---
_id: '44672'
abstract:
- lang: eng
  text: With enhancing digitalization, condition monitoring is used in an increasing
    number of application fields across various industrial sectors. By its application,
    increased reliability as well as reduced risks and costs can be achieved. Based
    on different approaches, technical systems are monitored and measured data is
    analyzed to enable condition-based or predictive maintenance. To this end, machine
    learning approaches are usually implemented to diagnose the health states or predict
    the health index of the monitored system. However, these trained models are often
    black-box models, not intuitively explainable for a human. To overcome this shortcoming,
    a model-based approach based on physics is developed for piezoelectric bending
    actuators. Such a model enables a transparent representation of the system. Moreover,
    the model-based approach is extended by a parameter-estimation to account for
    sudden changes in behavior e. g. caused by occurring cracks.
article_number: '114399'
article_type: original
author:
- first_name: Amelie
  full_name: Bender, Amelie
  id: '54290'
  last_name: Bender
citation:
  ama: 'Bender A. Model-based condition monitoring of piezoelectric bending actuators.
    <i>Sensors and Actuators A: Physical</i>. 2023;357. doi:<a href="https://doi.org/10.1016/j.sna.2023.114399">10.1016/j.sna.2023.114399</a>'
  apa: 'Bender, A. (2023). Model-based condition monitoring of piezoelectric bending
    actuators. <i>Sensors and Actuators A: Physical</i>, <i>357</i>, Article 114399.
    <a href="https://doi.org/10.1016/j.sna.2023.114399">https://doi.org/10.1016/j.sna.2023.114399</a>'
  bibtex: '@article{Bender_2023, title={Model-based condition monitoring of piezoelectric
    bending actuators}, volume={357}, DOI={<a href="https://doi.org/10.1016/j.sna.2023.114399">10.1016/j.sna.2023.114399</a>},
    number={114399}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier
    BV}, author={Bender, Amelie}, year={2023} }'
  chicago: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending
    Actuators.” <i>Sensors and Actuators A: Physical</i> 357 (2023). <a href="https://doi.org/10.1016/j.sna.2023.114399">https://doi.org/10.1016/j.sna.2023.114399</a>.'
  ieee: 'A. Bender, “Model-based condition monitoring of piezoelectric bending actuators,”
    <i>Sensors and Actuators A: Physical</i>, vol. 357, Art. no. 114399, 2023, doi:
    <a href="https://doi.org/10.1016/j.sna.2023.114399">10.1016/j.sna.2023.114399</a>.'
  mla: 'Bender, Amelie. “Model-Based Condition Monitoring of Piezoelectric Bending
    Actuators.” <i>Sensors and Actuators A: Physical</i>, vol. 357, 114399, Elsevier
    BV, 2023, doi:<a href="https://doi.org/10.1016/j.sna.2023.114399">10.1016/j.sna.2023.114399</a>.'
  short: 'A. Bender, Sensors and Actuators A: Physical 357 (2023).'
date_created: 2023-05-09T09:49:44Z
date_updated: 2023-05-09T09:53:31Z
department:
- _id: '151'
doi: 10.1016/j.sna.2023.114399
intvolume: '       357'
keyword:
- Condition Monitoring
- Model-based approach Diagnostics
- Varying conditions
- Explainability
- Piezoelectric bending actuators
language:
- iso: eng
main_file_link:
- open_access: '1'
  url: https://authors.elsevier.com/a/1h2WV3IC9dF7Hm
oa: '1'
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
  issn:
  - 0924-4247
publication_status: published
publisher: Elsevier BV
quality_controlled: '1'
status: public
title: Model-based condition monitoring of piezoelectric bending actuators
type: journal_article
user_id: '54290'
volume: 357
year: '2023'
...
---
_id: '10334'
abstract:
- lang: eng
  text: Ultrasonic joining is a common industrial process. In the electronics industry
    it is used to form electrical connections, including those of dissimilar materials.
    Multiple influencing factors in ultrasonic joining are known and extensively investigated;
    process parameters like ultrasonic power, bond force, and bonding frequency of
    the ultrasonic vibration are known to have a high impact on a reliable joining
    process and need to be adapted for each new application with different geometry
    or materials. This contribution is focused on increasing ultrasonic power transmitted
    to the interface and keeping mechanical stresses during ultrasonic bonding low
    by using a multi-dimensional ultrasonic transducer concept. Bonding results for
    a new designed connector pin in IGBT-modules achieved by multi- and one-dimensional
    bonding are discussed.
author:
- first_name: Reinhard
  full_name: Schemmel, Reinhard
  id: '28647'
  last_name: Schemmel
- first_name: Tobias
  full_name: Hemsel, Tobias
  id: '210'
  last_name: Hemsel
- first_name: Collin
  full_name: Dymel, Collin
  id: '66833'
  last_name: Dymel
- first_name: Matthias
  full_name: Hunstig, Matthias
  last_name: Hunstig
- first_name: Michael
  full_name: Brökelmann, Michael
  last_name: Brökelmann
- first_name: Walter
  full_name: Sextro, Walter
  id: '21220'
  last_name: Sextro
citation:
  ama: 'Schemmel R, Hemsel T, Dymel C, Hunstig M, Brökelmann M, Sextro W. Using complex
    multi-dimensional vibration trajectories in ultrasonic bonding and welding. <i>Sensors
    and Actuators A: Physical</i>. 2019;295:653-662. doi:<a href="https://doi.org/10.1016/j.sna.2019.04.025">10.1016/j.sna.2019.04.025</a>'
  apa: 'Schemmel, R., Hemsel, T., Dymel, C., Hunstig, M., Brökelmann, M., &#38; Sextro,
    W. (2019). Using complex multi-dimensional vibration trajectories in ultrasonic
    bonding and welding. <i>Sensors and Actuators A: Physical</i>, <i>295</i>, 653–662.
    <a href="https://doi.org/10.1016/j.sna.2019.04.025">https://doi.org/10.1016/j.sna.2019.04.025</a>'
  bibtex: '@article{Schemmel_Hemsel_Dymel_Hunstig_Brökelmann_Sextro_2019, title={Using
    complex multi-dimensional vibration trajectories in ultrasonic bonding and welding},
    volume={295}, DOI={<a href="https://doi.org/10.1016/j.sna.2019.04.025">10.1016/j.sna.2019.04.025</a>},
    journal={Sensors and Actuators A: Physical}, author={Schemmel, Reinhard and Hemsel,
    Tobias and Dymel, Collin and Hunstig, Matthias and Brökelmann, Michael and Sextro,
    Walter}, year={2019}, pages={653–662} }'
  chicago: 'Schemmel, Reinhard, Tobias Hemsel, Collin Dymel, Matthias Hunstig, Michael
    Brökelmann, and Walter Sextro. “Using Complex Multi-Dimensional Vibration Trajectories
    in Ultrasonic Bonding and Welding.” <i>Sensors and Actuators A: Physical</i> 295
    (2019): 653–62. <a href="https://doi.org/10.1016/j.sna.2019.04.025">https://doi.org/10.1016/j.sna.2019.04.025</a>.'
  ieee: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, and W. Sextro,
    “Using complex multi-dimensional vibration trajectories in ultrasonic bonding
    and welding,” <i>Sensors and Actuators A: Physical</i>, vol. 295, pp. 653–662,
    2019, doi: <a href="https://doi.org/10.1016/j.sna.2019.04.025">10.1016/j.sna.2019.04.025</a>.'
  mla: 'Schemmel, Reinhard, et al. “Using Complex Multi-Dimensional Vibration Trajectories
    in Ultrasonic Bonding and Welding.” <i>Sensors and Actuators A: Physical</i>,
    vol. 295, 2019, pp. 653–62, doi:<a href="https://doi.org/10.1016/j.sna.2019.04.025">10.1016/j.sna.2019.04.025</a>.'
  short: 'R. Schemmel, T. Hemsel, C. Dymel, M. Hunstig, M. Brökelmann, W. Sextro,
    Sensors and Actuators A: Physical 295 (2019) 653–662.'
date_created: 2019-07-01T07:32:07Z
date_updated: 2023-09-21T14:12:15Z
department:
- _id: '151'
doi: 10.1016/j.sna.2019.04.025
intvolume: '       295'
keyword:
- Ultrasonic bonding
- Ultrasonic welding
- Multi-dimensional bonding
- Complex vibration
- Multi-frequent
- Two-dimensional friction model
language:
- iso: eng
page: 653 - 662
project:
- _id: '93'
  grant_number: MP-1-1-015
  name: Hochleistungsbonden in energieeffizienten Leistungshalbleitermodulen
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
  issn:
  - 0924-4247
quality_controlled: '1'
status: public
title: Using complex multi-dimensional vibration trajectories in ultrasonic bonding
  and welding
type: journal_article
user_id: '210'
volume: 295
year: '2019'
...
---
_id: '9753'
abstract:
- lang: eng
  text: 'Piezoelektrische Trägheitsmotoren nutzen die Trägheit einer bewegten Masse,
    um diese in kleinen Schritten durch abwechselnde Haft- und Gleitphasen voranzutreiben.
    Eine Kernfrage bei der Entwicklung eines piezoelektrischen Trägheitsmotors ist,
    welches elektrische Ansteuersignal für das gewünschte Motorverhalten optimal ist.
    Das elektrische Signal führt zu einer Bewegung des piezoelektrischen Aktors und
    damit der Antriebsstange, die den reibschlüssigen Vortrieb bewirkt. Entsprechend
    wird diese Fragestellung in zwei Teilen untersucht: Anhand eines Starrkörpermodells
    werden zunächst Bewegungsverläufe für die Antriebsstange ermittelt, mit denen
    die maximale Geschwindigkeit erreicht wird. Dabei werden drei Antriebsmodi identifiziert.
    Mit allen kann eine höhere Geschwindigkeit als mit der heute häufig verwendeten
    Sägezahnanregung erreicht werden. Anschließend wird ein einfaches dynamisches
    Modell eines piezoelektrischen Aktors genutzt, um die notwendigen elektrischen
    Ansteuersignale für die verschiedenen Antriebsmodi zu bestimmen. Es zeigt sich,
    dass das gewählte einfache Modell hierzu nur bedingt geeignet ist.'
author:
- first_name: Matthias
  full_name: Hunstig, Matthias
  last_name: Hunstig
- first_name: Tobias
  full_name: Hemsel, Tobias
  id: '210'
  last_name: Hemsel
- first_name: Walter
  full_name: Sextro, Walter
  id: '21220'
  last_name: Sextro
citation:
  ama: 'Hunstig M, Hemsel T, Sextro W. Anregungskonzepte und Modellierung piezoelektrischer
    Trägheitsmotoren. In: Gausemeier J, Rammig F, Schäfer W, Trächtler A, eds. <i>7.
    Paderborner Workshop Entwurf Mechatronischer Systeme</i>. Vol 272. HNI-Verlagsschriftenreihe.
    Paderborn: Heinz Nixdorf Institut, Universität Paderborn; 2010:129-141.'
  apa: 'Hunstig, M., Hemsel, T., &#38; Sextro, W. (2010). Anregungskonzepte und Modellierung
    piezoelektrischer Trägheitsmotoren. In J. Gausemeier, F. Rammig, W. Schäfer, &#38;
    A. Trächtler (Eds.), <i>7. Paderborner Workshop Entwurf mechatronischer Systeme</i>
    (Vol. 272, pp. 129–141). Paderborn: Heinz Nixdorf Institut, Universität Paderborn.'
  bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, place={Paderborn}, series={HNI-Verlagsschriftenreihe},
    title={Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren},
    volume={272}, booktitle={7. Paderborner Workshop Entwurf mechatronischer Systeme},
    publisher={Heinz Nixdorf Institut, Universität Paderborn}, author={Hunstig, Matthias
    and Hemsel, Tobias and Sextro, Walter}, editor={Gausemeier, Jürgen and Rammig,
    Franz and Schäfer, Wilhelm and Trächtler, AnsgarEditors}, year={2010}, pages={129–141},
    collection={HNI-Verlagsschriftenreihe} }'
  chicago: 'Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Anregungskonzepte
    Und Modellierung Piezoelektrischer Trägheitsmotoren.” In <i>7. Paderborner Workshop
    Entwurf Mechatronischer Systeme</i>, edited by Jürgen Gausemeier, Franz Rammig,
    Wilhelm Schäfer, and Ansgar Trächtler, 272:129–41. HNI-Verlagsschriftenreihe.
    Paderborn: Heinz Nixdorf Institut, Universität Paderborn, 2010.'
  ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Anregungskonzepte und Modellierung
    piezoelektrischer Trägheitsmotoren,” in <i>7. Paderborner Workshop Entwurf mechatronischer
    Systeme</i>, 2010, vol. 272, pp. 129–141.
  mla: Hunstig, Matthias, et al. “Anregungskonzepte Und Modellierung Piezoelektrischer
    Trägheitsmotoren.” <i>7. Paderborner Workshop Entwurf Mechatronischer Systeme</i>,
    edited by Jürgen Gausemeier et al., vol. 272, Heinz Nixdorf Institut, Universität
    Paderborn, 2010, pp. 129–41.
  short: 'M. Hunstig, T. Hemsel, W. Sextro, in: J. Gausemeier, F. Rammig, W. Schäfer,
    A. Trächtler (Eds.), 7. Paderborner Workshop Entwurf Mechatronischer Systeme,
    Heinz Nixdorf Institut, Universität Paderborn, Paderborn, 2010, pp. 129–141.'
date_created: 2019-05-13T10:05:14Z
date_updated: 2022-01-06T07:04:19Z
department:
- _id: '151'
editor:
- first_name: Jürgen
  full_name: Gausemeier, Jürgen
  last_name: Gausemeier
- first_name: Franz
  full_name: Rammig, Franz
  last_name: Rammig
- first_name: Wilhelm
  full_name: Schäfer, Wilhelm
  last_name: Schäfer
- first_name: Ansgar
  full_name: Trächtler, Ansgar
  last_name: Trächtler
intvolume: '       272'
keyword:
- Piezoelektrischer Trägheitsmotoren
language:
- iso: eng
page: 129-141
place: Paderborn
publication: 7. Paderborner Workshop Entwurf mechatronischer Systeme
publication_identifier:
  issn:
  - 0924-4247
publisher: Heinz Nixdorf Institut, Universität Paderborn
series_title: HNI-Verlagsschriftenreihe
status: public
title: Anregungskonzepte und Modellierung piezoelektrischer Trägheitsmotoren
type: conference
user_id: '55222'
volume: 272
year: '2010'
...
---
_id: '9754'
abstract:
- lang: eng
  text: A model based design approach for improved piezoelectric inertia motors is
    presented. Three velocityoptimized movement patterns for the driving body have
    been derived. The influence of the motor parameters and the process of designing
    an application specific motor with maximum velocity are shown. A simple dynamic
    model of the piezoelectric actuator is used to calculate the voltage signal for
    achieving the desired movement pattern. Observed distortions of the optimum pattern,
    their influence on the motion of the driven body and different methods to reduce
    them are discussed.
author:
- first_name: Matthias
  full_name: Hunstig, Matthias
  last_name: Hunstig
- first_name: Tobias
  full_name: Hemsel, Tobias
  id: '210'
  last_name: Hemsel
- first_name: Walter
  full_name: Sextro, Walter
  id: '21220'
  last_name: Sextro
citation:
  ama: 'Hunstig M, Hemsel T, Sextro W. Improving the Performance of Piezoelectric
    Inertia Motors. In: <i>ACTUATOR 2010 Conference Proceedings</i>. ; 2010:657-661.'
  apa: Hunstig, M., Hemsel, T., &#38; Sextro, W. (2010). Improving the Performance
    of Piezoelectric Inertia Motors. In <i>ACTUATOR 2010 Conference Proceedings</i>
    (pp. 657–661).
  bibtex: '@inproceedings{Hunstig_Hemsel_Sextro_2010, title={Improving the Performance
    of Piezoelectric Inertia Motors}, booktitle={ACTUATOR 2010 Conference Proceedings},
    author={Hunstig, Matthias and Hemsel, Tobias and Sextro, Walter}, year={2010},
    pages={657–661} }'
  chicago: Hunstig, Matthias, Tobias Hemsel, and Walter Sextro. “Improving the Performance
    of Piezoelectric Inertia Motors.” In <i>ACTUATOR 2010 Conference Proceedings</i>,
    657–61, 2010.
  ieee: M. Hunstig, T. Hemsel, and W. Sextro, “Improving the Performance of Piezoelectric
    Inertia Motors,” in <i>ACTUATOR 2010 Conference Proceedings</i>, 2010, pp. 657–661.
  mla: Hunstig, Matthias, et al. “Improving the Performance of Piezoelectric Inertia
    Motors.” <i>ACTUATOR 2010 Conference Proceedings</i>, 2010, pp. 657–61.
  short: 'M. Hunstig, T. Hemsel, W. Sextro, in: ACTUATOR 2010 Conference Proceedings,
    2010, pp. 657–661.'
date_created: 2019-05-13T10:10:31Z
date_updated: 2022-01-06T07:04:19Z
department:
- _id: '151'
language:
- iso: eng
page: 657-661
publication: ACTUATOR 2010 Conference Proceedings
publication_identifier:
  issn:
  - 0924-4247
quality_controlled: '1'
status: public
title: Improving the Performance of Piezoelectric Inertia Motors
type: conference
user_id: '55222'
year: '2010'
...
---
_id: '39563'
author:
- first_name: Jianliang
  full_name: Jiang, Jianliang
  last_name: Jiang
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  id: '20179'
  last_name: Hilleringmann
- first_name: Xiaoping
  full_name: Shui, Xiaoping
  last_name: Shui
citation:
  ama: 'Jiang J, Hilleringmann U, Shui X. Electro-thermo-mechanical analytical modeling
    of multilayer cantilever microactuator. <i>Sensors and Actuators A: Physical</i>.
    2007;137(2):302-307. doi:<a href="https://doi.org/10.1016/j.sna.2007.03.012">10.1016/j.sna.2007.03.012</a>'
  apa: 'Jiang, J., Hilleringmann, U., &#38; Shui, X. (2007). Electro-thermo-mechanical
    analytical modeling of multilayer cantilever microactuator. <i>Sensors and Actuators
    A: Physical</i>, <i>137</i>(2), 302–307. <a href="https://doi.org/10.1016/j.sna.2007.03.012">https://doi.org/10.1016/j.sna.2007.03.012</a>'
  bibtex: '@article{Jiang_Hilleringmann_Shui_2007, title={Electro-thermo-mechanical
    analytical modeling of multilayer cantilever microactuator}, volume={137}, DOI={<a
    href="https://doi.org/10.1016/j.sna.2007.03.012">10.1016/j.sna.2007.03.012</a>},
    number={2}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV},
    author={Jiang, Jianliang and Hilleringmann, Ulrich and Shui, Xiaoping}, year={2007},
    pages={302–307} }'
  chicago: 'Jiang, Jianliang, Ulrich Hilleringmann, and Xiaoping Shui. “Electro-Thermo-Mechanical
    Analytical Modeling of Multilayer Cantilever Microactuator.” <i>Sensors and Actuators
    A: Physical</i> 137, no. 2 (2007): 302–7. <a href="https://doi.org/10.1016/j.sna.2007.03.012">https://doi.org/10.1016/j.sna.2007.03.012</a>.'
  ieee: 'J. Jiang, U. Hilleringmann, and X. Shui, “Electro-thermo-mechanical analytical
    modeling of multilayer cantilever microactuator,” <i>Sensors and Actuators A:
    Physical</i>, vol. 137, no. 2, pp. 302–307, 2007, doi: <a href="https://doi.org/10.1016/j.sna.2007.03.012">10.1016/j.sna.2007.03.012</a>.'
  mla: 'Jiang, Jianliang, et al. “Electro-Thermo-Mechanical Analytical Modeling of
    Multilayer Cantilever Microactuator.” <i>Sensors and Actuators A: Physical</i>,
    vol. 137, no. 2, Elsevier BV, 2007, pp. 302–07, doi:<a href="https://doi.org/10.1016/j.sna.2007.03.012">10.1016/j.sna.2007.03.012</a>.'
  short: 'J. Jiang, U. Hilleringmann, X. Shui, Sensors and Actuators A: Physical 137
    (2007) 302–307.'
date_created: 2023-01-24T12:16:12Z
date_updated: 2023-03-21T10:12:55Z
department:
- _id: '59'
doi: 10.1016/j.sna.2007.03.012
intvolume: '       137'
issue: '2'
keyword:
- Electrical and Electronic Engineering
- Metals and Alloys
- Surfaces
- Coatings and Films
- Condensed Matter Physics
- Instrumentation
- Electronic
- Optical and Magnetic Materials
language:
- iso: eng
page: 302-307
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
  issn:
  - 0924-4247
publication_status: published
publisher: Elsevier BV
status: public
title: Electro-thermo-mechanical analytical modeling of multilayer cantilever microactuator
type: journal_article
user_id: '20179'
volume: 137
year: '2007'
...
---
_id: '13890'
author:
- first_name: A
  full_name: Püttmer, A
  last_name: Püttmer
- first_name: N
  full_name: Hoppe, N
  last_name: Hoppe
- first_name: Bernd
  full_name: Henning, Bernd
  id: '213'
  last_name: Henning
- first_name: P
  full_name: Hauptmann, P
  last_name: Hauptmann
citation:
  ama: 'Püttmer A, Hoppe N, Henning B, Hauptmann P. Ultrasonic density sensor - analysis
    of errors due to thin layers of deposits on the sensor surface. <i>Sensors and
    Actuators A: Physical</i>. 2002:122-126. doi:<a href="https://doi.org/10.1016/s0924-4247(98)00365-3">10.1016/s0924-4247(98)00365-3</a>'
  apa: 'Püttmer, A., Hoppe, N., Henning, B., &#38; Hauptmann, P. (2002). Ultrasonic
    density sensor - analysis of errors due to thin layers of deposits on the sensor
    surface. <i>Sensors and Actuators A: Physical</i>, 122–126. <a href="https://doi.org/10.1016/s0924-4247(98)00365-3">https://doi.org/10.1016/s0924-4247(98)00365-3</a>'
  bibtex: '@article{Püttmer_Hoppe_Henning_Hauptmann_2002, title={Ultrasonic density
    sensor - analysis of errors due to thin layers of deposits on the sensor surface},
    DOI={<a href="https://doi.org/10.1016/s0924-4247(98)00365-3">10.1016/s0924-4247(98)00365-3</a>},
    journal={Sensors and Actuators A: Physical}, author={Püttmer, A and Hoppe, N and
    Henning, Bernd and Hauptmann, P}, year={2002}, pages={122–126} }'
  chicago: 'Püttmer, A, N Hoppe, Bernd Henning, and P Hauptmann. “Ultrasonic Density
    Sensor - Analysis of Errors Due to Thin Layers of Deposits on the Sensor Surface.”
    <i>Sensors and Actuators A: Physical</i>, 2002, 122–26. <a href="https://doi.org/10.1016/s0924-4247(98)00365-3">https://doi.org/10.1016/s0924-4247(98)00365-3</a>.'
  ieee: 'A. Püttmer, N. Hoppe, B. Henning, and P. Hauptmann, “Ultrasonic density sensor
    - analysis of errors due to thin layers of deposits on the sensor surface,” <i>Sensors
    and Actuators A: Physical</i>, pp. 122–126, 2002.'
  mla: 'Püttmer, A., et al. “Ultrasonic Density Sensor - Analysis of Errors Due to
    Thin Layers of Deposits on the Sensor Surface.” <i>Sensors and Actuators A: Physical</i>,
    2002, pp. 122–26, doi:<a href="https://doi.org/10.1016/s0924-4247(98)00365-3">10.1016/s0924-4247(98)00365-3</a>.'
  short: 'A. Püttmer, N. Hoppe, B. Henning, P. Hauptmann, Sensors and Actuators A:
    Physical (2002) 122–126.'
date_created: 2019-10-16T14:03:32Z
date_updated: 2022-01-06T06:51:46Z
department:
- _id: '49'
doi: 10.1016/s0924-4247(98)00365-3
language:
- iso: eng
page: 122-126
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
  issn:
  - 0924-4247
publication_status: published
status: public
title: Ultrasonic density sensor - analysis of errors due to thin layers of deposits
  on the sensor surface
type: journal_article
user_id: '15911'
year: '2002'
...
---
_id: '13812'
author:
- first_name: A.
  full_name: Püttmer, A.
  last_name: Püttmer
- first_name: R.
  full_name: Lucklum, R.
  last_name: Lucklum
- first_name: Bernd
  full_name: Henning, Bernd
  id: '213'
  last_name: Henning
- first_name: P.
  full_name: Hauptmann, P.
  last_name: Hauptmann
citation:
  ama: 'Püttmer A, Lucklum R, Henning B, Hauptmann P. Improved ultrasonic density
    sensor with reduced diffraction influence. <i>Sensors and Actuators A: Physical</i>.
    2002:8-12. doi:<a href="https://doi.org/10.1016/s0924-4247(97)01720-2">10.1016/s0924-4247(97)01720-2</a>'
  apa: 'Püttmer, A., Lucklum, R., Henning, B., &#38; Hauptmann, P. (2002). Improved
    ultrasonic density sensor with reduced diffraction influence. <i>Sensors and Actuators
    A: Physical</i>, 8–12. <a href="https://doi.org/10.1016/s0924-4247(97)01720-2">https://doi.org/10.1016/s0924-4247(97)01720-2</a>'
  bibtex: '@article{Püttmer_Lucklum_Henning_Hauptmann_2002, title={Improved ultrasonic
    density sensor with reduced diffraction influence}, DOI={<a href="https://doi.org/10.1016/s0924-4247(97)01720-2">10.1016/s0924-4247(97)01720-2</a>},
    journal={Sensors and Actuators A: Physical}, author={Püttmer, A. and Lucklum,
    R. and Henning, Bernd and Hauptmann, P.}, year={2002}, pages={8–12} }'
  chicago: 'Püttmer, A., R. Lucklum, Bernd Henning, and P. Hauptmann. “Improved Ultrasonic
    Density Sensor with Reduced Diffraction Influence.” <i>Sensors and Actuators A:
    Physical</i>, 2002, 8–12. <a href="https://doi.org/10.1016/s0924-4247(97)01720-2">https://doi.org/10.1016/s0924-4247(97)01720-2</a>.'
  ieee: 'A. Püttmer, R. Lucklum, B. Henning, and P. Hauptmann, “Improved ultrasonic
    density sensor with reduced diffraction influence,” <i>Sensors and Actuators A:
    Physical</i>, pp. 8–12, 2002.'
  mla: 'Püttmer, A., et al. “Improved Ultrasonic Density Sensor with Reduced Diffraction
    Influence.” <i>Sensors and Actuators A: Physical</i>, 2002, pp. 8–12, doi:<a href="https://doi.org/10.1016/s0924-4247(97)01720-2">10.1016/s0924-4247(97)01720-2</a>.'
  short: 'A. Püttmer, R. Lucklum, B. Henning, P. Hauptmann, Sensors and Actuators
    A: Physical (2002) 8–12.'
date_created: 2019-10-14T12:36:34Z
date_updated: 2022-01-06T06:51:45Z
department:
- _id: '49'
doi: 10.1016/s0924-4247(97)01720-2
language:
- iso: eng
page: 8-12
publication: 'Sensors and Actuators A: Physical'
publication_identifier:
  issn:
  - 0924-4247
publication_status: published
quality_controlled: '1'
status: public
title: Improved ultrasonic density sensor with reduced diffraction influence
type: journal_article
user_id: '11829'
year: '2002'
...
---
_id: '38341'
author:
- first_name: R
  full_name: Plotz, R
  last_name: Plotz
- first_name: S
  full_name: Michaelis, S
  last_name: Michaelis
- first_name: R
  full_name: Aigner, R
  last_name: Aigner
- first_name: HJ
  full_name: Timme, HJ
  last_name: Timme
- first_name: J
  full_name: Binder, J
  last_name: Binder
- first_name: Reinhold
  full_name: Noé, Reinhold
  id: '381'
  last_name: Noé
  orcid: https://orcid.org/0000-0002-5839-7616
citation:
  ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional
    actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>.
    2001;92(1-3):312-317. doi:<a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>
  apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., &#38; Noé, R.
    (2001). A low-voltage torsional actuator for application in RF-microswitches.
    <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, <i>92</i>(1–3), 312–317. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a>
  bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage
    torsional actuator for application in RF-microswitches}, volume={92}, DOI={<a
    href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>},
    number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and
    Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001},
    pages={312–317} }'
  chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé.
    “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS
    AND ACTUATORS A-PHYSICAL</i> 92, no. 1–3 (2001): 312–17. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a>.'
  ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage
    torsional actuator for application in RF-microswitches,” <i>SENSORS AND ACTUATORS
    A-PHYSICAL</i>, vol. 92, no. 1–3, pp. 312–317, 2001, doi: <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>.'
  mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.”
    <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, 2001, pp. 312–17, doi:<a
    href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>.
  short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND
    ACTUATORS A-PHYSICAL 92 (2001) 312–317.
date_created: 2023-01-23T18:14:18Z
date_updated: 2023-01-25T22:15:02Z
department:
- _id: '56'
doi: 10.1016/S0924-4247(01)00589-1
intvolume: '        92'
issue: 1-3
language:
- iso: eng
page: 312-317
publication: SENSORS AND ACTUATORS A-PHYSICAL
publication_identifier:
  issn:
  - 0924-4247
status: public
title: A low-voltage torsional actuator for application in RF-microswitches
type: journal_article
user_id: '14931'
volume: 92
year: '2001'
...
---
_id: '38291'
author:
- first_name: R
  full_name: Plotz, R
  last_name: Plotz
- first_name: S
  full_name: Michaelis, S
  last_name: Michaelis
- first_name: R
  full_name: Aigner, R
  last_name: Aigner
- first_name: HJ
  full_name: Timme, HJ
  last_name: Timme
- first_name: J
  full_name: Binder, J
  last_name: Binder
- first_name: Reinhold
  full_name: Noé, Reinhold
  id: '381'
  last_name: Noé
  orcid: https://orcid.org/0000-0002-5839-7616
citation:
  ama: Plotz R, Michaelis S, Aigner R, Timme H, Binder J, Noé R. A low-voltage torsional
    actuator for application in RF-microswitches. <i>SENSORS AND ACTUATORS A-PHYSICAL</i>.
    2001;92(1-3):312-317. doi:<a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>
  apa: Plotz, R., Michaelis, S., Aigner, R., Timme, H., Binder, J., &#38; Noé, R.
    (2001). A low-voltage torsional actuator for application in RF-microswitches.
    <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, <i>92</i>(1–3), 312–317. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a>
  bibtex: '@article{Plotz_Michaelis_Aigner_Timme_Binder_Noé_2001, title={A low-voltage
    torsional actuator for application in RF-microswitches}, volume={92}, DOI={<a
    href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>},
    number={1–3}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, author={Plotz, R and
    Michaelis, S and Aigner, R and Timme, HJ and Binder, J and Noé, Reinhold}, year={2001},
    pages={312–317} }'
  chicago: 'Plotz, R, S Michaelis, R Aigner, HJ Timme, J Binder, and Reinhold Noé.
    “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.” <i>SENSORS
    AND ACTUATORS A-PHYSICAL</i> 92, no. 1–3 (2001): 312–17. <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">https://doi.org/10.1016/S0924-4247(01)00589-1</a>.'
  ieee: 'R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, and R. Noé, “A low-voltage
    torsional actuator for application in RF-microswitches,” <i>SENSORS AND ACTUATORS
    A-PHYSICAL</i>, vol. 92, no. 1–3, pp. 312–317, 2001, doi: <a href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>.'
  mla: Plotz, R., et al. “A Low-Voltage Torsional Actuator for Application in RF-Microswitches.”
    <i>SENSORS AND ACTUATORS A-PHYSICAL</i>, vol. 92, no. 1–3, 2001, pp. 312–17, doi:<a
    href="https://doi.org/10.1016/S0924-4247(01)00589-1">10.1016/S0924-4247(01)00589-1</a>.
  short: R. Plotz, S. Michaelis, R. Aigner, H. Timme, J. Binder, R. Noé, SENSORS AND
    ACTUATORS A-PHYSICAL 92 (2001) 312–317.
date_created: 2023-01-23T18:11:12Z
date_updated: 2023-01-25T22:54:03Z
department:
- _id: '56'
doi: 10.1016/S0924-4247(01)00589-1
intvolume: '        92'
issue: 1-3
language:
- iso: eng
page: 312-317
publication: SENSORS AND ACTUATORS A-PHYSICAL
publication_identifier:
  issn:
  - 0924-4247
status: public
title: A low-voltage torsional actuator for application in RF-microswitches
type: journal_article
user_id: '14931'
volume: 92
year: '2001'
...