago: Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Improving the Performance
of Piezoelectric Inertia Motors.” In ACTUATOR 2010 Conference Proceedings,
657–61, 2010.
ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Improving the Performance of Piezoelectric
Inertia Motors,” in ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–661.
mla: Hunstig, Matthias, et al. “Improving the Performance of Piezoelectric Inertia
Motors.” ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–61.
short: 'M. Hunstig, T. Hemsel, W. Sextro, in: ACTUATOR 2010 Conference Proceedings,
2010, pp. 657–661.'
date_created: 2019-05-13T10:10:31Z
date_updated: 2022-01-06T07:04:19Z
department:
- _id: '151'
language:
- iso: eng
page: 657-661
publication: ACTUATOR 2010 Conference Proceedings
publication_identifier:
issn:
- 0924-4247
quality_controlled: '1'
status: public
title: Improving the Performance of Piezoelectric Inertia Motors
type: conference
user_id: '55222'
year: '2010'
...
---
_id: '39563'
author:
- first_name: Jianliang
full_name: Jiang, Jianliang
last_name: Jiang
- first_name: Ulrich
full_name: Hilleringmann, Ulrich
id: '20179'
last_name: Hilleringmann
- first_name: Xiaoping
full_name: Shui, Xiaoping
last_name: Shui
citation:
ama: 'Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling
of multilayer cantilever microactuator. Sensors and Actuators A: Physical.
2007;137(2):302-307. doi:10.1016/j.sna.2007.03.012'
apa: 'Jiang, J., Hilleringmann, U., & Shui, X. (2007). Electro-thermo-mechanical
analytical modeling of multilayer cantilever microactuator. Sensors and Actuators
A: Physical, 137(2), 302–307. https://doi.org/10.1016/j.sna.2007.03.012'
bibtex: '@article{Jiang_Hilleringmann_Shui_2007, title={Electro-thermo-mechanical
analytical modeling of multilayer cantilever microactuator}, volume={137}, DOI={10.1016/j.sna.2007.03.012},
number={2}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV},
author={Jiang, Jianliang and Hilleringmann, Ulrich and Shui, Xiaoping}, year={2007},
pages={302–307} }'
chicago: 'Jiang, Jianliang, Ulrich Hilleringmann, and Xiaoping Shui. “Electro-Thermo-Mechanical
Analytical Modeling of Multilayer Cantilever Microactuator.” Sensors and Actuators
A: Physical 137, no. 2 (2007): 302–7. https://doi.org/10.1016/j.sna.2007.03.012.'
ieee: 'J. Jiang, U. Hilleringmann, and X. Shui, “Electro-thermo-mechanical analytical
modeling of multilayer cantilever microactuator,” Sensors and Actuators A:
Physical, vol. 137, no. 2, pp. 302–307, 2007, doi: 10.1016/j.sna.2007.03.012.'
mla: 'Jiang, Jianliang, et al. “Electro-Thermo-Mechanical Analytical Modeling of
Multilayer Cantilever Microactuator.” Sensors and Actuators A: Physical,
vol. 137, no. 2, Elsevier BV, 2007, pp. 302–07, doi:10.1016/j.sna.2007.03.012.'
short: 'J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A: Physical 137
(2007) 302–307.'
date_created: 2023-01-24T12:16:12Z
date_updated: 2023-03-21T10:12:55Z
department:
- _id: '59'
doi: 10.1016/j.sna.2007.03.012
intvolume: ' 137'
issue: '2'
keyword:
- Electrical and Electronic Engineering
- Metals and Alloys
- Surfaces
- Coatings and Films
- Condensed Matter Physics
- Instrumentation
- Electronic
- Optical and Magnetic Materials
language:
- iso: eng
page: 302-307
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
issn:
- 0924-4247
publication_status: published
publisher: Elsevier BV
status: public
title: Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator
type: journal_article
user_id: '20179'
volume: 137
year: '2007'
...
---
_id: '13890'
author:
- first_name: A
full_name: Püttmer, A
last_name: Püttmer
- first_name: N
full_name: Hoppe, N
last_name: Hoppe
- first_name: Bernd
full_name: Henning, Bernd
id: '213'
last_name: Henning
- first_name: P
full_name: Hauptmann, P
last_name: Hauptmann
citation:
ama: 'Püttmer A, Hoppe N, Henning B, Hauptmann P. Ultrasonic density sensor - analysis
of errors due to thin layers of deposits on the sensor surface. Sensors and
Actuators A: Physical. 2002:122-126. doi:10.1016/s0924-4247(98)00365-3'
apa: 'Püttmer, A., Hoppe, N., Henning, B., & Hauptmann, P. (2002). Ultrasonic
density sensor - analysis of errors due to thin layers of deposits on the sensor
surface. Sensors and Actuators A: Physical, 122–126. https://doi.org/10.1016/s0924-4247(98)00365-3'
bibtex: '@article{Püttmer_Hoppe_Henning_Hauptmann_2002, title={Ultrasonic density
sensor - analysis of errors due to thin layers of deposits on the sensor surface},
DOI={10.1016/s0924-4247(98)00365-3},
journal={Sensors and Actuators A: Physical}, author={Püttmer, A and Hoppe, N and
Henning, Bernd and Hauptmann, P}, year={2002}, pages={122–126} }'
chicago: 'Püttmer, A, N Hoppe, Bernd Henning, and P Hauptmann. “Ultrasonic Density
Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.”
Sensors and Actuators A: Physical, 2002, 122–26. https://doi.org/10.1016/s0924-4247(98)00365-3.'
ieee: 'A. Püttmer, N. Hoppe, B. Henning, and P. Hauptmann, “Ultrasonic density sensor
- analysis of errors due to thin layers of deposits on the sensor surface,” Sensors
and Actuators A: Physical, pp. 122–126, 2002.'
mla: 'Püttmer, A., et al. “Ultrasonic Density Sensor - Analysis of Errors Due to
Thin Layers of Deposits on the Sensor Surface.” Sensors and Actuators A: Physical,
2002, pp. 122–26, doi:10.1016/s0924-4247(98)00365-3.'
short: 'A. Püttmer, N. Hoppe, B. Henning, P. Hauptmann, Sensors and Actuators A:
Physical (2002) 122–126.'
date_created: 2019-10-16T14:03:32Z
date_updated: 2022-01-06T06:51:46Z
department:
- _id: '49'
doi: 10.1016/s0924-4247(98)00365-3
language:
- iso: eng
page: 122-126
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
issn:
- 0924-4247
publication_status: published
status: public
title: Ultrasonic density sensor - analysis of errors due to thin layers of deposits
on the sensor surface
type: journal_article
user_id: '15911'
year: '2002'
...
---
_id: '13812'
author:
- first_name: A.
full_name: Püttmer, A.
last_name: Püttmer
- first_name: R.
full_name: Lucklum, R.
last_name: Lucklum
- first_name: Bernd
full_name: Henning, Bernd
id: '213'
last_name: Henning
- first_name: P.
full_name: Hauptmann, P.
last_name: Hauptmann
citation:
ama: 'Püttmer A, Lucklum R, Henning B, Hauptmann P. Improved ultrasonic density
sensor with reduced diffraction influence. Sensors and Actuators A: Physical.
2002:8-12. doi:10.1016/s0924-4247(97)01720-2'
apa: 'Püttmer, A., Lucklum, R., Henning, B., & Hauptmann, P. (2002). Improved
ultrasonic density sensor with reduced diffraction influence. Sensors and Actuators
A: Physical, 8–12. https://doi.org/10.1016/s0924-4247(97)01720-2'
bibtex: '@article{Püttmer_Lucklum_Henning_Hauptmann_2002, title={Improved ultrasonic
density sensor with reduced diffraction influence}, DOI={10.1016/s0924-4247(97)01720-2},
journal={Sensors and Actuators A: Physical}, author={Püttmer, A. and Lucklum,
R. and Henning, Bernd and Hauptmann, P.}, year={2002}, pages={8–12} }'
chicago: 'Püttmer, A., R. Lucklum, Bernd Henning, and P. Hauptmann. “Improved Ultrasonic
Density Sensor with Reduced Diffraction Influence.” Sensors and Actuators A:
Physical, 2002, 8–12. https://doi.org/10.1016/s0924-4247(97)01720-2.'
ieee: 'A. Püttmer, R. Lucklum, B. Henning, and P. Hauptmann, “Improved ultrasonic
density sensor with reduced diffraction influence,” Sensors and Actuators A:
Physical, pp. 8–12, 2002.'
mla: 'Püttmer, A., et al. “Improved Ultrasonic Density Sensor with Reduced Diffraction
Influence.” Sensors and Actuators A: Physical, 2002, pp. 8–12, doi:10.1016/s0924-4247(97)01720-2.'
short: 'A. Püttmer, R. Lucklum, B. Henning, P. Hauptmann, Sensors and Actuators
A: Physical (2002) 8–12.'
date_created: 2019-10-14T12:36:34Z
date_updated: 2022-01-06T06:51:45Z
department:
- _id: '49'
doi: 10.1016/s0924-4247(97)01720-2
language:
- iso: eng
page: 8-12
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
issn:
- 0924-4247
publication_status: published
quality_controlled: '1'
status: public
title: Improved ultrasonic density sensor with reduced diffraction influence
type: journal_article
user_id: '11829'
year: '2002'
...
---
_id: '38341'
author:
- first_name: R
full_name: Plotz, R
last_name: Plotz
- first_name: S
full_name: Michaelis, S
last_name: Michaelis
- first_name: R
full_name: Aigner, R
last_name: Aigner
- first_name: HJ
full_name: Timme, HJ
last_name: Timme
- first_name: J
full_name: Binder, J
last_name: Binder
- first_name: Reinhold
full_name: Noé, Reinhold
id: '381'
last_name: Noé
orcid: https://orcid.org/0000-0002-5839-7616
citation:
ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional
actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL.
2001;92(1-3):312-317. doi:10.1016/S0924-4247(01)00589-1
apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., & Noé, R.
(2001). A low-voltage torsional actuator for application in RF-microswitches.
SENSORS AND ACTUATORS A-PHYSICAL, 92(1–3), 312–317. https://doi.org/10.1016/S0924-4247(01)00589-1
bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage
torsional actuator for application in RF-microswitches}, volume={92}, DOI={10.1016/S0924-4247(01)00589-1},
number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and
Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001},
pages={312–317} }'
chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé.
“A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS
AND ACTUATORS A-PHYSICAL 92, no. 1–3 (2001): 312–17. https://doi.org/10.1016/S0924-4247(01)00589-1.'
ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage
torsional actuator for application in RF-microswitches,” SENSORS AND ACTUATORS
A-PHYSICAL, vol. 92, no. 1–3, pp. 312–317, 2001, doi: 10.1016/S0924-4247(01)00589-1.'
mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.”
SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, 2001, pp. 312–17, doi:10.1016/S0924-4247(01)00589-1.
short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND
ACTUATORS A-PHYSICAL 92 (2001) 312–317.
date_created: 2023-01-23T18:14:18Z
date_updated: 2023-01-25T22:15:02Z
department:
- _id: '56'
doi: 10.1016/S0924-4247(01)00589-1
intvolume: ' 92'
issue: 1-3
language:
- iso: eng
page: 312-317
publication: SENSORS AND ACTUATORS A-PHYSICAL
publication_identifier:
issn:
- 0924-4247
status: public
title: A low-voltage torsional actuator for application in RF-microswitches
type: journal_article
user_id: '14931'
volume: 92
year: '2001'
...
---
_id: '38291'
author:
- first_name: R
full_name: Plotz, R
last_name: Plotz
- first_name: S
full_name: Michaelis, S
last_name: Michaelis
- first_name: R
full_name: Aigner, R
last_name: Aigner
- first_name: HJ
full_name: Timme, HJ
last_name: Timme
- first_name: J
full_name: Binder, J
last_name: Binder
- first_name: Reinhold
full_name: Noé, Reinhold
id: '381'
last_name: Noé
orcid: https://orcid.org/0000-0002-5839-7616
citation:
ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional
actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL.
2001;92(1-3):312-317. doi:10.1016/S0924-4247(01)00589-1
apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., & Noé, R.
(2001). A low-voltage torsional actuator for application in RF-microswitches.
SENSORS AND ACTUATORS A-PHYSICAL, 92(1–3), 312–317. https://doi.org/10.1016/S0924-4247(01)00589-1
bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage
torsional actuator for application in RF-microswitches}, volume={92}, DOI={10.1016/S0924-4247(01)00589-1},
number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and
Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001},
pages={312–317} }'
chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé.
“A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS
AND ACTUATORS A-PHYSICAL 92, no. 1–3 (2001): 312–17. https://doi.org/10.1016/S0924-4247(01)00589-1.'
ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage
torsional actuator for application in RF-microswitches,” SENSORS AND ACTUATORS
A-PHYSICAL, vol. 92, no. 1–3, pp. 312–317, 2001, doi: 10.1016/S0924-4247(01)00589-1.'
mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.”
SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, 2001, pp. 312–17, doi:10.1016/S0924-4247(01)00589-1.
short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND
ACTUATORS A-PHYSICAL 92 (2001) 312–317.
date_created: 2023-01-23T18:11:12Z
date_updated: 2023-01-25T22:54:03Z
department:
- _id: '56'
doi: 10.1016/S0924-4247(01)00589-1
intvolume: ' 92'
issue: 1-3
language:
- iso: eng
page: 312-317
publication: SENSORS AND ACTUATORS A-PHYSICAL
publication_identifier:
issn:
- 0924-4247
status: public
title: A low-voltage torsional actuator for application in RF-microswitches
type: journal_article
user_id: '14931'
volume: 92
year: '2001'
...