@article{39520,
  author       = {{Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}},
  issn         = {{0960-1317}},
  journal      = {{Journal of Micromechanics and Microengineering}},
  keywords     = {{Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials}},
  number       = {{12}},
  publisher    = {{IOP Publishing}},
  title        = {{{Surface tension and its role for vertical wet etching of silicon}}},
  doi          = {{10.1088/0960-1317/22/12/125012}},
  volume       = {{22}},
  year         = {{2012}},
}

@article{39522,
  author       = {{Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}},
  issn         = {{0960-1317}},
  journal      = {{Journal of Micromechanics and Microengineering}},
  keywords     = {{Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials}},
  number       = {{12}},
  publisher    = {{IOP Publishing}},
  title        = {{{Surface tension and its role for vertical wet etching of silicon}}},
  doi          = {{10.1088/0960-1317/22/12/125012}},
  volume       = {{22}},
  year         = {{2012}},
}