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Dahlmann, A. Devi, D. Eremin, J. Franke, T. Gergs, J. Jenderny, E. Kemaneci, T.D. Kühne, S. Kusmierz, T. Mussenbrock, J. Rubner, J. Trieschmann, M. Wessling, X. Xie, D. Zanders, F. Zysk, G. Grundmeier, PLASMA PROCESSES AND POLYMERS (2023) e2300186.","chicago":"Arcos de Pedro, Maria Teresa de los, Peter Awakowicz, Marc Böke, Nils Boysen, Ralf Peter Brinkmann, Rainer Dahlmann, Anjana Devi, et al. “PECVD and PEALD on Polymer Substrates (Part II): Understanding and Tuning of Barrier and Membrane Properties of Thin Films.” <i>PLASMA PROCESSES AND POLYMERS</i>, 2023, e2300186. <a href=\"https://doi.org/10.1002/ppap.202300186\">https://doi.org/10.1002/ppap.202300186</a>.","mla":"de los Arcos de Pedro, Maria Teresa, et al. “PECVD and PEALD on Polymer Substrates (Part II): Understanding and Tuning of Barrier and Membrane Properties of Thin Films.” <i>PLASMA PROCESSES AND POLYMERS</i>, 2023, p. e2300186, doi:<a href=\"https://doi.org/10.1002/ppap.202300186\">10.1002/ppap.202300186</a>.","bibtex":"@article{de los Arcos de Pedro_Awakowicz_Böke_Boysen_Brinkmann_Dahlmann_Devi_Eremin_Franke_Gergs_et al._2023, title={PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films}, DOI={<a href=\"https://doi.org/10.1002/ppap.202300186\">10.1002/ppap.202300186</a>}, journal={PLASMA PROCESSES AND POLYMERS}, author={de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Böke, Marc and Boysen, Nils and Brinkmann, Ralf Peter and Dahlmann, Rainer and Devi, Anjana and Eremin, Denis and Franke, Jonas and Gergs, Tobias and et al.}, year={2023}, pages={e2300186} }","ama":"de los Arcos de Pedro MT, Awakowicz P, Böke M, et al. 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e2300150, doi:<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>.","bibtex":"@article{de los Arcos de Pedro_Awakowicz_Benedikt_Biskup_Böke_Boysen_Buschhaus_Dahlmann_Devi_Gergs_et al._2023, title={PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth}, DOI={<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>}, journal={PLASMA PROCESSES AND POLYMERS}, author={de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Benedikt, Jan and Biskup, Beatrix and Böke, Marc and Boysen, Nils and Buschhaus, Rahel and Dahlmann, Rainer and Devi, Anjana and Gergs, Tobias and et al.}, year={2023}, pages={e2300150} }","ama":"de los Arcos de Pedro MT, Awakowicz P, Benedikt J, et al. PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. <i>PLASMA PROCESSES AND POLYMERS</i>. Published online 2023:e2300150. doi:<a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>","ieee":"M. T. de los Arcos de Pedro <i>et al.</i>, “PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth,” <i>PLASMA PROCESSES AND POLYMERS</i>, p. e2300150, 2023, doi: <a href=\"https://doi.org/10.1002/ppap.202300150\">10.1002/ppap.202300150</a>.","apa":"de los Arcos de Pedro, M. T., Awakowicz, P., Benedikt, J., Biskup, B., Böke, M., Boysen, N., Buschhaus, R., Dahlmann, R., Devi, A., Gergs, T., Jenderny, J., von Keudell, A., Kühne, T. D., Kusmierz, S., Müller, H., Mussenbrock, T., Trieschmann, J., Zanders, D., Zysk, F., &#38; Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. <i>PLASMA PROCESSES AND POLYMERS</i>, e2300150. <a href=\"https://doi.org/10.1002/ppap.202300150\">https://doi.org/10.1002/ppap.202300150</a>","short":"M.T. de los Arcos de Pedro, P. Awakowicz, J. Benedikt, B. Biskup, M. Böke, N. Boysen, R. Buschhaus, R. Dahlmann, A. Devi, T. Gergs, J. Jenderny, A. von Keudell, T.D. Kühne, S. Kusmierz, H. Müller, T. Mussenbrock, J. Trieschmann, D. Zanders, F. Zysk, G. 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Hoppe, F. Mitschker, L. Mai, M.O. Liedke, T. Arcos, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","chicago":"Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i> 19, no. 4 (2022). <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>.","apa":"Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174. <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>","ieee":"C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","ama":"Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>","bibtex":"@article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }","mla":"Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>."}},{"volume":19,"user_id":"48864","_id":"34650","publisher":"Wiley","status":"public","citation":{"ieee":"X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","apa":"Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>","chicago":"Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>.","short":"X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","bibtex":"@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022} }","ama":"Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>"},"doi":"10.1002/ppap.202200052","language":[{"iso":"eng"}],"article_number":"2200052","intvolume":"        19","date_updated":"2022-12-21T09:34:05Z","publication_status":"published","publication_identifier":{"issn":["1612-8850","1612-8869"]},"author":[{"first_name":"Xiaofan","last_name":"Xie","full_name":"Xie, Xiaofan"},{"full_name":"de los Arcos, Teresa","first_name":"Teresa","last_name":"de los Arcos"},{"full_name":"Grundmeier, Guido","first_name":"Guido","last_name":"Grundmeier","id":"194"}],"year":"2022","title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation","department":[{"_id":"302"}],"keyword":["Polymers and Plastics","Condensed Matter Physics"],"type":"journal_article","date_created":"2022-12-21T09:33:54Z","issue":"11","publication":"Plasma Processes and Polymers"},{"department":[{"_id":"302"}],"type":"journal_article","keyword":["Polymers and Plastics","Condensed Matter Physics"],"date_created":"2023-01-11T10:10:09Z","issue":"4","publication":"Plasma Processes and Polymers","doi":"10.1002/ppap.202100174","language":[{"iso":"eng"}],"article_number":"2100174","intvolume":"        19","publication_status":"published","date_updated":"2023-01-24T08:07:46Z","publication_identifier":{"issn":["1612-8850","1612-8869"]},"author":[{"full_name":"Hoppe, Christian","last_name":"Hoppe","first_name":"Christian"},{"first_name":"Felix","last_name":"Mitschker","full_name":"Mitschker, Felix"},{"full_name":"Mai, Lukas","last_name":"Mai","first_name":"Lukas"},{"full_name":"Liedke, Maciej Oskar","last_name":"Liedke","first_name":"Maciej Oskar"},{"id":"54556","full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa"},{"full_name":"Awakowicz, Peter","last_name":"Awakowicz","first_name":"Peter"},{"last_name":"Devi","first_name":"Anjana","full_name":"Devi, Anjana"},{"full_name":"Attallah, Ahmed Gamal","first_name":"Ahmed Gamal","last_name":"Attallah"},{"last_name":"Butterling","first_name":"Maik","full_name":"Butterling, Maik"},{"last_name":"Wagner","first_name":"Andreas","full_name":"Wagner, Andreas"},{"full_name":"Grundmeier, Guido","first_name":"Guido","last_name":"Grundmeier"}],"title":"Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS","year":"2022","citation":{"mla":"Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","ama":"Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>","bibtex":"@article{Hoppe_Mitschker_Mai_Liedke_de los Arcos de Pedro_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }","apa":"Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174. <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>","ieee":"C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","short":"C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. 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Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>","ieee":"X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","chicago":"Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>.","short":"X. Xie, M.T. de los Arcos de Pedro, G. 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Published online 2015:1002-1009. doi:<a href=\"https://doi.org/10.1002/ppap.201500085\">10.1002/ppap.201500085</a>","bibtex":"@article{Mitschker_Dietrich_Ozkaya_de los Arcos de Pedro_Giner_Awakowicz_Grundmeier_2015, title={Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films}, DOI={<a href=\"https://doi.org/10.1002/ppap.201500085\">10.1002/ppap.201500085</a>}, journal={Plasma Processes and Polymers}, author={Mitschker, Felix and Dietrich, Jan and Ozkaya, Berkem and de los Arcos de Pedro, Maria Teresa and Giner, Ignacio and Awakowicz, Peter and Grundmeier, Guido}, year={2015}, pages={1002–1009} }","mla":"Mitschker, Felix, et al. “Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films.” <i>Plasma Processes and Polymers</i>, 2015, pp. 1002–09, doi:<a href=\"https://doi.org/10.1002/ppap.201500085\">10.1002/ppap.201500085</a>."}},{"year":"2013","title":"Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure","status":"public","author":[{"full_name":"Rügner, Katja","last_name":"Rügner","first_name":"Katja"},{"full_name":"Reuter, Rüdiger","first_name":"Rüdiger","last_name":"Reuter"},{"full_name":"Ellerweg, Dirk","last_name":"Ellerweg","first_name":"Dirk"},{"full_name":"de los Arcos de Pedro, Maria Teresa","first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","id":"54556"},{"full_name":"von Keudell, Achim","first_name":"Achim","last_name":"von Keudell"},{"last_name":"Benedikt","first_name":"Jan","full_name":"Benedikt, Jan"}],"publication_identifier":{"issn":["1612-8850"]},"publication_status":"published","date_updated":"2023-01-24T08:22:58Z","page":"1061-1073","_id":"22592","language":[{"iso":"eng"}],"user_id":"54556","doi":"10.1002/ppap.201300059","publication":"Plasma Processes and Polymers","citation":{"mla":"Rügner, Katja, et al. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2013, pp. 1061–73, doi:<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>.","ama":"Rügner K, Reuter R, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt J. Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>. Published online 2013:1061-1073. doi:<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>","bibtex":"@article{Rügner_Reuter_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2013, title={Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure}, DOI={<a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>}, journal={Plasma Processes and Polymers}, author={Rügner, Katja and Reuter, Rüdiger and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2013}, pages={1061–1073} }","apa":"Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., &#38; Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>, 1061–1073. <a href=\"https://doi.org/10.1002/ppap.201300059\">https://doi.org/10.1002/ppap.201300059</a>","ieee":"K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,” <i>Plasma Processes and Polymers</i>, pp. 1061–1073, 2013, doi: <a href=\"https://doi.org/10.1002/ppap.201300059\">10.1002/ppap.201300059</a>.","chicago":"Rügner, Katja, Rüdiger Reuter, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2013, 1061–73. <a href=\"https://doi.org/10.1002/ppap.201300059\">https://doi.org/10.1002/ppap.201300059</a>.","short":"K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073."},"extern":"1","date_created":"2021-07-07T11:13:20Z","type":"journal_article","department":[{"_id":"302"}]},{"type":"journal_article","department":[{"_id":"302"}],"date_created":"2021-07-07T11:30:59Z","extern":"1","publication":"Plasma Processes and Polymers","citation":{"mla":"Reuter, Rüdiger, et al. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2012, pp. 1116–24, doi:<a href=\"https://doi.org/10.1002/ppap.201100146\">10.1002/ppap.201100146</a>.","ama":"Reuter R, Rügner K, Ellerweg D, de los Arcos de Pedro MT, von Keudell A, Benedikt J. The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>. Published online 2012:1116-1124. doi:<a href=\"https://doi.org/10.1002/ppap.201100146\">10.1002/ppap.201100146</a>","bibtex":"@article{Reuter_Rügner_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2012, title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure}, DOI={<a href=\"https://doi.org/10.1002/ppap.201100146\">10.1002/ppap.201100146</a>}, journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2012}, pages={1116–1124} }","apa":"Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., &#38; Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. <i>Plasma Processes and Polymers</i>, 1116–1124. <a href=\"https://doi.org/10.1002/ppap.201100146\">https://doi.org/10.1002/ppap.201100146</a>","ieee":"R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” <i>Plasma Processes and Polymers</i>, pp. 1116–1124, 2012, doi: <a href=\"https://doi.org/10.1002/ppap.201100146\">10.1002/ppap.201100146</a>.","short":"R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.","chicago":"Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” <i>Plasma Processes and Polymers</i>, 2012, 1116–24. <a href=\"https://doi.org/10.1002/ppap.201100146\">https://doi.org/10.1002/ppap.201100146</a>."},"user_id":"54556","doi":"10.1002/ppap.201100146","page":"1116-1124","_id":"22604","language":[{"iso":"eng"}],"publication_status":"published","date_updated":"2023-01-24T08:26:12Z","status":"public","year":"2012","title":"The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure","publication_identifier":{"issn":["1612-8850"]},"author":[{"full_name":"Reuter, Rüdiger","first_name":"Rüdiger","last_name":"Reuter"},{"last_name":"Rügner","first_name":"Katja","full_name":"Rügner, Katja"},{"full_name":"Ellerweg, Dirk","first_name":"Dirk","last_name":"Ellerweg"},{"id":"54556","first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","full_name":"de los Arcos de Pedro, Maria Teresa"},{"first_name":"Achim","last_name":"von Keudell","full_name":"von Keudell, Achim"},{"first_name":"Jan","last_name":"Benedikt","full_name":"Benedikt, Jan"}]}]