---
_id: '33671'
abstract:
- lang: eng
  text: "<jats:title>Abstract</jats:title>\r\n               <jats:p>We demonstrate
    the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon
    detectors on a silicon substrate using laser lithography. We show saturated internal
    detection efficiencies with wire widths ranging from 0.59 <jats:italic>µ</jats:italic>m
    to 1.43 <jats:italic>µ</jats:italic>m under illumination at 1550 nm. We demonstrate
    both straight wires, as well as meandered structures. Single-photon sensitivity
    is shown in devices up to 4 mm in length. Laser-lithographically written devices
    allow for fast and easy structuring of large areas while maintaining a saturated
    internal efficiency for wire widths around 1 <jats:italic>µ</jats:italic>m.</jats:p>"
article_number: '055005'
author:
- first_name: Maximilian
  full_name: Protte, Maximilian
  id: '46170'
  last_name: Protte
- first_name: Varun B
  full_name: Verma, Varun B
  last_name: Verma
- first_name: Jan Philipp
  full_name: Höpker, Jan Philipp
  id: '33913'
  last_name: Höpker
- first_name: Richard P
  full_name: Mirin, Richard P
  last_name: Mirin
- first_name: Sae
  full_name: Woo Nam, Sae
  last_name: Woo Nam
- first_name: Tim
  full_name: Bartley, Tim
  id: '49683'
  last_name: Bartley
citation:
  ama: Protte M, Verma VB, Höpker JP, Mirin RP, Woo Nam S, Bartley T. Laser-lithographically
    written micron-wide superconducting nanowire single-photon detectors. <i>Superconductor
    Science and Technology</i>. 2022;35(5). doi:<a href="https://doi.org/10.1088/1361-6668/ac5338">10.1088/1361-6668/ac5338</a>
  apa: Protte, M., Verma, V. B., Höpker, J. P., Mirin, R. P., Woo Nam, S., &#38; Bartley,
    T. (2022). Laser-lithographically written micron-wide superconducting nanowire
    single-photon detectors. <i>Superconductor Science and Technology</i>, <i>35</i>(5),
    Article 055005. <a href="https://doi.org/10.1088/1361-6668/ac5338">https://doi.org/10.1088/1361-6668/ac5338</a>
  bibtex: '@article{Protte_Verma_Höpker_Mirin_Woo Nam_Bartley_2022, title={Laser-lithographically
    written micron-wide superconducting nanowire single-photon detectors}, volume={35},
    DOI={<a href="https://doi.org/10.1088/1361-6668/ac5338">10.1088/1361-6668/ac5338</a>},
    number={5055005}, journal={Superconductor Science and Technology}, publisher={IOP
    Publishing}, author={Protte, Maximilian and Verma, Varun B and Höpker, Jan Philipp
    and Mirin, Richard P and Woo Nam, Sae and Bartley, Tim}, year={2022} }'
  chicago: Protte, Maximilian, Varun B Verma, Jan Philipp Höpker, Richard P Mirin,
    Sae Woo Nam, and Tim Bartley. “Laser-Lithographically Written Micron-Wide Superconducting
    Nanowire Single-Photon Detectors.” <i>Superconductor Science and Technology</i>
    35, no. 5 (2022). <a href="https://doi.org/10.1088/1361-6668/ac5338">https://doi.org/10.1088/1361-6668/ac5338</a>.
  ieee: 'M. Protte, V. B. Verma, J. P. Höpker, R. P. Mirin, S. Woo Nam, and T. Bartley,
    “Laser-lithographically written micron-wide superconducting nanowire single-photon
    detectors,” <i>Superconductor Science and Technology</i>, vol. 35, no. 5, Art.
    no. 055005, 2022, doi: <a href="https://doi.org/10.1088/1361-6668/ac5338">10.1088/1361-6668/ac5338</a>.'
  mla: Protte, Maximilian, et al. “Laser-Lithographically Written Micron-Wide Superconducting
    Nanowire Single-Photon Detectors.” <i>Superconductor Science and Technology</i>,
    vol. 35, no. 5, 055005, IOP Publishing, 2022, doi:<a href="https://doi.org/10.1088/1361-6668/ac5338">10.1088/1361-6668/ac5338</a>.
  short: M. Protte, V.B. Verma, J.P. Höpker, R.P. Mirin, S. Woo Nam, T. Bartley, Superconductor
    Science and Technology 35 (2022).
date_created: 2022-10-11T07:14:11Z
date_updated: 2023-01-12T13:02:52Z
department:
- _id: '15'
- _id: '230'
- _id: '623'
doi: 10.1088/1361-6668/ac5338
intvolume: '        35'
issue: '5'
keyword:
- Materials Chemistry
- Electrical and Electronic Engineering
- Metals and Alloys
- Condensed Matter Physics
- Ceramics and Composites
language:
- iso: eng
publication: Superconductor Science and Technology
publication_identifier:
  issn:
  - 0953-2048
  - 1361-6668
publication_status: published
publisher: IOP Publishing
status: public
title: Laser-lithographically written micron-wide superconducting nanowire single-photon
  detectors
type: journal_article
user_id: '33913'
volume: 35
year: '2022'
...
---
_id: '23727'
article_number: '064002'
author:
- first_name: Timon
  full_name: Schapeler, Timon
  id: '55629'
  last_name: Schapeler
  orcid: 0000-0001-7652-1716
- first_name: Jan Philipp
  full_name: Höpker, Jan Philipp
  id: '33913'
  last_name: Höpker
- first_name: Tim
  full_name: Bartley, Tim
  id: '49683'
  last_name: Bartley
citation:
  ama: Schapeler T, Höpker JP, Bartley T. Quantum detector tomography of a high dynamic-range
    superconducting nanowire single-photon detector. <i>Superconductor Science and
    Technology</i>. Published online 2021. doi:<a href="https://doi.org/10.1088/1361-6668/abee9a">10.1088/1361-6668/abee9a</a>
  apa: Schapeler, T., Höpker, J. P., &#38; Bartley, T. (2021). Quantum detector tomography
    of a high dynamic-range superconducting nanowire single-photon detector. <i>Superconductor
    Science and Technology</i>, Article 064002. <a href="https://doi.org/10.1088/1361-6668/abee9a">https://doi.org/10.1088/1361-6668/abee9a</a>
  bibtex: '@article{Schapeler_Höpker_Bartley_2021, title={Quantum detector tomography
    of a high dynamic-range superconducting nanowire single-photon detector}, DOI={<a
    href="https://doi.org/10.1088/1361-6668/abee9a">10.1088/1361-6668/abee9a</a>},
    number={064002}, journal={Superconductor Science and Technology}, author={Schapeler,
    Timon and Höpker, Jan Philipp and Bartley, Tim}, year={2021} }'
  chicago: Schapeler, Timon, Jan Philipp Höpker, and Tim Bartley. “Quantum Detector
    Tomography of a High Dynamic-Range Superconducting Nanowire Single-Photon Detector.”
    <i>Superconductor Science and Technology</i>, 2021. <a href="https://doi.org/10.1088/1361-6668/abee9a">https://doi.org/10.1088/1361-6668/abee9a</a>.
  ieee: 'T. Schapeler, J. P. Höpker, and T. Bartley, “Quantum detector tomography
    of a high dynamic-range superconducting nanowire single-photon detector,” <i>Superconductor
    Science and Technology</i>, Art. no. 064002, 2021, doi: <a href="https://doi.org/10.1088/1361-6668/abee9a">10.1088/1361-6668/abee9a</a>.'
  mla: Schapeler, Timon, et al. “Quantum Detector Tomography of a High Dynamic-Range
    Superconducting Nanowire Single-Photon Detector.” <i>Superconductor Science and
    Technology</i>, 064002, 2021, doi:<a href="https://doi.org/10.1088/1361-6668/abee9a">10.1088/1361-6668/abee9a</a>.
  short: T. Schapeler, J.P. Höpker, T. Bartley, Superconductor Science and Technology
    (2021).
date_created: 2021-09-03T08:03:34Z
date_updated: 2025-12-18T17:07:44Z
department:
- _id: '15'
- _id: '230'
doi: 10.1088/1361-6668/abee9a
language:
- iso: eng
project:
- _id: '209'
  name: 'ISOQC: Quantenkommunikation mit integrierter Optik im Zusammenhang mit supraleitender
    Elektronik'
publication: Superconductor Science and Technology
publication_identifier:
  issn:
  - 0953-2048
  - 1361-6668
publication_status: published
status: public
title: Quantum detector tomography of a high dynamic-range superconducting nanowire
  single-photon detector
type: journal_article
user_id: '55629'
year: '2021'
...