---
_id: '34648'
article_number: '2100174'
author:
- first_name: Christian
  full_name: Hoppe, Christian
  id: '27401'
  last_name: Hoppe
- first_name: Felix
  full_name: Mitschker, Felix
  last_name: Mitschker
- first_name: Lukas
  full_name: Mai, Lukas
  last_name: Mai
- first_name: Maciej Oskar
  full_name: Liedke, Maciej Oskar
  last_name: Liedke
- first_name: Teresa
  full_name: Arcos, Teresa
  last_name: Arcos
- first_name: Peter
  full_name: Awakowicz, Peter
  last_name: Awakowicz
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
- first_name: Ahmed Gamal
  full_name: Attallah, Ahmed Gamal
  last_name: Attallah
- first_name: Maik
  full_name: Butterling, Maik
  last_name: Butterling
- first_name: Andreas
  full_name: Wagner, Andreas
  last_name: Wagner
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the
    microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i> 
              </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>.
    2022;19(4). doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>
  apa: Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P.,
    Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38; Grundmeier, G. (2022).
    Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO 
              <sub>              <i>x</i>            </sub>            thin films
    on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4), Article 2100174.
    <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>
  bibtex: '@article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et
    al._2022, title={Influence of surface activation on the microporosity of PE‐CVD
    and PE‐ALD SiO            <sub>              <i>x</i>            </sub>       
        thin films on PDMS}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>},
    number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej
    Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed
    Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }'
  chicago: Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa
    Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on
    the Microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i> 
              </sub>            Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>
    19, no. 4 (2022). <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>.
  ieee: 'C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, Art. no. 2100174, 2022, doi: <a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.'
  mla: Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, 2100174, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.
  short: C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, T. Arcos, P. Awakowicz, A. Devi,
    A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers
    19 (2022).
date_created: 2022-12-21T09:32:52Z
date_updated: 2022-12-21T09:33:14Z
department:
- _id: '302'
doi: 10.1002/ppap.202100174
intvolume: '        19'
issue: '4'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin
  films on PDMS
type: journal_article
user_id: '48864'
volume: 19
year: '2022'
...
---
_id: '34650'
article_number: '2200052'
author:
- first_name: Xiaofan
  full_name: Xie, Xiaofan
  last_name: Xie
- first_name: Teresa
  full_name: de los Arcos, Teresa
  last_name: de los Arcos
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane
    and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation.
    <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>
  apa: Xie, X., de los Arcos, T., &#38; Grundmeier, G. (2022). Comparative analysis
    of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before
    and after plasma oxidation. <i>Plasma Processes and Polymers</i>, <i>19</i>(11),
    Article 2200052. <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>
  bibtex: '@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis
    of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before
    and after plasma oxidation}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>},
    number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022}
    }'
  chicago: Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis
    of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before
    and after Plasma Oxidation.” <i>Plasma Processes and Polymers</i> 19, no. 11 (2022).
    <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>.
  ieee: 'X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane
    and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,”
    <i>Plasma Processes and Polymers</i>, vol. 19, no. 11, Art. no. 2200052, 2022,
    doi: <a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.'
  mla: Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane
    Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes
    and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.
  short: X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19
    (2022).
date_created: 2022-12-21T09:33:54Z
date_updated: 2022-12-21T09:34:05Z
department:
- _id: '302'
doi: 10.1002/ppap.202200052
intvolume: '        19'
issue: '11'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma
  polymer thin films before and after plasma oxidation
type: journal_article
user_id: '48864'
volume: 19
year: '2022'
...
---
_id: '35977'
article_number: '2100174'
author:
- first_name: Christian
  full_name: Hoppe, Christian
  last_name: Hoppe
- first_name: Felix
  full_name: Mitschker, Felix
  last_name: Mitschker
- first_name: Lukas
  full_name: Mai, Lukas
  last_name: Mai
- first_name: Maciej Oskar
  full_name: Liedke, Maciej Oskar
  last_name: Liedke
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Peter
  full_name: Awakowicz, Peter
  last_name: Awakowicz
- first_name: Anjana
  full_name: Devi, Anjana
  last_name: Devi
- first_name: Ahmed Gamal
  full_name: Attallah, Ahmed Gamal
  last_name: Attallah
- first_name: Maik
  full_name: Butterling, Maik
  last_name: Butterling
- first_name: Andreas
  full_name: Wagner, Andreas
  last_name: Wagner
- first_name: Guido
  full_name: Grundmeier, Guido
  last_name: Grundmeier
citation:
  ama: Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the
    microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i> 
              </sub>            thin films on PDMS. <i>Plasma Processes and Polymers</i>.
    2022;19(4). doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>
  apa: Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M.
    T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., &#38;
    Grundmeier, G. (2022). Influence of surface activation on the microporosity of
    PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              thin films on PDMS. <i>Plasma Processes and Polymers</i>, <i>19</i>(4),
    Article 2100174. <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>
  bibtex: '@article{Hoppe_Mitschker_Mai_Liedke_de los Arcos de Pedro_Awakowicz_Devi_Attallah_Butterling_Wagner_et
    al._2022, title={Influence of surface activation on the microporosity of PE‐CVD
    and PE‐ALD SiO            <sub>              <i>x</i>            </sub>       
        thin films on PDMS}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>},
    number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej
    Oskar and de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Devi, Anjana
    and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.},
    year={2022} }'
  chicago: Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Maria
    Teresa de los Arcos de Pedro, Peter Awakowicz, Anjana Devi, et al. “Influence
    of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO           
    <sub>              <i>x</i>            </sub>            Thin Films on PDMS.”
    <i>Plasma Processes and Polymers</i> 19, no. 4 (2022). <a href="https://doi.org/10.1002/ppap.202100174">https://doi.org/10.1002/ppap.202100174</a>.
  ieee: 'C. Hoppe <i>et al.</i>, “Influence of surface activation on the microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              thin films on PDMS,” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, Art. no. 2100174, 2022, doi: <a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.'
  mla: Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity
    of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub> 
              Thin Films on PDMS.” <i>Plasma Processes and Polymers</i>, vol. 19,
    no. 4, 2100174, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202100174">10.1002/ppap.202100174</a>.
  short: C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro,
    P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier,
    Plasma Processes and Polymers 19 (2022).
date_created: 2023-01-11T10:10:09Z
date_updated: 2023-01-24T08:07:46Z
department:
- _id: '302'
doi: 10.1002/ppap.202100174
intvolume: '        19'
issue: '4'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO            <sub>              <i>x</i>            </sub>            thin
  films on PDMS
type: journal_article
user_id: '54556'
volume: 19
year: '2022'
...
---
_id: '35974'
article_number: '2200052'
author:
- first_name: Xiaofan
  full_name: Xie, Xiaofan
  last_name: Xie
- first_name: Maria Teresa
  full_name: de los Arcos de Pedro, Maria Teresa
  id: '54556'
  last_name: de los Arcos de Pedro
- first_name: Guido
  full_name: Grundmeier, Guido
  id: '194'
  last_name: Grundmeier
citation:
  ama: Xie X, de los Arcos de Pedro MT, Grundmeier G. Comparative analysis of hexamethyldisiloxane
    and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation.
    <i>Plasma Processes and Polymers</i>. 2022;19(11). doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>
  apa: Xie, X., de los Arcos de Pedro, M. T., &#38; Grundmeier, G. (2022). Comparative
    analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin
    films before and after plasma oxidation. <i>Plasma Processes and Polymers</i>,
    <i>19</i>(11), Article 2200052. <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>
  bibtex: '@article{Xie_de los Arcos de Pedro_Grundmeier_2022, title={Comparative
    analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin
    films before and after plasma oxidation}, volume={19}, DOI={<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>},
    number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley},
    author={Xie, Xiaofan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido},
    year={2022} }'
  chicago: Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier.
    “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma
    Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes and
    Polymers</i> 19, no. 11 (2022). <a href="https://doi.org/10.1002/ppap.202200052">https://doi.org/10.1002/ppap.202200052</a>.
  ieee: 'X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis
    of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before
    and after plasma oxidation,” <i>Plasma Processes and Polymers</i>, vol. 19, no.
    11, Art. no. 2200052, 2022, doi: <a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.'
  mla: Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane
    Plasma Polymer Thin Films before and after Plasma Oxidation.” <i>Plasma Processes
    and Polymers</i>, vol. 19, no. 11, 2200052, Wiley, 2022, doi:<a href="https://doi.org/10.1002/ppap.202200052">10.1002/ppap.202200052</a>.
  short: X. Xie, M.T. de los Arcos de Pedro, G. Grundmeier, Plasma Processes and Polymers
    19 (2022).
date_created: 2023-01-11T10:08:25Z
date_updated: 2023-01-24T08:48:44Z
department:
- _id: '302'
doi: 10.1002/ppap.202200052
intvolume: '        19'
issue: '11'
keyword:
- Polymers and Plastics
- Condensed Matter Physics
language:
- iso: eng
publication: Plasma Processes and Polymers
publication_identifier:
  issn:
  - 1612-8850
  - 1612-8869
publication_status: published
publisher: Wiley
status: public
title: Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma
  polymer thin films before and after plasma oxidation
type: journal_article
user_id: '54556'
volume: 19
year: '2022'
...