[{"publication":"Plasma Processes and Polymers","issue":"4","date_created":"2022-12-21T09:32:52Z","type":"journal_article","keyword":["Polymers and Plastics","Condensed Matter Physics"],"department":[{"_id":"302"}],"title":"Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS","year":"2022","author":[{"id":"27401","full_name":"Hoppe, Christian","last_name":"Hoppe","first_name":"Christian"},{"last_name":"Mitschker","first_name":"Felix","full_name":"Mitschker, Felix"},{"full_name":"Mai, Lukas","last_name":"Mai","first_name":"Lukas"},{"full_name":"Liedke, Maciej Oskar","last_name":"Liedke","first_name":"Maciej Oskar"},{"first_name":"Teresa","last_name":"Arcos","full_name":"Arcos, Teresa"},{"full_name":"Awakowicz, Peter","last_name":"Awakowicz","first_name":"Peter"},{"first_name":"Anjana","last_name":"Devi","full_name":"Devi, Anjana"},{"first_name":"Ahmed Gamal","last_name":"Attallah","full_name":"Attallah, Ahmed Gamal"},{"last_name":"Butterling","first_name":"Maik","full_name":"Butterling, Maik"},{"last_name":"Wagner","first_name":"Andreas","full_name":"Wagner, Andreas"},{"first_name":"Guido","last_name":"Grundmeier","full_name":"Grundmeier, Guido","id":"194"}],"publication_identifier":{"issn":["1612-8850","1612-8869"]},"publication_status":"published","date_updated":"2022-12-21T09:33:14Z","intvolume":"        19","article_number":"2100174","language":[{"iso":"eng"}],"doi":"10.1002/ppap.202100174","citation":{"mla":"Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","bibtex":"@article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }","ama":"Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>","ieee":"C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","apa":"Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174. <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>","chicago":"Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i> 19, no. 4 (2022). <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>.","short":"C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, T. Arcos, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022)."},"status":"public","_id":"34648","publisher":"Wiley","user_id":"48864","volume":19},{"_id":"34650","publisher":"Wiley","volume":19,"user_id":"48864","status":"public","citation":{"bibtex":"@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022} }","ama":"Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>","mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","short":"X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","chicago":"Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>.","ieee":"X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","apa":"Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>"},"language":[{"iso":"eng"}],"article_number":"2200052","doi":"10.1002/ppap.202200052","publication_identifier":{"issn":["1612-8850","1612-8869"]},"author":[{"last_name":"Xie","first_name":"Xiaofan","full_name":"Xie, Xiaofan"},{"full_name":"de los Arcos, Teresa","first_name":"Teresa","last_name":"de los Arcos"},{"id":"194","last_name":"Grundmeier","first_name":"Guido","full_name":"Grundmeier, Guido"}],"year":"2022","title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation","intvolume":"        19","date_updated":"2022-12-21T09:34:05Z","publication_status":"published","date_created":"2022-12-21T09:33:54Z","department":[{"_id":"302"}],"keyword":["Polymers and Plastics","Condensed Matter Physics"],"type":"journal_article","issue":"11","publication":"Plasma Processes and Polymers"},{"citation":{"mla":"Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, 2100174, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","bibtex":"@article{Hoppe_Mitschker_Mai_Liedke_de los Arcos de Pedro_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }","ama":"Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>. 2022;19(4). doi:<a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>","ieee":"C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 4, Art. no. 2100174, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202100174\">10.1002/ppap.202100174</a>.","apa":"Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174. <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>","chicago":"Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Maria Teresa de los Arcos de Pedro, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i> 19, no. 4 (2022). <a href=\"https://doi.org/10.1002/ppap.202100174\">https://doi.org/10.1002/ppap.202100174</a>.","short":"C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022)."},"_id":"35977","publisher":"Wiley","volume":19,"user_id":"54556","status":"public","date_created":"2023-01-11T10:10:09Z","department":[{"_id":"302"}],"keyword":["Polymers and Plastics","Condensed Matter Physics"],"type":"journal_article","publication":"Plasma Processes and Polymers","issue":"4","language":[{"iso":"eng"}],"article_number":"2100174","doi":"10.1002/ppap.202100174","publication_identifier":{"issn":["1612-8850","1612-8869"]},"author":[{"last_name":"Hoppe","first_name":"Christian","full_name":"Hoppe, Christian"},{"first_name":"Felix","last_name":"Mitschker","full_name":"Mitschker, Felix"},{"full_name":"Mai, Lukas","last_name":"Mai","first_name":"Lukas"},{"last_name":"Liedke","first_name":"Maciej Oskar","full_name":"Liedke, Maciej Oskar"},{"first_name":"Maria Teresa","last_name":"de los Arcos de Pedro","full_name":"de los Arcos de Pedro, Maria Teresa","id":"54556"},{"last_name":"Awakowicz","first_name":"Peter","full_name":"Awakowicz, Peter"},{"first_name":"Anjana","last_name":"Devi","full_name":"Devi, Anjana"},{"last_name":"Attallah","first_name":"Ahmed Gamal","full_name":"Attallah, Ahmed Gamal"},{"full_name":"Butterling, Maik","first_name":"Maik","last_name":"Butterling"},{"last_name":"Wagner","first_name":"Andreas","full_name":"Wagner, Andreas"},{"last_name":"Grundmeier","first_name":"Guido","full_name":"Grundmeier, Guido"}],"year":"2022","title":"Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin films on PDMS","intvolume":"        19","date_updated":"2023-01-24T08:07:46Z","publication_status":"published"},{"citation":{"chicago":"Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022). <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>.","short":"X. Xie, M.T. de los Arcos de Pedro, G. Grundmeier, Plasma Processes and Polymers 19 (2022).","ieee":"X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022, doi: <a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>.","apa":"Xie, X., de los Arcos de Pedro, M. T., &#38; Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11), Article 2200052. <a href=\"https://doi.org/10.1002/ppap.202200052\">https://doi.org/10.1002/ppap.202200052</a>","bibtex":"@article{Xie_de los Arcos de Pedro_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}, year={2022} }","ama":"Xie X, de los Arcos de Pedro MT, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>","mla":"Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href=\"https://doi.org/10.1002/ppap.202200052\">10.1002/ppap.202200052</a>."},"volume":19,"user_id":"54556","_id":"35974","publisher":"Wiley","status":"public","department":[{"_id":"302"}],"keyword":["Polymers and Plastics","Condensed Matter Physics"],"type":"journal_article","date_created":"2023-01-11T10:08:25Z","publication":"Plasma Processes and Polymers","issue":"11","doi":"10.1002/ppap.202200052","language":[{"iso":"eng"}],"article_number":"2200052","intvolume":"        19","publication_status":"published","date_updated":"2023-01-24T08:48:44Z","publication_identifier":{"issn":["1612-8850","1612-8869"]},"author":[{"last_name":"Xie","first_name":"Xiaofan","full_name":"Xie, Xiaofan"},{"full_name":"de los Arcos de Pedro, Maria Teresa","last_name":"de los Arcos de Pedro","first_name":"Maria Teresa","id":"54556"},{"id":"194","full_name":"Grundmeier, Guido","first_name":"Guido","last_name":"Grundmeier"}],"year":"2022","title":"Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation"}]