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Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012).","mla":"Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","apa":"Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">https://doi.org/10.1088/0960-1317/22/12/125012</a>","chicago":"Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i> 22, no. 12 (2012). <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">https://doi.org/10.1088/0960-1317/22/12/125012</a>.","ieee":"A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","ama":"Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. 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Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","ama":"Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>. 2012;22(12). doi:<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>","apa":"Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">https://doi.org/10.1088/0960-1317/22/12/125012</a>","mla":"Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>.","bibtex":"@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={<a href=\"https://doi.org/10.1088/0960-1317/22/12/125012\">10.1088/0960-1317/22/12/125012</a>}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} }","short":"A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012)."},"intvolume":"        22","year":"2012","issue":"12","publication_status":"published","publication_identifier":{"issn":["0960-1317","1361-6439"]}}]