---
_id: '39520'
article_number: '125012'
author:
- first_name: A
  full_name: Brockmeier, A
  last_name: Brockmeier
- first_name: F J Santos
  full_name: Rodriguez, F J Santos
  last_name: Rodriguez
- first_name: M
  full_name: Harrison, M
  last_name: Harrison
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  id: '20179'
  last_name: Hilleringmann
citation:
  ama: Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and
    its role for vertical wet etching of silicon. <i>Journal of Micromechanics and
    Microengineering</i>. 2012;22(12). doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>
  apa: Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U.
    (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal
    of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a
    href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a>
  bibtex: '@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface
    tension and its role for vertical wet etching of silicon}, volume={22}, DOI={<a
    href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>},
    number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP
    Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and
    Hilleringmann, Ulrich}, year={2012} }'
  chicago: Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann.
    “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal
    of Micromechanics and Microengineering</i> 22, no. 12 (2012). <a href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a>.
  ieee: 'A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface
    tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics
    and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>.'
  mla: Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching
    of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no.
    12, 125012, IOP Publishing, 2012, doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>.
  short: A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of
    Micromechanics and Microengineering 22 (2012).
date_created: 2023-01-24T11:54:26Z
date_updated: 2023-03-21T10:19:17Z
department:
- _id: '59'
doi: 10.1088/0960-1317/22/12/125012
intvolume: '        22'
issue: '12'
keyword:
- Electrical and Electronic Engineering
- Mechanical Engineering
- Mechanics of Materials
- Electronic
- Optical and Magnetic Materials
language:
- iso: eng
publication: Journal of Micromechanics and Microengineering
publication_identifier:
  issn:
  - 0960-1317
  - 1361-6439
publication_status: published
publisher: IOP Publishing
status: public
title: Surface tension and its role for vertical wet etching of silicon
type: journal_article
user_id: '20179'
volume: 22
year: '2012'
...
---
_id: '39522'
article_number: '125012'
author:
- first_name: A
  full_name: Brockmeier, A
  last_name: Brockmeier
- first_name: F J Santos
  full_name: Rodriguez, F J Santos
  last_name: Rodriguez
- first_name: M
  full_name: Harrison, M
  last_name: Harrison
- first_name: Ulrich
  full_name: Hilleringmann, Ulrich
  id: '20179'
  last_name: Hilleringmann
citation:
  ama: Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and
    its role for vertical wet etching of silicon. <i>Journal of Micromechanics and
    Microengineering</i>. 2012;22(12). doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>
  apa: Brockmeier, A., Rodriguez, F. J. S., Harrison, M., &#38; Hilleringmann, U.
    (2012). Surface tension and its role for vertical wet etching of silicon. <i>Journal
    of Micromechanics and Microengineering</i>, <i>22</i>(12), Article 125012. <a
    href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a>
  bibtex: '@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface
    tension and its role for vertical wet etching of silicon}, volume={22}, DOI={<a
    href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>},
    number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP
    Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and
    Hilleringmann, Ulrich}, year={2012} }'
  chicago: Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann.
    “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” <i>Journal
    of Micromechanics and Microengineering</i> 22, no. 12 (2012). <a href="https://doi.org/10.1088/0960-1317/22/12/125012">https://doi.org/10.1088/0960-1317/22/12/125012</a>.
  ieee: 'A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface
    tension and its role for vertical wet etching of silicon,” <i>Journal of Micromechanics
    and Microengineering</i>, vol. 22, no. 12, Art. no. 125012, 2012, doi: <a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>.'
  mla: Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching
    of Silicon.” <i>Journal of Micromechanics and Microengineering</i>, vol. 22, no.
    12, 125012, IOP Publishing, 2012, doi:<a href="https://doi.org/10.1088/0960-1317/22/12/125012">10.1088/0960-1317/22/12/125012</a>.
  short: A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of
    Micromechanics and Microengineering 22 (2012).
date_created: 2023-01-24T11:54:56Z
date_updated: 2023-03-21T10:19:32Z
department:
- _id: '59'
doi: 10.1088/0960-1317/22/12/125012
intvolume: '        22'
issue: '12'
keyword:
- Electrical and Electronic Engineering
- Mechanical Engineering
- Mechanics of Materials
- Electronic
- Optical and Magnetic Materials
language:
- iso: eng
publication: Journal of Micromechanics and Microengineering
publication_identifier:
  issn:
  - 0960-1317
  - 1361-6439
publication_status: published
publisher: IOP Publishing
status: public
title: Surface tension and its role for vertical wet etching of silicon
type: journal_article
user_id: '20179'
volume: 22
year: '2012'
...