--- _id: '44672' abstract: - lang: eng text: With enhancing digitalization, condition monitoring is used in an increasing number of application fields across various industrial sectors. By its application, increased reliability as well as reduced risks and costs can be achieved. Based on different approaches, technical systems are monitored and measured data is analyzed to enable condition-based or predictive maintenance. To this end, machine learning approaches are usually implemented to diagnose the health states or predict the health index of the monitored system. However, these trained models are often black-box models, not intuitively explainable for a human. To overcome this shortcoming, a model-based approach based on physics is developed for piezoelectric bending actuators. Such a model enables a transparent representation of the system. Moreover, the model-based approach is extended by a parameter-estimation to account for sudden changes in behavior e. g. caused by occurring cracks. article_number: '114399' article_type: original author: - first_name: Amelie full_name: Bender, Amelie id: '54290' last_name: Bender citation: ama: 'Bender A. Model-based condition monitoring of piezoelectric bending actuators. Sensors and Actuators A: Physical. 2023;357. doi:10.1016/j.sna.2023.114399' apa: 'Bender, A. (2023). Model-based condition monitoring of piezoelectric bending actuators. Sensors and Actuators A: Physical, 357, Article 114399. https://doi.org/10.1016/j.sna.2023.114399' bibtex: '@article{Bender_2023, title={Model-based condition monitoring of piezoelectric bending actuators}, volume={357}, DOI={10.1016/j.sna.2023.114399}, number={114399}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Bender, Amelie}, year={2023} }' chicago: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending Actuators.” Sensors and Actuators A: Physical 357 (2023). https://doi.org/10.1016/j.sna.2023.114399.' ieee: 'A. Bender, “Model-based condition monitoring of piezoelectric bending actuators,” Sensors and Actuators A: Physical, vol. 357, Art. no. 114399, 2023, doi: 10.1016/j.sna.2023.114399.' mla: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending Actuators.” Sensors and Actuators A: Physical, vol. 357, 114399, Elsevier BV, 2023, doi:10.1016/j.sna.2023.114399.' short: 'A. Bender, Sensors and Actuators A: Physical 357 (2023).' date_created: 2023-05-09T09:49:44Z date_updated: 2023-05-09T09:53:31Z department: - _id: '151' doi: 10.1016/j.sna.2023.114399 intvolume: ' 357' keyword: - Condition Monitoring - Model-based approach Diagnostics - Varying conditions - Explainability - Piezoelectric bending actuators language: - iso: eng main_file_link: - open_access: '1' url: https://authors.elsevier.com/a/1h2WV3IC9dF7Hm oa: '1' publication: 'Sensors and Actuators A: Physical' publication_identifier: issn: - 0924-4247 publication_status: published publisher: Elsevier BV quality_controlled: '1' status: public title: Model-based condition monitoring of piezoelectric bending actuators type: journal_article user_id: '54290' volume: 357 year: '2023' ... --- _id: '10334' abstract: - lang: eng text: Ultrasonic joining is a common industrial process. In the electronics industry it is used to form electrical connections, including those of dissimilar materials. Multiple influencing factors in ultrasonic joining are known and extensively investigated; process parameters like ultrasonic power, bond force, and bonding frequency of the ultrasonic vibration are known to have a high impact on a reliable joining process and need to be adapted for each new application with different geometry or materials. This contribution is focused on increasing ultrasonic power transmitted to the interface and keeping mechanical stresses during ultrasonic bonding low by using a multi-dimensional ultrasonic transducer concept. Bonding results for a new designed connector pin in IGBT-modules achieved by multi- and one-dimensional bonding are discussed. author: - first_name: Reinhard full_name: Schemmel, Reinhard id: '28647' last_name: Schemmel - first_name: Tobias full_name: Hemsel, Tobias id: '210' last_name: Hemsel - first_name: Collin full_name: Dymel, Collin id: '66833' last_name: Dymel - first_name: Matthias full_name: Hunstig, Matthias last_name: Hunstig - first_name: Michael full_name: Brökelmann, Michael last_name: Brökelmann - first_name: Walter full_name: Sextro, Walter id: '21220' last_name: Sextro citation: ama: 'Schemmel R, Hemsel T, Dymel C, Hunstig M, Brökelmann M, Sextro W. Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding. Sensors and Actuators A: Physical. 2019;295:653-662. doi:10.1016/j.sna.2019.04.025' apa: 'Schemmel, R., Hemsel, T., Dymel, C., Hunstig, M., Brökelmann, M., & Sextro, W. (2019). Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding. Sensors and Actuators A: Physical, 295, 653–662. https://doi.org/10.1016/j.sna.2019.04.025' bibtex: '@article{Schemmel_Hemsel_Dymel_Hunstig_Brökelmann_Sextro_2019, title={Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding}, volume={295}, DOI={10.1016/j.sna.2019.04.025}, journal={Sensors and Actuators A: Physical}, author={Schemmel, Reinhard and Hemsel, Tobias and Dymel, Collin and Hunstig, Matthias and Brökelmann, Michael and Sextro, Walter}, year={2019}, pages={653–662} }' chicago: 'Schemmel, Reinhard, Tobias Hemsel, Collin Dymel, Matthias Hunstig, Michael Brökelmann, and Walter Sextro. “Using Complex Multi-Dimensional Vibration Trajectories in Ultrasonic Bonding and Welding.” Sensors and Actuators A: Physical 295 (2019): 653–62. https://doi.org/10.1016/j.sna.2019.04.025.' ieee: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, and W. Sextro, “Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding,” Sensors and Actuators A: Physical, vol. 295, pp. 653–662, 2019, doi: 10.1016/j.sna.2019.04.025.' mla: 'Schemmel, Reinhard, et al. “Using Complex Multi-Dimensional Vibration Trajectories in Ultrasonic Bonding and Welding.” Sensors and Actuators A: Physical, vol. 295, 2019, pp. 653–62, doi:10.1016/j.sna.2019.04.025.' short: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, W. Sextro, Sensors and Actuators A: Physical 295 (2019) 653–662.' date_created: 2019-07-01T07:32:07Z date_updated: 2023-09-21T14:12:15Z department: - _id: '151' doi: 10.1016/j.sna.2019.04.025 intvolume: ' 295' keyword: - Ultrasonic bonding - Ultrasonic welding - Multi-dimensional bonding - Complex vibration - Multi-frequent - Two-dimensional friction model language: - iso: eng page: 653 - 662 project: - _id: '93' grant_number: MP-1-1-015 name: Hochleistungsbonden in energieeffizienten Leistungshalbleitermodulen publication: 'Sensors and Actuators A: Physical' publication_identifier: issn: - 0924-4247 quality_controlled: '1' status: public title: Using complex multi-dimensional vibration trajectories in ultrasonic bonding and welding type: journal_article user_id: '210' volume: 295 year: '2019' ... --- _id: '9753' abstract: - lang: eng text: 'Piezoelektrische Trägheitsmotoren nutzen die Trägheit einer bewegten Masse, um diese in kleinen Schritten durch abwechselnde Haft- und Gleitphasen voranzutreiben. Eine Kernfrage bei der Entwicklung eines piezoelektrischen Trägheitsmotors ist, welches elektrische Ansteuersignal für das gewünschte Motorverhalten optimal ist. Das elektrische Signal führt zu einer Bewegung des piezoelektrischen Aktors und damit der Antriebsstange, die den reibschlüssigen Vortrieb bewirkt. Entsprechend wird diese Fragestellung in zwei Teilen untersucht: Anhand eines Starrkörpermodells werden zunächst Bewegungsverläufe für die Antriebsstange ermittelt, mit denen die maximale Geschwindigkeit erreicht wird. Dabei werden drei Antriebsmodi identifiziert. Mit allen kann eine höhere Geschwindigkeit als mit der heute häufig verwendeten Sägezahnanregung erreicht werden. Anschließend wird ein einfaches dynamisches Modell eines piezoelektrischen Aktors genutzt, um die notwendigen elektrischen Ansteuersignale für die verschiedenen Antriebsmodi zu bestimmen. Es zeigt sich, dass das gewählte einfache Modell hierzu nur bedingt geeignet ist.' author: - first_name: Matthias full_name: Hunstig, Matthias last_name: Hunstig - first_name: Tobias full_name: Hemsel, Tobias id: '210' last_name: Hemsel - first_name: Walter full_name: Sextro, Walter id: '21220' last_name: Sextro citation: ama: 'Hunstig M, Hemsel T, Sextro W. Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren. In: Gausemeier J, Rammig F, Schäfer W, Trächtler A, eds. 7. Paderborner Workshop Entwurf Mechatronischer Systeme. Vol 272. HNI-Verlagsschriftenreihe. Paderborn: Heinz Nixdorf Institut, Universität Paderborn; 2010:129-141.' apa: 'Hunstig, M., Hemsel, T., & Sextro, W. (2010). Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren. In J. Gausemeier, F. Rammig, W. Schäfer, & A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf mechatronischer Systeme (Vol. 272, pp. 129–141). Paderborn: Heinz Nixdorf Institut, Universität Paderborn.' bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, place={Paderborn}, series={HNI-Verlagsschriftenreihe}, title={Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren}, volume={272}, booktitle={7. Paderborner Workshop Entwurf mechatronischer Systeme}, publisher={Heinz Nixdorf Institut, Universität Paderborn}, author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, editor={Gausemeier, Jürgen and Rammig, Franz and Schäfer, Wilhelm and Trächtler, AnsgarEditors}, year={2010}, pages={129–141}, collection={HNI-Verlagsschriftenreihe} }' chicago: 'Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Anregungskonzepte Und Modellierung Piezoelektrischer Trägheitsmotoren.” In 7. Paderborner Workshop Entwurf Mechatronischer Systeme, edited by Jürgen Gausemeier, Franz Rammig, Wilhelm Schäfer, and Ansgar Trächtler, 272:129–41. HNI-Verlagsschriftenreihe. Paderborn: Heinz Nixdorf Institut, Universität Paderborn, 2010.' ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren,” in 7. Paderborner Workshop Entwurf mechatronischer Systeme, 2010, vol. 272, pp. 129–141. mla: Hunstig, Matthias, et al. “Anregungskonzepte Und Modellierung Piezoelektrischer Trägheitsmotoren.” 7. Paderborner Workshop Entwurf Mechatronischer Systeme, edited by Jürgen Gausemeier et al., vol. 272, Heinz Nixdorf Institut, Universität Paderborn, 2010, pp. 129–41. short: 'M. Hunstig, T. Hemsel, W. Sextro, in: J. Gausemeier, F. Rammig, W. Schäfer, A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf Mechatronischer Systeme, Heinz Nixdorf Institut, Universität Paderborn, Paderborn, 2010, pp. 129–141.' date_created: 2019-05-13T10:05:14Z date_updated: 2022-01-06T07:04:19Z department: - _id: '151' editor: - first_name: Jürgen full_name: Gausemeier, Jürgen last_name: Gausemeier - first_name: Franz full_name: Rammig, Franz last_name: Rammig - first_name: Wilhelm full_name: Schäfer, Wilhelm last_name: Schäfer - first_name: Ansgar full_name: Trächtler, Ansgar last_name: Trächtler intvolume: ' 272' keyword: - Piezoelektrischer Trägheitsmotoren language: - iso: eng page: 129-141 place: Paderborn publication: 7. Paderborner Workshop Entwurf mechatronischer Systeme publication_identifier: issn: - 0924-4247 publisher: Heinz Nixdorf Institut, Universität Paderborn series_title: HNI-Verlagsschriftenreihe status: public title: Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren type: conference user_id: '55222' volume: 272 year: '2010' ... --- _id: '9754' abstract: - lang: eng text: A model based design approach for improved piezoelectric inertia motors is presented. Three velocityoptimized movement patterns for the driving body have been derived. The influence of the motor parameters and the process of designing an application specific motor with maximum velocity are shown. A simple dynamic model of the piezoelectric actuator is used to calculate the voltage signal for achieving the desired movement pattern. Observed distortions of the optimum pattern, their influence on the motion of the driven body and different methods to reduce them are discussed. author: - first_name: Matthias full_name: Hunstig, Matthias last_name: Hunstig - first_name: Tobias full_name: Hemsel, Tobias id: '210' last_name: Hemsel - first_name: Walter full_name: Sextro, Walter id: '21220' last_name: Sextro citation: ama: 'Hunstig M, Hemsel T, Sextro W. Improving the Performance of Piezoelectric Inertia Motors. In: ACTUATOR 2010 Conference Proceedings. ; 2010:657-661.' apa: Hunstig, M., Hemsel, T., & Sextro, W. (2010). Improving the Performance of Piezoelectric Inertia Motors. In ACTUATOR 2010 Conference Proceedings (pp. 657–661). bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, title={Improving the Performance of Piezoelectric Inertia Motors}, booktitle={ACTUATOR 2010 Conference Proceedings}, author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, year={2010}, pages={657–661} }' chicago: Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Improving the Performance of Piezoelectric Inertia Motors.” In ACTUATOR 2010 Conference Proceedings, 657–61, 2010. ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Improving the Performance of Piezoelectric Inertia Motors,” in ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–661. mla: Hunstig, Matthias, et al. “Improving the Performance of Piezoelectric Inertia Motors.” ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–61. short: 'M. Hunstig, T. Hemsel, W. Sextro, in: ACTUATOR 2010 Conference Proceedings, 2010, pp. 657–661.' date_created: 2019-05-13T10:10:31Z date_updated: 2022-01-06T07:04:19Z department: - _id: '151' language: - iso: eng page: 657-661 publication: ACTUATOR 2010 Conference Proceedings publication_identifier: issn: - 0924-4247 quality_controlled: '1' status: public title: Improving the Performance of Piezoelectric Inertia Motors type: conference user_id: '55222' year: '2010' ... --- _id: '39563' author: - first_name: Jianliang full_name: Jiang, Jianliang last_name: Jiang - first_name: Ulrich full_name: Hilleringmann, Ulrich id: '20179' last_name: Hilleringmann - first_name: Xiaoping full_name: Shui, Xiaoping last_name: Shui citation: ama: 'Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. Sensors and Actuators A: Physical. 2007;137(2):302-307. doi:10.1016/j.sna.2007.03.012' apa: 'Jiang, J., Hilleringmann, U., & Shui, X. (2007). Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator. Sensors and Actuators A: Physical, 137(2), 302–307. https://doi.org/10.1016/j.sna.2007.03.012' bibtex: '@article{Jiang_Hilleringmann_Shui_2007, title={Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator}, volume={137}, DOI={10.1016/j.sna.2007.03.012}, number={2}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Jiang, Jianliang and Hilleringmann, Ulrich and Shui, Xiaoping}, year={2007}, pages={302–307} }' chicago: 'Jiang, Jianliang, Ulrich Hilleringmann, and Xiaoping Shui. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” Sensors and Actuators A: Physical 137, no. 2 (2007): 302–7. https://doi.org/10.1016/j.sna.2007.03.012.' ieee: 'J. Jiang, U. Hilleringmann, and X. Shui, “Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator,” Sensors and Actuators A: Physical, vol. 137, no. 2, pp. 302–307, 2007, doi: 10.1016/j.sna.2007.03.012.' mla: 'Jiang, Jianliang, et al. “Electro-Thermo-Mechanical Analytical Modeling of Multilayer Cantilever Microactuator.” Sensors and Actuators A: Physical, vol. 137, no. 2, Elsevier BV, 2007, pp. 302–07, doi:10.1016/j.sna.2007.03.012.' short: 'J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A: Physical 137 (2007) 302–307.' date_created: 2023-01-24T12:16:12Z date_updated: 2023-03-21T10:12:55Z department: - _id: '59' doi: 10.1016/j.sna.2007.03.012 intvolume: ' 137' issue: '2' keyword: - Electrical and Electronic Engineering - Metals and Alloys - Surfaces - Coatings and Films - Condensed Matter Physics - Instrumentation - Electronic - Optical and Magnetic Materials language: - iso: eng page: 302-307 publication: 'Sensors and Actuators A: Physical' publication_identifier: issn: - 0924-4247 publication_status: published publisher: Elsevier BV status: public title: Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator type: journal_article user_id: '20179' volume: 137 year: '2007' ... --- _id: '13890' author: - first_name: A full_name: Püttmer, A last_name: Püttmer - first_name: N full_name: Hoppe, N last_name: Hoppe - first_name: Bernd full_name: Henning, Bernd id: '213' last_name: Henning - first_name: P full_name: Hauptmann, P last_name: Hauptmann citation: ama: 'Püttmer A, Hoppe N, Henning B, Hauptmann P. Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface. Sensors and Actuators A: Physical. 2002:122-126. doi:10.1016/s0924-4247(98)00365-3' apa: 'Püttmer, A., Hoppe, N., Henning, B., & Hauptmann, P. (2002). Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface. Sensors and Actuators A: Physical, 122–126. https://doi.org/10.1016/s0924-4247(98)00365-3' bibtex: '@article{Püttmer_Hoppe_Henning_Hauptmann_2002, title={Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface}, DOI={10.1016/s0924-4247(98)00365-3}, journal={Sensors and Actuators A: Physical}, author={Püttmer, A and Hoppe, N and Henning, Bernd and Hauptmann, P}, year={2002}, pages={122–126} }' chicago: 'Püttmer, A, N Hoppe, Bernd Henning, and P Hauptmann. “Ultrasonic Density Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.” Sensors and Actuators A: Physical, 2002, 122–26. https://doi.org/10.1016/s0924-4247(98)00365-3.' ieee: 'A. Püttmer, N. Hoppe, B. Henning, and P. Hauptmann, “Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface,” Sensors and Actuators A: Physical, pp. 122–126, 2002.' mla: 'Püttmer, A., et al. “Ultrasonic Density Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.” Sensors and Actuators A: Physical, 2002, pp. 122–26, doi:10.1016/s0924-4247(98)00365-3.' short: 'A. Püttmer, N. Hoppe, B. Henning, P. Hauptmann, Sensors and Actuators A: Physical (2002) 122–126.' date_created: 2019-10-16T14:03:32Z date_updated: 2022-01-06T06:51:46Z department: - _id: '49' doi: 10.1016/s0924-4247(98)00365-3 language: - iso: eng page: 122-126 publication: 'Sensors and Actuators A: Physical' publication_identifier: issn: - 0924-4247 publication_status: published status: public title: Ultrasonic density sensor - analysis of errors due to thin layers of deposits on the sensor surface type: journal_article user_id: '15911' year: '2002' ... --- _id: '13812' author: - first_name: A. full_name: Püttmer, A. last_name: Püttmer - first_name: R. full_name: Lucklum, R. last_name: Lucklum - first_name: Bernd full_name: Henning, Bernd id: '213' last_name: Henning - first_name: P. full_name: Hauptmann, P. last_name: Hauptmann citation: ama: 'Püttmer A, Lucklum R, Henning B, Hauptmann P. Improved ultrasonic density sensor with reduced diffraction influence. Sensors and Actuators A: Physical. 2002:8-12. doi:10.1016/s0924-4247(97)01720-2' apa: 'Püttmer, A., Lucklum, R., Henning, B., & Hauptmann, P. (2002). Improved ultrasonic density sensor with reduced diffraction influence. Sensors and Actuators A: Physical, 8–12. https://doi.org/10.1016/s0924-4247(97)01720-2' bibtex: '@article{Püttmer_Lucklum_Henning_Hauptmann_2002, title={Improved ultrasonic density sensor with reduced diffraction influence}, DOI={10.1016/s0924-4247(97)01720-2}, journal={Sensors and Actuators A: Physical}, author={Püttmer, A. and Lucklum, R. and Henning, Bernd and Hauptmann, P.}, year={2002}, pages={8–12} }' chicago: 'Püttmer, A., R. Lucklum, Bernd Henning, and P. Hauptmann. “Improved Ultrasonic Density Sensor with Reduced Diffraction Influence.” Sensors and Actuators A: Physical, 2002, 8–12. https://doi.org/10.1016/s0924-4247(97)01720-2.' ieee: 'A. Püttmer, R. Lucklum, B. Henning, and P. Hauptmann, “Improved ultrasonic density sensor with reduced diffraction influence,” Sensors and Actuators A: Physical, pp. 8–12, 2002.' mla: 'Püttmer, A., et al. “Improved Ultrasonic Density Sensor with Reduced Diffraction Influence.” Sensors and Actuators A: Physical, 2002, pp. 8–12, doi:10.1016/s0924-4247(97)01720-2.' short: 'A. Püttmer, R. Lucklum, B. Henning, P. Hauptmann, Sensors and Actuators A: Physical (2002) 8–12.' date_created: 2019-10-14T12:36:34Z date_updated: 2022-01-06T06:51:45Z department: - _id: '49' doi: 10.1016/s0924-4247(97)01720-2 language: - iso: eng page: 8-12 publication: 'Sensors and Actuators A: Physical' publication_identifier: issn: - 0924-4247 publication_status: published quality_controlled: '1' status: public title: Improved ultrasonic density sensor with reduced diffraction influence type: journal_article user_id: '11829' year: '2002' ... --- _id: '38341' author: - first_name: R full_name: Plotz, R last_name: Plotz - first_name: S full_name: Michaelis, S last_name: Michaelis - first_name: R full_name: Aigner, R last_name: Aigner - first_name: HJ full_name: Timme, HJ last_name: Timme - first_name: J full_name: Binder, J last_name: Binder - first_name: Reinhold full_name: Noé, Reinhold id: '381' last_name: Noé orcid: https://orcid.org/0000-0002-5839-7616 citation: ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL. 2001;92(1-3):312-317. doi:10.1016/S0924-4247(01)00589-1 apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., & Noé, R. (2001). A low-voltage torsional actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL, 92(1–3), 312–317. https://doi.org/10.1016/S0924-4247(01)00589-1 bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage torsional actuator for application in RF-microswitches}, volume={92}, DOI={10.1016/S0924-4247(01)00589-1}, number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001}, pages={312–317} }' chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS AND ACTUATORS A-PHYSICAL 92, no. 1–3 (2001): 312–17. https://doi.org/10.1016/S0924-4247(01)00589-1.' ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage torsional actuator for application in RF-microswitches,” SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, pp. 312–317, 2001, doi: 10.1016/S0924-4247(01)00589-1.' mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, 2001, pp. 312–17, doi:10.1016/S0924-4247(01)00589-1. short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND ACTUATORS A-PHYSICAL 92 (2001) 312–317. date_created: 2023-01-23T18:14:18Z date_updated: 2023-01-25T22:15:02Z department: - _id: '56' doi: 10.1016/S0924-4247(01)00589-1 intvolume: ' 92' issue: 1-3 language: - iso: eng page: 312-317 publication: SENSORS AND ACTUATORS A-PHYSICAL publication_identifier: issn: - 0924-4247 status: public title: A low-voltage torsional actuator for application in RF-microswitches type: journal_article user_id: '14931' volume: 92 year: '2001' ... --- _id: '38291' author: - first_name: R full_name: Plotz, R last_name: Plotz - first_name: S full_name: Michaelis, S last_name: Michaelis - first_name: R full_name: Aigner, R last_name: Aigner - first_name: HJ full_name: Timme, HJ last_name: Timme - first_name: J full_name: Binder, J last_name: Binder - first_name: Reinhold full_name: Noé, Reinhold id: '381' last_name: Noé orcid: https://orcid.org/0000-0002-5839-7616 citation: ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL. 2001;92(1-3):312-317. doi:10.1016/S0924-4247(01)00589-1 apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., & Noé, R. (2001). A low-voltage torsional actuator for application in RF-microswitches. SENSORS AND ACTUATORS A-PHYSICAL, 92(1–3), 312–317. https://doi.org/10.1016/S0924-4247(01)00589-1 bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage torsional actuator for application in RF-microswitches}, volume={92}, DOI={10.1016/S0924-4247(01)00589-1}, number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001}, pages={312–317} }' chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS AND ACTUATORS A-PHYSICAL 92, no. 1–3 (2001): 312–17. https://doi.org/10.1016/S0924-4247(01)00589-1.' ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage torsional actuator for application in RF-microswitches,” SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, pp. 312–317, 2001, doi: 10.1016/S0924-4247(01)00589-1.' mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” SENSORS AND ACTUATORS A-PHYSICAL, vol. 92, no. 1–3, 2001, pp. 312–17, doi:10.1016/S0924-4247(01)00589-1. short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND ACTUATORS A-PHYSICAL 92 (2001) 312–317. date_created: 2023-01-23T18:11:12Z date_updated: 2023-01-25T22:54:03Z department: - _id: '56' doi: 10.1016/S0924-4247(01)00589-1 intvolume: ' 92' issue: 1-3 language: - iso: eng page: 312-317 publication: SENSORS AND ACTUATORS A-PHYSICAL publication_identifier: issn: - 0924-4247 status: public title: A low-voltage torsional actuator for application in RF-microswitches type: journal_article user_id: '14931' volume: 92 year: '2001' ...