---
_id: '34054'
abstract:
- lang: eng
text: AbstractColloidal nanosphere monolayers—used
as a lithography mask for site-controlled material deposition or removal—offer
the possibility of cost-effective patterning of large surface areas. In the present
study, an automated analysis of scanning electron microscopy (SEM) images is described,
which enables the recognition of the individual nanospheres in densely packed
monolayers in order to perform a statistical quantification of the sphere size,
mask opening size, and sphere-sphere separation distributions. Search algorithms
based on Fourier transformation, cross-correlation, multiple-angle intensity profiling,
and sphere edge point detection techniques allow for a sphere detection efficiency
of at least 99.8%, even in the case of considerable sphere size variations. While
the sphere positions and diameters are determined by fitting circles to the spheres
edge points, the openings between sphere triples are detected by intensity thresholding.
For the analyzed polystyrene sphere monolayers with sphere sizes between 220 and
600 nm and a diameter spread of around 3% coefficients of variation of 6.8–8.1%
for the opening size are found. By correlating the mentioned size distributions,
it is shown that, in this case, the dominant contribution to the opening size
variation stems from nanometer-scale positional variations of the spheres.
author:
- first_name: Thomas
full_name: Riedl, Thomas
id: '36950'
last_name: Riedl
- first_name: Jörg
full_name: Lindner, Jörg
id: '20797'
last_name: Lindner
citation:
ama: Riedl T, Lindner J. Automated SEM Image Analysis of the Sphere Diameter, Sphere-Sphere
Separation, and Opening Size Distributions of Nanosphere Lithography Masks. Microscopy
and Microanalysis. 2021;28(1):185-195. doi:10.1017/s1431927621013866
apa: Riedl, T., & Lindner, J. (2021). Automated SEM Image Analysis of the Sphere
Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere
Lithography Masks. Microscopy and Microanalysis, 28(1), 185–195.
https://doi.org/10.1017/s1431927621013866
bibtex: '@article{Riedl_Lindner_2021, title={Automated SEM Image Analysis of the
Sphere Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere
Lithography Masks}, volume={28}, DOI={10.1017/s1431927621013866},
number={1}, journal={Microscopy and Microanalysis}, publisher={Cambridge University
Press (CUP)}, author={Riedl, Thomas and Lindner, Jörg}, year={2021}, pages={185–195}
}'
chicago: 'Riedl, Thomas, and Jörg Lindner. “Automated SEM Image Analysis of the
Sphere Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere
Lithography Masks.” Microscopy and Microanalysis 28, no. 1 (2021): 185–95.
https://doi.org/10.1017/s1431927621013866.'
ieee: 'T. Riedl and J. Lindner, “Automated SEM Image Analysis of the Sphere Diameter,
Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere Lithography
Masks,” Microscopy and Microanalysis, vol. 28, no. 1, pp. 185–195, 2021,
doi: 10.1017/s1431927621013866.'
mla: Riedl, Thomas, and Jörg Lindner. “Automated SEM Image Analysis of the Sphere
Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere
Lithography Masks.” Microscopy and Microanalysis, vol. 28, no. 1, Cambridge
University Press (CUP), 2021, pp. 185–95, doi:10.1017/s1431927621013866.
short: T. Riedl, J. Lindner, Microscopy and Microanalysis 28 (2021) 185–195.
date_created: 2022-11-10T14:13:19Z
date_updated: 2023-01-10T12:11:24Z
department:
- _id: '15'
- _id: '230'
doi: 10.1017/s1431927621013866
intvolume: ' 28'
issue: '1'
keyword:
- Instrumentation
language:
- iso: eng
page: 185-195
publication: Microscopy and Microanalysis
publication_identifier:
issn:
- 1431-9276
- 1435-8115
publication_status: published
publisher: Cambridge University Press (CUP)
status: public
title: Automated SEM Image Analysis of the Sphere Diameter, Sphere-Sphere Separation,
and Opening Size Distributions of Nanosphere Lithography Masks
type: journal_article
user_id: '77496'
volume: 28
year: '2021'
...
---
_id: '29813'
author:
- first_name: Miroslav
full_name: Cieslar, Miroslav
last_name: Cieslar
- first_name: Rostislav
full_name: Králík, Rostislav
last_name: Králík
- first_name: Lucia
full_name: Bajtošová, Lucia
last_name: Bajtošová
- first_name: Barbora
full_name: Křivská, Barbora
last_name: Křivská
- first_name: Michal
full_name: Hájek, Michal
last_name: Hájek
- first_name: Sára
full_name: Belejová, Sára
last_name: Belejová
- first_name: Olexandr
full_name: Grydin, Olexandr
id: '43822'
last_name: Grydin
- first_name: Mykhailo
full_name: Stolbchenko, Mykhailo
last_name: Stolbchenko
- first_name: Mirko
full_name: Schaper, Mirko
id: '43720'
last_name: Schaper
citation:
ama: Cieslar M, Králík R, Bajtošová L, et al. High Temperature Annealing of Twin-Roll
Cast Al-Li-Based Alloy Studied by In-situ SEM and STEM. Microscopy and Microanalysis.
2021;27(S2):79-80. doi:10.1017/s1431927621013398
apa: Cieslar, M., Králík, R., Bajtošová, L., Křivská, B., Hájek, M., Belejová, S.,
Grydin, O., Stolbchenko, M., & Schaper, M. (2021). High Temperature Annealing
of Twin-Roll Cast Al-Li-Based Alloy Studied by In-situ SEM and STEM. Microscopy
and Microanalysis, 27(S2), 79–80. https://doi.org/10.1017/s1431927621013398
bibtex: '@article{Cieslar_Králík_Bajtošová_Křivská_Hájek_Belejová_Grydin_Stolbchenko_Schaper_2021,
title={High Temperature Annealing of Twin-Roll Cast Al-Li-Based Alloy Studied
by In-situ SEM and STEM}, volume={27}, DOI={10.1017/s1431927621013398},
number={S2}, journal={Microscopy and Microanalysis}, publisher={Cambridge University
Press (CUP)}, author={Cieslar, Miroslav and Králík, Rostislav and Bajtošová, Lucia
and Křivská, Barbora and Hájek, Michal and Belejová, Sára and Grydin, Olexandr
and Stolbchenko, Mykhailo and Schaper, Mirko}, year={2021}, pages={79–80} }'
chicago: 'Cieslar, Miroslav, Rostislav Králík, Lucia Bajtošová, Barbora Křivská,
Michal Hájek, Sára Belejová, Olexandr Grydin, Mykhailo Stolbchenko, and Mirko
Schaper. “High Temperature Annealing of Twin-Roll Cast Al-Li-Based Alloy Studied
by In-Situ SEM and STEM.” Microscopy and Microanalysis 27, no. S2 (2021):
79–80. https://doi.org/10.1017/s1431927621013398.'
ieee: 'M. Cieslar et al., “High Temperature Annealing of Twin-Roll Cast Al-Li-Based
Alloy Studied by In-situ SEM and STEM,” Microscopy and Microanalysis, vol.
27, no. S2, pp. 79–80, 2021, doi: 10.1017/s1431927621013398.'
mla: Cieslar, Miroslav, et al. “High Temperature Annealing of Twin-Roll Cast Al-Li-Based
Alloy Studied by In-Situ SEM and STEM.” Microscopy and Microanalysis, vol.
27, no. S2, Cambridge University Press (CUP), 2021, pp. 79–80, doi:10.1017/s1431927621013398.
short: M. Cieslar, R. Králík, L. Bajtošová, B. Křivská, M. Hájek, S. Belejová, O.
Grydin, M. Stolbchenko, M. Schaper, Microscopy and Microanalysis 27 (2021) 79–80.
date_created: 2022-02-11T17:33:29Z
date_updated: 2023-06-01T14:38:37Z
department:
- _id: '158'
doi: 10.1017/s1431927621013398
intvolume: ' 27'
issue: S2
keyword:
- Instrumentation
language:
- iso: eng
page: 79-80
publication: Microscopy and Microanalysis
publication_identifier:
issn:
- 1431-9276
- 1435-8115
publication_status: published
publisher: Cambridge University Press (CUP)
quality_controlled: '1'
status: public
title: High Temperature Annealing of Twin-Roll Cast Al-Li-Based Alloy Studied by In-situ
SEM and STEM
type: journal_article
user_id: '43720'
volume: 27
year: '2021'
...
---
_id: '29814'
author:
- first_name: Barbora
full_name: Křivská, Barbora
last_name: Křivská
- first_name: Michaela
full_name: Šlapáková, Michaela
last_name: Šlapáková
- first_name: Peter
full_name: Minárik, Peter
last_name: Minárik
- first_name: Klaudia
full_name: Fekete, Klaudia
last_name: Fekete
- first_name: Rostislav
full_name: Králík, Rostislav
last_name: Králík
- first_name: Mykhailo
full_name: Stolbchenko, Mykhailo
last_name: Stolbchenko
- first_name: Mirko
full_name: Schaper, Mirko
id: '43720'
last_name: Schaper
- first_name: Olexandr
full_name: Grydin, Olexandr
id: '43822'
last_name: Grydin
citation:
ama: Křivská B, Šlapáková M, Minárik P, et al. Intermetallic Phase Growth in Al-steel
Clad Strip during In-situ Heating in TEM. Microscopy and Microanalysis.
2021;27(S2):91-92. doi:10.1017/s1431927621013453
apa: Křivská, B., Šlapáková, M., Minárik, P., Fekete, K., Králík, R., Stolbchenko,
M., Schaper, M., & Grydin, O. (2021). Intermetallic Phase Growth in Al-steel
Clad Strip during In-situ Heating in TEM. Microscopy and Microanalysis,
27(S2), 91–92. https://doi.org/10.1017/s1431927621013453
bibtex: '@article{Křivská_Šlapáková_Minárik_Fekete_Králík_Stolbchenko_Schaper_Grydin_2021,
title={Intermetallic Phase Growth in Al-steel Clad Strip during In-situ Heating
in TEM}, volume={27}, DOI={10.1017/s1431927621013453},
number={S2}, journal={Microscopy and Microanalysis}, publisher={Cambridge University
Press (CUP)}, author={Křivská, Barbora and Šlapáková, Michaela and Minárik, Peter
and Fekete, Klaudia and Králík, Rostislav and Stolbchenko, Mykhailo and Schaper,
Mirko and Grydin, Olexandr}, year={2021}, pages={91–92} }'
chicago: 'Křivská, Barbora, Michaela Šlapáková, Peter Minárik, Klaudia Fekete, Rostislav
Králík, Mykhailo Stolbchenko, Mirko Schaper, and Olexandr Grydin. “Intermetallic
Phase Growth in Al-Steel Clad Strip during In-Situ Heating in TEM.” Microscopy
and Microanalysis 27, no. S2 (2021): 91–92. https://doi.org/10.1017/s1431927621013453.'
ieee: 'B. Křivská et al., “Intermetallic Phase Growth in Al-steel Clad Strip
during In-situ Heating in TEM,” Microscopy and Microanalysis, vol. 27,
no. S2, pp. 91–92, 2021, doi: 10.1017/s1431927621013453.'
mla: Křivská, Barbora, et al. “Intermetallic Phase Growth in Al-Steel Clad Strip
during In-Situ Heating in TEM.” Microscopy and Microanalysis, vol. 27,
no. S2, Cambridge University Press (CUP), 2021, pp. 91–92, doi:10.1017/s1431927621013453.
short: B. Křivská, M. Šlapáková, P. Minárik, K. Fekete, R. Králík, M. Stolbchenko,
M. Schaper, O. Grydin, Microscopy and Microanalysis 27 (2021) 91–92.
date_created: 2022-02-11T17:39:16Z
date_updated: 2023-06-01T14:38:28Z
department:
- _id: '158'
doi: 10.1017/s1431927621013453
intvolume: ' 27'
issue: S2
keyword:
- Instrumentation
language:
- iso: eng
page: 91-92
publication: Microscopy and Microanalysis
publication_identifier:
issn:
- 1431-9276
- 1435-8115
publication_status: published
publisher: Cambridge University Press (CUP)
quality_controlled: '1'
status: public
title: Intermetallic Phase Growth in Al-steel Clad Strip during In-situ Heating in
TEM
type: journal_article
user_id: '43720'
volume: 27
year: '2021'
...