@article{8747, author = {{Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D}}, issn = {{0268-1242}}, journal = {{Semiconductor Science and Technology}}, pages = {{603--607}}, title = {{{Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography}}}, doi = {{10.1088/0268-1242/16/7/314}}, year = {{2002}}, } @article{8768, author = {{Reuter, Dirk and Kähler, D and Kunze, U and Wieck, A D}}, issn = {{0268-1242}}, journal = {{Semiconductor Science and Technology}}, pages = {{603--607}}, title = {{{Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography}}}, doi = {{10.1088/0268-1242/16/7/314}}, year = {{2002}}, }