Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography - Reuter, Dirk; Kähler, D; Kunze, U; Wieck, A D (Semiconductor Science and Technology)

Layer-compensated selectively doped AlxGa1-xAs/GaAs heterostructures as a base material for nanolithography - Reuter, Dirk; Kähler, D; Kunze, U; Wieck, A D (Semiconductor Science and Technology)