@article{7497,
  author       = {{Mehta, M. and Ruth, M. and Piegdon, K. A. and Krix, D. and Nienhaus, H. and Meier, Cedrik}},
  issn         = {{1071-1023}},
  journal      = {{Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}},
  number       = {{5}},
  publisher    = {{American Vacuum Society}},
  title        = {{{Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films}}},
  doi          = {{10.1116/1.3186528}},
  volume       = {{27}},
  year         = {{2009}},
}

@article{7649,
  author       = {{Nienhaus, H. and Kravets, V. and Koutouzov, S. and Meier, Cedrik and Lorke, A. and Wiggers, H. and Kennedy, M. K. and Kruis, F. E.}},
  issn         = {{1071-1023}},
  journal      = {{Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}},
  number       = {{3}},
  publisher    = {{American Vacuum Society}},
  title        = {{{Quantum size effect of valence band plasmon energies in Si and SnO[sub x] nanoparticles}}},
  doi          = {{10.1116/1.2190658}},
  volume       = {{24}},
  year         = {{2006}},
}

@article{8657,
  author       = {{Reuter, Dirk and Riedesel, C. and Wieck, A. D.}},
  issn         = {{1071-1023}},
  journal      = {{Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures}},
  title        = {{{Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As}}},
  doi          = {{10.1116/1.2217975}},
  year         = {{2006}},
}