@article{39495,
  author       = {{Hilleringmann, Ulrich and Assion, F. and Vidor, F. F. and Wirth, G. I.}},
  issn         = {{2246-137X}},
  journal      = {{Journal of Machine to Machine Communications}},
  keywords     = {{General Medicine}},
  number       = {{3}},
  pages        = {{197--214}},
  publisher    = {{River Publishers}},
  title        = {{{Nanometer Scale Electronic Device Integration Using Side-Wall Deposition and Etch-Back Technology}}},
  doi          = {{10.13052/jmmc2246-137x.131}},
  volume       = {{1}},
  year         = {{2015}},
}